JP2018056227A - ニッケル配線の製造方法 - Google Patents
ニッケル配線の製造方法 Download PDFInfo
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Abstract
Description
特許文献2には、成膜原料ガスとしてニッケルアミジネートを用い、還元ガスとしてNH3ガスおよびH2ガスを用いてCVDによりNi膜を成膜することが記載されている。
最初に、本発明の一実施形態に係るNi配線の製造方法の概要について説明する。図1は本発明の一実施形態に係るNi配線の製造方法を概略的に示すフローチャート、図2はその工程断面図である。
例えば、図10(a)に示すように、少なくとも、狭い幅(例えば幅が10〜50nm)のトレンチ203aと、広い幅(例えば幅が50〜100nm)のトレンチ203bを有しているウエハWにおいて、1回目のNi膜205の成膜を行った後、1回目のアニールによってNi膜205をリフローさせ、狭い幅のトレンチ203aを埋め込む(図10(b))。このとき、広い幅のトレンチ203bは完全には埋め込まれていない。次に、2回目のNi膜205の成膜を行い、その後、2回目のアニールを行って2回目のNi膜205をリフローさせ、広い幅のトレンチ203bを埋め込む(図10(c))。このようにすることにより、幅が異なるトレンチをトレンチ上部が詰まることなく良好に埋め込むことができる。
以下実験例について説明する。
[実験例1]
ここでは、Si基体上に、テトラエチルオルソシリケート(TEOS)を用いたCVDによりSiO2膜を形成し、このSiO2膜に実際のCD(ミドルCD)が30〜150nm、深さ200nmのトレンチを複数形成したウエハを準備した。
ここでは、Si基体上に、TEOSを用いたCVDによりSiO2膜を形成し、このSiO2膜に実際のCD(ミドルCD)が30〜150nm、深さ200nmのトレンチを複数形成したウエハを準備した。
ここでは、複数の条件で実際にNi配線を形成した場合の抵抗率測定結果について説明する。
所定の下部構造を有するSi基体上に、TEOSを用いたCVDによりSiO2膜を形成し、このSiO2膜に実際のCD(ミドルCD)が約30nmのトレンチを複数形成したウエハを準備した。このような構造のウエハに対し、CVDにより厚さ1nmのTiN膜からなるバリア膜を成膜し、次いで種々の条件でNi膜の埋め込みを行い、次いでPVDにより厚さ100nmのNi膜の積み増し層を形成後、CMPを3分間行った。
ここでは、CDを変化させて実際にNi配線を形成した場合の抵抗率測定結果について説明する。
実験例3と同様、所定の下部構造を有するSi基体上に、TEOSを用いたCVDによりSiO2膜を形成し、このSiO2膜にCDを変えて複数のトレンチを形成した複数のウエハを準備した。各ウエハのトレンチのCDは、53nm、41nm、35nm、30nmとした。これらのウエハに対し、CVDにより厚さ1nmのTiN膜からなるバリア膜を成膜し、次いで上記実験例3の条件3と同様の条件で成膜とアニールによるリフローを2回繰り返してNi膜の埋め込みを行い、次いでPVDにより厚さ100nmのNi膜の積み増し層を形成後、CMPを3分間行った。これらについて抵抗率を測定した。
次に、上述したNi配線の製造方法を実施するために用いられる成膜システムの一例について説明する。
