JP2024543119A5 - - Google Patents
Info
- Publication number
- JP2024543119A5 JP2024543119A5 JP2024530417A JP2024530417A JP2024543119A5 JP 2024543119 A5 JP2024543119 A5 JP 2024543119A5 JP 2024530417 A JP2024530417 A JP 2024530417A JP 2024530417 A JP2024530417 A JP 2024530417A JP 2024543119 A5 JP2024543119 A5 JP 2024543119A5
- Authority
- JP
- Japan
- Prior art keywords
- shower head
- faceplate
- remaining portion
- head according
- remaining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163283971P | 2021-11-29 | 2021-11-29 | |
| US63/283,971 | 2021-11-29 | ||
| PCT/US2022/050241 WO2023096817A1 (en) | 2021-11-29 | 2022-11-17 | Showerhead faceplate configurations |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024543119A JP2024543119A (ja) | 2024-11-19 |
| JP2024543119A5 true JP2024543119A5 (https=) | 2025-12-22 |
Family
ID=86540330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024530417A Pending JP2024543119A (ja) | 2021-11-29 | 2022-11-17 | シャワーヘッドフェイスプレート構成 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20250054734A1 (https=) |
| JP (1) | JP2024543119A (https=) |
| KR (1) | KR20240117545A (https=) |
| CN (1) | CN118318066A (https=) |
| TW (1) | TW202340520A (https=) |
| WO (1) | WO2023096817A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20260046529A (ko) | 2019-08-23 | 2026-04-07 | 램 리써치 코포레이션 | 열 제어된 샹들리에 샤워헤드 |
| CN114929935A (zh) * | 2020-01-06 | 2022-08-19 | 朗姆研究公司 | 带有内部轮廓的面板的喷头 |
| US20260106108A1 (en) * | 2024-10-14 | 2026-04-16 | Applied Materials, Inc. | Shaped ion blocker plate for indirect ccp |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100686724B1 (ko) * | 2005-06-30 | 2007-02-26 | 삼성전자주식회사 | 화학기상증착장치 |
| US9315899B2 (en) * | 2012-06-15 | 2016-04-19 | Novellus Systems, Inc. | Contoured showerhead for improved plasma shaping and control |
| JP7565918B2 (ja) * | 2018-11-30 | 2024-10-11 | アプライド マテリアルズ インコーポレイテッド | ３ｄ ｎａｎｄ用途のための膜積層体オーバーレイの改善 |
| KR20220018554A (ko) * | 2019-06-07 | 2022-02-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 만곡된 표면을 갖는 페이스플레이트 |
| CN114929935A (zh) * | 2020-01-06 | 2022-08-19 | 朗姆研究公司 | 带有内部轮廓的面板的喷头 |
-
2022
- 2022-11-17 KR KR1020247017881A patent/KR20240117545A/ko active Pending
- 2022-11-17 US US18/710,671 patent/US20250054734A1/en active Pending
- 2022-11-17 CN CN202280079119.5A patent/CN118318066A/zh active Pending
- 2022-11-17 WO PCT/US2022/050241 patent/WO2023096817A1/en not_active Ceased
- 2022-11-17 JP JP2024530417A patent/JP2024543119A/ja active Pending
- 2022-11-22 TW TW111144551A patent/TW202340520A/zh unknown
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