JP2018530868A5 - - Google Patents
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- Publication number
- JP2018530868A5 JP2018530868A5 JP2018512902A JP2018512902A JP2018530868A5 JP 2018530868 A5 JP2018530868 A5 JP 2018530868A5 JP 2018512902 A JP2018512902 A JP 2018512902A JP 2018512902 A JP2018512902 A JP 2018512902A JP 2018530868 A5 JP2018530868 A5 JP 2018530868A5
- Authority
- JP
- Japan
- Prior art keywords
- heater assembly
- heating member
- wall
- dielectric material
- resistance element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims 9
- 239000003989 dielectric material Substances 0.000 claims 7
- 229910052751 metal Inorganic materials 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 239000011810 insulating material Substances 0.000 claims 3
- 239000012774 insulation material Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims 2
- 238000009413 insulation Methods 0.000 claims 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 2
- 239000000395 magnesium oxide Substances 0.000 claims 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- XEIIJQWBTZBCDC-UHFFFAOYSA-N [O-2].[Mg+2].[Cr+3].[Ni+2] Chemical compound [O-2].[Mg+2].[Cr+3].[Ni+2] XEIIJQWBTZBCDC-UHFFFAOYSA-N 0.000 claims 1
- 230000015556 catabolic process Effects 0.000 claims 1
- 239000002131 composite material Substances 0.000 claims 1
- 229910002804 graphite Inorganic materials 0.000 claims 1
- 239000010439 graphite Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 229910001928 zirconium oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021088078A JP7196234B2 (ja) | 2015-09-09 | 2021-05-26 | 高温管状ヒーター |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562216003P | 2015-09-09 | 2015-09-09 | |
| US62/216,003 | 2015-09-09 | ||
| PCT/US2016/050853 WO2017044674A1 (en) | 2015-09-09 | 2016-09-09 | High temperature tubular heaters |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021088078A Division JP7196234B2 (ja) | 2015-09-09 | 2021-05-26 | 高温管状ヒーター |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018530868A JP2018530868A (ja) | 2018-10-18 |
| JP2018530868A5 true JP2018530868A5 (https=) | 2020-08-13 |
| JP6946274B2 JP6946274B2 (ja) | 2021-10-06 |
Family
ID=56985685
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018512902A Active JP6946274B2 (ja) | 2015-09-09 | 2016-09-09 | 高温管状ヒーター |
| JP2021088078A Active JP7196234B2 (ja) | 2015-09-09 | 2021-05-26 | 高温管状ヒーター |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021088078A Active JP7196234B2 (ja) | 2015-09-09 | 2021-05-26 | 高温管状ヒーター |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10770318B2 (https=) |
| EP (1) | EP3348116B1 (https=) |
| JP (2) | JP6946274B2 (https=) |
| KR (1) | KR102213056B1 (https=) |
| CN (1) | CN108476560B (https=) |
| TW (1) | TWI644590B (https=) |
| WO (1) | WO2017044674A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10542587B2 (en) * | 2015-12-08 | 2020-01-21 | Temp4 Inc. | Heating elements of large sizes and of metallic tubular designs |
| US10448458B2 (en) * | 2016-10-21 | 2019-10-15 | Watlow Electric Manufacturing Company | Electric heaters with low drift resistance feedback |
