TWI775779B - 分選單元、檢驗系統及用於操作分選單元的方法 - Google Patents

分選單元、檢驗系統及用於操作分選單元的方法 Download PDF

Info

Publication number
TWI775779B
TWI775779B TW106134318A TW106134318A TWI775779B TW I775779 B TWI775779 B TW I775779B TW 106134318 A TW106134318 A TW 106134318A TW 106134318 A TW106134318 A TW 106134318A TW I775779 B TWI775779 B TW I775779B
Authority
TW
Taiwan
Prior art keywords
bin
end effector
bins
full
sorting
Prior art date
Application number
TW106134318A
Other languages
English (en)
Chinese (zh)
Other versions
TW201908022A (zh
Inventor
馬克思Ｊ 史達普
阿薩夫 施勒岑杰
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TW201908022A publication Critical patent/TW201908022A/zh
Application granted granted Critical
Publication of TWI775779B publication Critical patent/TWI775779B/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G57/00—Stacking of articles
    • B65G57/02—Stacking of articles by adding to the top of the stack
    • B65G57/03—Stacking of articles by adding to the top of the stack from above
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B07C5/361—Processing or control devices therefor, e.g. escort memory
    • B07C5/362—Separating or distributor mechanisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
    • B07B13/14—Details or accessories
    • B07B13/16—Feed or discharge arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/904—Devices for picking-up and depositing articles or materials provided with rotary movements only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C2501/00—Sorting according to a characteristic or feature of the articles or material to be sorted
    • B07C2501/0063—Using robots
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2814/00—Indexing codes relating to loading or unloading articles or bulk materials
    • B65G2814/03—Loading or unloading means
    • B65G2814/0301—General arrangements
    • B65G2814/0304—Stacking devices
    • B65G2814/0305—Adding to the top

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Specific Conveyance Elements (AREA)
  • Sorting Of Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
TW106134318A 2017-07-21 2017-10-05 分選單元、檢驗系統及用於操作分選單元的方法 TWI775779B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201762535270P 2017-07-21 2017-07-21
US62/535,270 2017-07-21
US15/708,943 US10406562B2 (en) 2017-07-21 2017-09-19 Automation for rotary sorters
US15/708,943 2017-09-19

Publications (2)

Publication Number Publication Date
TW201908022A TW201908022A (zh) 2019-03-01
TWI775779B true TWI775779B (zh) 2022-09-01

Family

ID=59955441

Family Applications (2)

Application Number Title Priority Date Filing Date
TW106134318A TWI775779B (zh) 2017-07-21 2017-10-05 分選單元、檢驗系統及用於操作分選單元的方法
TW106214778U TWM568493U (zh) 2017-07-21 2017-10-05 自動化的分選單元及檢驗系統

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW106214778U TWM568493U (zh) 2017-07-21 2017-10-05 自動化的分選單元及檢驗系統

Country Status (6)

