JP2023501304A - 基板のエッジ膜厚均一性を向上させる処理キット - Google Patents
基板のエッジ膜厚均一性を向上させる処理キット Download PDFInfo
- Publication number
- JP2023501304A JP2023501304A JP2022525855A JP2022525855A JP2023501304A JP 2023501304 A JP2023501304 A JP 2023501304A JP 2022525855 A JP2022525855 A JP 2022525855A JP 2022525855 A JP2022525855 A JP 2022525855A JP 2023501304 A JP2023501304 A JP 2023501304A
- Authority
- JP
- Japan
- Prior art keywords
- annular body
- shield
- processing
- kit
- plenum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 claims abstract description 21
- 238000010438 heat treatment Methods 0.000 claims description 20
- 210000005069 ears Anatomy 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 43
- 239000000376 reactant Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 13
- 238000005086 pumping Methods 0.000 description 13
- 238000010926 purge Methods 0.000 description 12
- 238000000151 deposition Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 239000006227 byproduct Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (20)
- 基板処理チャンバ内で使用する処理キットであって、
基板支持体を取り囲むように構成された環状本体であり、前記環状本体が、上部、下部、ならびに前記上部および前記下部を貫く中心開口を有し、前記上部が、前記環状本体の外径を画定する上フランジに結合された側壁を含み、前記上部が、前記側壁を貫いて配置された複数の第1の穴を含み、前記上部が、1つまたは複数の加熱要素を含む、前記環状本体と、
前記環状本体の周囲に配置されたシールドであり、前記シールドが、前記複数の第1の穴に流体接続された排気口を含む、前記シールドと
を備える処理キット。 - 前記シールドが、前記環状本体のスロットに入って前記シールドを前記環状本体に取り外し可能に結合するように構成されたキーを含む、請求項1に記載の処理キット。
- 前記1つまたは複数の加熱要素が、前記環状本体を加熱するために、前記環状本体の周囲の異なる角位置に配置された複数のヒータロッドを含み、前記複数のヒータロッドのそれぞれのロッドが独立して制御可能である、請求項1に記載の処理キット。
- 前記複数のヒータロッドが、前記上部の前記上フランジの中に軸対称に配置された、請求項3に記載の処理キット。
- 複数のヒータロッドが8本のヒータロッドを含む、請求項3に記載の処理キット。
- 前記環状本体が、前記上部の前記上フランジに結合されたリングを含み、前記複数のヒータロッドが前記リングの中に配置された、請求項3に記載の処理キット。
- 前記環状本体が、前記上部に結合されたリングを含み、前記リングが、前記環状本体を加熱するための抵抗加熱器を含む、請求項1に記載の処理キット。
- 前記上部の前記上フランジが、前記上フランジから半径方向外側へ延びる、前記環状本体をリッドアセンブリに位置合わせするための複数の耳を含む、請求項1~7のいずれか1項に記載の処理キット。
- 前記上フランジが、前記上フランジの上面から延びる、前記環状本体をシャワーヘッドに位置合わせするための複数のピンを含む、請求項1~7のいずれか1項に記載の処理キット。
- 前記環状本体および前記シールドがアルミニウムでできている、請求項1~7のいずれか1項に記載の処理キット。
- 前記環状本体および前記シールドがともに、そこを通して基板を収容するためのカットアウトを含む、請求項1~7のいずれか1項に記載の処理キット。
- 前記上部の外側壁が、第1のプレナムを画定するための環状凹部を含み、前記第1のプレナムが、前記シールドの内面と前記環状凹部によって画定された表面との間に画定された、請求項1~7のいずれか1項に記載の処理キット。
- 前記下部が、下フランジおよび上フランジ、ならびに前記下フランジと前記上フランジの間に配置された側壁を含み、前記シールドの前記内面および前記下部の前記側壁が、互いに前記下部の反対側に配置された凹部によって前記第1のプレナムに流体結合された第2のプレナムを画定する、請求項12に記載の処理キット。
- 前記環状本体が、前記環状本体の上面から延びる複数の位置合わせピンを含む、請求項1~7のいずれか1項に記載の処理キット。
- 前記複数の第1の穴が異なるサイズを有する、請求項10に記載の処理キット。
- 処理ボリュームを画定するチャンバ本体であり、前記チャンバ本体がリッドを含む、前記チャンバ本体と、
前記処理ボリューム内に配置された基板支持体と、
請求項1~7のいずれかに記載の処理キットと、
前記処理ボリューム内の前記基板支持体の反対側の前記環状本体の上面に配置されたシャワーヘッドと
を備える処理チャンバ。 - 前記複数のヒータロッドが、前記上部の外側壁から半径方向内側へ延びる、請求項16に記載の処理チャンバ。
- 前記複数のヒータロッドが、前記上部に結合された前記リングの中に配置された、請求項16に記載の処理チャンバ。
- ポンプポートをさらに備え、前記上部および前記シールドが第1のプレナムを画定し、前記下部および前記シールドが第2のプレナムを画定し、前記第1のプレナムが、前記第2のプレナムを介して前記ポンプポートに流体結合された、請求項16~18のいずれか1項に記載の処理チャンバ。
- 前記上部の内面が、前記シャワーヘッドの外面の輪郭に対応する輪郭を有する、請求項16~18のいずれか1項に記載の処理チャンバ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/672,327 | 2019-11-01 | ||
