JP2021516723A5 - - Google Patents

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Publication number
JP2021516723A5
JP2021516723A5 JP2020544229A JP2020544229A JP2021516723A5 JP 2021516723 A5 JP2021516723 A5 JP 2021516723A5 JP 2020544229 A JP2020544229 A JP 2020544229A JP 2020544229 A JP2020544229 A JP 2020544229A JP 2021516723 A5 JP2021516723 A5 JP 2021516723A5
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JP
Japan
Prior art keywords
temperature
sublimation
value
carrier gas
precursor material
Prior art date
Application number
JP2020544229A
Other languages
English (en)
Japanese (ja)
Other versions
JP7576464B2 (ja
JPWO2019177851A5 (https=
JP2021516723A (ja
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Priority claimed from US16/260,378 external-priority patent/US11168394B2/en
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Publication of JP2021516723A publication Critical patent/JP2021516723A/ja
Publication of JP2021516723A5 publication Critical patent/JP2021516723A5/ja
Publication of JPWO2019177851A5 publication Critical patent/JPWO2019177851A5/ja
Application granted granted Critical
Publication of JP7576464B2 publication Critical patent/JP7576464B2/ja
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JP2020544229A 2018-03-14 2019-03-07 昇華によって正確な濃度の蒸気を生成する方法および装置 Active JP7576464B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862642982P 2018-03-14 2018-03-14
US62/642,982 2018-03-14
US16/260,378 2019-01-29
US16/260,378 US11168394B2 (en) 2018-03-14 2019-01-29 Method and apparatus for making a vapor of precise concentration by sublimation
PCT/US2019/021074 WO2019177851A1 (en) 2018-03-14 2019-03-07 Method and apparatus for making a vapor of precise concentration by sublimation

Publications (4)

Publication Number Publication Date
JP2021516723A JP2021516723A (ja) 2021-07-08
JP2021516723A5 true JP2021516723A5 (https=) 2022-03-10
JPWO2019177851A5 JPWO2019177851A5 (https=) 2022-03-10
JP7576464B2 JP7576464B2 (ja) 2024-10-31

Family

ID=67904522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020544229A Active JP7576464B2 (ja) 2018-03-14 2019-03-07 昇華によって正確な濃度の蒸気を生成する方法および装置

Country Status (5)

Country Link
US (2) US11168394B2 (https=)
EP (1) EP3765418A4 (https=)
JP (1) JP7576464B2 (https=)
CN (1) CN111770900B (https=)
WO (1) WO2019177851A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
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CN112553930B (zh) * 2020-12-31 2023-04-07 濮阳圣恺环保新材料科技股份有限公司 一种利用可控温激光照射进行分散染料印花染色的工艺
FI130131B (en) 2021-09-07 2023-03-09 Picosun Oy Precursor container
TW202432241A (zh) * 2022-10-13 2024-08-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 蒸氣遞送設備、氣相反應器及用於監測及控制蒸氣遞送系統之方法

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