| KR20250090720A (ko) * | 2023-12-13 | 2025-06-20 | 주성엔지니어링(주) | 고정부, 히터, 기판처리장치용 챔버, 및 기판처리장치 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB345563A (en) * | 1929-05-17 | 1931-03-26 | British Thomson Houston Co Ltd | Improvements in and relating to electric heaters |
| CH427342A (de) * | 1965-04-23 | 1966-12-31 | Elpag Ag Chur | Anordnung an einem Behälter, welche einen Thermowiderstand aufweist |
| US3971875A (en) * | 1974-01-04 | 1976-07-27 | General Dynamics Corporation | Apparatus and method for vacuum hot press joining, compacting and treating of materials |
| JPS5843875B2 (ja) | 1977-07-11 | 1983-09-29 | 松下電器産業株式会社 | 高周波加熱装置用ヒ−タ装置 |
| JPS5590095A (en) * | 1978-12-28 | 1980-07-08 | Matsushita Electric Industrial Co Ltd | Sheathed heater and method of fabricating same |
| JPS6093794A (ja) * | 1983-10-26 | 1985-05-25 | 松下電器産業株式会社 | 遠赤外線ヒ−タ |
| US4735259A (en) * | 1984-02-21 | 1988-04-05 | Hewlett-Packard Company | Heated transfer line for capillary tubing |
| US4650964A (en) * | 1984-02-21 | 1987-03-17 | Hewlett-Packard Company | Electrically heated transfer line for capillary tubing |
| JPH0424638Y2 (https=) * | 1986-09-25 | 1992-06-10 | ||
| JP3102128B2 (ja) * | 1992-03-16 | 2000-10-23 | 松下電器産業株式会社 | ヒータ及びその製造方法 |
| JPH0677193U (ja) * | 1993-04-07 | 1994-10-28 | 日本ヒーター株式会社 | シーズヒーターの取付構造 |
| JPH08264465A (ja) * | 1995-03-23 | 1996-10-11 | Tokyo Electron Ltd | 処理装置 |
| JP3089196B2 (ja) * | 1995-11-22 | 2000-09-18 | シャープ株式会社 | 電子レンジのヒータ取り付け構造 |
| EP0848894B1 (en) * | 1996-07-15 | 1999-01-27 | Koninklijke Philips Electronics N.V. | Heating element |
| JP4041259B2 (ja) | 2000-02-23 | 2008-01-30 | 三洋熱工業株式会社 | ヒータの製造方法 |
| US20020185487A1 (en) * | 2001-05-02 | 2002-12-12 | Ramesh Divakar | Ceramic heater with heater element and method for use thereof |
| US20020166855A1 (en) * | 2001-05-11 | 2002-11-14 | Renwick Ian J. | Electric heater having dielectric sleeve |
| JPWO2003017726A1 (ja) * | 2001-08-13 | 2004-12-09 | 三洋熱工業株式会社 | ヒータ |
| JP3089196U (ja) | 2002-04-10 | 2002-10-11 | 宇呂電子工業株式会社 | アース金具 |
| CN2631182Y (zh) * | 2003-06-03 | 2004-08-04 | 宝胜科技创新股份有限公司 | 氧化镁绝缘加热元件 |
| US20080041836A1 (en) * | 2004-02-03 | 2008-02-21 | Nicholas Gralenski | High temperature heating element for preventing contamination of a work piece |
| DE102008063677B4 (de) | 2008-12-19 | 2012-10-04 | Heraeus Noblelight Gmbh | Infrarotstrahler und Verwendung des Infrarotstrahlers in einer Prozesskammer |
| DE102009038341A1 (de) | 2009-08-21 | 2011-04-21 | Von Ardenne Anlagentechnik Gmbh | Heizeinrichtung für eine Substratbehandlungseinrichtung und Substratbehandlungseinrichtung |
-
2016
- 2016-09-09 KR KR1020187010050A patent/KR102213056B1/ko active Active
- 2016-09-09 EP EP16770407.1A patent/EP3348116B1/en active Active
- 2016-09-09 TW TW105129350A patent/TWI644590B/zh not_active IP Right Cessation
- 2016-09-09 WO PCT/US2016/050853 patent/WO2017044674A1/en not_active Ceased
- 2016-09-09 US US15/260,357 patent/US10770318B2/en active Active
- 2016-09-09 CN CN201680064869.XA patent/CN108476560B/zh active Active
- 2016-09-09 JP JP2018512902A patent/JP6946274B2/ja active Active
-
2021
- 2021-05-26 JP JP2021088078A patent/JP7196234B2/ja active Active
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