US16/672,327 US11236424B2 (en) | 2019-11-01 | 2019-11-01 | Process kit for improving edge film thickness uniformity on a substrate |
PCT/US2020/057790 WO2021087002A1 (en) | 2019-11-01 | 2020-10-28 | Process kit for improving edge film thickness uniformity on a substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2023501304A true JP2023501304A (ja) | 2023-01-18 |
JP7418567B2 JP7418567B2 (ja) | 2024-01-19 |
Family
ID=75686259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022525855A Active JP7418567B2 (ja) | 2019-11-01 | 2020-10-28 | 基板のエッジ膜厚均一性を向上させる処理キット |
Country Status (5)
Country | Link |
---|---|
US (1) | US11236424B2 (ja) |
JP (1) | JP7418567B2 (ja) |
KR (1) | KR20220092574A (ja) |
TW (1) | TW202122626A (ja) |
WO (1) | WO2021087002A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11236424B2 (en) * | 2019-11-01 | 2022-02-01 | Applied Materials, Inc. | Process kit for improving edge film thickness uniformity on a substrate |
CN115287631A (zh) * | 2022-08-10 | 2022-11-04 | 江苏微导纳米科技股份有限公司 | 进气件、管式反应器及控制方法 |
CN115101400B (zh) * | 2022-08-25 | 2022-11-15 | 拓荆科技(上海)有限公司 | 半导体加工装置 |
CN115305458B (zh) * | 2022-10-10 | 2023-02-03 | 中微半导体设备(上海)股份有限公司 | 一种气体分配件、气体输送装置及其薄膜处理装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040237891A1 (en) * | 2003-06-02 | 2004-12-02 | David Stacey | Lid liner for chemical vapor deposition chamber |
JP2005244244A (ja) * | 2004-02-26 | 2005-09-08 | Applied Materials Inc | ライン製造のフロントエンドのためのインサイチュドライクリーンチャンバ |
US20050229849A1 (en) * | 2004-02-13 | 2005-10-20 | Applied Materials, Inc. | High productivity plasma processing chamber |
JP2007524236A (ja) * | 2004-01-14 | 2007-08-23 | アプライド マテリアルズ インコーポレイテッド | 堆積チャンバのためのプロセスキットデザイン |
JP2013179054A (ja) * | 2011-10-05 | 2013-09-09 | Applied Materials Inc | 対称プラズマ処理チャンバ |
Family Cites Families (92)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2763222B2 (ja) * | 1991-12-13 | 1998-06-11 | 三菱電機株式会社 | 化学気相成長方法ならびにそのための化学気相成長処理システムおよび化学気相成長装置 |
JP2662365B2 (ja) * | 1993-01-28 | 1997-10-08 | アプライド マテリアルズ インコーポレイテッド | 改良された排出システムを有する単一基板式の真空処理装置 |
JP2934565B2 (ja) * | 1993-05-21 | 1999-08-16 | 三菱電機株式会社 | 半導体製造装置及び半導体製造方法 |
US6248398B1 (en) * | 1996-05-22 | 2001-06-19 | Applied Materials, Inc. | Coater having a controllable pressurized process chamber for semiconductor processing |
US5846332A (en) * | 1996-07-12 | 1998-12-08 | Applied Materials, Inc. | Thermally floating pedestal collar in a chemical vapor deposition chamber |
US5911834A (en) * | 1996-11-18 | 1999-06-15 | Applied Materials, Inc. | Gas delivery system |
US5844195A (en) * | 1996-11-18 | 1998-12-01 | Applied Materials, Inc. | Remote plasma source |
US6152070A (en) * | 1996-11-18 | 2000-11-28 | Applied Materials, Inc. | Tandem process chamber |
US5902088A (en) * | 1996-11-18 | 1999-05-11 | Applied Materials, Inc. | Single loadlock chamber with wafer cooling function |
