JP2021079695A - 積層構造体 - Google Patents

積層構造体 Download PDF

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Publication number
JP2021079695A
JP2021079695A JP2020179053A JP2020179053A JP2021079695A JP 2021079695 A JP2021079695 A JP 2021079695A JP 2020179053 A JP2020179053 A JP 2020179053A JP 2020179053 A JP2020179053 A JP 2020179053A JP 2021079695 A JP2021079695 A JP 2021079695A
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JP
Japan
Prior art keywords
film
atomic
laminated
laminated structure
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2020179053A
Other languages
English (en)
Japanese (ja)
Inventor
悠人 歳森
Yuto TOSHIMORI
悠人 歳森
野中　荘平
Sohei Nonaka
荘平 野中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to PCT/JP2020/040664 priority Critical patent/WO2021095550A1/ja
Priority to KR1020227012481A priority patent/KR20220100856A/ko
Priority to CN202080074180.1A priority patent/CN114630919A/zh
Priority to TW109138353A priority patent/TW202132103A/zh
Publication of JP2021079695A publication Critical patent/JP2021079695A/ja
Pending legal-status Critical Current

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  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP2020179053A 2019-11-15 2020-10-26 積層構造体 Pending JP2021079695A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/JP2020/040664 WO2021095550A1 (ja) 2019-11-15 2020-10-29 積層構造体
KR1020227012481A KR20220100856A (ko) 2019-11-15 2020-10-29 적층 구조체
CN202080074180.1A CN114630919A (zh) 2019-11-15 2020-10-29 层叠结构体
TW109138353A TW202132103A (zh) 2019-11-15 2020-11-04 層積構造體

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019206934 2019-11-15
JP2019206934 2019-11-15

Publications (1)

Publication Number Publication Date
JP2021079695A true JP2021079695A (ja) 2021-05-27

Family

ID=75963792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020179053A Pending JP2021079695A (ja) 2019-11-15 2020-10-26 積層構造体

Country Status (2)

Country Link
JP (1) JP2021079695A (zh)
TW (1) TW202132103A (zh)

Also Published As

Publication number Publication date
TW202132103A (zh) 2021-09-01

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