KR102426444B1 - 프린팅된 화학적 기계적 연마 패드 - Google Patents

프린팅된 화학적 기계적 연마 패드 Download PDF

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Publication number
KR102426444B1
KR102426444B1 KR1020177013087A KR20177013087A KR102426444B1 KR 102426444 B1 KR102426444 B1 KR 102426444B1 KR 1020177013087 A KR1020177013087 A KR 1020177013087A KR 20177013087 A KR20177013087 A KR 20177013087A KR 102426444 B1 KR102426444 B1 KR 102426444B1
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South Korea
Prior art keywords
polishing pad
additive material
additive
droplets
polishing
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KR1020177013087A
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Korean (ko)
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KR20170070177A (ko
Inventor
마헨드라 씨. 오릴랄
티모시 마이클슨
카시라만 크리쉬난
라지브 바자즈
나그 비. 파티반들라
다니엘 레드필드
프레드 씨. 레데커
그레고리 이. 멘크
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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Priority to KR1020227025793A priority Critical patent/KR102638128B1/ko
Publication of KR20170070177A publication Critical patent/KR20170070177A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0045—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by stacking sheets of abrasive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
KR1020177013087A 2014-10-17 2015-10-16 프린팅된 화학적 기계적 연마 패드 Active KR102426444B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020227025793A KR102638128B1 (ko) 2014-10-17 2015-10-16 프린팅된 화학적 기계적 연마 패드

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201462065190P 2014-10-17 2014-10-17
US62/065,190 2014-10-17
US201462066291P 2014-10-20 2014-10-20
US62/066,291 2014-10-20
PCT/US2015/056021 WO2016061506A1 (en) 2014-10-17 2015-10-16 Printed chemical mechanical polishing pad

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020227025793A Division KR102638128B1 (ko) 2014-10-17 2015-10-16 프린팅된 화학적 기계적 연마 패드

Publications (2)

Publication Number Publication Date
KR20170070177A KR20170070177A (ko) 2017-06-21
KR102426444B1 true KR102426444B1 (ko) 2022-07-29

Family

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KR1020177013087A Active KR102426444B1 (ko) 2014-10-17 2015-10-16 프린팅된 화학적 기계적 연마 패드
KR1020227025793A Active KR102638128B1 (ko) 2014-10-17 2015-10-16 프린팅된 화학적 기계적 연마 패드

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KR1020227025793A Active KR102638128B1 (ko) 2014-10-17 2015-10-16 프린팅된 화학적 기계적 연마 패드

Country Status (6)

Country Link
US (2) US10322491B2 (enExample)
JP (1) JP6703985B2 (enExample)
KR (2) KR102426444B1 (enExample)
CN (1) CN107073677B (enExample)
TW (1) TWI689406B (enExample)
WO (1) WO2016061506A1 (enExample)

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US10399201B2 (en) 2014-10-17 2019-09-03 Applied Materials, Inc. Advanced polishing pads having compositional gradients by use of an additive manufacturing process
US10821573B2 (en) 2014-10-17 2020-11-03 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
CN107078048B (zh) 2014-10-17 2021-08-13 应用材料公司 使用加成制造工艺的具复合材料特性的cmp衬垫建构
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
US10875145B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
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CN110977801A (zh) * 2019-12-20 2020-04-10 中国科学院长春光学精密机械与物理研究所 一种沥青抛光盘制备装置
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TW202419495A (zh) * 2022-06-15 2024-05-16 美商Ｃｍｃ材料有限責任公司 用於化學機械拋光墊之uv可固化樹脂
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Also Published As

Publication number Publication date
KR20220110333A (ko) 2022-08-05
CN107073677B (zh) 2020-05-15
TW201615389A (zh) 2016-05-01
US10322491B2 (en) 2019-06-18
TWI689406B (zh) 2020-04-01
US20190299357A1 (en) 2019-10-03
KR102638128B1 (ko) 2024-02-20
KR20170070177A (ko) 2017-06-21
CN107073677A (zh) 2017-08-18
WO2016061506A1 (en) 2016-04-21
JP2017533831A (ja) 2017-11-16
US20160107288A1 (en) 2016-04-21
JP6703985B2 (ja) 2020-06-03

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