JP2018047632A - インクジェットヘッドおよびインクジェットヘッドの製造方法 - Google Patents
インクジェットヘッドおよびインクジェットヘッドの製造方法 Download PDFInfo
- Publication number
- JP2018047632A JP2018047632A JP2016185119A JP2016185119A JP2018047632A JP 2018047632 A JP2018047632 A JP 2018047632A JP 2016185119 A JP2016185119 A JP 2016185119A JP 2016185119 A JP2016185119 A JP 2016185119A JP 2018047632 A JP2018047632 A JP 2018047632A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- piezoelectric body
- inkjet head
- groove
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title description 5
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 230000010287 polarization Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 6
- 238000009413 insulation Methods 0.000 abstract description 2
- 239000000976 ink Substances 0.000 description 158
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 27
- 238000000605 extraction Methods 0.000 description 21
- 239000010931 gold Substances 0.000 description 17
- 230000001681 protective effect Effects 0.000 description 15
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 13
- 229910052737 gold Inorganic materials 0.000 description 13
- 229910052759 nickel Inorganic materials 0.000 description 12
- 229920001721 polyimide Polymers 0.000 description 12
- 239000010410 layer Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 230000002093 peripheral effect Effects 0.000 description 11
- 239000004642 Polyimide Substances 0.000 description 9
- 238000004070 electrodeposition Methods 0.000 description 8
- 230000003068 static effect Effects 0.000 description 7
- 210000000078 claw Anatomy 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 238000005868 electrolysis reaction Methods 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 238000011084 recovery Methods 0.000 description 6
- -1 Polyparaxylylene Polymers 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229920006332 epoxy adhesive Polymers 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229920000052 poly(p-xylylene) Polymers 0.000 description 4
- 238000007772 electroless plating Methods 0.000 description 3
- 239000009719 polyimide resin Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000004323 axial length Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
- B41J2/03—Ink jet characterised by the jet generation process generating a continuous ink jet by pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14362—Assembling elements of heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/22—Manufacturing print heads
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
図1は、実施形態のインクジェットヘッド(1A、1B、1C、1D)を搭載したインクジェットプリンタ100の断面を示している。インクジェットヘッド1A乃至1D(印字部109)は、シアン、マゼンタ、イエロー、ブラックのインクを吐出させ、インクジェットプリンタ100の外部から入力された画像信号に応じて記録媒体S(用紙)上に画像を記録する。
前記基板とノズルプレートの間に設けられ、傾斜面と、傾斜面を横切る複数の溝とを有する圧電体と、圧電体の頂部および傾斜面から離間して圧電体の溝の内面に形成された導電膜と、導電膜を覆う絶縁膜とを有するインクジェットヘッドになっている。すなわち、圧電体に形成された直角部近傍に導電膜を形成しないようにしている。
第2の実施形態では、インクジェットヘッド1の構成は、第1の実施形態と同じである。異なる点は、電極膜260の形成方法が異なっている。
基板と、
インクを吐出するノズルを有するノズルプレートと、
前記基板とノズルプレートの間に設けられ、第1の面は第1の方向において第1の幅を有し前記第1の面に対向する第2の面は前記第1の方向において前記第1の幅より広い第2の幅を有し、かつ前記第1の面の辺から前記第2の面の辺へ繋がる傾斜面と、前記第1の方向に形成され前記傾斜面を横切る複数の溝とを有する圧電体と、
前記第1の面および前記傾斜面から離間し、前記圧電体の溝の内面に形成された導電膜と、
前記導電膜を覆う絶縁膜と、を備えるインクジェットヘッドと、
前記インクジェットヘッドへインクを供給し、前記溝を通して前記ノズルから吐出しなかったインクを回収し、再びインクをインクジェットヘッドへ供給するインク循環装置と、
