|
US2361150A
(en)
|
1941-01-24 |
1944-10-24 |
Mathieson Alkali Works Inc |
Method and apparatus for admitting chlorine to a liquid stream
|
|
US2569857A
(en)
|
1946-03-06 |
1951-10-02 |
Klingerit Inc |
Combined mixing unit and hose rack
|
|
US2871887A
(en)
|
1955-04-26 |
1959-02-03 |
Monarch Machine Tool Co |
Manifolding
|
|
US3102004A
(en)
|
1959-08-05 |
1963-08-27 |
Grintz Joseph John |
Mixing and dispensing apparatus
|
|
US3026183A
(en)
|
1960-02-05 |
1962-03-20 |
Dayco Corp |
Mixing apparatus
|
|
GB1098629A
(en)
|
1964-08-06 |
1968-01-10 |
Applied Controls Ltd |
Connector unit
|
|
US3865133A
(en)
|
1973-10-31 |
1975-02-11 |
Minnesota Mining & Mfg |
Self cleaning check valve
|
|
US4134002A
(en)
*
|
1975-11-21 |
1979-01-09 |
Stanford George H |
Down spouts provided with heating elements
|
|
US4099919A
(en)
|
1976-12-22 |
1978-07-11 |
The Upjohn Company |
Stem adjustment seal for reaction injection molding machine
|
|
CA1096630A
(en)
|
1978-05-26 |
1981-03-03 |
David J. Tookey |
Static mixer
|
|
US4215081A
(en)
|
1979-01-24 |
1980-07-29 |
Brooks Kirtland H |
Liquid aerator
|
|
US4581521A
(en)
*
|
1980-08-28 |
1986-04-08 |
Grise Frederick Gerard J |
Electrically heated pipe assembly
|
|
US4422471A
(en)
|
1982-05-24 |
1983-12-27 |
The United States Of America As Represented By The Secretary Of The Navy |
Four bar manifold
|
|
JPS6063375A
(ja)
|
1983-09-14 |
1985-04-11 |
Canon Inc |
気相法堆積膜製造装置
|
|
US4714091A
(en)
|
1985-06-10 |
1987-12-22 |
Emcore, Inc. |
Modular gas handling apparatus
|
|
US4703718A
(en)
|
1985-11-29 |
1987-11-03 |
Rca Corporation |
Vapor deposition apparatus and method of using same
|
|
DE3820810A1
(de)
|
1988-06-20 |
1989-12-21 |
Krauss Maffei Ag |
Vorrichtung zum mischen von wenigstens zwei reaktiven kunststoffkomponenten
|
|
US5082633A
(en)
|
1990-06-14 |
1992-01-21 |
The Dow Chemical Company |
Mix head for mixing reactive chemicals
|
|
JP3323530B2
(ja)
|
1991-04-04 |
2002-09-09 |
株式会社日立製作所 |
半導体装置の製造方法
|
|
US5251447A
(en)
|
1992-10-01 |
1993-10-12 |
General Electric Company |
Air fuel mixer for gas turbine combustor
|
|
US5534328A
(en)
|
1993-12-02 |
1996-07-09 |
E. I. Du Pont De Nemours And Company |
Integrated chemical processing apparatus and processes for the preparation thereof
|
|
US5341841A
(en)
|
1993-10-19 |
1994-08-30 |
Acute Ideas, Inc. |
Fluid distribution device
|
|
US6168948B1
(en)
|
1995-06-29 |
2001-01-02 |
Affymetrix, Inc. |
Miniaturized genetic analysis systems and methods
|
|
IT240441Y1
(it)
|
1996-02-09 |
2001-04-02 |
Italtinto Srl |
Macchina dosatrice in particolare per coloranti
|
|
IT240440Y1
(it)
|
1996-02-09 |
2001-04-02 |
Italtinto Srl |
Macchina dosatrice per coloranti
|
|
US5794645A
(en)
|
1996-07-15 |
1998-08-18 |
Creative Pathways, Inc. |
Method for supplying industrial gases using integrated bottle controllers
|
|
US6073646A
(en)
|
1996-09-30 |
2000-06-13 |
Benkan Corporation |
Gas controlling device for integration
|
|
US6302141B1
(en)
|
1996-12-03 |
2001-10-16 |
Insync Systems, Inc. |