Country Link
US (1) US10406562B2 (enExample)
EP (1) EP3431194B1 (enExample)
JP (1) JP7120748B2 (enExample)
KR (1) KR102246810B1 (enExample)
CN (3) CN207641886U (enExample)
TW (2) TWI775779B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10406562B2 (en) * 2017-07-21 2019-09-10 Applied Materials, Inc. Automation for rotary sorters
CN112005356B (zh) * 2018-05-03 2024-06-14 应用材料公司 高速旋转分类器中的基板倾斜控制
WO2020051020A1 (en) * 2018-09-06 2020-03-12 Tompkins International Parcel and article sorting system and method with destination container removal
CN114424330A (zh) * 2019-09-30 2022-04-29 应用材料公司 输送机检查系统、基板旋转器和具有该输送机检查系统和基板旋转器的测试系统
CN114365272B (zh) * 2019-09-30 2025-11-18 应用材料公司 输送机检查系统、基板旋转器和具有前述项的测试系统
US12131930B2 (en) * 2020-04-02 2024-10-29 Applied Materials, Inc. Inspection system
DE102020112222A1 (de) * 2020-05-06 2021-11-11 LAW-NDT Mess- und Prüfsysteme GmbH Prüfanlage für eine Mehrzahl von vereinzelbaren Prüfobjekten
TWI824988B (zh) * 2020-05-29 2023-12-01 鴻勁精密股份有限公司 置匣裝置及其應用之作業設備
EP4026661B1 (de) * 2021-01-07 2025-03-05 Swisslog Deutschland GmbH Verfahren und system zur robotergestützten überführung von gütern von, insbesondere zwischen, transportträgern
CN113071744B (zh) * 2021-03-29 2022-11-29 珠海市创飞自动化设备有限公司 一种适用于墨瓶包装用真空包装机
US11945660B2 (en) 2021-08-09 2024-04-02 Applied Materials, Inc. Linear sorter using vacuum belt
WO2023040452A1 (zh) * 2021-09-15 2023-03-23 旷视格图(苏州)智能装备有限公司 自动分拣方法、系统、电子设备、存储介质及程序产品
NL2031169B1 (nl) * 2022-03-05 2023-09-11 Gearbox Bv Inrichting voor het samenstellen van producten
US12135296B2 (en) 2022-04-29 2024-11-05 Applied Materials, Inc. Edge inspection of silicon wafers by image stacking
FR3144118B1 (fr) * 2022-12-22 2024-11-15 Seti Tec Dispositif de stockage et de distribution de composants d’assemblage equipe d’au moins un moyen rotatif de transfert de composants d’assemblage.
CN115672758B (zh) * 2023-01-04 2023-04-07 河南锂动电源有限公司 一种具有筛分功能的软包电池扩口检测装置
US12128446B1 (en) 2023-06-30 2024-10-29 Applied Materials, Inc. High speed substrate sorter
CN118594953A (zh) * 2024-06-14 2024-09-06 云浮市深环科技有限公司 一种炉渣金属检测剔除系统及其方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007004551A1 (ja) * 2005-07-01 2007-01-11 Rorze Corporation コンテナ搬送装置及びコンテナ搬送システム
US8827618B2 (en) * 2011-12-02 2014-09-09 Brooks Automation, Inc. Transport system
US9341580B2 (en) * 2014-06-27 2016-05-17 Applied Materials, Inc. Linear inspection system
WO2016175989A1 (en) * 2015-04-29 2016-11-03 Applied Materials, Inc. High speed rotary sorter
TWM568493U (zh) * 2017-07-21 2018-10-11 美商應用材料股份有限公司 自動化的分選單元及檢驗系統