US5855681A (en) * | 1996-11-18 | 1999-01-05 | Applied Materials, Inc. | Ultra high throughput wafer vacuum processing system |
US6063441A (en) | 1997-12-02 | 2000-05-16 | Applied Materials, Inc. | Processing chamber and method for confining plasma |
US6772827B2 (en) * | 2000-01-20 | 2004-08-10 | Applied Materials, Inc. | Suspended gas distribution manifold for plasma chamber |
JP2001319921A (ja) * | 2000-05-09 | 2001-11-16 | Canon Inc | プロセスチャンバ |
US6630053B2 (en) * | 2000-08-22 | 2003-10-07 | Asm Japan K.K. | Semiconductor processing module and apparatus |
US6413321B1 (en) * | 2000-12-07 | 2002-07-02 | Applied Materials, Inc. | Method and apparatus for reducing particle contamination on wafer backside during CVD process |
US6591850B2 (en) * | 2001-06-29 | 2003-07-15 | Applied Materials, Inc. | Method and apparatus for fluid flow control |
JP4121269B2 (ja) * | 2001-11-27 | 2008-07-23 | 日本エー・エス・エム株式会社 | セルフクリーニングを実行するプラズマcvd装置及び方法 |
US6777352B2 (en) * | 2002-02-11 | 2004-08-17 | Applied Materials, Inc. | Variable flow deposition apparatus and method in semiconductor substrate processing |
US6921556B2 (en) * | 2002-04-12 | 2005-07-26 | Asm Japan K.K. | Method of film deposition using single-wafer-processing type CVD |
US20030213560A1 (en) * | 2002-05-16 | 2003-11-20 | Yaxin Wang | Tandem wafer processing system and process |
JP4417669B2 (ja) * | 2003-07-28 | 2010-02-17 | 日本エー・エス・エム株式会社 | 半導体処理装置および半導体ウエハーの導入方法 |
US7408225B2 (en) * | 2003-10-09 | 2008-08-05 | Asm Japan K.K. | Apparatus and method for forming thin film using upstream and downstream exhaust mechanisms |
US8083853B2 (en) * | 2004-05-12 | 2011-12-27 | Applied Materials, Inc. | Plasma uniformity control by gas diffuser hole design |
US8074599B2 (en) * | 2004-05-12 | 2011-12-13 | Applied Materials, Inc. | Plasma uniformity control by gas diffuser curvature |
US7429410B2 (en) * | 2004-09-20 | 2008-09-30 | Applied Materials, Inc. | Diffuser gravity support |
US8709162B2 (en) * | 2005-08-16 | 2014-04-29 | Applied Materials, Inc. | Active cooling substrate support |
US20070254112A1 (en) * | 2006-04-26 | 2007-11-01 | Applied Materials, Inc. | Apparatus and method for high utilization of process chambers of a cluster system through staggered plasma cleaning |
JP5347294B2 (ja) * | 2007-09-12 | 2013-11-20 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
US20090084317A1 (en) | 2007-09-28 | 2009-04-02 | Applied Materials, Inc. | Atomic layer deposition chamber and components |
JP2009088229A (ja) * | 2007-09-28 | 2009-04-23 | Tokyo Electron Ltd | 成膜装置、成膜方法、記憶媒体及びガス供給装置 |
TWI498988B (zh) * | 2008-02-20 | 2015-09-01 | Tokyo Electron Ltd | A gas supply device, a film forming apparatus, and a film forming method |
US8097082B2 (en) * | 2008-04-28 | 2012-01-17 | Applied Materials, Inc. | Nonplanar faceplate for a plasma processing chamber |
