JP2017527955A - 多層構造のリチウム金属電極及びその製造方法 - Google Patents
多層構造のリチウム金属電極及びその製造方法 Download PDFInfo
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- 229910052744 lithium Inorganic materials 0.000 title claims abstract description 110
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 239000010410 layer Substances 0.000 claims abstract description 43
- 229910013189 LiBON Inorganic materials 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims abstract description 35
- BHZCMUVGYXEBMY-UHFFFAOYSA-N trilithium;azanide Chemical compound [Li+].[Li+].[Li+].[NH2-] BHZCMUVGYXEBMY-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000011241 protective layer Substances 0.000 claims abstract description 29
- 238000005546 reactive sputtering Methods 0.000 claims abstract description 19
- 239000010409 thin film Substances 0.000 claims description 49
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 18
- 239000000203 mixture Substances 0.000 claims description 14
- 239000007789 gas Substances 0.000 claims description 12
- 239000003792 electrolyte Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 11
- 210000001787 dendrite Anatomy 0.000 abstract description 6
- 238000009751 slip forming Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 5
- 230000009257 reactivity Effects 0.000 abstract description 5
- 210000004027 cell Anatomy 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 14
- 229910012305 LiPON Inorganic materials 0.000 description 9
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000008151 electrolyte solution Substances 0.000 description 4
- -1 LiNiCoMnO 2 Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 description 2
- 229910018068 Li 2 O Inorganic materials 0.000 description 2
- 229910013870 LiPF 6 Inorganic materials 0.000 description 2
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- IEJIGPNLZYLLBP-UHFFFAOYSA-N dimethyl carbonate Chemical compound COC(=O)OC IEJIGPNLZYLLBP-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910018119 Li 3 PO 4 Inorganic materials 0.000 description 1
- 229910012851 LiCoO 2 Inorganic materials 0.000 description 1
- 229910010707 LiFePO 4 Inorganic materials 0.000 description 1
- 229910015643 LiMn 2 O 4 Inorganic materials 0.000 description 1
- 229910013290 LiNiO 2 Inorganic materials 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 229910021450 lithium metal oxide Inorganic materials 0.000 description 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- 229910001947 lithium oxide Inorganic materials 0.000 description 1
- 229910003002 lithium salt Inorganic materials 0.000 description 1
- 159000000002 lithium salts Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
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Abstract
Description
LixBOyNz (式1)
(前記xは0.9〜3.51、yは0.6〜3.2、zは0.5〜1.0である。)
真空チャンバ内にリチウム金属板を提供するステップ;
前記リチウム金属板の一面または両面に反応性スパッタリング法により窒化リチウム(Li3N)薄膜を形成するステップ;及び
前記窒化リチウム薄膜に連続して反応性スパッタリング法により、下記式1の組成を有するLiBON薄膜を形成するステップ。
LixBOyNz (式1)
(前記xは0.9〜3.51、yは0.6〜3.2、zは0.5〜1.0である。)
リチウム金属板(厚さ:20μm)を、真空チャンバ内で窒素(N2)ガス0.1Paに5分間露出させ、反応性スパッタリング法により窒化リチウム(Li3N)薄膜(厚さ:0.02μm)を形成し、前記窒化リチウム薄膜を形成したリチウム金属板を反応チャンバ内にそのまま置いて、連続してLi2BO3をターゲットとして反応性スパッタリング法(reactive sputtering)により、Li3.09BO2.53N0.52の組成を有するLiBON薄膜(厚さ:0.2μm)を形成した。このように製造されたコーティング層が形成されたリチウム金属板を、負極として使用した。
前記実施例1において、前記窒化リチウム(Li3N)薄膜の厚さを0.02μmに形成した以外は、実施例1と同様の方法で対称セルを製造した。
前記実施例1において、前記窒化リチウム(Li3N)薄膜の厚さを0.01μmに形成した以外は、実施例1と同様の方法で対称セルを製造した。
前記実施例1において、前記LiBON薄膜の厚さを0.01μmに形成した以外は、実施例1と同様の方法で対称セルを製造した。
前記実施例1において、前記LiBON薄膜の厚さを5μmに形成した以外は、実施例1と同様の方法で対称セルを製造した。
前記実施例1において、前記LiBON薄膜をLi0.9BO0.66N0.98の組成を有するように形成した以外は、実施例1と同様の方法で対称セルを製造した。
前記実施例1において、前記LiBON薄膜をLi3.51BO3.03N0.52の組成を有するように形成した以外は、実施例1と同様の方法で対称セルを製造した。
前記実施例1において、前記窒化リチウム(Li3N)薄膜及び前記LiBON薄膜を形成していないこと以外は、実施例1と同様の方法で対称セルを製造した。
前記実施例1において前記LiBON薄膜を形成していないこと以外は、実施例1と同様の方法で対称セルを製造した。
前記実施例1において前記窒化リチウム(Li3N)薄膜を形成していないこと以外は、実施例1と同様の方法で対称セルを製造した。
リチウム金属板(厚さ:20μm)を、真空チャンバ内で窒素(N2)ガス0.1Paに5分間露出させ、反応性スパッタリング法により窒化リチウム(Li3N)薄膜(厚さ:0.02μm)を形成し、前記窒化リチウム薄膜を形成したリチウム金属板を反応チャンバ内にそのまま置いて、連続してLi3PO4をターゲットとして反応性スパッタリング法(reactive sputtering)により、LiPON1.33の組成を有するLiPON薄膜(厚さ:0.2μm)を形成した。このように製造されたコーティング層が形成されたリチウム金属板を、負極として使用した。
前記比較例4において、前記LiPON薄膜の厚さを0.1μmに形成した以外は、比較例4と同様の方法で対称セルを製造した。
前記比較例4において、前記LiPON薄膜の厚さを2μmに形成した以外は、比較例4と同様の方法で対称セルを製造した。
前記実施例及び比較例で製造された対称セルを、DOD(depth of discharge)83%、1Cの充放電条件下で充放電させた。前記充放電後、Li金属の酸化の有無、及びLiBON薄膜又はLiPON薄膜のクラック(crack)の有無を目視で観察し、サイクル効率(%)を測定した。その結果を、下記表1に示す。
−X:酸化していない
−△:部分的酸化
−O:全部酸化
2)クラック(crack)の有無
−X:クラックがない
−△:間欠的なクラック
−O:全面的なクラック
1100 リチウム金属板
1210 バッファ層
1220 保護層
Claims (9)
- リチウム金属板と、
前記リチウム金属板上に形成された窒化リチウム(Li3N)からなるバッファ層と、
前記バッファ層上に形成され、下記式1の組成を有するLiBONからなる保護層とを含む、多層構造のリチウム金属電極:
LixBOyNz (式1)
(前記xは0.9〜3.51、yは0.6〜3.2、zは0.5〜1.0である。) - 前記バッファ層は、リチウム金属板の電解質と対面する面に形成される、請求項1に記載の多層構造のリチウム金属電極。
- 前記式1の組成を有するLiBONは、Li3.09BO2.53N0.52、Li0.90BO0.66N0.98、及びLi3.51BO3.03N0.52からなる群から選択されるいずれか1つである、請求項1に記載の多層構造のリチウム金属電極。
- 前記リチウム金属板の厚さは30〜500μmである、請求項1又は2に記載の多層構造のリチウム金属電極。
- 前記バッファ層である窒化リチウム層の厚さは0.01〜5μmである、請求項1又は2に記載の多層構造のリチウム金属電極。
- 前記保護層であるLiBON層の厚さは0.1〜10μmである、請求項1又は2に記載の多層構造のリチウム金属電極。
- 前記バッファ層またはLiBON保護層は、電子ビーム蒸着法、有機金属化学気相蒸着法、反応性スパッタリング法、高周波スパッタリング法、及びマグネトロンスパッタリング法から選択された方法で形成される、請求項1に記載の多層構造のリチウム金属電極。
- 真空チャンバ内にリチウム金属板を提供するステップと、
前記リチウム金属板の一面または両面に窒素(N2)ガス反応性スパッタリング法により窒化リチウム(Li3N)薄膜を形成するステップと、
前記窒化リチウム薄膜に連続して窒素(N2)ガス反応性スパッタリング法により、下記式1の組成を有するLiBON薄膜を形成するステップと、
を含む、多層構造のリチウム金属電極の製造方法:
LixBOyNz (式1)
(前記xは0.9〜3.51、yは0.6〜3.2、zは0.5〜1.0である。) - 負極、正極、及び前記正極と負極との間に介在する電解質を含み、前記負極は、請求項1から7のいずれか一項に記載の多層構造のリチウム金属電極である、リチウム二次電池。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2014-0144248 | 2014-10-23 | ||
KR20140144248 | 2014-10-23 | ||
KR1020150145771A KR101984719B1 (ko) | 2014-10-23 | 2015-10-20 | 다층구조의 리튬금속 전극 및 이의 제조방법 |
KR10-2015-0145771 | 2015-10-20 | ||
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