JP6804053B2 - 静電チャック - Google Patents

静電チャック Download PDF

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Publication number
JP6804053B2
JP6804053B2 JP2020051446A JP2020051446A JP6804053B2 JP 6804053 B2 JP6804053 B2 JP 6804053B2 JP 2020051446 A JP2020051446 A JP 2020051446A JP 2020051446 A JP2020051446 A JP 2020051446A JP 6804053 B2 JP6804053 B2 JP 6804053B2
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JP
Japan
Prior art keywords
ceramic dielectric
dielectric substrate
bonding layer
base plate
electrostatic chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2020051446A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020167404A (ja
Inventor
大 籾山
大 籾山
佐々木　均
均 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=72714917&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP6804053(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Toto Ltd filed Critical Toto Ltd
Publication of JP2020167404A publication Critical patent/JP2020167404A/ja
Application granted granted Critical
Publication of JP6804053B2 publication Critical patent/JP6804053B2/ja
Ceased legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Physical Vapour Deposition (AREA)
  • Adhesive Tapes (AREA)
JP2020051446A 2019-03-28 2020-03-23 静電チャック Ceased JP6804053B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019062370 2019-03-28
JP2019062370 2019-03-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020195093A Division JP7133764B2 (ja) 2019-03-28 2020-11-25 静電チャック

Publications (2)

Publication Number Publication Date
JP2020167404A JP2020167404A (ja) 2020-10-08
JP6804053B2 true JP6804053B2 (ja) 2020-12-23

Family

ID=72714917

Family Applications (6)

Application Number Title Priority Date Filing Date
JP2020051446A Ceased JP6804053B2 (ja) 2019-03-28 2020-03-23 静電チャック
JP2020195093A Ceased JP7133764B2 (ja) 2019-03-28 2020-11-25 静電チャック
JP2022127102A Active JP7565017B2 (ja) 2019-03-28 2022-08-09 静電チャック
JP2024078150A Pending JP2024096458A (ja) 2019-03-28 2024-05-13 静電チャック
JP2024078149A Active JP7783570B2 (ja) 2019-03-28 2024-05-13 静電チャック
JP2025203944A Pending JP2026026186A (ja) 2019-03-28 2025-11-26 静電チャック

Family Applications After (5)

Application Number Title Priority Date Filing Date
JP2020195093A Ceased JP7133764B2 (ja) 2019-03-28 2020-11-25 静電チャック
JP2022127102A Active JP7565017B2 (ja) 2019-03-28 2022-08-09 静電チャック
JP2024078150A Pending JP2024096458A (ja) 2019-03-28 2024-05-13 静電チャック
JP2024078149A Active JP7783570B2 (ja) 2019-03-28 2024-05-13 静電チャック
JP2025203944A Pending JP2026026186A (ja) 2019-03-28 2025-11-26 静電チャック

Country Status (1)

Country Link
JP (6) JP6804053B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7629182B2 (ja) 2020-10-02 2025-02-13 Ｏ－Ｆｏｒｃｅ合同会社 アミロイドβの凝集抑制剤、アミロイドβ凝集疾患用医薬組成物、およびその用途
KR20220103046A (ko) 2021-01-14 2022-07-21 신꼬오덴기 고교 가부시키가이샤 기판 고정 장치
JP2022109210A (ja) * 2021-01-14 2022-07-27 新光電気工業株式会社 基板固定装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04287344A (ja) * 1991-03-15 1992-10-12 Kyocera Corp 静電チャックの接合構造
JP3188057B2 (ja) * 1993-06-28 2001-07-16 東京エレクトロン株式会社 静電チャック
JPH07183279A (ja) * 1993-12-24 1995-07-21 Tokyo Electron Ltd 処理装置
JP2000169714A (ja) 1998-12-07 2000-06-20 Dow Corning Toray Silicone Co Ltd 硬化性シリコーン組成物
MY131961A (en) 2000-03-06 2007-09-28 Hitachi Chemical Co Ltd Resin composition, heat-resistant resin paste and semiconductor device using them and method for manufacture thereof
JP4003932B2 (ja) 2002-03-07 2007-11-07 日本碍子株式会社 セラミックス−金属接合体
JP6176771B2 (ja) * 2010-12-28 2017-08-09 住友大阪セメント株式会社 静電チャック装置
JP6250949B2 (ja) * 2013-04-15 2017-12-20 日本特殊陶業株式会社 半導体製造装置用部品及びその製造方法
JP6119430B2 (ja) 2013-05-31 2017-04-26 住友大阪セメント株式会社 静電チャック装置
JP5948513B1 (ja) 2014-09-04 2016-07-06 日本碍子株式会社 ウエハー保持台及びその製法
JP6597437B2 (ja) 2016-03-24 2019-10-30 住友大阪セメント株式会社 静電チャック装置
JP2018148373A (ja) * 2017-03-03 2018-09-20 シャープ株式会社 表示装置及びテレビジョン受信機
KR102427974B1 (ko) 2018-03-13 2022-08-02 엔지케이 인슐레이터 엘티디 웨이퍼 유지대
JP6886439B2 (ja) * 2018-08-07 2021-06-16 日本特殊陶業株式会社 複合部材および接着剤組成物

Also Published As

Publication number Publication date
JP7565017B2 (ja) 2024-10-10
JP2020167404A (ja) 2020-10-08
JP7783570B2 (ja) 2025-12-10
JP2024096457A (ja) 2024-07-12
JP2026026186A (ja) 2026-02-16
JP7133764B2 (ja) 2022-09-09
JP2021040155A (ja) 2021-03-11
JP2022145853A (ja) 2022-10-04
JP2024096458A (ja) 2024-07-12

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