前記インクジェットヘッドによって画像を形成する記録媒体を搬送する搬送装置と、を備えるインクジェットプリンタ。
100 インクジェットプリンタ
120 インク循環装置
200 インク吐出部
201 マニホールド
202 基板
203 枠部材
204 ノズルプレート
251 第1圧電体
252 第2圧電体
255 傾斜面
260 電極膜
300 回路モジュール
400 カバー
Claims (5)
- 第1の面と第1の面に対向する第2の面を有する圧電体の第2の面を基板に固定する工程と、
前記第1の面より広い第2の面を形成するように、前記第1の面と第2の面に跨る傾斜面を前記圧電体に作成する工程と、
前記圧電体の傾斜面を横切る溝を形成する工程と、
前記溝の内面に導電膜を形成する工程と、
前記溝における前記第1の面および前記傾斜面の辺から、前記導電膜の端部が離間するように、前記導電膜を除去する工程と、
前記導電膜上に絶縁膜を形成する工程と、を含むインクジェットヘッドの製造方法。 - 基板と、
インクを吐出するノズルを有するノズルプレートと、
前記基板とノズルプレートの間に設けられ、第1の面は第1の方向において第1の幅を有し、前記第1の面に対向する第2の面は前記第1の方向において前記第1の幅より広い第2の幅を有し、かつ前記第1の面の辺から前記第2の面の辺へ繋がる傾斜面と、前記第1の方向に形成され前記傾斜面を横切る複数の溝とを有する圧電体と、
端部が、前記第1の面および前記傾斜面から離間し、かつ前記圧電体の溝の内面に形成された導電膜と、
前記導電膜を覆う絶縁膜と、を備えるインクジェットヘッド。 - 前記圧電体は、前記第1の方向に直交する第2の方向に分極された第1の圧電体と、前記第1の圧電体の分極方向と反対方向に分極された第2の圧電体の積層体になっている請求項2記載のインクジェットヘッド。
- 二つの前記溝によって挟まれた前記圧電体の一方の壁面に形成され、前記端部が前記第1の面および前記傾斜面から離間している電極面積は、前記壁面全体の面積の、90%から99%の範囲である請求項2または3記載のインクジェットヘッド。
- 前記絶縁膜は複数の絶縁層で形成されている請求項2乃至4の1項記載のインクジェットヘッド。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016185119A JP6869675B2 (ja) | 2016-09-23 | 2016-09-23 | インクジェットヘッドおよびインクジェットヘッドの製造方法 |
CN201710728419.2A CN107867075B (zh) | 2016-09-23 | 2017-08-22 | 喷墨头的制造方法、喷墨头以及喷墨记录装置 |
US15/694,928 US10081179B2 (en) | 2016-09-23 | 2017-09-04 | Inkjet head and method for manufacturing inkjet head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016185119A JP6869675B2 (ja) | 2016-09-23 | 2016-09-23 | インクジェットヘッドおよびインクジェットヘッドの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018047632A true JP2018047632A (ja) | 2018-03-29 |
JP6869675B2 JP6869675B2 (ja) | 2021-05-12 |
Family
ID=61687160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016185119A Active JP6869675B2 (ja) | 2016-09-23 | 2016-09-23 | インクジェットヘッドおよびインクジェットヘッドの製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10081179B2 (ja) |
JP (1) | JP6869675B2 (ja) |
CN (1) | CN107867075B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020082492A (ja) * | 2018-11-22 | 2020-06-04 | 東芝テック株式会社 | インクジェットヘッド及びインクジェット装置 |
JP7110126B2 (ja) * | 2019-01-10 | 2022-08-01 | 東芝テック株式会社 | インクジェットヘッド、インクジェット装置、及びインクジェットヘッドの製造方法 |
JP2023088371A (ja) * | 2021-12-15 | 2023-06-27 | 東芝テック株式会社 | 液体吐出ヘッド |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6254819B1 (en) * | 1999-07-16 | 2001-07-03 | Eastman Kodak Company | Forming channel members for ink jet printheads |
JP2012096525A (ja) * | 2010-10-06 | 2012-05-24 | Toshiba Tec Corp | インクジェットヘッド及びインクジェットヘッドの製造方法 |
JP2014168963A (ja) * | 2014-05-23 | 2014-09-18 | Toshiba Tec Corp | インクジェットヘッド |
CN104417065A (zh) * | 2013-09-10 | 2015-03-18 | 珠海纳思达企业管理有限公司 | 喷墨头制造方法、喷墨头及打印设备 |
JP2015051569A (ja) * | 2013-09-06 | 2015-03-19 | 株式会社東芝 | インクジェットヘッドおよびその製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4077344B2 (ja) * | 2003-03-11 | 2008-04-16 | シャープ株式会社 | インクジェットヘッド、インクジェットヘッドモジュール及びその製造方法 |
US7348715B2 (en) * | 2004-01-27 | 2008-03-25 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric element and method for manufacturing the same, and ink jet head and ink jet recording apparatus using the piezoelectric element |
JP5563354B2 (ja) * | 2010-04-01 | 2014-07-30 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッド及び液体噴射装置 |
JP5743076B2 (ja) * | 2011-04-06 | 2015-07-01 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