Building blocks for integrated gas panel
|
|
US5836355A
(en)
|
1996-12-03 |
1998-11-17 |
Insync Systems, Inc. |
Building blocks for integrated gas panel
|
|
JP3748473B2
(ja)
|
1996-12-12 |
2006-02-22 |
キヤノン株式会社 |
堆積膜形成装置
|
|
US5984519A
(en)
|
1996-12-26 |
1999-11-16 |
Genus Corporation |
Fine particle producing devices
|
|
DE69813254T2
(de)
|
1997-08-05 |
2004-04-01 |
Microfluidics International Corp., Newton |
Hochdruck mischer-reaktor mit mehrfachströmen
|
|
US6352594B2
(en)
|
1997-08-11 |
2002-03-05 |
Torrex |
Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors
|
|
US6068016A
(en)
|
1997-09-25 |
2000-05-30 |
Applied Materials, Inc |
Modular fluid flow system with integrated pump-purge
|
|
US5887977A
(en)
|
1997-09-30 |
1999-03-30 |
Uniflows Co., Ltd. |
Stationary in-line mixer
|
|
WO1999045302A1
(en)
|
1998-03-05 |
1999-09-10 |
The Swagelok Company |
Modular surface mount manifold
|
|
US6260581B1
(en)
|
1998-06-12 |
2001-07-17 |
J. Gregory Hollingshead |
Apparatus for assembling modular chemical distribution substrate blocks
|
|
JP4454725B2
(ja)
|
1998-12-28 |
2010-04-21 |
株式会社オムニ研究所 |
ガス混合装置およびガス混合ブロック
|
|
EP1157144A4
(en)
|
1999-01-13 |
2010-04-28 |
Cornell Res Foundation Inc |
MANUFACTURE OF FLUIDER MONOLITHIC STRUCTURES
|
|
JP4463896B2
(ja)
|
1999-04-13 |
2010-05-19 |
株式会社オムニ研究所 |
ガス供給装置
|
|
US6620289B1
(en)
|
1999-04-27 |
2003-09-16 |
Applied Materials, Inc |
Method and apparatus for asymmetric gas distribution in a semiconductor wafer processing system
|
|
US6186177B1
(en)
|
1999-06-23 |
2001-02-13 |
Mks Instruments, Inc. |
Integrated gas delivery system
|
|
US7144616B1
(en)
|
1999-06-28 |
2006-12-05 |
California Institute Of Technology |
Microfabricated elastomeric valve and pump systems
|
|
IT246858Y1
(it)
|
1999-07-16 |
2002-04-10 |
Italtinto Srl |
Macchina erogatrice-dosatrice per coloranti vernici o simili con gruppo di erogazione centrale simultanea dei coloranti e sistema di pulitur
|
|
US6125887A
(en)
|
1999-09-20 |
2000-10-03 |
Pinto; James V. |
Welded interconnection modules for high purity fluid flow control applications
|
|
US6281155B1
(en)
|
1999-11-19 |
2001-08-28 |
Equistar Chemicals, L.P. |
Supported olefin polymerization catalysts
|
|
US6283155B1
(en)
|
1999-12-06 |
2001-09-04 |
Insync Systems, Inc. |
System of modular substrates for enabling the distribution of process fluids through removable components
|
|
US6546960B1
(en)
|
2000-03-03 |
2003-04-15 |
Creative Pathways, Inc. |
Self-aligning SmartStrate™
|
|
US6640835B1
(en)
|
2000-03-03 |
2003-11-04 |
Creative Pathways, Inc. |
Micromount™ system
|
|
US6283143B1
(en)
|
2000-03-31 |
2001-09-04 |
Lam Research Corporation |
System and method for providing an integrated gas stick
|
|
DE10032269A1
(de)
|
2000-07-03 |
2002-01-31 |
Basf Ag |
Verfahren und Vorrichtung zur Verringerung von Nebenprodukten bei der Vermischung von Eduktströmen
|
|
JP4156184B2
(ja)
|
2000-08-01 |
2008-09-24 |
株式会社キッツエスシーティー |
集積化ガス制御装置
|
|
US6581640B1
(en)
|
2000-08-16 |
2003-06-24 |
Kelsey-Hayes Company |
Laminated manifold for microvalve
|
|
JP2002089798A
(ja)
|
2000-09-11 |
2002-03-27 |
Ulvac Japan Ltd |
流体制御装置およびこれを用いたガス処理装置
|
|
WO2002023964A1
(en)
|
2000-09-13 |
2002-03-21 |
Applied Materials, Inc. |
Processing chamber with multi-layer brazed lid
|
|
JP2002130479A
(ja)
|
2000-10-23 |
2002-05-09 |
Tokyo Electron Ltd |
集積化流体供給装置及びこれに用いるシール材及びこれを用いた半導体製造装置
|
|
US6464129B2
(en)
|
2000-12-22 |
2002-10-15 |
Triumph Group, Inc. |
Method of diffusion bonding superalloy components
|
|
US6655829B1
(en)
|
2001-05-07 |
2003-12-02 |
Uop Llc |
Static mixer and process for mixing at least two fluids
|
|
DE10123093A1
(de)
|
2001-05-07 |
2002-11-21 |
Inst Mikrotechnik Mainz Gmbh |
Verfahren und statischer Mikrovermischer zum Mischen mindestens zweier Fluide
|
|
US7293910B2
(en)
|
2001-05-24 |
2007-11-13 |
Masco Corporation |
Surge suppressor for a mixer head assembly
|
|
US7150475B2
(en)
|
2001-07-13 |
2006-12-19 |
Talon Innovations, Inc. |
Shear-resistant modular fluidic blocks
|
|
FR2829707B1
(fr)
|
2001-09-19 |
2003-12-12 |
Air Liquide |
Procede et dispositif de melange de deux gaz reactifs
|
|
JP2003334479A
(ja)
|
2001-10-02 |
2003-11-25 |
Ngk Insulators Ltd |
液体噴射装置
|
|
US20030124842A1
(en)
|
2001-12-27 |
2003-07-03 |
Applied Materials, Inc. |
Dual-gas delivery system for chemical vapor deposition processes
|
|
US7261812B1
(en)
|
2002-02-13 |
2007-08-28 |
Nanostream, Inc. |
Multi-column separation devices and methods
|
|
TWI305664B
(en)
|
2002-08-16 |
2009-01-21 |
Unaxis Usa Inc |
Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method
|
|
US6924235B2
(en)
|
2002-08-16 |
2005-08-02 |
Unaxis Usa Inc. |
Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method
|
|
WO2004021412A2
(en)
|
2002-08-27 |
2004-03-11 |
Celerity Group, Inc. |
Modular substrate gas panel having manifold connections in a common plane
|
|
US7510392B2
(en)
*
|
2002-11-06 |
2009-03-31 |
Mold-Masters (2007) Limited |
Injection nozzle with a removable heater device having one or more heating elements
|
|
JP4502590B2
(ja)
|
2002-11-15 |
2010-07-14 |
株式会社ルネサステクノロジ |
半導体製造装置
|
|
US6718817B1
(en)
|
2002-11-22 |
2004-04-13 |
Chung-Shan Institute Of Science And Technology |
Sample injection device for gas chromatography
|
|
WO2004059474A2
(en)
|
2002-12-20 |
2004-07-15 |
Applied Materials, Inc. |
Micromachined intergrated fluid delivery system
|
|
CN102620959B
(zh)
|
2002-12-26 |
2015-12-16 |
梅索磅秤技术有限公司 |
检定盒及其使用方法
|
|
US6907904B2
(en)
|
2003-03-03 |
2005-06-21 |
Redwood Microsystems, Inc. |
Fluid delivery system and mounting panel therefor
|
|
CA2462397C
(en)
|
2003-03-24 |
2010-05-04 |
Thomas William Mccracken |
Mixing arrangement for atomizing nozzle in multi-phase flow
|
|
US20050005981A1
(en)
|
2003-03-26 |
2005-01-13 |
Paul Eidsmore |
Modular fluid components and assembly
|
|
DE10333922B4
(de)
|
2003-07-25 |
2005-11-17 |
Wella Ag |
Bauteile für statische Mikromischer, daraus aufgebaute Mikromischer und deren Verwendung zum Mischen, zum Dispergieren oder zur Durchführung chemischer Reaktionen
|
|
