JP2022525212A5 - - Google Patents

Info

Publication number
JP2022525212A5
JP2022525212A5 JP2021555506A JP2021555506A JP2022525212A5 JP 2022525212 A5 JP2022525212 A5 JP 2022525212A5 JP 2021555506 A JP2021555506 A JP 2021555506A JP 2021555506 A JP2021555506 A JP 2021555506A JP 2022525212 A5 JP2022525212 A5 JP 2022525212A5
Authority
JP
Japan
Prior art keywords
coating
material via
layer
depositing
forming
Prior art date
Application number
JP2021555506A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022525212A (ja
JPWO2020187744A5 (https=
JP7382124B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2020/056864 external-priority patent/WO2020187744A1/en
Publication of JP2022525212A publication Critical patent/JP2022525212A/ja
Publication of JPWO2020187744A5 publication Critical patent/JPWO2020187744A5/ja
Publication of JP2022525212A5 publication Critical patent/JP2022525212A5/ja
Application granted granted Critical
Publication of JP7382124B2 publication Critical patent/JP7382124B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021555506A 2019-03-15 2020-03-13 改良されたコーティングプロセス Active JP7382124B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP19163306.4 2019-03-15
EP19163306 2019-03-15
PCT/EP2020/056864 WO2020187744A1 (en) 2019-03-15 2020-03-13 Improved coating processes

Publications (4)

Publication Number Publication Date
JP2022525212A JP2022525212A (ja) 2022-05-11
JPWO2020187744A5 JPWO2020187744A5 (https=) 2022-10-13
JP2022525212A5 true JP2022525212A5 (https=) 2022-10-13
JP7382124B2 JP7382124B2 (ja) 2023-11-16

Family

ID=65818247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021555506A Active JP7382124B2 (ja) 2019-03-15 2020-03-13 改良されたコーティングプロセス

Country Status (6)

