JP2019023140A5 - - Google Patents

Download PDF

Info

Publication number
JP2019023140A5
JP2019023140A5 JP2017194125A JP2017194125A JP2019023140A5 JP 2019023140 A5 JP2019023140 A5 JP 2019023140A5 JP 2017194125 A JP2017194125 A JP 2017194125A JP 2017194125 A JP2017194125 A JP 2017194125A JP 2019023140 A5 JP2019023140 A5 JP 2019023140A5
Authority
JP
Japan
Prior art keywords
end effector
bin
full
bins
handler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2017194125A
Other languages
English (en)
Japanese (ja)
Other versions
JP7120748B2 (ja
JP2019023140A (ja
Filing date
Publication date
Priority claimed from US15/708,943 external-priority patent/US10406562B2/en
Application filed filed Critical
Publication of JP2019023140A publication Critical patent/JP2019023140A/ja
Publication of JP2019023140A5 publication Critical patent/JP2019023140A5/ja
Application granted granted Critical
Publication of JP7120748B2 publication Critical patent/JP7120748B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2017194125A 2017-07-21 2017-10-04 回転ソータの自動化 Active JP7120748B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201762535270P 2017-07-21 2017-07-21
US62/535,270 2017-07-21
US15/708,943 US10406562B2 (en) 2017-07-21 2017-09-19 Automation for rotary sorters
US15/708,943 2017-09-19

Publications (3)

Publication Number Publication Date
JP2019023140A JP2019023140A (ja) 2019-02-14
JP2019023140A5 true JP2019023140A5 (enExample) 2020-11-12
JP7120748B2 JP7120748B2 (ja) 2022-08-17

Family

ID=59955441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017194125A Active JP7120748B2 (ja) 2017-07-21 2017-10-04 回転ソータの自動化

Country Status (6)

Country Link
US (1) US10406562B2 (enExample)
EP (1) EP3431194B1 (enExample)
JP (1) JP7120748B2 (enExample)
KR (1) KR102246810B1 (enExample)
CN (3) CN207641886U (enExample)
TW (2) TWI775779B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10406562B2 (en) * 2017-07-21 2019-09-10 Applied Materials, Inc. Automation for rotary sorters
CN112005356B (zh) * 2018-05-03 2024-06-14 应用材料公司 高速旋转分类器中的基板倾斜控制
WO2020051020A1 (en) * 2018-09-06 2020-03-12 Tompkins International Parcel and article sorting system and method with destination container removal
CN114424330A (zh) * 2019-09-30 2022-04-29 应用材料公司 输送机检查系统、基板旋转器和具有该输送机检查系统和基板旋转器的测试系统
CN114365272B (zh) * 2019-09-30 2025-11-18 应用材料公司 输送机检查系统、基板旋转器和具有前述项的测试系统
US12131930B2 (en) * 2020-04-02 2024-10-29 Applied Materials, Inc. Inspection system
DE102020112222A1 (de) * 2020-05-06 2021-11-11 LAW-NDT Mess- und Prüfsysteme GmbH Prüfanlage für eine Mehrzahl von vereinzelbaren Prüfobjekten
TWI824988B (zh) * 2020-05-29 2023-12-01 鴻勁精密股份有限公司 置匣裝置及其應用之作業設備
EP4026661B1 (de) * 2021-01-07 2025-03-05 Swisslog Deutschland GmbH Verfahren und system zur robotergestützten überführung von gütern von, insbesondere zwischen, transportträgern
CN113071744B (zh) * 2021-03-29 2022-11-29 珠海市创飞自动化设备有限公司 一种适用于墨瓶包装用真空包装机
US11945660B2 (en) 2021-08-09 2024-04-02 Applied Materials, Inc. Linear sorter using vacuum belt
WO2023040452A1 (zh) * 2021-09-15 2023-03-23 旷视格图(苏州)智能装备有限公司 自动分拣方法、系统、电子设备、存储介质及程序产品
NL2031169B1 (nl) * 2022-03-05 2023-09-11 Gearbox Bv Inrichting voor het samenstellen van producten
US12135296B2 (en) 2022-04-29 2024-11-05 Applied Materials, Inc. Edge inspection of silicon wafers by image stacking
FR3144118B1 (fr) * 2022-12-22 2024-11-15 Seti Tec Dispositif de stockage et de distribution de composants d’assemblage equipe d’au moins un moyen rotatif de transfert de composants d’assemblage.
CN115672758B (zh) * 2023-01-04 2023-04-07 河南锂动电源有限公司 一种具有筛分功能的软包电池扩口检测装置
US12128446B1 (en) 2023-06-30 2024-10-29 Applied Materials, Inc. High speed substrate sorter
CN118594953A (zh) * 2024-06-14 2024-09-06 云浮市深环科技有限公司 一种炉渣金属检测剔除系统及其方法

