KR102213056B1 - 고온 튜브형 히터 - Google Patents

고온 튜브형 히터 Download PDF

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Publication number
KR102213056B1
KR102213056B1 KR1020187010050A KR20187010050A KR102213056B1 KR 102213056 B1 KR102213056 B1 KR 102213056B1 KR 1020187010050 A KR1020187010050 A KR 1020187010050A KR 20187010050 A KR20187010050 A KR 20187010050A KR 102213056 B1 KR102213056 B1 KR 102213056B1
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South Korea
Prior art keywords
insulator
heater assembly
wall
dielectric material
heating member
Prior art date
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KR1020187010050A
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English (en)
Korean (ko)
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KR20180066089A (ko
Inventor
모하마드 노스라티
로저 브러멜
케네스 디. 에임즈
폴 에스. 웨스톤
Original Assignee
와틀로 일렉트릭 매뉴팩츄어링 컴파니
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Publication of KR20180066089A publication Critical patent/KR20180066089A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F5/00—Compounds of magnesium
    • C01F5/02—Magnesia
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00—Compounds of aluminium
    • C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G25/00—Compounds of zirconium
    • C01G25/02—Oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
    • H01L21/67109—
    • H01L21/67115—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/40—Electric properties
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/363—Carbon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/016—Heaters using particular connecting means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Resistance Heating (AREA)
  • Chemical Vapour Deposition (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
KR1020187010050A 2015-09-09 2016-09-09 고온 튜브형 히터 Active KR102213056B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562216003P 2015-09-09 2015-09-09
US62/216,003 2015-09-09
PCT/US2016/050853 WO2017044674A1 (en) 2015-09-09 2016-09-09 High temperature tubular heaters

Publications (2)

Publication Number Publication Date
KR20180066089A KR20180066089A (ko) 2018-06-18
KR102213056B1 true KR102213056B1 (ko) 2021-02-05

Family

ID=56985685

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187010050A Active KR102213056B1 (ko) 2015-09-09 2016-09-09 고온 튜브형 히터

Country Status (7)

Country Link
US (1) US10770318B2 (https=)
EP (1) EP3348116B1 (https=)
JP (2) JP6946274B2 (https=)
KR (1) KR102213056B1 (https=)
CN (1) CN108476560B (https=)
TW (1) TWI644590B (https=)
WO (1) WO2017044674A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10542587B2 (en) * 2015-12-08 2020-01-21 Temp4 Inc. Heating elements of large sizes and of metallic tubular designs
US10448458B2 (en) * 2016-10-21 2019-10-15 Watlow Electric Manufacturing Company Electric heaters with low drift resistance feedback
KR20250090720A (ko) * 2023-12-13 2025-06-20 주성엔지니어링(주) 고정부, 히터, 기판처리장치용 챔버, 및 기판처리장치

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB345563A (en) * 1929-05-17 1931-03-26 British Thomson Houston Co Ltd Improvements in and relating to electric heaters
CH427342A (de) * 1965-04-23 1966-12-31 Elpag Ag Chur Anordnung an einem Behälter, welche einen Thermowiderstand aufweist
US3971875A (en) * 1974-01-04 1976-07-27 General Dynamics Corporation Apparatus and method for vacuum hot press joining, compacting and treating of materials
JPS5843875B2 (ja) 1977-07-11 1983-09-29 松下電器産業株式会社 高周波加熱装置用ヒ−タ装置
JPS5590095A (en) * 1978-12-28 1980-07-08 Matsushita Electric Industrial Co Ltd Sheathed heater and method of fabricating same
JPS6093794A (ja) * 1983-10-26 1985-05-25 松下電器産業株式会社 遠赤外線ヒ−タ
US4735259A (en) * 1984-02-21 1988-04-05 Hewlett-Packard Company Heated transfer line for capillary tubing
US4650964A (en) * 1984-02-21 1987-03-17 Hewlett-Packard Company Electrically heated transfer line for capillary tubing
JPH0424638Y2 (https=) * 1986-09-25 1992-06-10
JP3102128B2 (ja) * 1992-03-16 2000-10-23 松下電器産業株式会社 ヒータ及びその製造方法
JPH0677193U (ja) * 1993-04-07 1994-10-28 日本ヒーター株式会社 シーズヒーターの取付構造
JPH08264465A (ja) * 1995-03-23 1996-10-11 Tokyo Electron Ltd 処理装置
JP3089196B2 (ja) * 1995-11-22 2000-09-18 シャープ株式会社 電子レンジのヒータ取り付け構造
EP0848894B1 (en) * 1996-07-15 1999-01-27 Koninklijke Philips Electronics N.V. Heating element
JP4041259B2 (ja) 2000-02-23 2008-01-30 三洋熱工業株式会社 ヒータの製造方法
US20020185487A1 (en) * 2001-05-02 2002-12-12 Ramesh Divakar Ceramic heater with heater element and method for use thereof
US20020166855A1 (en) * 2001-05-11 2002-11-14 Renwick Ian J. Electric heater having dielectric sleeve
JPWO2003017726A1 (ja) * 2001-08-13 2004-12-09 三洋熱工業株式会社 ヒータ
JP3089196U (ja) 2002-04-10 2002-10-11 宇呂電子工業株式会社 アース金具
CN2631182Y (zh) * 2003-06-03 2004-08-04 宝胜科技创新股份有限公司 氧化镁绝缘加热元件
US20080041836A1 (en) * 2004-02-03 2008-02-21 Nicholas Gralenski High temperature heating element for preventing contamination of a work piece
DE102008063677B4 (de) 2008-12-19 2012-10-04 Heraeus Noblelight Gmbh Infrarotstrahler und Verwendung des Infrarotstrahlers in einer Prozesskammer
DE102009038341A1 (de) 2009-08-21 2011-04-21 Von Ardenne Anlagentechnik Gmbh Heizeinrichtung für eine Substratbehandlungseinrichtung und Substratbehandlungseinrichtung

Also Published As

Publication number Publication date
EP3348116B1 (en) 2020-11-11
US10770318B2 (en) 2020-09-08
TWI644590B (zh) 2018-12-11
CN108476560A (zh) 2018-08-31
JP2018530868A (ja) 2018-10-18
CN108476560B (zh) 2020-11-03
JP6946274B2 (ja) 2021-10-06
JP2021132043A (ja) 2021-09-09
KR20180066089A (ko) 2018-06-18
TW201717697A (zh) 2017-05-16
JP7196234B2 (ja) 2022-12-26
WO2017044674A1 (en) 2017-03-16
US20170069514A1 (en) 2017-03-09
EP3348116A1 (en) 2018-07-18

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