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4488610A (en) * 1982-05-17 1984-12-18 Data-Pac Mailing Systems Corp. Sorting apparatus
JPH0694306B2 (ja) * 1986-12-23 1994-11-24 松下電器産業株式会社 回転移載装置
US5664337A (en) * 1996-03-26 1997-09-09 Semitool, Inc. Automated semiconductor processing systems
US5934856A (en) * 1994-05-23 1999-08-10 Tokyo Electron Limited Multi-chamber treatment system
US6481956B1 (en) * 1995-10-27 2002-11-19 Brooks Automation Inc. Method of transferring substrates with two different substrate holding end effectors
DE19606763C1 (de) * 1996-02-23 1997-04-03 Singulus Technologies Gmbh Vorrichtung zum Greifen, Halten und/oder Transportieren von Substraten
DE19606764C1 (de) * 1996-02-23 1997-04-03 Singulus Technologies Gmbh Vorrichtung zum Greifen, Halten und/oder Transportieren von Substraten
US6672820B1 (en) * 1996-07-15 2004-01-06 Semitool, Inc. Semiconductor processing apparatus having linear conveyer system
JPH1159829A (ja) * 1997-08-08 1999-03-02 Mitsubishi Electric Corp 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法
TW439570U (en) * 1998-12-18 2001-06-07 Think Technologies Co Ltd Circumrotating sifting device for die sifting machine
DE19921243C2 (de) * 1999-05-07 2002-12-05 Infineon Technologies Ag Anlage zur Bearbeitung von Wafern
US6953906B2 (en) 1999-08-02 2005-10-11 Rapistan Systems Advertising Corp. Delivery point sequencing mail sorting system with flat mail capability
JP4141608B2 (ja) * 2000-01-17 2008-08-27 プレシジョン・システム・サイエンス株式会社 容器搬送処理システム
JP2001236107A (ja) * 2000-02-23 2001-08-31 Nec Corp 自動搬送装置および方法
DE10038168C2 (de) * 2000-08-04 2002-06-20 Asys Gmbh Handhabungs-und/oder Bearbeitungszentrum für Mikrosysteme
JP2003051527A (ja) * 2001-08-02 2003-02-21 Takehide Hayashi 半導体自動搬送対応ｅｆｅｍ（密閉容器からウエハーを出し入れし、製造装置に供給、回収する装置）用ｆｏｕｐ（密閉容器）移載ロボット
US8053659B2 (en) 2002-10-03 2011-11-08 Polyphonic Human Media Interface, S.L. Music intelligence universe server
KR100476988B1 (ko) * 2002-10-08 2005-03-16 (주)제이티 회전 암을 구비한 양방향 다이 분류기
US20050111956A1 (en) * 2003-11-10 2005-05-26 Blueshift Technologies, Inc. Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system
JP4632091B2 (ja) * 2005-08-30 2011-02-16 株式会社ダイフク 物品搬送設備
KR100832772B1 (ko) * 2006-05-22 2008-05-27 주식회사 나온테크 반도체이송장비
KR100897851B1 (ko) * 2007-08-27 2009-05-15 세메스 주식회사 기판 처리 장치
JP4796024B2 (ja) * 2007-08-30 2011-10-19 東京エレクトロン株式会社 容器交換システム及び容器交換方法
JP5183220B2 (ja) * 2008-01-18 2013-04-17 株式会社ヒューモラボラトリー 部品分類装置および前記装置を用いた電子部品特性検査分類装置
US20100111650A1 (en) * 2008-01-31 2010-05-06 Applied Materials, Inc. Automatic substrate loading station
JP2010064024A (ja) * 2008-09-11 2010-03-25 Micro-Tec Co Ltd 選別装置
US7851721B2 (en) * 2009-02-17 2010-12-14 Asm Assembly Automation Ltd Electronic device sorter comprising dual buffers
US8882433B2 (en) * 2009-05-18 2014-11-11 Brooks Automation, Inc. Integrated systems for interfacing with substrate container storage systems
KR20120043730A (ko) * 2009-11-27 2012-05-04 가부시키가이샤 다이후쿠 천정 반송차
SG171498A1 (en) * 2009-12-01 2011-06-29 Rokko Systems Pte Ltd Method and apparatus for improved sorting of diced substrates
US8096402B2 (en) * 2009-12-30 2012-01-17 Pitney Bowes Inc. Sorter having a container shuttle system
JP5318005B2 (ja) * 2010-03-10 2013-10-16 株式会社Ｓｏｋｕｄｏ 基板処理装置、ストッカー装置および基板収納容器の搬送方法
KR101055082B1 (ko) * 2010-05-13 2011-08-08 (주)티에스이 멀티빈을 이용한 ｌｅｄ 칩 소팅 방법
EP2618214B1 (en) * 2010-09-13 2021-01-27 Murata Machinery, Ltd. Automated warehouse and article removal method
CN202265198U (zh) * 2011-07-27 2012-06-06 北京北方微电子基地设备工艺研究中心有限责任公司 料盒传输系统
KR101264399B1 (ko) * 2011-08-19 2013-05-14 주식회사 프로텍 솔라 셀 웨이퍼 분류 장치
WO2013117246A1 (en) 2012-02-07 2013-08-15 Ismeca Semiconductor Holding Sa A device for sorting components
CN103569629B (zh) * 2012-07-26 2015-12-16 北京北方微电子基地设备工艺研究中心有限责任公司 料盒更换装置、插片机和半导体设备
US9147592B2 (en) * 2012-08-08 2015-09-29 Applied Materials, Inc. Linked vacuum processing tools and methods of using the same
JP2014041894A (ja) * 2012-08-22 2014-03-06 Panasonic Corp 基板供給装置および基板供給方法
US8631923B1 (en) * 2012-09-28 2014-01-21 Asm Technology Singapore Pte Ltd Device sorting apparatus
CN104813462B (zh) * 2012-11-30 2017-04-26 应用材料公司 振动控制的基板传送机械手、系统及方法
CN103077914B (zh) * 2013-01-09 2015-09-02 广东志成华科光电设备有限公司 一种全自动晶粒分选设备及全自动晶粒分选方法
US9669552B2 (en) * 2013-05-20 2017-06-06 Varian Semiconductor Equipment Associates, Inc. System and method for quick-swap of multiple substrates
JP6190645B2 (ja) * 2013-07-09 2017-08-30 東京エレクトロン株式会社 基板搬送方法
US9818633B2 (en) * 2014-10-17 2017-11-14 Lam Research Corporation Equipment front end module for transferring wafers and method of transferring wafers
US10403533B2 (en) * 2015-05-04 2019-09-03 Applied Materials, Inc. Substrate rotary loader
US20160332301A1 (en) * 2015-05-13 2016-11-17 Boris Kesil Method of handling and transporting flat objects between a plurality of flat object pocessing units at robotic station
FR3040900B1 (fr) 2015-09-15 2017-09-01 Solystic Equipement de tri postal avec des robots navettes qui transportent des bacs

