JP2018056529A5 - - Google Patents

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Publication number
JP2018056529A5
JP2018056529A5 JP2016194722A JP2016194722A JP2018056529A5 JP 2018056529 A5 JP2018056529 A5 JP 2018056529A5 JP 2016194722 A JP2016194722 A JP 2016194722A JP 2016194722 A JP2016194722 A JP 2016194722A JP 2018056529 A5 JP2018056529 A5 JP 2018056529A5
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JP
Japan
Prior art keywords
processing apparatus
light
substrate processing
heating unit
optical member
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JP2016194722A
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English (en)
Japanese (ja)
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JP2018056529A (ja
JP6849368B2 (ja
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Priority claimed from JP2016194722A external-priority patent/JP6849368B2/ja
Priority to JP2016194722A priority Critical patent/JP6849368B2/ja
Priority to TW106130930A priority patent/TWI677018B/zh
Priority to CN201710879504.9A priority patent/CN107887300B/zh
Priority to KR1020170125882A priority patent/KR101988127B1/ko
Priority to EP17193691.7A priority patent/EP3301707A1/en
Priority to US15/720,928 priority patent/US10460961B2/en
Publication of JP2018056529A publication Critical patent/JP2018056529A/ja
Publication of JP2018056529A5 publication Critical patent/JP2018056529A5/ja
Publication of JP6849368B2 publication Critical patent/JP6849368B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016194722A 2016-09-30 2016-09-30 基板処理装置 Active JP6849368B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2016194722A JP6849368B2 (ja) 2016-09-30 2016-09-30 基板処理装置
TW106130930A TWI677018B (zh) 2016-09-30 2017-09-11 基板處理裝置
CN201710879504.9A CN107887300B (zh) 2016-09-30 2017-09-26 基板处理装置
EP17193691.7A EP3301707A1 (en) 2016-09-30 2017-09-28 Substrate processing apparatus
KR1020170125882A KR101988127B1 (ko) 2016-09-30 2017-09-28 기판 처리 장치
US15/720,928 US10460961B2 (en) 2016-09-30 2017-09-29 Substrate processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016194722A JP6849368B2 (ja) 2016-09-30 2016-09-30 基板処理装置

Publications (3)

Publication Number Publication Date
JP2018056529A JP2018056529A (ja) 2018-04-05
JP2018056529A5 true JP2018056529A5 (enExample) 2020-05-07
JP6849368B2 JP6849368B2 (ja) 2021-03-24

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ID=59997167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016194722A Active JP6849368B2 (ja) 2016-09-30 2016-09-30 基板処理装置

Country Status (6)

Country Link
US (1) US10460961B2 (enExample)
EP (1) EP3301707A1 (enExample)
JP (1) JP6849368B2 (enExample)
KR (1) KR101988127B1 (enExample)
CN (1) CN107887300B (enExample)
TW (1) TWI677018B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6849368B2 (ja) * 2016-09-30 2021-03-24 芝浦メカトロニクス株式会社 基板処理装置
JP2019054112A (ja) * 2017-09-15 2019-04-04 株式会社Ｓｃｒｅｅｎホールディングス 基板乾燥方法および基板乾燥装置
KR102187631B1 (ko) 2018-03-29 2020-12-07 현대모비스 주식회사 차량의 제동 장치 및 제동 제어 방법
CN111250455A (zh) * 2018-11-30 2020-06-09 夏泰鑫半导体(青岛)有限公司 晶圆清洗装置
JP7625458B2 (ja) * 2021-03-22 2025-02-03 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
KR102753522B1 (ko) * 2021-12-02 2025-01-14 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

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JP6849368B2 (ja) * 2016-09-30 2021-03-24 芝浦メカトロニクス株式会社 基板処理装置

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