JP2023512451A5 - - Google Patents
Info
- Publication number
- JP2023512451A5 JP2023512451A5 JP2022542658A JP2022542658A JP2023512451A5 JP 2023512451 A5 JP2023512451 A5 JP 2023512451A5 JP 2022542658 A JP2022542658 A JP 2022542658A JP 2022542658 A JP2022542658 A JP 2022542658A JP 2023512451 A5 JP2023512451 A5 JP 2023512451A5
- Authority
- JP
- Japan
- Prior art keywords
- distribution device
- gas distribution
- plenum
- protrusions
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025083017A JP2025118919A (ja) | 2020-01-13 | 2025-05-19 | 溝の輪郭を最適化するために複数のゾーンを有するガス分配プレート |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202062960390P | 2020-01-13 | 2020-01-13 | |
| US62/960,390 | 2020-01-13 | ||
| PCT/US2021/012604 WO2021146099A1 (en) | 2020-01-13 | 2021-01-08 | Multizone gas distribution plate for trench profile optimization |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025083017A Division JP2025118919A (ja) | 2020-01-13 | 2025-05-19 | 溝の輪郭を最適化するために複数のゾーンを有するガス分配プレート |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023512451A JP2023512451A (ja) | 2023-03-27 |
| JP2023512451A5 true JP2023512451A5 (https=) | 2024-01-16 |
| JP7685507B2 JP7685507B2 (ja) | 2025-05-29 |
Family
ID=76864771
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022542658A Active JP7685507B2 (ja) | 2020-01-13 | 2021-01-08 | 溝の輪郭を最適化するために複数のゾーンを有するガス分配プレート |
| JP2025083017A Pending JP2025118919A (ja) | 2020-01-13 | 2025-05-19 | 溝の輪郭を最適化するために複数のゾーンを有するガス分配プレート |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025083017A Pending JP2025118919A (ja) | 2020-01-13 | 2025-05-19 | 溝の輪郭を最適化するために複数のゾーンを有するガス分配プレート |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12394603B2 (https=) |
| JP (2) | JP7685507B2 (https=) |
| KR (1) | KR20220127895A (https=) |
| CN (1) | CN114981477A (https=) |
| TW (2) | TWI884204B (https=) |
| WO (1) | WO2021146099A1 (https=) |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4358727B2 (ja) | 2004-12-09 | 2009-11-04 | 東京エレクトロン株式会社 | ガス供給装置，基板処理装置及び供給ガス設定方法 |
| US8475625B2 (en) | 2006-05-03 | 2013-07-02 | Applied Materials, Inc. | Apparatus for etching high aspect ratio features |
| US8440049B2 (en) | 2006-05-03 | 2013-05-14 | Applied Materials, Inc. | Apparatus for etching high aspect ratio features |
| US20080236495A1 (en) * | 2007-03-27 | 2008-10-02 | Structured Materials Inc. | Showerhead for chemical vapor deposition (CVD) apparatus |
| JP5192214B2 (ja) * | 2007-11-02 | 2013-05-08 | 東京エレクトロン株式会社 | ガス供給装置、基板処理装置および基板処理方法 |
| US8910644B2 (en) | 2010-06-18 | 2014-12-16 | Applied Materials, Inc. | Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas |
| TWI534291B (zh) * | 2011-03-18 | 2016-05-21 | 應用材料股份有限公司 | 噴淋頭組件 |
| TW201325326A (zh) | 2011-10-05 | 2013-06-16 | 應用材料股份有限公司 | 電漿處理設備及其基板支撐組件 |
| JP2016036018A (ja) | 2014-07-31 | 2016-03-17 | 東京エレクトロン株式会社 | プラズマ処理装置及びガス供給部材 |
| US10577690B2 (en) * | 2016-05-20 | 2020-03-03 | Applied Materials, Inc. | Gas distribution showerhead for semiconductor processing |
| US20190032211A1 (en) * | 2017-07-28 | 2019-01-31 | Lam Research Corporation | Monolithic ceramic gas distribution plate |
| JP7753351B2 (ja) | 2020-09-21 | 2025-10-14 | ラム リサーチ コーポレーション | Ｔｃｐチャンバのガスプレートを浮遊させるためのキャリアリング |
-
2021
- 2021-01-08 JP JP2022542658A patent/JP7685507B2/ja active Active
- 2021-01-08 WO PCT/US2021/012604 patent/WO2021146099A1/en not_active Ceased
- 2021-01-08 CN CN202180009083.9A patent/CN114981477A/zh active Pending
- 2021-01-08 KR KR1020227028030A patent/KR20220127895A/ko active Pending
- 2021-01-08 US US17/792,157 patent/US12394603B2/en active Active
- 2021-01-12 TW TW110101035A patent/TWI884204B/zh active
- 2021-01-12 TW TW114113668A patent/TWI913154B/zh active
-
2025
- 2025-05-19 JP JP2025083017A patent/JP2025118919A/ja active Pending
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