JP2018142589A - 基板固定具及び基板固定装置 - Google Patents
基板固定具及び基板固定装置 Download PDFInfo
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
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Abstract
Description
図11は、本実施形態に係る基板固定装置の断面図である。
本実施形態では、第1実施形態と比較してイットリウム酸化物層36を形成する範囲を拡大する。
本実施形態では、第1実施形態よりも作製するのが容易なトレイについて説明する。
第1〜第3実施形態においては、トレイ7で搬送し得る基板Sの枚数を7枚としたが、基板Sの枚数はこれに限定されない。
Claims (6)
- 絶縁板と、前記絶縁板に埋め込まれた電極とを備えた単極式のチャック本体と、
前記チャック本体の上に載置され、複数の基板の各々を収容する複数の凹部が上面に形成され、かつ、体積抵抗率が前記絶縁板の体積抵抗率以下の絶縁体からなるトレイと、
前記トレイの前記上面に形成されたイットリウム酸化物層と、
を備えた基板固定具。 - 前記トレイの前記凹部に、前記基板の裏面に供給される冷却ガスが通る貫通孔が形成されたことを特徴とする請求項1に記載の基板固定具。
- 前記貫通孔が複数設けられ、かつ、前記トレイの下面に、複数の前記貫通孔同士を繋ぐ溝が形成されたことを特徴とする請求項2に記載の基板固定具。
- 前記トレイは、
下板と、
前記下板の上面に着脱自在であって、かつ、複数の前記凹部の各々に対応した開口が形成された上板とを備え、
複数の前記凹部の各々が、複数の前記開口と前記上面とにより画定されたことを特徴とする請求項1に記載の基板固定具。 - 前記トレイは、前記絶縁体のみからなることを特徴とする請求項1に記載の基板固定具。
- 導電性のベースプレートと、
前記ベースプレートの上に固定された絶縁板と、前記絶縁板に埋め込まれた電極とを備えた単極式のチャック本体と、
前記チャック本体の上に載置され、複数の基板の各々を収容する複数の凹部が上面に形成され、かつ、体積抵抗率が前記絶縁板の体積抵抗率以下の絶縁体からなるトレイと、
前記トレイの前記上面に形成されたイットリウム酸化物層と、
を備えた基板固定装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017035169A JP6858035B2 (ja) | 2017-02-27 | 2017-02-27 | 基板固定具及び基板固定装置 |
KR1020180020930A KR102453116B1 (ko) | 2017-02-27 | 2018-02-22 | 기판 고정구 및 기판 고정 디바이스 |
US15/902,241 US10600669B2 (en) | 2017-02-27 | 2018-02-22 | Substrate fixture and substrate fixing device |
TW107106385A TWI794211B (zh) | 2017-02-27 | 2018-02-26 | 基板夾具及基板固定裝置 |
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JP2017035169A JP6858035B2 (ja) | 2017-02-27 | 2017-02-27 | 基板固定具及び基板固定装置 |
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JP2018142589A true JP2018142589A (ja) | 2018-09-13 |
JP6858035B2 JP6858035B2 (ja) | 2021-04-14 |
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US (1) | US10600669B2 (ja) |
JP (1) | JP6858035B2 (ja) |
KR (1) | KR102453116B1 (ja) |
TW (1) | TWI794211B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020114789A (ja) * | 2019-01-17 | 2020-07-30 | 新光電気工業株式会社 | セラミック部材及びその製造方法 |
JP2020124867A (ja) * | 2019-02-05 | 2020-08-20 | 新光電気工業株式会社 | 複合グリーンシート、セラミック部材、複合グリーンシートの製造方法及びセラミック部材の製造方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6811144B2 (ja) * | 2017-05-30 | 2021-01-13 | 東京エレクトロン株式会社 | プラズマ処理装置の静電チャックを運用する方法 |
JP7345289B2 (ja) * | 2019-06-18 | 2023-09-15 | 東京エレクトロン株式会社 | 基板処理装置、基板処理システム及び基板搬送方法 |
KR20210128064A (ko) * | 2020-04-16 | 2021-10-26 | 주식회사 제우스 | 기판 처리용 통전장치 |
CN112133664B (zh) * | 2020-09-25 | 2024-03-26 | 北京北方华创微电子装备有限公司 | 静电卡盘装置及半导体工艺设备 |
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- 2017-02-27 JP JP2017035169A patent/JP6858035B2/ja active Active
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2018
- 2018-02-22 KR KR1020180020930A patent/KR102453116B1/ko active IP Right Grant
- 2018-02-22 US US15/902,241 patent/US10600669B2/en active Active
- 2018-02-26 TW TW107106385A patent/TWI794211B/zh active
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2020114789A (ja) * | 2019-01-17 | 2020-07-30 | 新光電気工業株式会社 | セラミック部材及びその製造方法 |
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TWI794211B (zh) | 2023-03-01 |
JP6858035B2 (ja) | 2021-04-14 |
KR20180099494A (ko) | 2018-09-05 |
KR102453116B1 (ko) | 2022-10-12 |
US20180247852A1 (en) | 2018-08-30 |
US10600669B2 (en) | 2020-03-24 |
TW201842622A (zh) | 2018-12-01 |
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