Family Cites Families (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4488610A (en) * 1982-05-17 1984-12-18 Data-Pac Mailing Systems Corp. Sorting apparatus
JPH0694306B2 (ja) * 1986-12-23 1994-11-24 松下電器産業株式会社 回転移載装置
US5664337A (en) * 1996-03-26 1997-09-09 Semitool, Inc. Automated semiconductor processing systems
US5934856A (en) * 1994-05-23 1999-08-10 Tokyo Electron Limited Multi-chamber treatment system
US6481956B1 (en) * 1995-10-27 2002-11-19 Brooks Automation Inc. Method of transferring substrates with two different substrate holding end effectors
DE19606763C1 (de) * 1996-02-23 1997-04-03 Singulus Technologies Gmbh Vorrichtung zum Greifen, Halten und/oder Transportieren von Substraten
DE19606764C1 (de) * 1996-02-23 1997-04-03 Singulus Technologies Gmbh Vorrichtung zum Greifen, Halten und/oder Transportieren von Substraten
US6672820B1 (en) * 1996-07-15 2004-01-06 Semitool, Inc. Semiconductor processing apparatus having linear conveyer system
JPH1159829A (ja) * 1997-08-08 1999-03-02 Mitsubishi Electric Corp 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法
TW439570U (en) * 1998-12-18 2001-06-07 Think Technologies Co Ltd Circumrotating sifting device for die sifting machine
DE19921243C2 (de) * 1999-05-07 2002-12-05 Infineon Technologies Ag Anlage zur Bearbeitung von Wafern
US6953906B2 (en) 1999-08-02 2005-10-11 Rapistan Systems Advertising Corp. Delivery point sequencing mail sorting system with flat mail capability
JP4141608B2 (ja) * 2000-01-17 2008-08-27 プレシジョン・システム・サイエンス株式会社 容器搬送処理システム
JP2001236107A (ja) * 2000-02-23 2001-08-31 Nec Corp 自動搬送装置および方法
DE10038168C2 (de) * 2000-08-04 2002-06-20 Asys Gmbh Handhabungs-und/oder Bearbeitungszentrum für Mikrosysteme
JP2003051527A (ja) * 2001-08-02 2003-02-21 Takehide Hayashi 半導体自動搬送対応ｅｆｅｍ（密閉容器からウエハーを出し入れし、製造装置に供給、回収する装置）用ｆｏｕｐ（密閉容器）移載ロボット
US8053659B2 (en) 2002-10-03 2011-11-08 Polyphonic Human Media Interface, S.L. Music intelligence universe server
KR100476988B1 (ko) * 2002-10-08 2005-03-16 (주)제이티 회전 암을 구비한 양방향 다이 분류기
US20050111956A1 (en) * 2003-11-10 2005-05-26 Blueshift Technologies, Inc. Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system
CN100578750C (zh) * 2005-07-01 2010-01-06 日商乐华股份有限公司 容器搬送装置及容器搬送系统
JP4632091B2 (ja) * 2005-08-30 2011-02-16 株式会社ダイフク 物品搬送設備
KR100832772B1 (ko) * 2006-05-22 2008-05-27 주식회사 나온테크 반도체이송장비
KR100897851B1 (ko) * 2007-08-27 2009-05-15 세메스 주식회사 기판 처리 장치
JP4796024B2 (ja) * 2007-08-30 2011-10-19 東京エレクトロン株式会社 容器交換システム及び容器交換方法
JP5183220B2 (ja) * 2008-01-18 2013-04-17 株式会社ヒューモラボラトリー 部品分類装置および前記装置を用いた電子部品特性検査分類装置
US20100111650A1 (en) * 2008-01-31 2010-05-06 Applied Materials, Inc. Automatic substrate loading station
JP2010064024A (ja) * 2008-09-11 2010-03-25 Micro-Tec Co Ltd 選別装置
US7851721B2 (en) * 2009-02-17 2010-12-14 Asm Assembly Automation Ltd Electronic device sorter comprising dual buffers
US8882433B2 (en) * 2009-05-18 2014-11-11 Brooks Automation, Inc. Integrated systems for interfacing with substrate container storage systems
KR20120043730A (ko) * 2009-11-27 2012-05-04 가부시키가이샤 다이후쿠 천정 반송차
SG171498A1 (en) * 2009-12-01 2011-06-29 Rokko Systems Pte Ltd Method and apparatus for improved sorting of diced substrates
US8096402B2 (en) * 2009-12-30 2012-01-17 Pitney Bowes Inc. Sorter having a container shuttle system
JP5318005B2 (ja) * 2010-03-10 2013-10-16 株式会社Ｓｏｋｕｄｏ 基板処理装置、ストッカー装置および基板収納容器の搬送方法
KR101055082B1 (ko) * 2010-05-13 2011-08-08 (주)티에스이 멀티빈을 이용한 ｌｅｄ 칩 소팅 방법
EP2618214B1 (en) * 2010-09-13 2021-01-27 Murata Machinery, Ltd. Automated warehouse and article removal method
CN202265198U (zh) * 2011-07-27 2012-06-06 北京北方微电子基地设备工艺研究中心有限责任公司 料盒传输系统
KR101264399B1 (ko) * 2011-08-19 2013-05-14 주식회사 프로텍 솔라 셀 웨이퍼 분류 장치
US8827618B2 (en) * 2011-12-02 2014-09-09 Brooks Automation, Inc. Transport system
WO2013117246A1 (en) 2012-02-07 2013-08-15 Ismeca Semiconductor Holding Sa A device for sorting components
CN103569629B (zh) * 2012-07-26 2015-12-16 北京北方微电子基地设备工艺研究中心有限责任公司 料盒更换装置、插片机和半导体设备
US9147592B2 (en) * 2012-08-08 2015-09-29 Applied Materials, Inc. Linked vacuum processing tools and methods of using the same
JP2014041894A (ja) * 2012-08-22 2014-03-06 Panasonic Corp 基板供給装置および基板供給方法
US8631923B1 (en) * 2012-09-28 2014-01-21 Asm Technology Singapore Pte Ltd Device sorting apparatus
CN104813462B (zh) * 2012-11-30 2017-04-26 应用材料公司 振动控制的基板传送机械手、系统及方法
CN103077914B (zh) * 2013-01-09 2015-09-02 广东志成华科光电设备有限公司 一种全自动晶粒分选设备及全自动晶粒分选方法
US9669552B2 (en) * 2013-05-20 2017-06-06 Varian Semiconductor Equipment Associates, Inc. System and method for quick-swap of multiple substrates
JP6190645B2 (ja) * 2013-07-09 2017-08-30 東京エレクトロン株式会社 基板搬送方法
US9341580B2 (en) * 2014-06-27 2016-05-17 Applied Materials, Inc. Linear inspection system
US9818633B2 (en) * 2014-10-17 2017-11-14 Lam Research Corporation Equipment front end module for transferring wafers and method of transferring wafers
KR102139220B1 (ko) 2015-04-29 2020-07-29 어플라이드 머티어리얼스, 인코포레이티드 고속 로터리 소터
US10403533B2 (en) * 2015-05-04 2019-09-03 Applied Materials, Inc. Substrate rotary loader
US20160332301A1 (en) * 2015-05-13 2016-11-17 Boris Kesil Method of handling and transporting flat objects between a plurality of flat object pocessing units at robotic station
FR3040900B1 (fr) 2015-09-15 2017-09-01 Solystic Equipement de tri postal avec des robots navettes qui transportent des bacs
US10406562B2 (en) * 2017-07-21 2019-09-10 Applied Materials, Inc. Automation for rotary sorters

