CN108476560B - 高温管状加热器 - Google Patents

高温管状加热器 Download PDF

Info

Publication number
CN108476560B
CN108476560B CN201680064869.XA CN201680064869A CN108476560B CN 108476560 B CN108476560 B CN 108476560B CN 201680064869 A CN201680064869 A CN 201680064869A CN 108476560 B CN108476560 B CN 108476560B
Authority
CN
China
Prior art keywords
heater assembly
insulator
heating member
assembly according
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201680064869.XA
Other languages
English (en)
Chinese (zh)
Other versions
CN108476560A (zh
Inventor
穆罕默德·诺斯拉蒂
罗格·布鲁梅尔
肯尼斯·D·阿米斯
保罗·S·惠茨通
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Watlow Electric Manufacturing Co
Original Assignee
Watlow Electric Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Watlow Electric Manufacturing Co filed Critical Watlow Electric Manufacturing Co
Publication of CN108476560A publication Critical patent/CN108476560A/zh
Application granted granted Critical
Publication of CN108476560B publication Critical patent/CN108476560B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F5/00—Compounds of magnesium
    • C01F5/02—Magnesia
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00—Compounds of aluminium
    • C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G25/00—Compounds of zirconium
    • C01G25/02—Oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/40—Electric properties
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/363—Carbon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/016—Heaters using particular connecting means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Resistance Heating (AREA)
  • Chemical Vapour Deposition (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
CN201680064869.XA 2015-09-09 2016-09-09 高温管状加热器 Active CN108476560B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562216003P 2015-09-09 2015-09-09
US62/216,003 2015-09-09
PCT/US2016/050853 WO2017044674A1 (en) 2015-09-09 2016-09-09 High temperature tubular heaters

Publications (2)

Publication Number Publication Date
CN108476560A CN108476560A (zh) 2018-08-31
CN108476560B true CN108476560B (zh) 2020-11-03

Family

ID=56985685

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680064869.XA Active CN108476560B (zh) 2015-09-09 2016-09-09 高温管状加热器

Country Status (7)

Country Link
US (1) US10770318B2 (https=)
EP (1) EP3348116B1 (https=)
JP (2) JP6946274B2 (https=)
KR (1) KR102213056B1 (https=)
CN (1) CN108476560B (https=)
TW (1) TWI644590B (https=)
WO (1) WO2017044674A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10542587B2 (en) * 2015-12-08 2020-01-21 Temp4 Inc. Heating elements of large sizes and of metallic tubular designs
US10448458B2 (en) * 2016-10-21 2019-10-15 Watlow Electric Manufacturing Company Electric heaters with low drift resistance feedback
KR20250090720A (ko) * 2023-12-13 2025-06-20 주성엔지니어링(주) 고정부, 히터, 기판처리장치용 챔버, 및 기판처리장치

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB345563A (en) * 1929-05-17 1931-03-26 British Thomson Houston Co Ltd Improvements in and relating to electric heaters
US4088258A (en) * 1974-01-04 1978-05-09 General Dynamics Corporation Apparatus and method for vacuum hot press joining, compacting and treating of materials
US4735259A (en) * 1984-02-21 1988-04-05 Hewlett-Packard Company Heated transfer line for capillary tubing
US5618350A (en) * 1995-03-23 1997-04-08 Tokyo Electron Limited Processing apparatus
JPH09148063A (ja) * 1995-11-22 1997-06-06 Sharp Corp 電子レンジのヒータ取り付け構造
CN1197584A (zh) * 1996-07-15 1998-10-28 菲利浦电子有限公司 加热元件
CN1498515A (zh) * 2001-08-13 2004-05-19 ͬ�Ϳ�ҵ��ʽ���� 加热器
CN2631182Y (zh) * 2003-06-03 2004-08-04 宝胜科技创新股份有限公司 氧化镁绝缘加热元件

