JP6935174B2 - インクジェットヘッドおよびインクジェットプリンタ - Google Patents
インクジェットヘッドおよびインクジェットプリンタ Download PDFInfo
- Publication number
- JP6935174B2 JP6935174B2 JP2016154887A JP2016154887A JP6935174B2 JP 6935174 B2 JP6935174 B2 JP 6935174B2 JP 2016154887 A JP2016154887 A JP 2016154887A JP 2016154887 A JP2016154887 A JP 2016154887A JP 6935174 B2 JP6935174 B2 JP 6935174B2
- Authority
- JP
- Japan
- Prior art keywords
- ink
- voltage
- pressure chamber
- inkjet head
- volume
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 claims description 36
- 239000011241 protective layer Substances 0.000 claims description 30
- 230000008859 change Effects 0.000 claims description 20
- 238000005452 bending Methods 0.000 claims description 8
- 230000004044 response Effects 0.000 claims description 5
- 239000012528 membrane Substances 0.000 claims description 4
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 239000000976 ink Substances 0.000 description 171
- 239000010408 film Substances 0.000 description 81
- 230000005684 electric field Effects 0.000 description 30
- 239000010410 layer Substances 0.000 description 27
- 230000002093 peripheral effect Effects 0.000 description 21
- 238000000034 method Methods 0.000 description 17
- 229910052581 Si3N4 Inorganic materials 0.000 description 15
- 239000000463 material Substances 0.000 description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 15
- 239000010409 thin film Substances 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 230000010287 polarization Effects 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 210000000078 claw Anatomy 0.000 description 7
- 230000003068 static effect Effects 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 6
- 230000005499 meniscus Effects 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 230000008602 contraction Effects 0.000 description 4
- 235000012489 doughnuts Nutrition 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 230000004323 axial length Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910004243 O3-PbTiO3 Inorganic materials 0.000 description 1
- 229910004293 O3—PbTiO3 Inorganic materials 0.000 description 1
- 229910020215 Pb(Mg1/3Nb2/3)O3PbTiO3 Inorganic materials 0.000 description 1
- 229910003781 PbTiO3 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000334 poly[3-(3'-N,N,N-triethylamino-1-propyloxy)-4-methylthiophene-2,5-diyl hydrochloride] polymer Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04541—Specific driving circuit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04573—Timing; Delays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04581—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04588—Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04596—Non-ejecting pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/15—Moving nozzle or nozzle plate
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
従来のインクジェットヘッドとして、インク圧力室が形成された基板と、基板に積層された振動板と、振動板上に作られた圧電素子を有する構成が知られている。薄膜の圧電体は、長時間高い電圧が印加され続けると、劣化する傾向がある。圧電体の劣化はインクジェットヘッドの寿命を短くすることになる。
図1は、実施形態のインクジェットヘッド(1A、1B、1C、1D)を搭載したインクジェットプリンタ100の断面を示している。インクジェットヘッド1A乃至1D(印字部109)は、シアン、マゼンタ、イエロー、ブラックのインクを吐出させ、インクジェットプリンタ100の外部から入力された画像信号に応じて記録媒体S(用紙)上に画像を記録する。
図7を参照し、第2実施形態のインクジェットヘッド1を説明する。図7はインクジェットヘッド1をインク吐出面側から見た図になっている。アクチュエータ5がインク吐出面側から見て、長方形になっている。圧力室20の横寸法X2は120μm、縦寸法Y2は240μmになっている。圧電素子は横100μm、縦220μmになっている。圧電素子35の中央に直径20μmのノズル7が形成されている。断面の構造は図4に記載した構造と同じである。また、インクジェットプリンタ1の構造も図1の構造と同じである。
