CN107073677B - 打印化学机械研磨垫 - Google Patents

打印化学机械研磨垫 Download PDF

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Publication number
CN107073677B
CN107073677B CN201580056353.6A CN201580056353A CN107073677B CN 107073677 B CN107073677 B CN 107073677B CN 201580056353 A CN201580056353 A CN 201580056353A CN 107073677 B CN107073677 B CN 107073677B
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China
Prior art keywords
layer
polishing
polishing pad
abrasive
additive
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Application number
CN201580056353.6A
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English (en)
Chinese (zh)
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CN107073677A (zh
Inventor
M·C·奥里拉尔
T·麦克尔森
K·克里希南
R·巴贾杰
N·B·帕迪班德拉
D·莱德菲尔德
F·C·雷德克
G·E·孟克
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Applied Materials Inc
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Applied Materials Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0045—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by stacking sheets of abrasive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
CN201580056353.6A 2014-10-17 2015-10-16 打印化学机械研磨垫 Active CN107073677B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201462065190P 2014-10-17 2014-10-17
US62/065,190 2014-10-17
US201462066291P 2014-10-20 2014-10-20
US62/066,291 2014-10-20
PCT/US2015/056021 WO2016061506A1 (en) 2014-10-17 2015-10-16 Printed chemical mechanical polishing pad

Publications (2)

Publication Number Publication Date
CN107073677A CN107073677A (zh) 2017-08-18
CN107073677B true CN107073677B (zh) 2020-05-15

Family

ID=55747430

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580056353.6A Active CN107073677B (zh) 2014-10-17 2015-10-16 打印化学机械研磨垫

Country Status (6)

Country Link
US (2) US10322491B2 (enExample)
JP (1) JP6703985B2 (enExample)
KR (2) KR102638128B1 (enExample)
CN (1) CN107073677B (enExample)
TW (1) TWI689406B (enExample)
WO (1) WO2016061506A1 (enExample)

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CN113056496B (zh) * 2018-11-19 2023-09-08 应用材料公司 用于3d打印的低粘度uv可固化配方
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Also Published As

Publication number Publication date
TWI689406B (zh) 2020-04-01
KR102638128B1 (ko) 2024-02-20
JP6703985B2 (ja) 2020-06-03
KR102426444B1 (ko) 2022-07-29
US20190299357A1 (en) 2019-10-03
WO2016061506A1 (en) 2016-04-21
US20160107288A1 (en) 2016-04-21
CN107073677A (zh) 2017-08-18
US10322491B2 (en) 2019-06-18
KR20170070177A (ko) 2017-06-21
JP2017533831A (ja) 2017-11-16
TW201615389A (zh) 2016-05-01
KR20220110333A (ko) 2022-08-05

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