JP2018037656A5 - - Google Patents
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- Publication number
- JP2018037656A5 JP2018037656A5 JP2017163358A JP2017163358A JP2018037656A5 JP 2018037656 A5 JP2018037656 A5 JP 2018037656A5 JP 2017163358 A JP2017163358 A JP 2017163358A JP 2017163358 A JP2017163358 A JP 2017163358A JP 2018037656 A5 JP2018037656 A5 JP 2018037656A5
- Authority
- JP
- Japan
- Prior art keywords
- spacer
- passivation
- etching
- nitride
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 29
- 125000006850 spacer group Chemical group 0.000 claims 26
- 238000002161 passivation Methods 0.000 claims 12
- 238000001020 plasma etching Methods 0.000 claims 9
- 238000005530 etching Methods 0.000 claims 8
- 239000000463 material Substances 0.000 claims 8
- 150000004767 nitrides Chemical class 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- 238000007493 shaping process Methods 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000010703 silicon Substances 0.000 claims 4
- 229910003481 amorphous carbon Inorganic materials 0.000 claims 3
- 229910052799 carbon Inorganic materials 0.000 claims 3
- 229920002120 photoresistant polymer Polymers 0.000 claims 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 229910044991 metal oxide Inorganic materials 0.000 claims 2
- 150000004706 metal oxides Chemical class 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000005669 field effect Effects 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662382110P | 2016-08-31 | 2016-08-31 | |
| US62/382,110 | 2016-08-31 | ||
| US15/486,928 | 2017-04-13 | ||
| US15/486,928 US10453686B2 (en) | 2016-08-31 | 2017-04-13 | In-situ spacer reshaping for self-aligned multi-patterning methods and systems |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018037656A JP2018037656A (ja) | 2018-03-08 |
| JP2018037656A5 true JP2018037656A5 (enExample) | 2020-10-01 |
| JP6779846B2 JP6779846B2 (ja) | 2020-11-04 |
Family
ID=61243201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017163358A Active JP6779846B2 (ja) | 2016-08-31 | 2017-08-28 | セルフアライン式マルチパターニングのためのその場スペーサ再整形方法及びシステム |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10453686B2 (enExample) |
| JP (1) | JP6779846B2 (enExample) |
| KR (1) | KR102250213B1 (enExample) |
| CN (1) | CN107799458B (enExample) |
| TW (1) | TWI728178B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10340149B2 (en) * | 2017-09-05 | 2019-07-02 | Nanya Technology Corporation | Method of forming dense hole patterns of semiconductor devices |
| US10163635B1 (en) * | 2017-10-30 | 2018-12-25 | Globalfoundries Inc. | Asymmetric spacer for preventing epitaxial merge between adjacent devices of a semiconductor and related method |
| US10439047B2 (en) * | 2018-02-14 | 2019-10-08 | Applied Materials, Inc. | Methods for etch mask and fin structure formation |
| US10340136B1 (en) * | 2018-07-19 | 2019-07-02 | Lam Research Corporation | Minimization of carbon loss in ALD SiO2 deposition on hardmask films |
| KR102939729B1 (ko) | 2018-11-16 | 2026-03-13 | 램 리써치 코포레이션 | 기포 결함 감소 |
| US11551930B2 (en) * | 2018-12-12 | 2023-01-10 | Tokyo Electron Limited | Methods to reshape spacer profiles in self-aligned multiple patterning |
| JP7145819B2 (ja) * | 2019-06-24 | 2022-10-03 | 東京エレクトロン株式会社 | エッチング方法 |
| TWI730821B (zh) * | 2020-06-22 | 2021-06-11 | 力晶積成電子製造股份有限公司 | 多重圖案化方法 |
| US12451353B2 (en) | 2022-08-03 | 2025-10-21 | Tokyo Electron Limited | Double hardmasks for self-aligned multi-patterning processes |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7291560B2 (en) * | 2005-08-01 | 2007-11-06 | Infineon Technologies Ag | Method of production pitch fractionizations in semiconductor technology |
| US7265059B2 (en) * | 2005-09-30 | 2007-09-04 | Freescale Semiconductor, Inc. | Multiple fin formation |
| KR20080059429A (ko) * | 2005-10-05 | 2008-06-27 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 게이트 스페이서 산화물 재료를 선택적으로 에칭하기 위한조성물 및 방법 |
| US8298949B2 (en) * | 2009-01-07 | 2012-10-30 | Lam Research Corporation | Profile and CD uniformity control by plasma oxidation treatment |
| CN102428544B (zh) * | 2009-05-20 | 2014-10-29 | 株式会社东芝 | 凹凸图案形成方法 |
| KR101105508B1 (ko) * | 2009-12-30 | 2012-01-13 | 주식회사 하이닉스반도체 | 반도체 메모리 소자의 제조 방법 |
| US8962484B2 (en) * | 2011-12-16 | 2015-02-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of forming pattern for semiconductor device |
| KR101644732B1 (ko) * | 2012-04-11 | 2016-08-01 | 도쿄엘렉트론가부시키가이샤 | Finfet 방식용 게이트 스페이서 프로파일, 핀 손실 및 하드 마스크 손실 개선을 위한 종횡비 종속 성막 |
| WO2014197324A1 (en) | 2013-06-04 | 2014-12-11 | Tokyo Electron Limited | Mitigation of asymmetrical profile in self aligned patterning etch |
| JP6026375B2 (ja) * | 2013-09-02 | 2016-11-16 | 株式会社東芝 | 半導体装置の製造方法 |
| US9165770B2 (en) * | 2013-09-26 | 2015-10-20 | GlobalFoundries, Inc. | Methods for fabricating integrated circuits using improved masks |
| US9287262B2 (en) * | 2013-10-10 | 2016-03-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Passivated and faceted for fin field effect transistor |
| US9184058B2 (en) * | 2013-12-23 | 2015-11-10 | Micron Technology, Inc. | Methods of forming patterns by using a brush layer and masks |
| US9293341B2 (en) | 2014-03-13 | 2016-03-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Mechanisms for forming patterns using multiple lithography processes |
| US9633907B2 (en) * | 2014-05-28 | 2017-04-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Self-aligned nanowire formation using double patterning |
| US9484201B2 (en) * | 2015-02-23 | 2016-11-01 | International Business Machines Corporation | Epitaxial silicon germanium fin formation using sacrificial silicon fin templates |
| US9530646B2 (en) * | 2015-02-24 | 2016-12-27 | United Microelectronics Corp. | Method of forming a semiconductor structure |
| US9640409B1 (en) * | 2016-02-02 | 2017-05-02 | Lam Research Corporation | Self-limited planarization of hardmask |
-
2017
- 2017-04-13 US US15/486,928 patent/US10453686B2/en active Active
- 2017-08-28 JP JP2017163358A patent/JP6779846B2/ja active Active
- 2017-08-29 TW TW106129280A patent/TWI728178B/zh active
- 2017-08-30 KR KR1020170110261A patent/KR102250213B1/ko active Active
- 2017-08-30 CN CN201710763389.9A patent/CN107799458B/zh active Active
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