図16に示すように、本例の成膜システム300は、平面形状が七角形をなす真空搬送室301を有し、真空搬送室301の4つの壁部にそれぞれゲートバルブGを介してTiN膜成膜装置302、Ni膜成膜装置303、アニール装置304、および積み増し層形成装置305が接続されている。TiN膜成膜装置302は、CVDまたはALDによりバリア膜としてのTiN膜を成膜するものである。Ni膜成膜装置303は、CVDまたはALDによりトレンチを埋め込むためのNi膜を成膜するものである。アニール装置304は、Ni膜成膜後にウエハをアニールしてNi膜をトレンチ内にリフローするためのものである。積み増し層形成装置305は、埋め込みのためのNi膜の上にさらにPVDまたはCVDにより次のCMP処理に備えてNi膜の積み増し層を形成するためのものである。真空搬送室301内は、真空ポンプにより排気されて所定の真空度に保持される。
図17は、Ni膜成膜装置303の一例を示す断面図である。このNi膜成膜装置303は、気密に構成された略円筒状のチャンバー1を有しており、その中には被処理基板であるウエハWを水平に支持するためのサセプタ2が、後述する排気室の底部からその中央下部に達する円筒状の支持部材3により支持された状態で配置されている。このサセプタ2は例えばAlN等のセラミックスからなっている。また、サセプタ2にはヒーター5が埋め込まれており、このヒーター5にはヒーター電源6が接続されている。一方、サセプタ2の上面近傍には熱電対7が設けられており、熱電対7の信号はヒーターコントローラ8に伝送されるようになっている。そして、ヒーターコントローラ8は熱電対7の信号に応じてヒーター電源6に指令を送信し、ヒーター5の加熱を制御してウエハWを所定の温度に制御するようになっている。サセプタ2の内部のヒーター5の上方には、高周波電力印加用の電極27が埋設されている。この電極27には整合器28を介して高周波電源29が接続されており、必要に応じて電極27に高周波電力を印加してプラズマを生成し、プラズマCVDを実施することも可能となっている。なお、サセプタ2には3本のウエハ昇降ピン(図示せず)がサセプタ2の表面に対して突没可能に設けられており、ウエハWを搬送する際に、サセプタ2の表面から突出した状態にされる。また、サセプタ2は昇降機構(図示せず)により昇降可能となっている。
ウエハ搬送機構310によりウエハWをNi膜成膜装置303のチャンバー1内に搬入した後、ウエハWを載置台2上に載置する。そして、ウエハ搬送機構310を真空搬送室301に戻し、ゲートバルブGを閉じる。載置台2上のウエハWをヒーター5により所定の温度、例えば200〜300℃の範囲内の所定の温度に加熱するとともに、排気機構20によりチャンバー1内を排気しつつ、Arガス供給源33および52からパージガスとしてArガスを供給してチャンバー1内の圧力調整を行い、次いでArガス供給源33からバブリング配管32を介して成膜原料タンク31内にArガスを供給してバブリングし、原料ガス送出配管36および第1のプリフローライン61を介してNi化合物ガスであるニッケルアルキルアミジネートのプリフローを行うとともに、NH3ガス供給源42から分岐配管40a、配管40および第2のプリフローライン62を介してNH3ガスのプリフローを行う。
以上、本発明の実施形態について説明したが、本発明は、上記実施形態に限定されることなく、本発明の技術思想の範囲内で種々変形可能である。例えば、上記実施形態で用いた成膜システム、Ni膜成膜装置は、あくまで例示であって、本実施形態に限るものではない。
2;サセプタ
5;ヒーター
10;シャワーヘッド
30;ガス供給機構
31;成膜原料タンク
42;NH3ガス供給源
43;H2ガス供給源
201;基体
202;層間絶縁膜
203;トレンチ
204;バリア膜
205;Ni膜
206;積み増し層
207;Ni配線
300;成膜システム
301;真空搬送室
302;TiN膜成膜装置
303;Ni膜成膜装置
304;アニール装置
W;半導体ウエハ
Claims (17)
- 表面に凹部が形成された基板に対し、ニッケル膜を形成し、前記凹部を埋めてニッケル配線を製造するニッケル配線の製造方法であって、
前記基板の表面に、成膜原料となるニッケル化合物と、還元ガスとなるNH3ガスおよびH2ガスを用いてCVDまたはALDによりニッケル膜を形成し、前記凹部を部分的に埋め込む工程と、