図8、9を参照し、第3実施形態のインクジェットヘッド1を説明する。なお、インクジェットプリンタ1の構造は図1の構造と同じである。
2 アクチェータ基板
3 駆動IC
4 インク供給部材
5 アクチュエータ
6 インク供給口
7 ノズル
11 個別電極
12 共通電極
13 振動板
14 下部電極
15 圧電体薄膜
16 上部電極
17 絶縁層
32 コンタクトホール
100 インクジェットプリンタ
102 給紙カセット
103 排紙トレイ
105 保持ドラム
112 インク供給装置
113 インクタンク
Claims (5)
- インクを吐出するノズルに連通する圧力室が形成された基板と、
前記ノズルが設けられ、前記圧力室の容積を変化させインクに圧力変化を発生させる容積可変板と、
前記容積可変板と前記圧力室の間に設けられ、外部から供給される電気信号に応じて、伸縮する圧電体膜と、
待機時は前記圧電体膜を面内方向に収縮させる前の0Vで、インク吐出時は前記0Vより大きい第1の電圧に変化して前記圧電体膜を面内方向に収縮させて、前記圧力室の容積を拡大させ、前記圧力室の容積を拡大させた後に待機時の0Vに変化する前記電気信号を発生する駆動回路と、
を備えるインクジェットヘッド。 - 前記圧電体膜と前記圧力室間に保護層を備え、前記容積可変板の曲げ剛性が、前記保護層の曲げ剛性よりも大きい請求項1記載のインクジェットヘッド。
- 前記電気信号は、正極性または負極性の単極電圧である請求項1または2項記載のインクジェットヘッド。
- 前記電気信号は、前記第1の電圧に変化した後、前記第1の電圧と同極性で前記第1の電圧より低い第2の電圧に変化し、前記第2の電圧に変化した後に0Vに変化する請求項1乃至3の1項記載のインクジェットヘッド。
- 請求項1乃至4のいずれか一項に記載のインクジェットヘッドと、
記録媒体を前記ノズルに対向する位置へ搬送する搬送機構と、を有するインクジェットプリンタ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016154887A JP6935174B2 (ja) | 2016-08-05 | 2016-08-05 | インクジェットヘッドおよびインクジェットプリンタ |
CN201710475819.7A CN107685538B (zh) | 2016-08-05 | 2017-06-21 | 喷墨头 |
US15/641,915 US10226922B2 (en) | 2016-08-05 | 2017-07-05 | Ink jet head having prolonged lifetime |
EP17183071.4A EP3278989A1 (en) | 2016-08-05 | 2017-07-25 | Ink jet head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016154887A JP6935174B2 (ja) | 2016-08-05 | 2016-08-05 | インクジェットヘッドおよびインクジェットプリンタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018020537A JP2018020537A (ja) | 2018-02-08 |
JP6935174B2 true JP6935174B2 (ja) | 2021-09-15 |
Family
ID=59399350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016154887A Active JP6935174B2 (ja) | 2016-08-05 | 2016-08-05 | インクジェットヘッドおよびインクジェットプリンタ |
Country Status (4)
Country | Link |
---|---|
US (1) | US10226922B2 (ja) |
EP (1) | EP3278989A1 (ja) |
JP (1) | JP6935174B2 (ja) |
CN (1) | CN107685538B (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6778121B2 (ja) | 2017-01-25 | 2020-10-28 | 東芝テック株式会社 | 液体噴射装置、液体噴射装置の駆動方法、および液体供給装置 |
JP7149765B2 (ja) * | 2018-08-10 | 2022-10-07 | 東芝テック株式会社 | 薬液吐出装置 |
JP2020032580A (ja) | 2018-08-28 | 2020-03-05 | 東芝テック株式会社 | 液体吐出装置及びマルチノズル液体吐出装置 |
JP7163108B2 (ja) * | 2018-08-28 | 2022-10-31 | 東芝テック株式会社 | 液体吐出装置及び駆動タイミング決定方法 |
JP7159018B2 (ja) * | 2018-11-22 | 2022-10-24 | 東芝テック株式会社 | 液体吐出ヘッド、及び液体吐出装置 |
JP2020116792A (ja) * | 2019-01-22 | 2020-08-06 | 東芝テック株式会社 | 液体吐出ヘッド、及び液体吐出装置 |
JP7163233B2 (ja) * | 2019-03-26 | 2022-10-31 | 東芝テック株式会社 | 液体吐出装置 |
US11373947B2 (en) * | 2020-02-26 | 2022-06-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods of forming interconnect structures of semiconductor device |
JP2023000082A (ja) | 2021-06-17 | 2023-01-04 | 東芝テック株式会社 | インクジェットヘッド |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5828394A (en) * | 1995-09-20 | 1998-10-27 | The Board Of Trustees Of The Leland Stanford Junior University | Fluid drop ejector and method |
JP2000127390A (ja) * | 1998-10-30 | 2000-05-09 | Nec Corp | インクジェット記録ヘッドの駆動方法 |
JP3223892B2 (ja) * | 1998-11-25 | 2001-10-29 | 日本電気株式会社 | インクジェット式記録装置及びインクジェット式記録方法 |
JP2002001952A (ja) * | 2000-06-20 | 2002-01-08 | Matsushita Electric Ind Co Ltd | インクジェットヘッド及びインクジェット式記録装置 |
JP3956950B2 (ja) * | 2004-03-30 | 2007-08-08 | 富士フイルム株式会社 | 吐出ヘッド駆動方法及び吐出ヘッド製造方法並びに液吐出装置 |
JP4730531B2 (ja) * | 2005-09-13 | 2011-07-20 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