JP6163782B2 (ja) * | 2013-02-26 | 2017-07-19 | セイコーエプソン株式会社 | 配線構造体、配線構造体の製造方法、液滴吐出ヘッドおよび液滴吐出装置 |
JP2015027789A (ja) * | 2013-07-04 | 2015-02-12 | 株式会社リコー | アクチュエータ、アクチュエータの製造方法、液滴吐出ヘッド、液体カートリッジ、インクジェット記録装置、マイクロポンプ |
JP2015217571A (ja) * | 2014-05-16 | 2015-12-07 | セイコーエプソン株式会社 | 配線実装構造及びその製造方法、並びに液体噴射ヘッド及び液体噴射装置 |
JP6456049B2 (ja) * | 2014-06-16 | 2019-01-23 | キヤノン株式会社 | 貫通基板の形成方法 |
JP6314062B2 (ja) * | 2014-08-28 | 2018-04-18 | セイコーインスツル株式会社 | 液体噴射ヘッドの製造方法及び液体噴射装置 |
JP6302401B2 (ja) * | 2014-12-04 | 2018-03-28 | 株式会社東芝 | インクジェットヘッドおよびプリンタ |
-
2016
- 2016-09-23 JP JP2016185119A patent/JP6869675B2/ja active Active
-
2017
- 2017-08-22 CN CN201710728419.2A patent/CN107867075B/zh active Active
- 2017-09-04 US US15/694,928 patent/US10081179B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6254819B1 (en) * | 1999-07-16 | 2001-07-03 | Eastman Kodak Company | Forming channel members for ink jet printheads |
JP2012096525A (ja) * | 2010-10-06 | 2012-05-24 | Toshiba Tec Corp | インクジェットヘッド及びインクジェットヘッドの製造方法 |
JP2015051569A (ja) * | 2013-09-06 | 2015-03-19 | 株式会社東芝 | インクジェットヘッドおよびその製造方法 |
CN104417065A (zh) * | 2013-09-10 | 2015-03-18 | 珠海纳思达企业管理有限公司 | 喷墨头制造方法、喷墨头及打印设备 |
JP2014168963A (ja) * | 2014-05-23 | 2014-09-18 | Toshiba Tec Corp | インクジェットヘッド |
Also Published As
Publication number | Publication date |
---|---|
CN107867075A (zh) | 2018-04-03 |
US20180086072A1 (en) | 2018-03-29 |
CN107867075B (zh) | 2019-11-05 |
JP6869675B2 (ja) | 2021-05-12 |
US10081179B2 (en) | 2018-09-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6894217B2 (ja) | 液体噴射装置 | |
JP6935174B2 (ja) | インクジェットヘッドおよびインクジェットプリンタ | |
JP2009196329A (ja) | 液体噴射ヘッドの製造方法 | |
US9365039B2 (en) | Liquid jet head, method for manufacturing liquid jet head, and liquid jet apparatus | |
JP2017193108A (ja) | インクジェットヘッド及びインクジェット記録装置 | |
JP6266460B2 (ja) | インクジェットヘッドとインクジェット記録装置 | |
JP6869675B2 (ja) | インクジェットヘッドおよびインクジェットヘッドの製造方法 | |
JP5899139B2 (ja) | インクジェットヘッドおよびインクジェット記録装置 | |
JP2011056922A (ja) | 液体吐出ヘッド及び画像形成装置 | |
KR101972256B1 (ko) | Mems 디바이스, 헤드 및 액체 분사 장치 | |
US9375922B2 (en) | Method of manufacturing liquid jet head | |
JP3942118B2 (ja) | インクジェット記録装置及びインクジェットヘッド | |
JP2018043435A (ja) | インクジェットヘッド | |
JP2015189031A (ja) | インクジェットヘッド、インクジェット記録装置およびインクジェットヘッドの製造方法 | |
US20130342611A1 (en) | Liquid discharge head | |
CN111204127B (zh) | 液体喷出头以及液体喷出装置 | |
JP2007076129A (ja) | 液滴吐出ヘッド、記録液カートリッジ及び画像形成装置 | |
JP2018043434A (ja) | インクジェットヘッド | |
JP2014151623A (ja) | 圧電アクチュエータ装置、液滴吐出ヘッド、インクカートリッジ及び画像形成装置 | |
JP7193334B2 (ja) | ヘッドチップ、液体噴射ヘッド、液体噴射記録装置およびヘッドチップの製造方法 | |
JP6977131B2 (ja) | インクジェットヘッド及びインクジェット記録装置 | |
JP2007015341A (ja) | 液滴吐出ヘッド及びその製造方法、並びに液滴吐出装置 | |
JP2008012703A (ja) | 液滴吐出ヘッド、液滴吐出装置及び液滴吐出ヘッドの製造方法 | |
JP2017185705A (ja) | インクジェットヘッド記録装置 | |
JP2016124119A (ja) | 液体吐出装置及び液体吐出装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190827 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200717 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200824 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201021 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210405 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210414 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6869675 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |