JP2013058735A5 - - Google Patents

Download PDF

Info

Publication number
JP2013058735A5
JP2013058735A5 JP2012135543A JP2012135543A JP2013058735A5 JP 2013058735 A5 JP2013058735 A5 JP 2013058735A5 JP 2012135543 A JP2012135543 A JP 2012135543A JP 2012135543 A JP2012135543 A JP 2012135543A JP 2013058735 A5 JP2013058735 A5 JP 2013058735A5
Authority
JP
Japan
Prior art keywords
unit
processed
processing
stacking direction
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012135543A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013058735A (ja
JP6122256B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2012135543A external-priority patent/JP6122256B2/ja
Priority to JP2012135543A priority Critical patent/JP6122256B2/ja
Priority to KR1020120086830A priority patent/KR101311616B1/ko
Priority to US13/570,440 priority patent/US9199805B2/en
Priority to TW101129116A priority patent/TWI462212B/zh
Priority to CN201210286785.4A priority patent/CN102956531B/zh
Publication of JP2013058735A publication Critical patent/JP2013058735A/ja
Publication of JP2013058735A5 publication Critical patent/JP2013058735A5/ja
Publication of JP6122256B2 publication Critical patent/JP6122256B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012135543A 2011-08-12 2012-06-15 処理システムおよび処理方法 Active JP6122256B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012135543A JP6122256B2 (ja) 2011-08-12 2012-06-15 処理システムおよび処理方法
KR1020120086830A KR101311616B1 (ko) 2011-08-12 2012-08-08 처리 시스템 및 처리 방법
US13/570,440 US9199805B2 (en) 2011-08-12 2012-08-09 Processing system and processing method
TW101129116A TWI462212B (zh) 2011-08-12 2012-08-10 Processing system and processing methods
CN201210286785.4A CN102956531B (zh) 2011-08-12 2012-08-13 被处理物的处理系统及被处理物的处理方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011177245 2011-08-12
JP2011177245 2011-08-12
JP2012135543A JP6122256B2 (ja) 2011-08-12 2012-06-15 処理システムおよび処理方法

Publications (3)

Publication Number Publication Date
JP2013058735A JP2013058735A (ja) 2013-03-28
JP2013058735A5 true JP2013058735A5 (enExample) 2015-07-30
JP6122256B2 JP6122256B2 (ja) 2017-04-26

Family

ID=48134305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012135543A Active JP6122256B2 (ja) 2011-08-12 2012-06-15 処理システムおよび処理方法

Country Status (3)

Country Link
US (1) US9199805B2 (enExample)
JP (1) JP6122256B2 (enExample)
TW (1) TWI462212B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5885528B2 (ja) * 2012-02-14 2016-03-15 株式会社安川電機 搬送装置
JP5959914B2 (ja) * 2012-04-18 2016-08-02 東京エレクトロン株式会社 基板処理システム、基板搬送方法および記憶媒体
KR102308221B1 (ko) * 2013-06-05 2021-10-01 퍼시몬 테크놀로지스 코포레이션 로봇 및 적응형 배치 시스템 및 방법
US9214369B2 (en) * 2013-11-01 2015-12-15 Varian Semiconductor Equipment Associates, Inc. Dynamic pitch substrate lift
KR102164067B1 (ko) 2017-09-29 2020-10-12 시바우라 메카트로닉스 가부시끼가이샤 기판 처리 장치 및 기판 처리 방법
KR102116344B1 (ko) 2017-09-29 2020-05-28 시바우라 메카트로닉스 가부시끼가이샤 기판 처리 장치 및 기판 처리 방법
JP7566526B2 (ja) * 2020-07-29 2024-10-15 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板搬送方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3380570B2 (ja) 1992-05-21 2003-02-24 東京エレクトロン株式会社 搬送装置
KR970011065B1 (ko) * 1992-12-21 1997-07-05 다이닛뽕 스크린 세이조오 가부시키가이샤 기판처리장치와 기판처리장치에 있어서 기판교환장치 및 기판교환방법
JPH07106402A (ja) * 1993-10-04 1995-04-21 Tokyo Electron Ltd 板状体搬送装置
JP3734294B2 (ja) 1995-09-04 2006-01-11 大日本スクリーン製造株式会社 基板搬送装置
JP3650495B2 (ja) * 1995-12-12 2005-05-18 東京エレクトロン株式会社 半導体処理装置、その基板交換機構及び基板交換方法
JP3779393B2 (ja) * 1996-09-06 2006-05-24 東京エレクトロン株式会社 処理システム
US6059507A (en) * 1997-04-21 2000-05-09 Brooks Automation, Inc. Substrate processing apparatus with small batch load lock
JP3286240B2 (ja) * 1998-02-09 2002-05-27 日本エー・エス・エム株式会社 半導体処理用ロードロック装置及び方法
US6444974B1 (en) * 1998-07-17 2002-09-03 Asahi Glass Company Ltd. Method for transferring a dummy wafer
DE10119229B4 (de) * 2001-04-19 2004-04-15 Rohwedder Microtech Gmbh & Co. Kg Werkstückträger-Wechseleinrichtung und Wechselverfahren für Werkstückträger
US20030002964A1 (en) * 2001-06-27 2003-01-02 Hee Wee Boon Handler system incorporating a semi-automatic tray replacement apparatus and method of use
JP2003045931A (ja) * 2001-07-31 2003-02-14 Sendai Nikon:Kk 露光装置
US7191033B2 (en) * 2004-03-03 2007-03-13 Tokyo Electron Limited Substrate processing apparatus and substrate processing method
KR100746850B1 (ko) * 2005-05-27 2007-08-07 주식회사 엔씨비네트웍스 반도체 웨이퍼 이송장치
JP2007005582A (ja) * 2005-06-24 2007-01-11 Asm Japan Kk 基板搬送装置及びそれを搭載した半導体基板製造装置
JP2009049232A (ja) * 2007-08-21 2009-03-05 Dainippon Screen Mfg Co Ltd 基板処理装置
KR101226954B1 (ko) * 2008-08-06 2013-01-28 세메스 주식회사 기판 처리장치 및 이의 기판 이송 방법
JP5548430B2 (ja) * 2008-11-26 2014-07-16 株式会社日立国際電気 基板処理装置及び半導体装置の製造方法
JP4880004B2 (ja) * 2009-02-06 2012-02-22 東京エレクトロン株式会社 基板処理システム
JP4973675B2 (ja) * 2009-02-26 2012-07-11 東京エレクトロン株式会社 基板処理装置及び基板処理方法
US9254566B2 (en) * 2009-03-13 2016-02-09 Kawasaki Jukogyo Kabushiki Kaisha Robot having end effector and method of operating the same
JP5274335B2 (ja) * 2009-03-26 2013-08-28 大日本スクリーン製造株式会社 基板処理装置および基板受渡方法

Similar Documents

Publication Publication Date Title
JP2013058735A5 (enExample)
GB2568180A (en) Robotic put wall
CA3177838C (en) OBJECT PROCESSING SYSTEMS AND METHODS INCLUDING MOBILE MATRIX SUPPORT SYSTEMS
NZ621609A (en) Method for providing transport units from a warehouse
MY189257A (en) Handling robot and method for retrieving inventory item based on handling robot
NZ620590A (en) Device for layered stacking a support
JP2015511916A5 (enExample)
WO2018175333A8 (en) Systems and methods for processing objects including a zone gantry system
SG10201807710WA (en) System and method for bi-facial processing of substrates
JP2017506612A5 (enExample)
FI3152712T3 (fi) Menetelmät, järjestelmät ja laitteisto kuljetuslaitteiden liikkeen ohjaamiseksi
MX378657B (es) Sistema y metodo con transportador de arrastre para soldadura de produccion de alta velocidad.
SG10201909234SA (en) Robotic container handling device and method
SG145664A1 (en) Article processing facility and its control method
MX2016002465A (es) Descargador robotizado de cajas de carton.
MX2016000434A (es) Metodo de cumplimiento de ordenes al preparar unidades de almacenamiento en una estacion de recoleccion.
WO2014165439A3 (en) Automated storage and retrieval system and control system thereof
JP2012023289A5 (enExample)
WO2016083920A3 (en) Machine and method for orienting containers
EP2777894A3 (en) Manufacturing system comprising robot cell apparatuses, and method of manufacturing a product
WO2015084798A3 (en) Systems and methods for delivering an item to a dynamic location
SI3260399T1 (sl) Prijemalna naprava za zajemanje več izdelkov, sistem za ravnanje z več izdelki in postopek za manipulacijo več izdelkov
WO2015035300A8 (en) Autonomous mobile picking
WO2011119296A3 (en) Robotic automated storage and retrieval system mixed pallet build system
AU2017252750A1 (en) Packing robot