JP2022502846A5 - - Google Patents

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Publication number
JP2022502846A5
JP2022502846A5 JP2021516574A JP2021516574A JP2022502846A5 JP 2022502846 A5 JP2022502846 A5 JP 2022502846A5 JP 2021516574 A JP2021516574 A JP 2021516574A JP 2021516574 A JP2021516574 A JP 2021516574A JP 2022502846 A5 JP2022502846 A5 JP 2022502846A5
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JP
Japan
Prior art keywords
pedestal
lift
bottom bowl
carrier
actuators
Prior art date
Application number
JP2021516574A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022502846A (ja
JPWO2020068343A5 (https=
JP7475337B2 (ja
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Publication date
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Priority claimed from PCT/US2019/048529 external-priority patent/WO2020068343A1/en
Publication of JP2022502846A publication Critical patent/JP2022502846A/ja
Publication of JP2022502846A5 publication Critical patent/JP2022502846A5/ja
Publication of JPWO2020068343A5 publication Critical patent/JPWO2020068343A5/ja
Priority to JP2024065841A priority Critical patent/JP7712418B2/ja
Application granted granted Critical
Publication of JP7475337B2 publication Critical patent/JP7475337B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021516574A 2018-09-28 2019-08-28 動的水平化を備えた同軸リフト装置 Active JP7475337B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024065841A JP7712418B2 (ja) 2018-09-28 2024-04-16 動的水平化を備えた同軸リフト装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862738869P 2018-09-28 2018-09-28
US62/738,869 2018-09-28
PCT/US2019/048529 WO2020068343A1 (en) 2018-09-28 2019-08-28 Coaxial lift device with dynamic leveling

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024065841A Division JP7712418B2 (ja) 2018-09-28 2024-04-16 動的水平化を備えた同軸リフト装置

Publications (4)

Publication Number Publication Date
JP2022502846A JP2022502846A (ja) 2022-01-11
JP2022502846A5 true JP2022502846A5 (https=) 2022-09-05
JPWO2020068343A5 JPWO2020068343A5 (https=) 2022-09-05
JP7475337B2 JP7475337B2 (ja) 2024-04-26

Family

ID=69946575

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021516574A Active JP7475337B2 (ja) 2018-09-28 2019-08-28 動的水平化を備えた同軸リフト装置
JP2024065841A Active JP7712418B2 (ja) 2018-09-28 2024-04-16 動的水平化を備えた同軸リフト装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024065841A Active JP7712418B2 (ja) 2018-09-28 2024-04-16 動的水平化を備えた同軸リフト装置

Country Status (7)

Country Link
US (3) US11742235B2 (https=)
JP (2) JP7475337B2 (https=)
KR (2) KR102789697B1 (https=)
CN (2) CN117305815B (https=)
SG (1) SG11202101649WA (https=)
TW (2) TWI897025B (https=)
WO (1) WO2020068343A1 (https=)

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JP7488138B2 (ja) * 2020-07-07 2024-05-21 東京エレクトロン株式会社 真空処理装置、及び真空処理装置の制御方法
US11501957B2 (en) * 2020-09-03 2022-11-15 Applied Materials, Inc. Pedestal support design for precise chamber matching and process control
CN112736020B (zh) * 2020-12-31 2024-06-07 拓荆科技股份有限公司 晶圆支撑销升降装置
JP7664717B2 (ja) * 2021-03-12 2025-04-18 東京エレクトロン株式会社 真空処理装置および傾き調整方法
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