JP2024513341A5 - - Google Patents

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Publication number
JP2024513341A5
JP2024513341A5 JP2023557388A JP2023557388A JP2024513341A5 JP 2024513341 A5 JP2024513341 A5 JP 2024513341A5 JP 2023557388 A JP2023557388 A JP 2023557388A JP 2023557388 A JP2023557388 A JP 2023557388A JP 2024513341 A5 JP2024513341 A5 JP 2024513341A5
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JP
Japan
Prior art keywords
images
target feature
cameras
symmetry
variation
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Granted
Application number
JP2023557388A
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English (en)
Japanese (ja)
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JP7579988B2 (ja
JP2024513341A (ja
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Publication date
Priority claimed from US17/219,869 external-priority patent/US11592755B2/en
Application filed filed Critical
Publication of JP2024513341A publication Critical patent/JP2024513341A/ja
Priority to JP2024050417A priority Critical patent/JP7725645B2/ja
Publication of JP2024513341A5 publication Critical patent/JP2024513341A5/ja
Application granted granted Critical
Publication of JP7579988B2 publication Critical patent/JP7579988B2/ja
Priority to JP2025060950A priority patent/JP2025096344A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023557388A 2021-03-31 2021-06-29 オーバレイ計量の性能拡張 Active JP7579988B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2024050417A JP7725645B2 (ja) 2021-03-31 2024-03-26 オーバレイ計量の性能拡張
JP2025060950A JP2025096344A (ja) 2021-03-31 2025-04-02 光学検査装置及び計量方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/219,869 US11592755B2 (en) 2021-03-31 2021-03-31 Enhancing performance of overlay metrology
US17/219,869 2021-03-31
PCT/US2021/039472 WO2022211835A1 (en) 2021-03-31 2021-06-29 Enhancing performance of overlay metrology

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024050417A Division JP7725645B2 (ja) 2021-03-31 2024-03-26 オーバレイ計量の性能拡張

Publications (3)

Publication Number Publication Date
JP2024513341A JP2024513341A (ja) 2024-03-25
JP2024513341A5 true JP2024513341A5 (https=) 2024-04-09
JP7579988B2 JP7579988B2 (ja) 2024-11-08

Family

ID=83450225

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2023557388A Active JP7579988B2 (ja) 2021-03-31 2021-06-29 オーバレイ計量の性能拡張
JP2024050417A Active JP7725645B2 (ja) 2021-03-31 2024-03-26 オーバレイ計量の性能拡張
JP2025060950A Pending JP2025096344A (ja) 2021-03-31 2025-04-02 光学検査装置及び計量方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2024050417A Active JP7725645B2 (ja) 2021-03-31 2024-03-26 オーバレイ計量の性能拡張
JP2025060950A Pending JP2025096344A (ja) 2021-03-31 2025-04-02 光学検査装置及び計量方法

Country Status (6)

Country Link
US (2) US11592755B2 (https=)
JP (3) JP7579988B2 (https=)
KR (3) KR20240038171A (https=)
CN (2) CN118311056B (https=)
TW (3) TW202530684A (https=)
WO (1) WO2022211835A1 (https=)

Families Citing this family (6)

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KR102524462B1 (ko) * 2022-03-28 2023-04-21 (주)오로스 테크놀로지 오버레이 측정장치
KR102554833B1 (ko) * 2023-02-14 2023-07-13 (주)오로스 테크놀로지 오버레이 계측 장치 및 오버레이 계측 방법
KR102898111B1 (ko) * 2023-03-15 2025-12-09 (주) 오로스테크놀로지 오버레이 측정 장치의 최적화 방법 및 이를 수행하는 오버레이 측정 장치
US20240337953A1 (en) * 2023-04-04 2024-10-10 Kla Corporation System and method for tracking real-time position for scanning overlay metrology
KR102615980B1 (ko) * 2023-06-09 2023-12-21 (주)오로스 테크놀로지 오버레이 계측 장치 및 오버레이 계측 방법
US12411420B2 (en) * 2023-09-29 2025-09-09 Kla Corporation Small in-die target design for overlay measurement

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