JP2015517922A5 - - Google Patents
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- Publication number
- JP2015517922A5 JP2015517922A5 JP2015508994A JP2015508994A JP2015517922A5 JP 2015517922 A5 JP2015517922 A5 JP 2015517922A5 JP 2015508994 A JP2015508994 A JP 2015508994A JP 2015508994 A JP2015508994 A JP 2015508994A JP 2015517922 A5 JP2015517922 A5 JP 2015517922A5
- Authority
- JP
- Japan
- Prior art keywords
- precursor
- layer
- layers
- polishing
- pad material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000005498 polishing Methods 0.000 claims 36
- 239000002243 precursor Substances 0.000 claims 36
- 239000000463 material Substances 0.000 claims 34
- 238000000034 method Methods 0.000 claims 11
- 238000000151 deposition Methods 0.000 claims 9
- 239000000843 powder Substances 0.000 claims 8
- 239000002245 particle Substances 0.000 claims 5
- 230000005855 radiation Effects 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 4
- 239000000178 monomer Substances 0.000 claims 4
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims 3
- 239000011230 binding agent Substances 0.000 claims 3
- 230000008021 deposition Effects 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 2
- 229910044991 metal oxide Inorganic materials 0.000 claims 2
- 150000004706 metal oxides Chemical class 0.000 claims 2
- 238000005507 spraying Methods 0.000 claims 2
- 239000003082 abrasive agent Substances 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 229910000420 cerium oxide Inorganic materials 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000011159 matrix material Substances 0.000 claims 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 238000003892 spreading Methods 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261638461P | 2012-04-25 | 2012-04-25 | |
| US61/638,461 | 2012-04-25 | ||
| US13/591,051 US9067299B2 (en) | 2012-04-25 | 2012-08-21 | Printed chemical mechanical polishing pad |
| US13/591,051 | 2012-08-21 | ||
| PCT/US2013/035513 WO2013162856A1 (en) | 2012-04-25 | 2013-04-05 | Printed chemical mechanical polishing pad |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017116092A Division JP6697419B2 (ja) | 2012-04-25 | 2017-06-13 | 印刷による化学機械研磨パッド |
| JP2017116093A Division JP6620125B2 (ja) | 2012-04-25 | 2017-06-13 | バッキング層および研磨層を有する印刷による化学機械研磨パッド |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015517922A JP2015517922A (ja) | 2015-06-25 |
| JP2015517922A5 true JP2015517922A5 (enExample) | 2016-06-02 |
| JP6180512B2 JP6180512B2 (ja) | 2017-08-16 |
Family
ID=49476099
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015508994A Active JP6180512B2 (ja) | 2012-04-25 | 2013-04-05 | 研磨剤粒子を有する印刷による化学機械研磨パッド |
| JP2017116093A Active JP6620125B2 (ja) | 2012-04-25 | 2017-06-13 | バッキング層および研磨層を有する印刷による化学機械研磨パッド |
| JP2017116092A Active JP6697419B2 (ja) | 2012-04-25 | 2017-06-13 | 印刷による化学機械研磨パッド |
| JP2019070349A Active JP6898379B2 (ja) | 2012-04-25 | 2019-04-02 | 印刷による化学機械研磨パッド |
Family Applications After (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017116093A Active JP6620125B2 (ja) | 2012-04-25 | 2017-06-13 | バッキング層および研磨層を有する印刷による化学機械研磨パッド |
| JP2017116092A Active JP6697419B2 (ja) | 2012-04-25 | 2017-06-13 | 印刷による化学機械研磨パッド |
| JP2019070349A Active JP6898379B2 (ja) | 2012-04-25 | 2019-04-02 | 印刷による化学機械研磨パッド |
Country Status (8)
| Country | Link |
|---|---|
| US (8) | US9067299B2 (enExample) |
| EP (2) | EP2842157B1 (enExample) |
| JP (4) | JP6180512B2 (enExample) |
| KR (6) | KR102344467B1 (enExample) |
| CN (2) | CN107030595B (enExample) |
| SG (2) | SG11201406448UA (enExample) |
| TW (7) | TWI795287B (enExample) |
| WO (1) | WO2013162856A1 (enExample) |
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