JP2023523945A5 - - Google Patents
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- Publication number
- JP2023523945A5 JP2023523945A5 JP2022564501A JP2022564501A JP2023523945A5 JP 2023523945 A5 JP2023523945 A5 JP 2023523945A5 JP 2022564501 A JP2022564501 A JP 2022564501A JP 2022564501 A JP2022564501 A JP 2022564501A JP 2023523945 A5 JP2023523945 A5 JP 2023523945A5
- Authority
- JP
- Japan
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063018288P | 2020-04-30 | 2020-04-30 | |
| US63/018,288 | 2020-04-30 | ||
| PCT/US2021/029452 WO2021222292A1 (en) | 2020-04-30 | 2021-04-27 | Heater design solutions for chemical delivery systems |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2023523945A JP2023523945A (ja) | 2023-06-08 |
| JPWO2021222292A5 JPWO2021222292A5 (https=) | 2024-05-09 |
| JP2023523945A5 true JP2023523945A5 (https=) | 2024-05-09 |
| JP7691439B2 JP7691439B2 (ja) | 2025-06-11 |
Family
ID=78332189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022564501A Active JP7691439B2 (ja) | 2020-04-30 | 2021-04-27 | 化学物質送達システム用のヒーター設計ソリューション |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12460294B2 (https=) |
| JP (1) | JP7691439B2 (https=) |
| KR (1) | KR20230005931A (https=) |
| CN (1) | CN115485412A (https=) |
| TW (1) | TWI902792B (https=) |
| WO (1) | WO2021222292A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI129734B (en) * | 2019-04-25 | 2022-08-15 | Beneq Oy | Precursor supply chamber |
| CN115485412A (zh) | 2020-04-30 | 2022-12-16 | 朗姆研究公司 | 用于化学品输送系统的加热器设计方案 |
| CN114318300B (zh) * | 2021-12-30 | 2024-05-10 | 拓荆科技股份有限公司 | 一种半导体加工设备及其反应腔室、工艺管路穿腔模块 |
| KR102728765B1 (ko) | 2024-01-10 | 2024-11-13 | 포이스주식회사 | 기체상태 화학약품 공급라인의 온도제어시스템 |
| KR102770119B1 (ko) | 2024-01-10 | 2025-02-20 | 포이스주식회사 | 기체상태 화학약품 공급라인의 퍼지시스템 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3651240A (en) * | 1969-01-31 | 1972-03-21 | Trw Inc | Heat transfer device |
| US3677329A (en) * | 1970-11-16 | 1972-07-18 | Trw Inc | Annular heat pipe |
| JPH02210822A (ja) | 1989-02-10 | 1990-08-22 | Toshiba Corp | 気相成長装置 |
| US5451258A (en) | 1994-05-11 | 1995-09-19 | Materials Research Corporation | Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber |
| JPH0897160A (ja) | 1994-09-29 | 1996-04-12 | Fujitsu Ltd | ガス吹き出し装置及びガス混合装置及び半導体装置製造方法 |
| US5714738A (en) * | 1995-07-10 | 1998-02-03 | Watlow Electric Manufacturing Co. | Apparatus and methods of making and using heater apparatus for heating an object having two-dimensional or three-dimensional curvature |
| KR100392047B1 (ko) | 1998-12-16 | 2003-07-23 | 동경 엘렉트론 주식회사 | 박막 형성 방법 |
| US6915592B2 (en) | 2002-07-29 | 2005-07-12 | Applied Materials, Inc. | Method and apparatus for generating gas to a processing chamber |
| KR20080070893A (ko) | 2007-01-29 | 2008-08-01 | (주)티티에스 | 블록히터가 장착된 가스라인을 갖는 반도체 제조장치 |
| JP2009084625A (ja) * | 2007-09-28 | 2009-04-23 | Tokyo Electron Ltd | 原料ガスの供給システム及び成膜装置 |
| KR101084275B1 (ko) | 2009-09-22 | 2011-11-16 | 삼성모바일디스플레이주식회사 | 소스 가스 공급 유닛, 이를 구비하는 증착 장치 및 방법 |
| TWI518198B (zh) | 2014-04-09 | 2016-01-21 | 中央研究院 | 製備薄膜之系統 |
| JP6627464B2 (ja) | 2015-03-30 | 2020-01-08 | 東京エレクトロン株式会社 | 原料ガス供給装置及び成膜装置 |
| US11421320B2 (en) * | 2017-12-07 | 2022-08-23 | Entegris, Inc. | Chemical delivery system and method of operating the chemical delivery system |
| US10975470B2 (en) * | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| US11183400B2 (en) | 2018-08-08 | 2021-11-23 | Lam Research Corporation | Progressive heating of components of substrate processing systems using TCR element-based heaters |
| KR20200101141A (ko) * | 2019-02-19 | 2020-08-27 | 고려대학교 산학협력단 | 전구체 소스 공급을 위한 금속블록 결합형 히터 어셈블리를 포함하는 증착 장치 |
| CN115485412A (zh) | 2020-04-30 | 2022-12-16 | 朗姆研究公司 | 用于化学品输送系统的加热器设计方案 |
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2021
- 2021-04-27 CN CN202180032165.5A patent/CN115485412A/zh active Pending
- 2021-04-27 US US17/922,279 patent/US12460294B2/en active Active
- 2021-04-27 JP JP2022564501A patent/JP7691439B2/ja active Active
- 2021-04-27 KR KR1020227041952A patent/KR20230005931A/ko active Pending
- 2021-04-27 WO PCT/US2021/029452 patent/WO2021222292A1/en not_active Ceased
- 2021-04-30 TW TW110115707A patent/TWI902792B/zh active