US7699935B2 (en) * | 2008-06-19 | 2010-04-20 | Applied Materials, Inc. | Method and system for supplying a cleaning gas into a process chamber |
WO2010011013A1 (en) * | 2008-07-23 | 2010-01-28 | New Power Plasma Co., Ltd. | Multi-workpiece processing chamber and workpiece processing system including the same |
US20100147396A1 (en) * | 2008-12-15 | 2010-06-17 | Asm Japan K.K. | Multiple-Substrate Transfer Apparatus and Multiple-Substrate Processing Apparatus |
JP2010225640A (ja) * | 2009-03-19 | 2010-10-07 | Tokyo Electron Ltd | 基板処理装置及び排気方法 |
WO2012009371A2 (en) * | 2010-07-12 | 2012-01-19 | Applied Materials, Inc. | Compartmentalized chamber |
US20130105085A1 (en) | 2011-10-28 | 2013-05-02 | Applied Materials, Inc. | Plasma reactor with chamber wall temperature control |
JP5929429B2 (ja) * | 2012-03-30 | 2016-06-08 | 東京エレクトロン株式会社 | 成膜装置 |
JP6123208B2 (ja) * | 2012-09-28 | 2017-05-10 | 東京エレクトロン株式会社 | 成膜装置 |
JP6056403B2 (ja) * | 2012-11-15 | 2017-01-11 | 東京エレクトロン株式会社 | 成膜装置 |
JP6134191B2 (ja) * | 2013-04-07 | 2017-05-24 | 村川 惠美 | 回転型セミバッチald装置 |
JP6258657B2 (ja) * | 2013-10-18 | 2018-01-10 | 東京エレクトロン株式会社 | 成膜方法および成膜装置 |
JP5859586B2 (ja) * | 2013-12-27 | 2016-02-10 | 株式会社日立国際電気 | 基板処理システム、半導体装置の製造方法および記録媒体 |
US9214340B2 (en) * | 2014-02-05 | 2015-12-15 | Applied Materials, Inc. | Apparatus and method of forming an indium gallium zinc oxide layer |
US9673092B2 (en) * | 2014-03-06 | 2017-06-06 | Asm Ip Holding B.V. | Film forming apparatus, and method of manufacturing semiconductor device |
JP5800964B1 (ja) * | 2014-07-22 | 2015-10-28 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法および記録媒体 |
JP5800969B1 (ja) * | 2014-08-27 | 2015-10-28 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法、プログラム、記録媒体 |
US9390910B2 (en) | 2014-10-03 | 2016-07-12 | Applied Materials, Inc. | Gas flow profile modulated control of overlay in plasma CVD films |
US10460949B2 (en) * | 2014-10-20 | 2019-10-29 | Tokyo Electron Limited | Substrate processing apparatus, substrate processing method and storage medium |
JP6516436B2 (ja) * | 2014-10-24 | 2019-05-22 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
US9885112B2 (en) * | 2014-12-02 | 2018-02-06 | Asm Ip Holdings B.V. | Film forming apparatus |
KR102438139B1 (ko) * | 2014-12-22 | 2022-08-29 | 어플라이드 머티어리얼스, 인코포레이티드 | 높은 처리량의 프로세싱 챔버를 위한 프로세스 키트 |
US9963782B2 (en) * | 2015-02-12 | 2018-05-08 | Asm Ip Holding B.V. | Semiconductor manufacturing apparatus |
US9914999B2 (en) * | 2015-04-28 | 2018-03-13 | Applied Materials, Inc. | Oxidized showerhead and process kit parts and methods of using same |
JP6450653B2 (ja) * | 2015-06-24 | 2019-01-09 | 東京エレクトロン株式会社 | 格納ユニット、搬送装置、及び、基板処理システム |
JP5941589B1 (ja) * | 2015-09-14 | 2016-06-29 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法、プログラム及び記録媒体 |
KR20170090194A (ko) * | 2016-01-28 | 2017-08-07 | 삼성전자주식회사 | 복수 개의 가스 배출관 들 및 가스 센서들을 가진 반도체 소자 제조 설비 |
US10020204B2 (en) * | 2016-03-10 | 2018-07-10 | Applied Materials, Inc. | Bottom processing |
