TWI644590B - 高溫管狀加熱器 - Google Patents

高溫管狀加熱器 Download PDF

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Publication number
TWI644590B
TWI644590B TW105129350A TW105129350A TWI644590B TW I644590 B TWI644590 B TW I644590B TW 105129350 A TW105129350 A TW 105129350A TW 105129350 A TW105129350 A TW 105129350A TW I644590 B TWI644590 B TW I644590B
Authority
TW
Taiwan
Prior art keywords
insulator
heater assembly
pair
heating element
dielectric material
Prior art date
Application number
TW105129350A
Other languages
English (en)
Chinese (zh)
Other versions
TW201717697A (zh
Inventor
穆罕默德 諾斯拉提
羅傑 伯魯摩
肯 艾姆斯
保羅 惠茨通
Original Assignee
美商瓦特洛威電子製造公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商瓦特洛威電子製造公司 filed Critical 美商瓦特洛威電子製造公司
Publication of TW201717697A publication Critical patent/TW201717697A/zh
Application granted granted Critical
Publication of TWI644590B publication Critical patent/TWI644590B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F5/00—Compounds of magnesium
    • C01F5/02—Magnesia
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00—Compounds of aluminium
    • C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G25/00—Compounds of zirconium
    • C01G25/02—Oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/40—Electric properties
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/363—Carbon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/016—Heaters using particular connecting means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Resistance Heating (AREA)
  • Chemical Vapour Deposition (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
TW105129350A 2015-09-09 2016-09-09 高溫管狀加熱器 TWI644590B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562216003P 2015-09-09 2015-09-09
US62/216,003 2015-09-09

Publications (2)

Publication Number Publication Date
TW201717697A TW201717697A (zh) 2017-05-16
TWI644590B true TWI644590B (zh) 2018-12-11

Family

ID=56985685

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105129350A TWI644590B (zh) 2015-09-09 2016-09-09 高溫管狀加熱器

Country Status (7)

Country Link
US (1) US10770318B2 (https=)
EP (1) EP3348116B1 (https=)
JP (2) JP6946274B2 (https=)
KR (1) KR102213056B1 (https=)
CN (1) CN108476560B (https=)
TW (1) TWI644590B (https=)
WO (1) WO2017044674A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10542587B2 (en) * 2015-12-08 2020-01-21 Temp4 Inc. Heating elements of large sizes and of metallic tubular designs
US10448458B2 (en) * 2016-10-21 2019-10-15 Watlow Electric Manufacturing Company Electric heaters with low drift resistance feedback
KR20250090720A (ko) * 2023-12-13 2025-06-20 주성엔지니어링(주) 고정부, 히터, 기판처리장치용 챔버, 및 기판처리장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4088258A (en) * 1974-01-04 1978-05-09 General Dynamics Corporation Apparatus and method for vacuum hot press joining, compacting and treating of materials
US20020185487A1 (en) * 2001-05-02 2002-12-12 Ramesh Divakar Ceramic heater with heater element and method for use thereof
TW529315B (en) * 2000-02-23 2003-04-21 Sanyo Netsukogyo Kk Heater

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB345563A (en) * 1929-05-17 1931-03-26 British Thomson Houston Co Ltd Improvements in and relating to electric heaters
CH427342A (de) * 1965-04-23 1966-12-31 Elpag Ag Chur Anordnung an einem Behälter, welche einen Thermowiderstand aufweist
JPS5843875B2 (ja) 1977-07-11 1983-09-29 松下電器産業株式会社 高周波加熱装置用ヒ−タ装置
JPS5590095A (en) * 1978-12-28 1980-07-08 Matsushita Electric Industrial Co Ltd Sheathed heater and method of fabricating same
JPS6093794A (ja) * 1983-10-26 1985-05-25 松下電器産業株式会社 遠赤外線ヒ−タ
US4735259A (en) * 1984-02-21 1988-04-05 Hewlett-Packard Company Heated transfer line for capillary tubing
US4650964A (en) * 1984-02-21 1987-03-17 Hewlett-Packard Company Electrically heated transfer line for capillary tubing
JPH0424638Y2 (https=) * 1986-09-25 1992-06-10
JP3102128B2 (ja) * 1992-03-16 2000-10-23 松下電器産業株式会社 ヒータ及びその製造方法
JPH0677193U (ja) * 1993-04-07 1994-10-28 日本ヒーター株式会社 シーズヒーターの取付構造
JPH08264465A (ja) * 1995-03-23 1996-10-11 Tokyo Electron Ltd 処理装置
JP3089196B2 (ja) * 1995-11-22 2000-09-18 シャープ株式会社 電子レンジのヒータ取り付け構造
EP0848894B1 (en) * 1996-07-15 1999-01-27 Koninklijke Philips Electronics N.V. Heating element
US20020166855A1 (en) * 2001-05-11 2002-11-14 Renwick Ian J. Electric heater having dielectric sleeve
JPWO2003017726A1 (ja) * 2001-08-13 2004-12-09 三洋熱工業株式会社 ヒータ
JP3089196U (ja) 2002-04-10 2002-10-11 宇呂電子工業株式会社 アース金具
CN2631182Y (zh) * 2003-06-03 2004-08-04 宝胜科技创新股份有限公司 氧化镁绝缘加热元件
US20080041836A1 (en) * 2004-02-03 2008-02-21 Nicholas Gralenski High temperature heating element for preventing contamination of a work piece
DE102008063677B4 (de) 2008-12-19 2012-10-04 Heraeus Noblelight Gmbh Infrarotstrahler und Verwendung des Infrarotstrahlers in einer Prozesskammer
DE102009038341A1 (de) 2009-08-21 2011-04-21 Von Ardenne Anlagentechnik Gmbh Heizeinrichtung für eine Substratbehandlungseinrichtung und Substratbehandlungseinrichtung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4088258A (en) * 1974-01-04 1978-05-09 General Dynamics Corporation Apparatus and method for vacuum hot press joining, compacting and treating of materials
TW529315B (en) * 2000-02-23 2003-04-21 Sanyo Netsukogyo Kk Heater
US20020185487A1 (en) * 2001-05-02 2002-12-12 Ramesh Divakar Ceramic heater with heater element and method for use thereof

Also Published As

Publication number Publication date
EP3348116B1 (en) 2020-11-11
US10770318B2 (en) 2020-09-08
CN108476560A (zh) 2018-08-31
JP2018530868A (ja) 2018-10-18
CN108476560B (zh) 2020-11-03
JP6946274B2 (ja) 2021-10-06
JP2021132043A (ja) 2021-09-09
KR20180066089A (ko) 2018-06-18
TW201717697A (zh) 2017-05-16
KR102213056B1 (ko) 2021-02-05
JP7196234B2 (ja) 2022-12-26
WO2017044674A1 (en) 2017-03-16
US20170069514A1 (en) 2017-03-09
EP3348116A1 (en) 2018-07-18

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