前記基板をアニールして前記基板表面および前記凹部側面の前記ニッケル膜を前記凹部にリフローさせる工程とを有することを特徴とするニッケル配線の製造方法。 - 前記基板は、基体と、該基体上に形成された下地膜を有し、前記凹部は前記下地膜に形成されていることを特徴とする請求項1に記載のニッケル配線の製造方法。
- 前記基体は半導体からなり、前記下地膜は前記基体の所定の下部構造の上に形成された層間絶縁膜であり、前記凹部はトレンチであることを特徴とする請求項2に記載のニッケル配線の製造方法。
- 前記基板の上にバリア膜を成膜する工程をさらに有し、前記ニッケル膜は前記バリア膜の上に形成されることを特徴とする請求項1から請求項3のいずれか1項に記載のニッケル配線の製造方法。
- 前記ニッケル膜を成膜する際の、NH3ガスとH2ガスとの流量比率であるNH3/H2比の値は、0.25〜4の範囲であることを特徴とする請求項1から請求項4のいずれか1項に記載のニッケル配線の製造方法。
- 前記ニッケル膜を成膜する際の、前記NH3/H2比の値は、0.67〜4の範囲であることを特徴とする請求項5に記載のニッケル配線の製造方法。
- 前記ニッケル膜を成膜する際の、前記NH3/H2比の値は、0.67〜2.33の範囲であることを特徴とする請求項6に記載のニッケル配線の製造方法。
- 前記ニッケル膜を成膜する際の前記成膜原料となるニッケル化合物は、ニッケルアミジネートを含むことを特徴とする請求項1から請求項7のいずれか1項に記載のニッケル配線の製造方法。
- 前記アニールは、200〜600℃の範囲の温度で実施されることを特徴とする請求項1から請求項8のいずれか1項に記載ニッケル配線の製造方法。
- 前記ニッケル膜の成膜と前記アニールとを2回以上繰り返すことを特徴とする請求項1から請求項9のいずれか1項に記載のニッケル配線の製造方法。
- 前記基板は、幅または径が相対的に小さい第1の凹部と、幅または径が相対的に大きい第2の凹部の少なくとも2種類の凹部を有し、
1回目のニッケル膜の成膜と1回目のアニールにより、前記第1の凹部を完全に埋め込む一方、前記第2の凹部を部分的に埋め込み、2回目のニッケル膜の成膜と2回目のアニールにより、前記第2の凹部を完全に埋め込むことを特徴とする請求項10に記載のニッケル配線の製造方法。 - 前記1回目の成膜の際の膜厚は、前記2回目の成膜の際の膜厚よりも小さいことを特徴とする請求項11に記載のニッケル配線の製造方法。
- 前記2回目の成膜の際の還元ガスのNH3ガスとH2ガスとの流量比率であるNH3/H2比の値は、前記1回目の成膜の際のNH3/H2比の値よりも小さいことを特徴とする請求項11または請求項12に記載のニッケル配線の製造方法。
- 前記ニッケル膜の成膜に先立って、前記ニッケル膜の下地をエッチバックして、前記凹部の間口を広げることを特徴とする請求項1から請求項13のいずれか1項に記載のニッケル配線の製造方法。
- 前記アニールの後、全面を研磨して、前記凹部以外の表面の膜を除去する研磨工程をさらに有することを特徴とする請求項1から請求項14のいずれか1項に記載のニッケル配線の製造方法。
- 前記研磨工程に先立って、前記ニッケル膜の上にニッケル膜からなる積み増し層を形成する工程をさらに有することを特徴とする請求項15に記載のニッケル配線の製造方法。
- コンピュータ上で動作し、ニッケル配線製造システムを制御するためのプログラムが記憶された記憶媒体であって、前記プログラムは、実行時に、請求項1から請求項16のいずれかのニッケル配線の製造方法が行われるように、コンピュータに前記ニッケル配線製造システムを制御させることを特徴とする記憶媒体。
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