TWI677593B (zh) * | 2016-04-01 | 2019-11-21 | 美商應用材料股份有限公司 | 用於提供均勻流動的氣體的設備及方法 |
JP6792786B2 (ja) * | 2016-06-20 | 2020-12-02 | 東京エレクトロン株式会社 | ガス混合装置および基板処理装置 |
JP6851173B2 (ja) * | 2016-10-21 | 2021-03-31 | 東京エレクトロン株式会社 | 成膜装置および成膜方法 |
JP6698001B2 (ja) * | 2016-10-24 | 2020-05-27 | 東京エレクトロン株式会社 | 処理装置及びカバー部材 |
US10312076B2 (en) * | 2017-03-10 | 2019-06-04 | Applied Materials, Inc. | Application of bottom purge to increase clean efficiency |
US10600624B2 (en) * | 2017-03-10 | 2020-03-24 | Applied Materials, Inc. | System and method for substrate processing chambers |
JP6823533B2 (ja) * | 2017-04-24 | 2021-02-03 | 東京エレクトロン株式会社 | チタンシリサイド領域を形成する方法 |
JP6925196B2 (ja) * | 2017-07-31 | 2021-08-25 | 東京エレクトロン株式会社 | 処理装置及び処理方法 |
US10460988B2 (en) * | 2017-12-21 | 2019-10-29 | Tokyo Electron Limited | Removal method and processing method |
KR102501472B1 (ko) * | 2018-03-30 | 2023-02-20 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
US11462387B2 (en) * | 2018-04-17 | 2022-10-04 | Asm Ip Holding B.V. | Substrate processing apparatus and substrate processing method |
JP7133975B2 (ja) * | 2018-05-11 | 2022-09-09 | 東京エレクトロン株式会社 | エッチング方法およびエッチング装置 |
JP7195060B2 (ja) * | 2018-05-17 | 2022-12-23 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
JP7014055B2 (ja) * | 2018-06-15 | 2022-02-01 | 東京エレクトロン株式会社 | 真空処理装置、真空処理システム、及び真空処理方法 |
JP7134003B2 (ja) * | 2018-07-06 | 2022-09-09 | 東京エレクトロン株式会社 | 成膜装置 |
US11118262B2 (en) * | 2018-10-11 | 2021-09-14 | Asm Ip Holding B.V. | Substrate processing apparatus having a gas-mixing manifold |
KR102546322B1 (ko) * | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
KR102605121B1 (ko) * | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
KR20200091543A (ko) * | 2019-01-22 | 2020-07-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
JP2020147795A (ja) * | 2019-03-13 | 2020-09-17 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP7300898B2 (ja) * | 2019-06-11 | 2023-06-30 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
JP7296806B2 (ja) * | 2019-07-16 | 2023-06-23 | 東京エレクトロン株式会社 | RuSi膜の形成方法及び基板処理システム |
CN112309899A (zh) * | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112309900A (zh) * | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
JP7236953B2 (ja) * | 2019-08-05 | 2023-03-10 | 東京エレクトロン株式会社 | 成膜装置および成膜方法 |
KR20210029663A (ko) * | 2019-09-05 | 2021-03-16 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US20210071296A1 (en) * | 2019-09-06 | 2021-03-11 | Asm Ip Holding B.V. | Exhaust component cleaning method and substrate processing apparatus including exhaust component |
US11236424B2 (en) * | 2019-11-01 | 2022-02-01 | Applied Materials, Inc. | Process kit for improving edge film thickness uniformity on a substrate |
CN112951697A (zh) * | 2019-11-26 | 2021-06-11 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885693A (zh) * | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885692A (zh) * | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
