JP2018532260A5 - - Google Patents
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- Publication number
- JP2018532260A5 JP2018532260A5 JP2018509890A JP2018509890A JP2018532260A5 JP 2018532260 A5 JP2018532260 A5 JP 2018532260A5 JP 2018509890 A JP2018509890 A JP 2018509890A JP 2018509890 A JP2018509890 A JP 2018509890A JP 2018532260 A5 JP2018532260 A5 JP 2018532260A5
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- inductor
- inductor wafer
- magnetic layer
- soc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims 12
- 238000000034 method Methods 0.000 claims 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000007747 plating Methods 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 239000000654 additive Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/843,964 US20170062398A1 (en) | 2015-09-02 | 2015-09-02 | Integration of inductors with advanced-node system-on-chip (soc) using glass wafer with inductors and wafer-to-wafer joining |
| US14/843,964 | 2015-09-02 | ||
| PCT/US2016/045998 WO2017039962A1 (en) | 2015-09-02 | 2016-08-08 | Integration of inductors with advanced-node system-on-chip (soc) using glass wafer with inductors and wafer-to-wafer joining |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018532260A JP2018532260A (ja) | 2018-11-01 |
| JP2018532260A5 true JP2018532260A5 (enExample) | 2019-08-29 |
Family
ID=56684312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018509890A Pending JP2018532260A (ja) | 2015-09-02 | 2016-08-08 | インダクタを有するガラスウェハを使用するアドバンスドノードシステムオンチップ（ｓｏｃ）によるインダクタの集積化およびウェハ間接合 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US20170062398A1 (enExample) |
| EP (1) | EP3345218B1 (enExample) |
| JP (1) | JP2018532260A (enExample) |
| KR (1) | KR102541387B1 (enExample) |
| CN (1) | CN108012565A (enExample) |
| BR (1) | BR112018004288A2 (enExample) |
| CA (1) | CA2992855A1 (enExample) |
| WO (1) | WO2017039962A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9935076B1 (en) * | 2015-09-30 | 2018-04-03 | Apple Inc. | Structure and method for fabricating a computing system with an integrated voltage regulator module |
| US20170169934A1 (en) * | 2015-12-15 | 2017-06-15 | Globalfoundries Inc. | Patterned magnetic shields for inductors and transformers |
| US20200203067A1 (en) * | 2017-09-29 | 2020-06-25 | Intel Corporation | Magnetic core/shell particles for inductor arrays |
| US11538617B2 (en) * | 2018-06-29 | 2022-12-27 | Intel Corporation | Integrated magnetic core inductors on glass core substrates |
| US11855124B2 (en) * | 2019-11-15 | 2023-12-26 | Qualcomm Incorporated | Vertically integrated device stack including system on chip and power management integrated circuit |
| US11450628B2 (en) * | 2019-12-15 | 2022-09-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package structure including a solenoid inductor laterally aside a die and method of fabricating the same |
| KR20210106588A (ko) | 2020-02-19 | 2021-08-31 | 삼성전자주식회사 | 반도체 패키지 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6240622B1 (en) * | 1999-07-09 | 2001-06-05 | Micron Technology, Inc. | Integrated circuit inductors |
| US6531945B1 (en) * | 2000-03-10 | 2003-03-11 | Micron Technology, Inc. | Integrated circuit inductor with a magnetic core |
| US6992871B2 (en) * | 2003-08-06 | 2006-01-31 | Micron Technology, Inc. | Microtransformer for system-on-chip power supply |
| US20060088971A1 (en) * | 2004-10-27 | 2006-04-27 | Crawford Ankur M | Integrated inductor and method of fabrication |
| US7463131B1 (en) * | 2005-01-24 | 2008-12-09 | National Semiconductor Corporation | Patterned magnetic layer on-chip inductor |
| JP4929857B2 (ja) * | 2006-06-12 | 2012-05-09 | 株式会社日立製作所 | 半導体装置 |
| US9105627B2 (en) * | 2011-11-04 | 2015-08-11 | International Business Machines Corporation | Coil inductor for on-chip or on-chip stack |
| US10115671B2 (en) * | 2012-08-03 | 2018-10-30 | Snaptrack, Inc. | Incorporation of passives and fine pitch through via for package on package |
| US9041152B2 (en) * | 2013-03-14 | 2015-05-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Inductor with magnetic material |
| US9165791B2 (en) * | 2013-10-31 | 2015-10-20 | Qualcomm Incorporated | Wireless interconnects in an interposer |
| US20150137342A1 (en) * | 2013-11-20 | 2015-05-21 | Marvell World Trade Ltd. | Inductor/transformer outside of silicon wafer |
| WO2015127207A1 (en) * | 2014-02-21 | 2015-08-27 | Marvell World Trade Ltd. | Method and apparatus for incorporating passive devices in an integrated passive device separate from a die |
| US9893141B2 (en) * | 2015-02-26 | 2018-02-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Magnetic core, inductor, and method for fabricating the magnetic core |
-
2015
- 2015-09-02 US US14/843,964 patent/US20170062398A1/en not_active Abandoned
-
2016
- 2016-08-08 EP EP16751137.7A patent/EP3345218B1/en active Active
- 2016-08-08 CN CN201680048793.1A patent/CN108012565A/zh active Pending
- 2016-08-08 KR KR1020187009210A patent/KR102541387B1/ko active Active
- 2016-08-08 WO PCT/US2016/045998 patent/WO2017039962A1/en not_active Ceased
- 2016-08-08 JP JP2018509890A patent/JP2018532260A/ja active Pending
- 2016-08-08 BR BR112018004288-9A patent/BR112018004288A2/en not_active Application Discontinuation
- 2016-08-08 CA CA2992855A patent/CA2992855A1/en not_active Abandoned
-
2021
- 2021-08-20 US US17/408,273 patent/US20210384292A1/en active Pending
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