KR100738117B1 (ko) * | 2006-07-06 | 2007-07-12 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트헤드 |
JP2011177963A (ja) | 2010-02-26 | 2011-09-15 | Seiko Epson Corp | 液体吐出装置、及び、液体吐出装置の制御方法 |
JP2012124190A (ja) * | 2010-12-06 | 2012-06-28 | Ricoh Co Ltd | 圧電素子及びこの圧電素子を用いたインクジェットヘッド及びこのインクジェットヘッドを用いたインクジェットプリンター |
JP2012187864A (ja) * | 2011-03-11 | 2012-10-04 | Toshiba Tec Corp | インクジェットヘッド |
KR101846606B1 (ko) * | 2011-06-29 | 2018-04-06 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | 압전 잉크젯 다이 스택 |
JP5659198B2 (ja) | 2011-09-15 | 2015-01-28 | 東芝テック株式会社 | インクジェットヘッドおよびインクジェット記録装置 |
JP5560253B2 (ja) * | 2011-09-30 | 2014-07-23 | 富士フイルム株式会社 | インクジェット記録装置及び方法並びに異常ノズル検知方法 |
KR101328304B1 (ko) * | 2011-10-28 | 2013-11-14 | 삼성전기주식회사 | 잉크젯 프린트 헤드 조립체 |
JP5816646B2 (ja) * | 2013-03-13 | 2015-11-18 | 東芝テック株式会社 | インクジェットヘッドおよびインクジェット記録装置 |
JP2017001240A (ja) | 2015-06-08 | 2017-01-05 | 東芝テック株式会社 | インクジェットヘッド及びインクジェット記録装置 |
-
2016
- 2016-08-05 JP JP2016154887A patent/JP6935174B2/ja active Active
-
2017
- 2017-06-21 CN CN201710475819.7A patent/CN107685538B/zh active Active
- 2017-07-05 US US15/641,915 patent/US10226922B2/en active Active
- 2017-07-25 EP EP17183071.4A patent/EP3278989A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP3278989A1 (en) | 2018-02-07 |
US10226922B2 (en) | 2019-03-12 |
CN107685538B (zh) | 2019-11-05 |
US20180037023A1 (en) | 2018-02-08 |
JP2018020537A (ja) | 2018-02-08 |
CN107685538A (zh) | 2018-02-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6935174B2 (ja) | インクジェットヘッドおよびインクジェットプリンタ | |
EP3354461B1 (en) | Liquid injection apparatus, driving method of liquid injection apparatus and liquid supply apparatus | |
JP5115330B2 (ja) | 液体噴射ヘッドおよびそれを備えた液体噴射装置 | |
KR19980033257A (ko) | 잉크제트 기록장치와 그 제조방법 | |
US9914299B2 (en) | Inkjet head and inkjet recording apparatus | |
US9707756B2 (en) | Inkjet head and inkjet recording apparatus | |
US10137686B2 (en) | Ink jet head and ink jet apparatus having the same | |
EP3246163A1 (en) | Inkjet head and inkjet recording apparatus | |
US8757752B2 (en) | Method of controlling liquid ejection head, and liquid ejection device | |
JP2023164707A (ja) | 液体吐出ヘッド及び液体吐出装置 | |
US11602933B2 (en) | Liquid ejection head and liquid ejection apparatus | |
JP2005119044A (ja) | 液滴吐出ヘッド及び液滴吐出ヘッド製造方法並びに液滴吐出装置、電界発光表示パネル製造装置、マイクロアレイ製造装置及びカラーフィルタ製造装置 | |
JP2012213957A (ja) | 液体噴射ヘッド及びその製造方法 | |
US9481167B2 (en) | Liquid ejecting head and liquid ejecting apparatus | |
JP7458914B2 (ja) | 液体吐出ヘッド及びプリンタ | |
JP2011000738A (ja) | 画像形成装置 | |
US20060227180A1 (en) | Piezoelectric vibration plate | |
JP4688186B2 (ja) | 液滴吐出ヘッド、液体カートリッジ及び画像形成装置 | |
WO2016121849A1 (ja) | 液体吐出ヘッドおよびインクジェットプリンタ | |
JP2008173895A (ja) | 液体吐出ヘッド、液体吐出装置、画像形成装置及び静電型アクチュエータ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190719 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200622 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200629 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200825 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210112 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210312 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210802 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210825 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6935174 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |