JP2021511681A - キャパシタ、キャパシタの製造方法、及び半導体装置 - Google Patents
キャパシタ、キャパシタの製造方法、及び半導体装置 Download PDFInfo
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- 239000003990 capacitor Substances 0.000 title claims abstract description 81
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 40
- 239000004065 semiconductor Substances 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 61
- 239000002184 metal Substances 0.000 claims abstract description 52
- 229910052751 metal Inorganic materials 0.000 claims abstract description 52
- 239000000758 substrate Substances 0.000 claims abstract description 49
- 239000000463 material Substances 0.000 claims abstract description 20
- 238000012546 transfer Methods 0.000 claims abstract description 19
- 238000005240 physical vapour deposition Methods 0.000 claims description 61
- 238000000231 atomic layer deposition Methods 0.000 claims description 31
- 238000007872 degassing Methods 0.000 claims description 18
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 8
- 238000000137 annealing Methods 0.000 claims description 8
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000012535 impurity Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims 1
- 238000011109 contamination Methods 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 16
- 230000032258 transport Effects 0.000 description 11
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000005477 sputtering target Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
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Abstract
Description
キャパシタの製造プロセスフローは、キャパシタの複数の層及び複雑な構造に起因して複雑であり、6つの堆積プロセスを必要とする。更に、6つの堆積プロセスでは、TiN膜層とW膜層の両方が化学気相成長(CVD)装置によって作製され、誘電体層が原子層堆積(ALD)装置によって作製され、CVD装置とALD装置は互いに独立しており、真空搬送システムに統合されることができないので、独立した装置ごとにプロセスが完了した後、次のプロセスに対応する独立した装置に基板が搬送される必要がある。2つの独立した装置間で基板を搬送すると、基板を空気にさらすので、キャパシタの全製造プロセスにおいて基板が空気に5回さらされることになり、これは必然的に堆積膜の表面に汚染を引き起こす。
PVDチャンバは、キャパシタの上部電極及び下部電極を作製するように構成され、
ALDチャンバは、キャパシタの誘電体層を作製するように構成され、
搬送プラットフォームは、PVDチャンバ及びALDチャンバとそれぞれ接続され、基板を搬送するように構成される。
PVDプロセスによって、基板の被堆積表面上に下部電極を形成することと、
ALDプロセスによって、基板から離れて下部電極の表面上に誘電体層を形成することと、
PVDプロセスによって、下部電極から離れて誘電体層の表面上に上部電極を形成することと、
を行うステップを含み、
上部電極及び下部電極の各々は金属層を含み、上部電極の金属層及び下部電極の金属層は同じ材料で作られている。
PVDプロセスによって、基板の被堆積表面上に下部電極を形成することと、
ALDプロセスによって、基板から離れて下部電極の表面上に誘電体層を形成することと、
PVDプロセスによって、下部電極から離れて誘電体層の表面上に上部電極を形成することと、
を行うステップを含む。
Claims (21)
- 上部電極と、下部電極と、前記上部電極と前記下部電極との間に配置された誘電体層とを備えることによって特徴付けられ、前記上部電極及び前記下部電極の各々が金属層を備え、前記上部電極の前記金属層及び前記下部電極の前記金属層が、同じ材料で作られていることを特徴とする、キャパシタ。
- 前記金属層の材料が、Al、Au、Ti、又はCuを含むことを特徴とする、請求項1に記載のキャパシタ。
- 前記上部電極及び前記下部電極の両方が、物理気相成長プロセスによって作製されることを特徴とする、請求項1又は2に記載のキャパシタ。
- 前記上部電極の厚さ及び前記下部電極の厚さの両方が、50nm〜500nmの範囲であることを特徴とする、請求項2に記載のキャパシタ。
- 前記上部電極の前記厚さ及び前記下部電極の前記厚さの両方が、100nm〜300nmの範囲であることを特徴とする、請求項4に記載のキャパシタ。
- 前記誘電体層が、Al2O3層、TiO2層、又はHfO4層を含むことを特徴とする、請求項1に記載のキャパシタ。
- 前記誘電体層の厚さが、5nm〜15nmの範囲であることを特徴とする、請求項6に記載のキャパシタ。
- 高密度キャパシタであることを特徴とする、請求項1に記載のキャパシタ。
- 半導体装置であって、請求項1〜8のいずれか一項に記載のキャパシタを製造するように構成され、物理気相成長チャンバと、原子層堆積チャンバと、搬送プラットフォームとを備え、
前記物理気相成長チャンバが、前記キャパシタの前記上部電極及び前記下部電極を作製するように構成され、
前記原子層堆積チャンバが、前記キャパシタの前記誘電体層を作製するように構成され、
前記搬送プラットフォームが、前記物理気相成長チャンバ及び前記原子層堆積チャンバとそれぞれ接続され、基板を搬送するように構成されていることを特徴とする、半導体装置。 - 前記基板を脱ガス及びアニールするように構成され、前記搬送プラットフォームと接続された脱ガスチャンバを更に備えることによって特徴付けられる、請求項9に記載の半導体装置。
- 前記基板の表面から不純物を除去するように構成され、前記搬送プラットフォームと接続されたプレ洗浄チャンバを更に備えることによって特徴付けられる、請求項9に記載の半導体装置。
- 複数の材料の薄膜をそれぞれ堆積させるように構成された複数の物理気相成長チャンバを備えることを特徴とする、請求項9に記載の半導体装置。
- ターゲット・ベース間距離が、前記物理気相成長チャンバにおいて90mmより大きいことを特徴とする、請求項9に記載の半導体装置。
- 前記ターゲット・ベース間距離が、200mm〜410mmの範囲であることを特徴とする、請求項13に記載の半導体装置。
- キャパシタの製造方法であって、
物理気相成長プロセスによって、基板の被堆積表面上に下部電極を形成することと、
原子層堆積プロセスによって、前記基板から離れて前記下部電極の表面上に誘電体層を形成することと、
物理気相成長プロセスによって、前記下部電極から離れて前記誘電体層の表面上に上部電極を形成することと
を備えることによって特徴付けられ、
前記上部電極及び前記下部電極の各々は金属層を備え、前記上部電極の前記金属層及び前記下部電極の前記金属層は同じ材料で作られている、キャパシタの製造方法。 - 前記金属層の材料が、Al、Au、Ti、又はCuを含むことを特徴とする、請求項15に記載のキャパシタの製造方法。
- 前記物理気相成長プロセスによって前記下部電極から離れて前記誘電体層の表面上に前記上部電極を形成するステップにおいて、プロセス圧力が、0mTorr〜2mTorrの範囲であり、スパッタ電力が、30kW〜38kWの範囲であり、バイアス電力が、400W〜1000Wの範囲であることを特徴とする、請求項15に記載のキャパシタの製造方法。
- 前記誘電体層が、Al2O3層、TiO2層、又はHfO4層を含むことを特徴とする、請求項15に記載のキャパシタの製造方法。
- 前記原子層堆積プロセスによって前記基板から離れて前記下部電極の表面上に前記誘電体層を形成するステップにおいて、プロセス温度が、300℃〜400℃の範囲であることを特徴とする、請求項15に記載のキャパシタの製造方法。
- 前記物理気相成長プロセスによって前記基板の被堆積表面上に前記下部電極を形成するステップの前に、前記基板の被堆積表面を脱ガスするための脱ガスプロセスを更に備えることによって特徴付けられる、請求項15に記載のキャパシタの製造方法。
- 前記物理気相成長プロセスによって前記下部電極から離れて前記誘電体層の表面上に前記上部電極を形成するステップの後に、アニールプロセスを更に備えることによって特徴付けられる、請求項15に記載のキャパシタの製造方法。
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CN201810044659.5A CN108281414A (zh) | 2018-01-17 | 2018-01-17 | 一种电容及其制作方法、半导体设备 |
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PCT/CN2018/115359 WO2019140994A1 (zh) | 2018-01-17 | 2018-11-14 | 电容、电容制作方法及半导体设备 |
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