JP2021100047A (ja) * | 2019-12-23 | 2021-07-01 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法およびプログラム |
US20210249239A1 (en) * | 2020-02-10 | 2021-08-12 | Applied Materials, Inc. | Methods and apparatus for improving flow uniformity in a process chamber |
-
2019
- 2019-11-01 US US16/672,327 patent/US11236424B2/en active Active
-
2020
- 2020-10-28 WO PCT/US2020/057790 patent/WO2021087002A1/en active Application Filing
- 2020-10-28 JP JP2022525855A patent/JP7418567B2/ja active Active
- 2020-10-28 KR KR1020227018270A patent/KR20220092574A/ko not_active Application Discontinuation
- 2020-10-29 TW TW109137554A patent/TW202122626A/zh unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040237891A1 (en) * | 2003-06-02 | 2004-12-02 | David Stacey | Lid liner for chemical vapor deposition chamber |
JP2007524236A (ja) * | 2004-01-14 | 2007-08-23 | アプライド マテリアルズ インコーポレイテッド | 堆積チャンバのためのプロセスキットデザイン |
US20050229849A1 (en) * | 2004-02-13 | 2005-10-20 | Applied Materials, Inc. | High productivity plasma processing chamber |
JP2005244244A (ja) * | 2004-02-26 | 2005-09-08 | Applied Materials Inc | ライン製造のフロントエンドのためのインサイチュドライクリーンチャンバ |
JP2013179054A (ja) * | 2011-10-05 | 2013-09-09 | Applied Materials Inc | 対称プラズマ処理チャンバ |
Also Published As
Publication number | Publication date |
---|---|
US20210130953A1 (en) | 2021-05-06 |
TW202122626A (zh) | 2021-06-16 |
WO2021087002A1 (en) | 2021-05-06 |
KR20220092574A (ko) | 2022-07-01 |
JP7418567B2 (ja) | 2024-01-19 |
US11236424B2 (en) | 2022-02-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7418567B2 (ja) | 基板のエッジ膜厚均一性を向上させる処理キット | |
US10793951B2 (en) | Apparatus to improve substrate temperature uniformity | |
TWI489003B (zh) | 具有加熱腔室襯墊的處理室 | |
TWI643266B (zh) | 磊晶底環 | |
JP3963966B2 (ja) | 基板裏面への堆積を減少させる処理装置及び処理方法 | |
CN106463450B (zh) | 在epi腔室中的基板热控制 | |
US20070022959A1 (en) | Deposition apparatus for semiconductor processing | |
US11420217B2 (en) | Showerhead for ALD precursor delivery | |
US20180138031A1 (en) | Process chamber having separate process gas and purge gas regions | |
KR20170048578A (ko) | 분위기 에피택셜 퇴적 챔버 | |
US10711348B2 (en) | Apparatus to improve substrate temperature uniformity | |
KR102459367B1 (ko) | 에피 챔버를 위한 라이너 | |
CN110804729B (zh) | 用于处理腔室的衬里 | |
US11421322B2 (en) | Blocker plate for use in a substrate process chamber |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220502 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230519 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230619 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230919 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20231207 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240109 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7418567 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |