JP2017201677A - 回路基板の製造方法 - Google Patents
回路基板の製造方法 Download PDFInfo
- Publication number
- JP2017201677A JP2017201677A JP2016172367A JP2016172367A JP2017201677A JP 2017201677 A JP2017201677 A JP 2017201677A JP 2016172367 A JP2016172367 A JP 2016172367A JP 2016172367 A JP2016172367 A JP 2016172367A JP 2017201677 A JP2017201677 A JP 2017201677A
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- Prior art keywords
- layer
- plating layer
- nickel plating
- electroless nickel
- thickness
- Prior art date
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- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 38
- 238000000034 method Methods 0.000 title claims description 22
- 239000010410 layer Substances 0.000 claims abstract description 328
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 178
- 238000007747 plating Methods 0.000 claims abstract description 128
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 89
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 62
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 31
- 229910052751 metal Inorganic materials 0.000 claims abstract description 22
- 239000002184 metal Substances 0.000 claims abstract description 22
- 238000002161 passivation Methods 0.000 claims abstract description 22
- 239000012792 core layer Substances 0.000 claims abstract description 18
- 238000011946 reduction process Methods 0.000 claims abstract description 9
- 229910000679 solder Inorganic materials 0.000 claims description 14
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000007654 immersion Methods 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 230000002335 preservative effect Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 239000002345 surface coating layer Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0237—High frequency adaptations
- H05K1/0242—Structural details of individual signal conductors, e.g. related to the skin effect
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/429—Plated through-holes specially for multilayer circuits, e.g. having connections to inner circuit layers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4661—Adding a circuit layer by direct wet plating, e.g. electroless plating; insulating materials adapted therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0338—Layered conductor, e.g. layered metal substrate, layered finish layer, layered thin film adhesion layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0369—Etching selective parts of a metal substrate through part of its thickness, e.g. using etch resist
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Structure Of Printed Boards (AREA)
- Chemically Coating (AREA)
Abstract
Description
110 コア層
111 コア誘電体層
112 上側表面
113 第一パターン回路層
114 下側表面
115 第二パターン回路層
117 導電性ビア
119 第三パターン回路層
120 無電解ニッケルめっき層
120A 薄型化無電解ニッケルめっき層
130 無電解パラジウムめっき層
140 表面金属不働態化層
142 頂面
150、150A ソルダレジスト層
152 頂面
160、160A プリフラックス層
H 高さの差
P1、P2 パッド
T1 第一の厚さ
T2 第二の厚さ
Claims (13)
- 互いに逆向きである上側表面及び下側表面を有するコア誘電体層と、前記コア誘電体層の前記上側表面上に設けられた第一パターン回路層と、前記コア誘電体層の前記下側表面上に設けられた第二パターン回路層と、を有するコア層を設ける工程と、
前記第一パターン回路層上及び前記第二パターン回路層上に、1マイクロメートルと10マイクロメートルの間である第一の厚さを有する無電解ニッケルめっき層を形成して前記第一パターン回路層及び前記第二パターン回路層を覆う工程と、
前記無電解ニッケルめっき層に減厚処理を施し、該無電解ニッケルめっき層を前記第一の厚さから0.01マイクロメートルと0.9マイクロメートルの間である第二の厚さに薄くして薄型化無電解ニッケルめっき層を形成する工程と、
前記薄型化無電解ニッケルめっき層上に無電解パラジウムめっき層を形成して前記薄型化無電解ニッケルめっき層を覆う工程と、
前記無電解パラジウムめっき層上に表面金属不動態化層を形成して前記無電解パラジウムめっき層を覆う工程と、
を備える、回路基板の製造方法。 - 前記第一の厚さが2マイクロメートルと6マイクロメートルの間である、請求項1に記載の回路基板の製造方法。
- 前記第二の厚さが0.08マイクロメートルと0.2マイクロメートルの間である、請求項1又は2に記載の回路基板の製造方法。
- 前記表面金属不働態化層が無電解金めっき層又は無電解銀めっき層を有する、請求項1乃至3の何れか一項に記載の回路基板の製造方法。
- 前記コア層形成後且つ前記無電解ニッケルめっき層形成前に、又は、前記表面金属不働態化層形成後に、前記コア誘電体層の前記上側表面上及び前記下側表面上にソルダレジスト層を形成する工程をさらに有する、請求項1乃至4の何れか一項に記載の回路基板の製造方法。
- 前記コア誘電体層の前記上側表面上に第三パターン回路層を形成し、
前記第三パターン回路層上にプリフラックス層を形成して前記第三パターン回路層を覆う工程をさらに有する、請求項1乃至5の何れか一項に記載の回路基板の製造方法。 - 前記無電解ニッケルめっき層は、リン含有無電解ニッケルめっき層である、請求項1乃至6の何れか一項に記載の回路基板の製造方法。
- 前記減厚処理はエッチング処理である、請求項1乃至7の何れか一項に記載の回路基板の製造方法。
- 前記無電解パラジウムめっき層の厚さが0.03マイクロメートルと0.2マイクロメートルの間である、請求項1乃至8の何れか一項に記載の回路基板の製造方法。
- 前記表面金属不働態化層の厚さが0.03マイクロメートルと0.2マイクロメートルの間である、請求項1乃至9の何れか一項に記載の回路基板の製造方法。
- 前記コア層は、前記コア誘電体層を貫通して前記第一パターン回路層と前記第二パターン回路層とを電気的に接続する少なくとも一つの導電性ビアをさらに有する、請求項1乃至10の何れか一項に記載の回路基板の製造方法。
- コア誘電体層、第一パターン回路層及び第二パターン回路層を有し、前記コア誘電体層が互いに逆向きである上側表面及び下側表面を有し、前記第一パターン回路層が前記コア誘電体層の前記上側表面上に設けられ、前記第二パターン回路層が前記コア誘電体層の前記下側表面上に設けられているコア層と、
前記第一パターン回路層上及び前記第二パターン回路層上に設けられ、該第一パターン回路層及び前記第二パターン回路層を覆うとともに厚さを有し、その厚さが0.01マイクロメートルと0.9マイクロメートルの間である薄型化無電解ニッケルめっき層と、
前記薄型化無電解ニッケルめっき層上に設けられ、該薄型化無電解ニッケルめっき層を覆う無電解パラジウムめっき層と、
前記無電解パラジウムめっき層上に設けられ、該無電解パラジウムめっき層を覆う表面金属不動態化層と、
を備える回路基板。 - 前記コア誘電体層の前記上側表面に設けられた第三パターン回路層と、該第三パターン回路層上に設けられ該第三パターン回路層を覆うプリフラックス層と、をさらに有する、請求項12に記載の回路基板。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW105114094A TWI576033B (zh) | 2016-05-06 | 2016-05-06 | 線路基板及其製作方法 |
TW105114094 | 2016-05-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017201677A true JP2017201677A (ja) | 2017-11-09 |
JP6574153B2 JP6574153B2 (ja) | 2019-09-11 |
Family
ID=58766145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016172367A Expired - Fee Related JP6574153B2 (ja) | 2016-05-06 | 2016-09-05 | 回路基板の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20170325330A1 (ja) |
JP (1) | JP6574153B2 (ja) |
CN (1) | CN107347231B (ja) |
TW (1) | TWI576033B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109156080B (zh) * | 2016-05-16 | 2021-10-08 | 株式会社村田制作所 | 陶瓷电子部件 |
US20220199503A1 (en) * | 2020-12-21 | 2022-06-23 | Intel Corporation | Novel lga architecture for improving reliability performance of metal defined pads |
Citations (12)
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JPH07297524A (ja) * | 1994-04-21 | 1995-11-10 | Ibiden Co Ltd | Icカード用プリント配線板 |
US5910644A (en) * | 1997-06-11 | 1999-06-08 | International Business Machines Corporation | Universal surface finish for DCA, SMT and pad on pad interconnections |
JPH11251353A (ja) * | 1998-03-03 | 1999-09-17 | Canon Inc | 半導体装置およびその製造方法 |
JP2004039771A (ja) * | 2002-07-02 | 2004-02-05 | Nitto Denko Corp | 配線回路基板の製造方法 |
JP2009076851A (ja) * | 2007-09-19 | 2009-04-09 | Phoenix Precision Technology Corp | 実装基板構造物及びその製造方法 |
JP2010232590A (ja) * | 2009-03-30 | 2010-10-14 | Sanyo Electric Co Ltd | 回路基板の製造方法 |
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-
2016
- 2016-05-06 TW TW105114094A patent/TWI576033B/zh not_active IP Right Cessation
- 2016-06-07 US US15/176,130 patent/US20170325330A1/en not_active Abandoned
- 2016-06-20 CN CN201610450440.6A patent/CN107347231B/zh not_active Expired - Fee Related
- 2016-09-05 JP JP2016172367A patent/JP6574153B2/ja not_active Expired - Fee Related
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JPH07297524A (ja) * | 1994-04-21 | 1995-11-10 | Ibiden Co Ltd | Icカード用プリント配線板 |
US5910644A (en) * | 1997-06-11 | 1999-06-08 | International Business Machines Corporation | Universal surface finish for DCA, SMT and pad on pad interconnections |
JPH11251353A (ja) * | 1998-03-03 | 1999-09-17 | Canon Inc | 半導体装置およびその製造方法 |
JP2004039771A (ja) * | 2002-07-02 | 2004-02-05 | Nitto Denko Corp | 配線回路基板の製造方法 |
JP2009076851A (ja) * | 2007-09-19 | 2009-04-09 | Phoenix Precision Technology Corp | 実装基板構造物及びその製造方法 |
JP2010232590A (ja) * | 2009-03-30 | 2010-10-14 | Sanyo Electric Co Ltd | 回路基板の製造方法 |
JP2012019080A (ja) * | 2010-07-08 | 2012-01-26 | Shinko Electric Ind Co Ltd | 配線基板の製造方法及び配線基板 |
US20120280371A1 (en) * | 2011-05-04 | 2012-11-08 | Subtron Technology Co., Ltd. | Circuit structure and manufacturing method thereof |
JP2013012740A (ja) * | 2011-06-28 | 2013-01-17 | Samsung Electro-Mechanics Co Ltd | プリント回路基板の無電解表面処理めっき層及びその製造方法 |
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US20140000109A1 (en) * | 2012-07-02 | 2014-01-02 | Subtron Technology Co., Ltd. | Manufacturing method of substrate structure |
JP2015082534A (ja) * | 2013-10-21 | 2015-04-27 | 日立化成株式会社 | 接続端子及びそれを用いた半導体チップ搭載用基板 |
Also Published As
Publication number | Publication date |
---|---|
CN107347231A (zh) | 2017-11-14 |
TWI576033B (zh) | 2017-03-21 |
US20170325330A1 (en) | 2017-11-09 |
CN107347231B (zh) | 2019-11-15 |
JP6574153B2 (ja) | 2019-09-11 |
TW201740777A (zh) | 2017-11-16 |
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