Similar Documents

Publication Publication Date Title
JP2019023140A5 (enExample)
US10899002B2 (en) Article movement apparatus, article movement method, and article movement control program
CN105438738B (zh) 一种多种类蔬果货物自动分拣控制系统
US9656301B2 (en) Sorting system for damaged product
CN101804405B (zh) 包含有双缓冲器的电子器件分选机
EP3081315A3 (en) Method and system for sorting of foodstuff items
WO2017143037A3 (en) Laboratory automated instruments, systems, and methods
ES2377711T3 (es) Procedimiento y sistema para procesar artículos
US20170247198A1 (en) Improved conveyor apparatus for the transportation and weighing of agricultural products
WO2017184242A3 (en) Automated diagnostic analyzer and method for its operation
JP2010064024A (ja) 選別装置
US9618573B2 (en) Test handler that picks up electronic devices for testing and an orientation-changing apparatus for use in a test handler
MX388429B (es) Sistema automata de descarga y carga automatizado.
JP2019023140A (ja) 回転ソータの自動化
CA2956087A1 (en) Apparatus for transporting a container relative to a filling station
JP2011123066A5 (enExample)
JP2014530153A5 (enExample)
KR102210368B1 (ko) 라벨 부착 장치 및 방법
CN104094393A (zh) 用以拣选部件的设备
CN106144018A (zh) 电子元件包装载带补料方法及装置
CN105080849A (zh) 电子元件检测分选的搬送方法及装置
MX379174B (es) Aparato para clasificar objetos.
CN202038719U (zh) 一种试样排序存储装置
CN111032540B (zh) 将物品转移出和转移到运输线的方法和设备
CN204021344U (zh) 被动组件检测包装机