JP2021040155A5 - - Google Patents
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- Publication number
- JP2021040155A5 JP2021040155A5 JP2020195093A JP2020195093A JP2021040155A5 JP 2021040155 A5 JP2021040155 A5 JP 2021040155A5 JP 2020195093 A JP2020195093 A JP 2020195093A JP 2020195093 A JP2020195093 A JP 2020195093A JP 2021040155 A5 JP2021040155 A5 JP 2021040155A5
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic chuck
- dielectric substrate
- elongation rate
- ceramic dielectric
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 229920001296 polysiloxane Polymers 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- -1 siloxane skeleton Chemical group 0.000 claims description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 2
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022127102A JP7565017B2 (ja) | 2019-03-28 | 2022-08-09 | 静電チャック |
| JP2024078150A JP2024096458A (ja) | 2019-03-28 | 2024-05-13 | 静電チャック |
| JP2024078149A JP7783570B2 (ja) | 2019-03-28 | 2024-05-13 | 静電チャック |
| JP2025203944A JP2026026186A (ja) | 2019-03-28 | 2025-11-26 | 静電チャック |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019062370 | 2019-03-28 | ||
| JP2019062370 | 2019-03-28 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020051446A Division JP6804053B2 (ja) | 2019-03-28 | 2020-03-23 | 静電チャック |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022127102A Division JP7565017B2 (ja) | 2019-03-28 | 2022-08-09 | 静電チャック |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021040155A JP2021040155A (ja) | 2021-03-11 |
| JP2021040155A5 true JP2021040155A5 (https=) | 2022-07-08 |
| JP7133764B2 JP7133764B2 (ja) | 2022-09-09 |
Family
ID=72714917
Family Applications (6)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020051446A Ceased JP6804053B2 (ja) | 2019-03-28 | 2020-03-23 | 静電チャック |
| JP2020195093A Ceased JP7133764B2 (ja) | 2019-03-28 | 2020-11-25 | 静電チャック |
| JP2022127102A Active JP7565017B2 (ja) | 2019-03-28 | 2022-08-09 | 静電チャック |
| JP2024078150A Pending JP2024096458A (ja) | 2019-03-28 | 2024-05-13 | 静電チャック |
| JP2024078149A Active JP7783570B2 (ja) | 2019-03-28 | 2024-05-13 | 静電チャック |
| JP2025203944A Pending JP2026026186A (ja) | 2019-03-28 | 2025-11-26 | 静電チャック |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020051446A Ceased JP6804053B2 (ja) | 2019-03-28 | 2020-03-23 | 静電チャック |
Family Applications After (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022127102A Active JP7565017B2 (ja) | 2019-03-28 | 2022-08-09 | 静電チャック |
| JP2024078150A Pending JP2024096458A (ja) | 2019-03-28 | 2024-05-13 | 静電チャック |
| JP2024078149A Active JP7783570B2 (ja) | 2019-03-28 | 2024-05-13 | 静電チャック |
| JP2025203944A Pending JP2026026186A (ja) | 2019-03-28 | 2025-11-26 | 静電チャック |
Country Status (1)
| Country | Link |
|---|---|
| JP (6) | JP6804053B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7629182B2 (ja) | 2020-10-02 | 2025-02-13 | Ｏ－Ｆｏｒｃｅ合同会社 | アミロイドβの凝集抑制剤、アミロイドβ凝集疾患用医薬組成物、およびその用途 |
| KR20220103046A (ko) | 2021-01-14 | 2022-07-21 | 신꼬오덴기 고교 가부시키가이샤 | 기판 고정 장치 |
| JP2022109210A (ja) * | 2021-01-14 | 2022-07-27 | 新光電気工業株式会社 | 基板固定装置 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04287344A (ja) * | 1991-03-15 | 1992-10-12 | Kyocera Corp | 静電チャックの接合構造 |
| JP3188057B2 (ja) * | 1993-06-28 | 2001-07-16 | 東京エレクトロン株式会社 | 静電チャック |
| JPH07183279A (ja) * | 1993-12-24 | 1995-07-21 | Tokyo Electron Ltd | 処理装置 |
| JP2000169714A (ja) | 1998-12-07 | 2000-06-20 | Dow Corning Toray Silicone Co Ltd | 硬化性シリコーン組成物 |
| MY131961A (en) | 2000-03-06 | 2007-09-28 | Hitachi Chemical Co Ltd | Resin composition, heat-resistant resin paste and semiconductor device using them and method for manufacture thereof |
| JP4003932B2 (ja) | 2002-03-07 | 2007-11-07 | 日本碍子株式会社 | セラミックス−金属接合体 |
| JP6176771B2 (ja) * | 2010-12-28 | 2017-08-09 | 住友大阪セメント株式会社 | 静電チャック装置 |
| JP6250949B2 (ja) * | 2013-04-15 | 2017-12-20 | 日本特殊陶業株式会社 | 半導体製造装置用部品及びその製造方法 |
| JP6119430B2 (ja) | 2013-05-31 | 2017-04-26 | 住友大阪セメント株式会社 | 静電チャック装置 |
| JP5948513B1 (ja) | 2014-09-04 | 2016-07-06 | 日本碍子株式会社 | ウエハー保持台及びその製法 |
| JP6597437B2 (ja) | 2016-03-24 | 2019-10-30 | 住友大阪セメント株式会社 | 静電チャック装置 |
| JP2018148373A (ja) * | 2017-03-03 | 2018-09-20 | シャープ株式会社 | 表示装置及びテレビジョン受信機 |
| KR102427974B1 (ko) | 2018-03-13 | 2022-08-02 | 엔지케이 인슐레이터 엘티디 | 웨이퍼 유지대 |
| JP6886439B2 (ja) * | 2018-08-07 | 2021-06-16 | 日本特殊陶業株式会社 | 複合部材および接着剤組成物 |
-
2020
- 2020-03-23 JP JP2020051446A patent/JP6804053B2/ja not_active Ceased
- 2020-11-25 JP JP2020195093A patent/JP7133764B2/ja not_active Ceased
-
2022
- 2022-08-09 JP JP2022127102A patent/JP7565017B2/ja active Active
-
2024
- 2024-05-13 JP JP2024078150A patent/JP2024096458A/ja active Pending
- 2024-05-13 JP JP2024078149A patent/JP7783570B2/ja active Active
-
2025
- 2025-11-26 JP JP2025203944A patent/JP2026026186A/ja active Pending
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