JP2021521418A5 - - Google Patents

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Publication number
JP2021521418A5
JP2021521418A5 JP2020555097A JP2020555097A JP2021521418A5 JP 2021521418 A5 JP2021521418 A5 JP 2021521418A5 JP 2020555097 A JP2020555097 A JP 2020555097A JP 2020555097 A JP2020555097 A JP 2020555097A JP 2021521418 A5 JP2021521418 A5 JP 2021521418A5
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overlay
alignment
weighing system
imaging system
images
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JP2020555097A
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JP7085642B2 (ja
JP2021521418A (ja
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Priority claimed from US15/948,941 external-priority patent/US10677588B2/en
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JP2020555097A 2018-04-09 2019-04-05 オーバレイ計量向けの局所的テレセントリシティ及び合焦最適化 Active JP7085642B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/948,941 US10677588B2 (en) 2018-04-09 2018-04-09 Localized telecentricity and focus optimization for overlay metrology
US15/948,941 2018-04-09
PCT/US2019/025917 WO2019199585A1 (en) 2018-04-09 2019-04-05 Localized telecentricity and focus optimization for overlay metrology

Publications (3)

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JP2021521418A JP2021521418A (ja) 2021-08-26
JP2021521418A5 true JP2021521418A5 (https=) 2022-04-08
JP7085642B2 JP7085642B2 (ja) 2022-06-16

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JP2020555097A Active JP7085642B2 (ja) 2018-04-09 2019-04-05 オーバレイ計量向けの局所的テレセントリシティ及び合焦最適化

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US (1) US10677588B2 (https=)
EP (1) EP3762900B1 (https=)
JP (1) JP7085642B2 (https=)
KR (1) KR102448698B1 (https=)
CN (1) CN111971712B (https=)
IL (1) IL277841B2 (https=)
SG (1) SG11202005972UA (https=)
TW (1) TWI781312B (https=)
WO (1) WO2019199585A1 (https=)

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