Country Link
US (1) US20220162739A1 (https=)
EP (1) EP3938556A1 (https=)
JP (1) JP7382124B2 (https=)
CN (1) CN111690898B (https=)
SG (1) SG11202109137XA (https=)
WO (1) WO2020187744A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114483362B (zh) 2020-11-13 2024-05-28 纳峰真空镀膜（上海）有限公司 活塞环及制造方法
WO2022253859A1 (en) * 2021-06-04 2022-12-08 Nanofilm Technologies International Limited Anti-static coating
WO2024094870A1 (en) 2022-11-03 2024-05-10 Nanofilm Technologies International Limited Sealed electrical devices
WO2024094872A1 (en) 2022-11-03 2024-05-10 Nanofilm Technologies International Limited Coated solar cell
CN116695079B (zh) * 2023-06-09 2024-04-02 深圳市博源碳晶科技有限公司 一种导热绝缘金刚石复合材料基板及其制备方法和应用
CN117488247B (zh) * 2023-10-31 2026-03-31 中国航发动力股份有限公司 一种热障涂层的制备方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE65265T1 (de) 1987-08-26 1991-08-15 Balzers Hochvakuum Verfahren zur aufbringung von schichten auf substraten und vakuumbeschichtungsanlage zur durchfuehrung des verfahrens.
US5306407A (en) * 1989-06-27 1994-04-26 Hauzer Holding Bv Method and apparatus for coating substrates
US5358615A (en) * 1993-10-04 1994-10-25 Motorola, Inc. Process for forming a sputter deposited metal film
DE4405477A1 (de) 1994-02-21 1995-08-24 Hauzer Holding PVD-Verfahren zur Abscheidung von mehrkomponentigen Hartstoffschichten
CA2305938C (en) 2000-04-10 2007-07-03 Vladimir I. Gorokhovsky Filtered cathodic arc deposition method and apparatus
AUPR353601A0 (en) 2001-03-05 2001-03-29 Commonwealth Scientific And Industrial Research Organisation Deposition process
US6923891B2 (en) * 2003-01-10 2005-08-02 Nanofilm Technologies International Pte Ltd. Copper interconnects
JP4939032B2 (ja) * 2005-02-08 2012-05-23 株式会社神戸製鋼所 硬質皮膜、および硬質皮膜の製造方法
CN100519828C (zh) * 2005-04-27 2009-07-29 北京实力源科技开发有限责任公司 一种真空镀膜方法和设备
JP4607687B2 (ja) * 2005-07-04 2011-01-05 株式会社神戸製鋼所 非晶質炭素膜の成膜方法
JP2007291429A (ja) * 2006-04-24 2007-11-08 Nissan Motor Co Ltd 硬質炭素被膜
CN100506527C (zh) * 2007-06-26 2009-07-01 广州有色金属研究院 金属碳化物/类金刚石(MeC/DLC)纳米多层膜材料及其制备方法
JP2009283107A (ja) * 2008-05-26 2009-12-03 Fuji Electric Device Technology Co Ltd テトラヘドラル・アモルファス・カーボン膜を主体とする保護膜および該保護膜を有する磁気記録媒体
US20110186420A1 (en) * 2008-06-09 2011-08-04 Nanofilm Technologies International Pte Ltd Method for rapid deposition of a coating on a substrate
DE102010028558A1 (de) * 2010-05-04 2011-11-10 Walter Ag PVD-Hybridverfahren zum Abscheiden von Mischkristallschichten
JP5226826B2 (ja) * 2011-04-25 2013-07-03 株式会社神戸製鋼所 ダイヤモンドライクカーボン硬質多層膜成形体の製造方法
US10304665B2 (en) * 2011-09-07 2019-05-28 Nano-Product Engineering, LLC Reactors for plasma-assisted processes and associated methods
US9793098B2 (en) * 2012-09-14 2017-10-17 Vapor Technologies, Inc. Low pressure arc plasma immersion coating vapor deposition and ion treatment
BR102014007893B1 (pt) 2014-04-02 2022-03-22 Mahle International Gmbh Elemento deslizante, motor de combustão interna e processo de obtenção de elemento deslizante
CN106282935A (zh) * 2015-05-15 2017-01-04 新科实业有限公司 具有类金刚石涂层的材料及其制备方法
CN107022740A (zh) * 2016-01-29 2017-08-08 广东耐信镀膜科技有限公司 一种超硬多层复合类金刚石涂层及其制备方法
CN107022761B (zh) * 2017-04-28 2023-11-03 星弧涂层新材料科技（苏州）股份有限公司 基于类金刚石薄膜的复合厚膜及其镀膜方法
CN207313693U (zh) * 2017-04-28 2018-05-04 星弧涂层新材料科技（苏州）股份有限公司 基于类金刚石薄膜的复合厚膜
CN107779839B (zh) * 2017-11-15 2019-07-23 温州职业技术学院 基于阳极技术的dlc镀膜方法
CN108823544A (zh) 2018-09-12 2018-11-16 杨杰平 基于氮化钛复合膜及其制备方法
CN109136872A (zh) * 2018-10-11 2019-01-04 华杰新材料科技（苏州）有限公司 一种不锈钢基材表面CrN涂层制备方法
CN109371360A (zh) * 2018-12-13 2019-02-22 纳峰真空镀膜（上海）有限公司 一种应用于低温材料上的耐磨类金刚石涂层的制备方法

Similar Documents

Publication Publication Date Title
JP2022525212A5 (https=)
CN103160797B (zh) 纳米陶瓷涂层、沉积有该涂层的压铸模具及其制备方法
US8778491B2 (en) Coated article and method for manufacturing same
JP7382124B2 (ja) 改良されたコーティングプロセス
TWI597373B (zh) 鍍膜件及其製備方法
JP2013529249A5 (https=)
CN108456843B (zh) 一种高性能TiAlSiN纳米复合涂层及其制备方法和应用
CN107254662B (zh) 蓝色复合薄膜及其制备方法
JP2008522026A5 (https=)
CN112410727B (zh) 一种新型WCrSiN梯度涂层及其制备方法
TW201438884A (zh) 具有硬質膜層的不銹鋼製品及其製備方法
CN102560393B (zh) 镀膜件
JP6931008B2 (ja) ハフニウムを含まないニッケル系単結晶超合金部品を腐食及び酸化から保護する方法
CN102691043A (zh) 镀膜件及其制备方法
JPWO2020187744A5 (https=)
CN102409302A (zh) 涂层、具有该涂层的被覆件及该被覆件的制备方法
JP2013249491A (ja) 成膜方法
CN102345092A (zh) 涂层、具有该涂层的被覆件及该被覆件的制备方法
TW201311915A (zh) 鍍膜件及其製備方法
TW201229270A (en) Electromagnetic shielding treatment for magnesium alloy articles and magnesium alloy articles
TW201305360A (zh) 鍍膜件及其製備方法
CN102413649A (zh) 壳体及其制造方法
CN102560394A (zh) 镀膜件及其制造方法
TWI471450B (zh) 鍍膜件及其製備方法
TW201226601A (en) Housing and method for making the same