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH427342A (de) * 1965-04-23 1966-12-31 Elpag Ag Chur Anordnung an einem Behälter, welche einen Thermowiderstand aufweist
JPS5843875B2 (ja) 1977-07-11 1983-09-29 松下電器産業株式会社 高周波加熱装置用ヒ−タ装置
JPS5590095A (en) * 1978-12-28 1980-07-08 Matsushita Electric Industrial Co Ltd Sheathed heater and method of fabricating same
JPS6093794A (ja) * 1983-10-26 1985-05-25 松下電器産業株式会社 遠赤外線ヒ−タ
US4650964A (en) * 1984-02-21 1987-03-17 Hewlett-Packard Company Electrically heated transfer line for capillary tubing
JPH0424638Y2 (https=) * 1986-09-25 1992-06-10
JP3102128B2 (ja) * 1992-03-16 2000-10-23 松下電器産業株式会社 ヒータ及びその製造方法
JPH0677193U (ja) * 1993-04-07 1994-10-28 日本ヒーター株式会社 シーズヒーターの取付構造
JP4041259B2 (ja) 2000-02-23 2008-01-30 三洋熱工業株式会社 ヒータの製造方法
US20020185487A1 (en) * 2001-05-02 2002-12-12 Ramesh Divakar Ceramic heater with heater element and method for use thereof
US20020166855A1 (en) * 2001-05-11 2002-11-14 Renwick Ian J. Electric heater having dielectric sleeve
JP3089196U (ja) 2002-04-10 2002-10-11 宇呂電子工業株式会社 アース金具
US20080041836A1 (en) * 2004-02-03 2008-02-21 Nicholas Gralenski High temperature heating element for preventing contamination of a work piece
DE102008063677B4 (de) 2008-12-19 2012-10-04 Heraeus Noblelight Gmbh Infrarotstrahler und Verwendung des Infrarotstrahlers in einer Prozesskammer
DE102009038341A1 (de) 2009-08-21 2011-04-21 Von Ardenne Anlagentechnik Gmbh Heizeinrichtung für eine Substratbehandlungseinrichtung und Substratbehandlungseinrichtung

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB345563A (en) * 1929-05-17 1931-03-26 British Thomson Houston Co Ltd Improvements in and relating to electric heaters
US4088258A (en) * 1974-01-04 1978-05-09 General Dynamics Corporation Apparatus and method for vacuum hot press joining, compacting and treating of materials
US4735259A (en) * 1984-02-21 1988-04-05 Hewlett-Packard Company Heated transfer line for capillary tubing
US5618350A (en) * 1995-03-23 1997-04-08 Tokyo Electron Limited Processing apparatus
JPH09148063A (ja) * 1995-11-22 1997-06-06 Sharp Corp 電子レンジのヒータ取り付け構造
CN1197584A (zh) * 1996-07-15 1998-10-28 菲利浦电子有限公司 加热元件
CN1498515A (zh) * 2001-08-13 2004-05-19 ͬ�Ϳ�ҵ��ʽ���� 加热器
CN2631182Y (zh) * 2003-06-03 2004-08-04 宝胜科技创新股份有限公司 氧化镁绝缘加热元件

Also Published As

Publication number Publication date
EP3348116B1 (en) 2020-11-11
US10770318B2 (en) 2020-09-08
TWI644590B (zh) 2018-12-11
CN108476560A (zh) 2018-08-31
JP2018530868A (ja) 2018-10-18
JP6946274B2 (ja) 2021-10-06
JP2021132043A (ja) 2021-09-09
KR20180066089A (ko) 2018-06-18
TW201717697A (zh) 2017-05-16
KR102213056B1 (ko) 2021-02-05
JP7196234B2 (ja) 2022-12-26
WO2017044674A1 (en) 2017-03-16
US20170069514A1 (en) 2017-03-09
EP3348116A1 (en) 2018-07-18

Similar Documents

Publication Publication Date Title
JP7196234B2 (ja) 高温管状ヒーター
JP3790000B2 (ja) セラミックス部材と電力供給用コネクターとの接合構造
KR100836183B1 (ko) 히터 조립체 및 그 설치구조
US8884524B2 (en) Apparatus and methods for improving reliability of RF grounding
KR102741090B1 (ko) 세라믹 서셉터
US12168950B2 (en) Electrical current feed-through
JP2005166354A (ja) セラミックヒーター
US7560668B2 (en) Substrate processing device
US10172186B2 (en) Ceramic cylindrical heater
JP2525974B2 (ja) 半導体ウエハ―加熱装置
JP4640842B2 (ja) 加熱装置
JP6454859B2 (ja) 浸漬ヒータ
JP2018005998A (ja) セラミックスヒータ
KR20190058330A (ko) 가열식 기판 지지부
US8251760B2 (en) Terminal for electrical resistance element
JP2002184844A (ja) サセプターのチャンバーへの取付構造およびサセプターのチャンバーへの支持部材
KR20220140362A (ko) 히팅 케이블 접속장치 및 그가 적용된 플렉시블 히터
JP7136915B2 (ja) ヒータ
JP2016103345A (ja) 接続構造体およびそれを備えたヒータ
JP6711210B2 (ja) 半導体製造装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant