JP2022107898A5 - - Google Patents
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- JP2022107898A5 JP2022107898A5 JP2021002579A JP2021002579A JP2022107898A5 JP 2022107898 A5 JP2022107898 A5 JP 2022107898A5 JP 2021002579 A JP2021002579 A JP 2021002579A JP 2021002579 A JP2021002579 A JP 2021002579A JP 2022107898 A5 JP2022107898 A5 JP 2022107898A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing chamber
- transferring
- detects
- detection sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021002579A JP7797104B2 (ja) | 2021-01-12 | 2021-01-12 | 基板搬送装置、基板搬送方法、および基板処理システム |
| KR1020210190678A KR102652598B1 (ko) | 2021-01-12 | 2021-12-29 | 기판 반송 장치, 기판 반송 방법, 및 기판 처리 시스템 |
| TW110149399A TWI890911B (zh) | 2021-01-12 | 2021-12-29 | 基板搬送裝置、基板搬送方法、及基板處理系統 |
| CN202210002402.XA CN114765121B (zh) | 2021-01-12 | 2022-01-04 | 基板搬送装置、基板搬送方法以及基板处理系统 |
| US17/573,387 US12183612B2 (en) | 2021-01-12 | 2022-01-11 | Substrate transfer apparatus, substrate transfer method, and substrate processing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021002579A JP7797104B2 (ja) | 2021-01-12 | 2021-01-12 | 基板搬送装置、基板搬送方法、および基板処理システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022107898A JP2022107898A (ja) | 2022-07-25 |
| JP2022107898A5 true JP2022107898A5 (https=) | 2023-09-07 |
| JP7797104B2 JP7797104B2 (ja) | 2026-01-13 |
Family
ID=82323252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021002579A Active JP7797104B2 (ja) | 2021-01-12 | 2021-01-12 | 基板搬送装置、基板搬送方法、および基板処理システム |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12183612B2 (https=) |
| JP (1) | JP7797104B2 (https=) |
| KR (1) | KR102652598B1 (https=) |
| CN (1) | CN114765121B (https=) |
| TW (1) | TWI890911B (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7506971B2 (ja) * | 2019-07-23 | 2024-06-27 | 川崎重工業株式会社 | ブレード間隔調整装置 |
| KR102818927B1 (ko) * | 2020-01-17 | 2025-06-11 | 주성엔지니어링(주) | 기판 이송 방법 및 기판 이송 장치 |
| JP7433159B2 (ja) * | 2020-07-30 | 2024-02-19 | 東京エレクトロン株式会社 | 真空搬送装置、基板処理システム、および基板処理方法 |
| JP7519923B2 (ja) * | 2021-01-12 | 2024-07-22 | 東京エレクトロン株式会社 | 基板搬送装置、基板搬送方法、および基板処理システム |
| JP7548671B2 (ja) * | 2021-03-17 | 2024-09-10 | 東京エレクトロン株式会社 | 開閉装置及び搬送室 |
| JP7771651B2 (ja) * | 2021-11-12 | 2025-11-18 | 東京エレクトロン株式会社 | 基板搬送装置及び基板搬送方法 |
| JP7835056B2 (ja) * | 2022-03-08 | 2026-03-25 | 東京エレクトロン株式会社 | 基板処理室内に配置される部材を搬送する装置、基板処理システム及び前記部材を搬送する方法 |
| DE102022124050B3 (de) * | 2022-09-20 | 2023-12-07 | Syntegon Technology Gmbh | Transportvorrichtung |
| JP2024064684A (ja) | 2022-10-28 | 2024-05-14 | 東京エレクトロン株式会社 | 基板載置台の位置ずれ測定方法および基板処理装置 |
| CN120225448B (zh) * | 2023-04-17 | 2026-04-17 | 三菱电机株式会社 | 线性输送装置及线性输送装置的制造方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06120317A (ja) * | 1992-03-20 | 1994-04-28 | Ulvac Japan Ltd | 真空装置用ウエハ搬送機構 |
| AU8747698A (en) * | 1997-08-21 | 1999-03-16 | Nikon Corporation | Positioning device, driving unit, and aligner equipped with the device |
| JP2000286318A (ja) * | 1999-01-27 | 2000-10-13 | Shinko Electric Co Ltd | 搬送システム |
| JP2003264214A (ja) | 2002-03-07 | 2003-09-19 | Hitachi High-Technologies Corp | 真空処理装置及び真空処理方法 |
| JP2004193344A (ja) | 2002-12-11 | 2004-07-08 | Tokyo Electron Ltd | 基板搬送装置及び基板搬送方法 |
| JP4711216B2 (ja) | 2005-03-08 | 2011-06-29 | 日本精工株式会社 | 搬送装置 |
| US8760629B2 (en) * | 2008-12-19 | 2014-06-24 | Nikon Corporation | Exposure apparatus including positional measurement system of movable body, exposure method of exposing object including measuring positional information of movable body, and device manufacturing method that includes exposure method of exposing object, including measuring positional information of movable body |
| US9360772B2 (en) * | 2011-12-29 | 2016-06-07 | Nikon Corporation | Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method |
| JP2013187432A (ja) * | 2012-03-09 | 2013-09-19 | Nikon Corp | 移動体装置、露光装置、及びデバイス製造方法 |
| JP5600703B2 (ja) * | 2012-03-30 | 2014-10-01 | 東京エレクトロン株式会社 | 搬送装置及び搬送方法 |
| KR101989366B1 (ko) | 2012-07-04 | 2019-06-14 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 |
| JP6199199B2 (ja) | 2014-02-20 | 2017-09-20 | 東京エレクトロン株式会社 | 基板処理装置、位置ずれ補正方法及び記憶媒体 |
| TWI676227B (zh) | 2015-01-23 | 2019-11-01 | 美商應用材料股份有限公司 | 半導體工藝設備 |
| JP6842934B2 (ja) | 2017-01-27 | 2021-03-17 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板搬送装置、検出位置較正方法および基板処理装置 |
| KR102099115B1 (ko) * | 2018-06-08 | 2020-04-10 | 세메스 주식회사 | 기판 이송 장치, 이를 포함하는 기판 처리 장치 및 기판 틀어짐 보정 방법 |
| JP7158238B2 (ja) | 2018-10-10 | 2022-10-21 | 東京エレクトロン株式会社 | 基板処理システム |
-
2021
- 2021-01-12 JP JP2021002579A patent/JP7797104B2/ja active Active
- 2021-12-29 KR KR1020210190678A patent/KR102652598B1/ko active Active
- 2021-12-29 TW TW110149399A patent/TWI890911B/zh active
-
2022
- 2022-01-04 CN CN202210002402.XA patent/CN114765121B/zh active Active
- 2022-01-11 US US17/573,387 patent/US12183612B2/en active Active
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