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007004551A1 (ja) * 2005-07-01 2007-01-11 Rorze Corporation コンテナ搬送装置及びコンテナ搬送システム
US8827618B2 (en) * 2011-12-02 2014-09-09 Brooks Automation, Inc. Transport system
US9341580B2 (en) * 2014-06-27 2016-05-17 Applied Materials, Inc. Linear inspection system
WO2016175989A1 (en) * 2015-04-29 2016-11-03 Applied Materials, Inc. High speed rotary sorter
TWM568493U (zh) * 2017-07-21 2018-10-11 美商應用材料股份有限公司 自動化的分選單元及檢驗系統

Also Published As

Publication number Publication date
JP7120748B2 (ja) 2022-08-17
CN109285796B (zh) 2024-10-29
CN115483134A (zh) 2022-12-16
JP2019023140A (ja) 2019-02-14
KR20190010384A (ko) 2019-01-30
CN207641886U (zh) 2018-07-24
EP3431194B1 (en) 2021-12-29
TW201908022A (zh) 2019-03-01
US20190022705A1 (en) 2019-01-24
KR102246810B1 (ko) 2021-04-29
US10406562B2 (en) 2019-09-10
CN109285796A (zh) 2019-01-29
TWM568493U (zh) 2018-10-11
EP3431194A1 (en) 2019-01-23

Similar Documents

Publication Publication Date Title
TWI775779B (zh) 分選單元、檢驗系統及用於操作分選單元的方法
EP3127147B1 (en) High speed rotary sorter
US10937683B1 (en) Conveyor inspection system, substrate rotator, and test system having the same
CN106128987B (zh) 基板旋转装载器
US20240429078A1 (en) Inspection system
CN106457496A (zh) 机床系统以及用于运行机床系统的方法
US11072502B2 (en) Substrate tilt control in high speed rotary sorter
CN112437977B (zh) 基板处理装置以及基板处理方法
JP3954664B2 (ja) 洗浄装置
CN114365272B (zh) 输送机检查系统、基板旋转器和具有前述项的测试系统
WO2021066984A1 (en) Conveyor inspection system, substrate rotator, and test system having the same
JP2001019153A (ja) 物品の振り分け装置及び振り分け方法
TW202306015A (zh) 一種晶圓傳送裝置、氣相沉積系統及使用方法
JP2001250227A (ja) 磁気転写方法と装置

Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent