JP2022540087A5 - - Google Patents

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Publication number
JP2022540087A5
JP2022540087A5 JP2022500553A JP2022500553A JP2022540087A5 JP 2022540087 A5 JP2022540087 A5 JP 2022540087A5 JP 2022500553 A JP2022500553 A JP 2022500553A JP 2022500553 A JP2022500553 A JP 2022500553A JP 2022540087 A5 JP2022540087 A5 JP 2022540087A5
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JP
Japan
Prior art keywords
integer
composition according
sulfonic acid
substrate
hydrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022500553A
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English (en)
Japanese (ja)
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JP2022540087A (ja
JP7389886B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/EP2020/069326 external-priority patent/WO2021005140A1/en
Publication of JP2022540087A publication Critical patent/JP2022540087A/ja
Publication of JP2022540087A5 publication Critical patent/JP2022540087A5/ja
Application granted granted Critical
Publication of JP7389886B2 publication Critical patent/JP7389886B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022500553A 2019-07-11 2020-07-09 フォトレジストリムーバ組成物 Active JP7389886B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962872950P 2019-07-11 2019-07-11
US62/872,950 2019-07-11
PCT/EP2020/069326 WO2021005140A1 (en) 2019-07-11 2020-07-09 Photoresist remover compositions

Publications (3)

Publication Number Publication Date
JP2022540087A JP2022540087A (ja) 2022-09-14
JP2022540087A5 true JP2022540087A5 (https=) 2023-06-06
JP7389886B2 JP7389886B2 (ja) 2023-11-30

Family

ID=71620411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022500553A Active JP7389886B2 (ja) 2019-07-11 2020-07-09 フォトレジストリムーバ組成物

Country Status (7)

Country Link
US (1) US11994803B2 (https=)
EP (1) EP3997521B1 (https=)
JP (1) JP7389886B2 (https=)
KR (1) KR102609919B1 (https=)
CN (1) CN114080571B (https=)
TW (1) TWI824164B (https=)
WO (1) WO2021005140A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3997521B1 (en) 2019-07-11 2023-08-30 Merck Patent GmbH Photoresist remover compositions
US12374639B2 (en) * 2022-04-04 2025-07-29 Taiwan Semiconductor Manufacturing Co., Ltd. Non-DMSO stripper for advance package metal plating process

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