JP2018049896A - プラズマ処理方法 - Google Patents
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- H01J37/32—Gas-filled discharge tubes
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02046—Dry cleaning only
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
- H01L21/02315—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
- H01L21/0234—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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Abstract
【解決手段】本発明は、金属製の処理室にて試料をプラズマエッチングするプラズマ処理方法において、プラズマを用いて前記試料をエッチングし、前記試料のエッチング後、前記処理室をプラズマクリーニングし、前記プラズマクリーニング後、SとOを含有する単ガスを用いて前記処理室をプラズマ処理することを特徴とする。
【選択図】図2
Description
次に本発明の一実施例であるプラズマ処理方法について図2を参照しながら説明する。
104:電磁石 106:処理室
107:ガス導入 111:VHF放射アンテナ
112:シャワープレート 113:ウエハ
116:ウエハステージ 117:第二の整合器
119:RFバイアス電源
Claims (4)
- 金属製の処理室にて試料をプラズマエッチングするプラズマ処理方法において、
プラズマを用いて前記試料をエッチングし、
前記試料のエッチング後、前記処理室をプラズマクリーニングし、
前記プラズマクリーニング後、SとOを含有する単ガスを用いて前記処理室をプラズマ処理することを特徴とするプラズマ処理方法。 - 請求項1に記載のプラズマ処理方法において、
前記SとOを含有する単ガスは、COSガスまたはSO2ガスであることを特徴とするプラズマ処理方法。 - 請求項1に記載のプラズマ処理方法において、
前記試料のエッチング前に前記SとOを含有する単がスを用いたプラズマ処理をさらに行うことを特徴とするプラズマ処理方法。 - 請求項1に記載のプラズマ処理方法において、
前記プラズマクリーニングは、シリコンを含有する膜を除去するプラズマクリーニング、炭素を含有する膜を除去するプラズマクリーニング、金属を含有する膜を除去するプラズマクリーニングを含むことを特徴とするプラズマ処理方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016183621A JP6609535B2 (ja) | 2016-09-21 | 2016-09-21 | プラズマ処理方法 |
KR1020170000105A KR101953149B1 (ko) | 2016-09-21 | 2017-01-02 | 플라스마 처리 방법 |
TW106102449A TWI650813B (zh) | 2016-09-21 | 2017-01-23 | 電漿處理方法 |
US15/443,488 US10056236B2 (en) | 2016-09-21 | 2017-02-27 | Plasma processing method |
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JP2016183621A JP6609535B2 (ja) | 2016-09-21 | 2016-09-21 | プラズマ処理方法 |
Publications (2)
Publication Number | Publication Date |
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JP2018049896A true JP2018049896A (ja) | 2018-03-29 |
JP6609535B2 JP6609535B2 (ja) | 2019-11-20 |
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JP2016183621A Active JP6609535B2 (ja) | 2016-09-21 | 2016-09-21 | プラズマ処理方法 |
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US (1) | US10056236B2 (ja) |
JP (1) | JP6609535B2 (ja) |
KR (1) | KR101953149B1 (ja) |
TW (1) | TWI650813B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108878319A (zh) * | 2018-06-22 | 2018-11-23 | 武汉新芯集成电路制造有限公司 | 一种旋转蚀刻装置及湿法刻蚀机台 |
WO2020050124A1 (ja) * | 2018-09-05 | 2020-03-12 | 株式会社Kokusai Electric | クリーニング方法、半導体装置の製造方法、プログラムおよび基板処理装置 |
WO2022249964A1 (ja) * | 2021-05-25 | 2022-12-01 | 東京エレクトロン株式会社 | クリーニング方法およびプラズマ処理方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6845773B2 (ja) * | 2017-09-15 | 2021-03-24 | 株式会社日立ハイテク | プラズマ処理方法 |
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2016
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2017
- 2017-01-02 KR KR1020170000105A patent/KR101953149B1/ko active IP Right Grant
- 2017-01-23 TW TW106102449A patent/TWI650813B/zh active
- 2017-02-27 US US15/443,488 patent/US10056236B2/en active Active
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CN108878319A (zh) * | 2018-06-22 | 2018-11-23 | 武汉新芯集成电路制造有限公司 | 一种旋转蚀刻装置及湿法刻蚀机台 |
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WO2022249964A1 (ja) * | 2021-05-25 | 2022-12-01 | 東京エレクトロン株式会社 | クリーニング方法およびプラズマ処理方法 |
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Publication number | Publication date |
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TW201812897A (zh) | 2018-04-01 |
TWI650813B (zh) | 2019-02-11 |
JP6609535B2 (ja) | 2019-11-20 |
US20180082825A1 (en) | 2018-03-22 |
KR101953149B1 (ko) | 2019-02-28 |
US10056236B2 (en) | 2018-08-21 |
KR20180032153A (ko) | 2018-03-29 |
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