JP2022540130A5 - - Google Patents

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Publication number
JP2022540130A5
JP2022540130A5 JP2022500771A JP2022500771A JP2022540130A5 JP 2022540130 A5 JP2022540130 A5 JP 2022540130A5 JP 2022500771 A JP2022500771 A JP 2022500771A JP 2022500771 A JP2022500771 A JP 2022500771A JP 2022540130 A5 JP2022540130 A5 JP 2022540130A5
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Japan
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light
configuration
distinct regions
spatially distinct
pupil
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JP2022500771A
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English (en)
Japanese (ja)
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JP7427763B2 (ja
JP2022540130A (ja
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Priority claimed from US16/913,396 external-priority patent/US11703460B2/en
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JP2022500771A 2019-07-09 2020-07-08 光学的表面欠陥物質特性評価のための方法およびシステム Active JP7427763B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962871872P 2019-07-09 2019-07-09
US62/871,872 2019-07-09
US16/913,396 2020-06-26
US16/913,396 US11703460B2 (en) 2019-07-09 2020-06-26 Methods and systems for optical surface defect material characterization
PCT/US2020/041088 WO2021007262A1 (en) 2019-07-09 2020-07-08 Methods and systems for optical surface defect material characterization

Publications (3)

Publication Number Publication Date
JP2022540130A JP2022540130A (ja) 2022-09-14
JP2022540130A5 true JP2022540130A5 (https=) 2023-07-05
JP7427763B2 JP7427763B2 (ja) 2024-02-05

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JP2022500771A Active JP7427763B2 (ja) 2019-07-09 2020-07-08 光学的表面欠陥物質特性評価のための方法およびシステム

Country Status (7)

Country Link
US (1) US11703460B2 (https=)
JP (1) JP7427763B2 (https=)
KR (1) KR102630492B1 (https=)
CN (1) CN114096834B (https=)
IL (1) IL289546B2 (https=)
TW (1) TWI840582B (https=)
WO (1) WO2021007262A1 (https=)

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