JP2017533831A5 - - Google Patents

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Publication number
JP2017533831A5
JP2017533831A5 JP2017520355A JP2017520355A JP2017533831A5 JP 2017533831 A5 JP2017533831 A5 JP 2017533831A5 JP 2017520355 A JP2017520355 A JP 2017520355A JP 2017520355 A JP2017520355 A JP 2017520355A JP 2017533831 A5 JP2017533831 A5 JP 2017533831A5
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JP
Japan
Prior art keywords
polishing pad
additive
precursor material
layers
layer
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JP2017520355A
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English (en)
Japanese (ja)
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JP6703985B2 (ja
JP2017533831A (ja
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Priority claimed from PCT/US2015/056021 external-priority patent/WO2016061506A1/en
Publication of JP2017533831A publication Critical patent/JP2017533831A/ja
Publication of JP2017533831A5 publication Critical patent/JP2017533831A5/ja
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JP2017520355A 2014-10-17 2015-10-16 印刷による化学機械研磨パッド Active JP6703985B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201462065190P 2014-10-17 2014-10-17
US62/065,190 2014-10-17
US201462066291P 2014-10-20 2014-10-20
US62/066,291 2014-10-20
PCT/US2015/056021 WO2016061506A1 (en) 2014-10-17 2015-10-16 Printed chemical mechanical polishing pad

Publications (3)

Publication Number Publication Date
JP2017533831A JP2017533831A (ja) 2017-11-16
JP2017533831A5 true JP2017533831A5 (enExample) 2018-11-29
JP6703985B2 JP6703985B2 (ja) 2020-06-03

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JP2017520355A Active JP6703985B2 (ja) 2014-10-17 2015-10-16 印刷による化学機械研磨パッド

Country Status (6)

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US (2) US10322491B2 (enExample)
JP (1) JP6703985B2 (enExample)
KR (2) KR102426444B1 (enExample)
CN (1) CN107073677B (enExample)
TW (1) TWI689406B (enExample)
WO (1) WO2016061506A1 (enExample)

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CN110977801A (zh) * 2019-12-20 2020-04-10 中国科学院长春光学精密机械与物理研究所 一种沥青抛光盘制备装置
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