DE10333921B4
(de)
|
2003-07-25 |
2005-10-20 |
Wella Ag |
Extraktionsverfahren unter Verwendung eines statischen Mikromischers
|
|
US7178556B2
(en)
|
2003-08-07 |
2007-02-20 |
Parker-Hannifin Corporation |
Modular component connector substrate assembly system
|
|
US7234222B1
(en)
|
2003-09-26 |
2007-06-26 |
Lam Research Corporation |
Methods and apparatus for optimizing the delivery of a set of gases in a plasma processing system
|
|
TWI279158B
(en)
|
2003-11-07 |
2007-04-11 |
Celerity Group Inc |
Surface mount heater
|
|
US7892357B2
(en)
|
2004-01-12 |
2011-02-22 |
Axcelis Technologies, Inc. |
Gas distribution plate assembly for plasma reactors
|
|
ITTO20040012A1
(it)
|
2004-01-13 |
2004-04-13 |
Nordimpianti Technologies S R |
Tintometro
|
|
CN1921931B
(zh)
|
2004-02-17 |
2012-05-09 |
埃尔费尔德微技术Bts有限责任公司 |
微混合器
|
|
US20070140042A1
(en)
|
2004-06-04 |
2007-06-21 |
Gerhard Schanz |
Multicomponent packaging with static micromixer
|
|
JP2006009969A
(ja)
|
2004-06-25 |
2006-01-12 |
Kitz Sct:Kk |
集積化ガス制御装置用流路ブロックとその製造方法並びに集積化ガス制御装置
|
|
US20060028908A1
(en)
|
2004-08-03 |
2006-02-09 |
Suriadi Arief B |
Micro-mixer
|
|
US7299825B2
(en)
|
2005-06-02 |
2007-11-27 |
Ultra Clean Holdings, Inc. |
Gas-panel assembly
|
|
US7320339B2
(en)
|
2005-06-02 |
2008-01-22 |
Ultra Clean Holdings, Inc. |
Gas-panel assembly
|
|
US7410519B1
(en)
|
2005-08-16 |
2008-08-12 |
Ewald Dieter H |
Sandwich filter block
|
|
JP4718274B2
(ja)
|
2005-08-25 |
2011-07-06 |
東京エレクトロン株式会社 |
半導体製造装置，半導体製造装置の流量補正方法，プログラム
|
|
US7976795B2
(en)
|
2006-01-19 |
2011-07-12 |
Rheonix, Inc. |
Microfluidic systems
|
|
JP5280861B2
(ja)
*
|
2006-01-19 |
2013-09-04 |
エーエスエム アメリカ インコーポレイテッド |
高温ａｌｄインレットマニホールド
|
|
US8196480B1
(en)
|
2006-04-03 |
2012-06-12 |
A+ Manufacturing, Llc |
Modular sample conditioning system
|
|
US7566165B2
(en)
|
2006-04-17 |
2009-07-28 |
Milliken & Company |
Valved manifold and system suitable for introducing one or more additives into a fluid stream
|
|
JP5037510B2
(ja)
|
2006-08-23 |
2012-09-26 |
株式会社堀場エステック |
集積型ガスパネル装置
|
|
US20080066859A1
(en)
|
2006-08-30 |
2008-03-20 |
Michiaki Kobayashi |
Plasma processing apparatus capable of adjusting pressure within processing chamber
|
|
NL1032816C2
(nl)
|
2006-11-06 |
2008-05-08 |
Micronit Microfluidics Bv |
Micromengkamer, micromenger omvattende meerdere van dergelijke micromengkamers, werkwijzen voor het vervaardigen daarvan, en werkwijzen voor mengen.
|
|
US7789107B2
(en)
|
2006-11-16 |
2010-09-07 |
Talon Innovations |
Fluid transport in monolithic structures
|
|
US7822570B2
(en)
|
2006-11-17 |
2010-10-26 |
Lam Research Corporation |
Methods for performing actual flow verification
|
|
JP5004614B2
(ja)
|
2007-02-20 |
2012-08-22 |
株式会社日立ハイテクノロジーズ |
真空処理装置
|
|
JP5427344B2
(ja)
|
2007-05-23 |
2014-02-26 |
株式会社渡辺商行 |
気化装置、及び、気化装置を備えた成膜装置
|
|
US7798388B2
(en)
|
2007-05-31 |
2010-09-21 |
Applied Materials, Inc. |
Method of diffusion bonding a fluid flow apparatus
|
|
US7806143B2
(en)
|
2007-06-11 |
2010-10-05 |
Lam Research Corporation |
Flexible manifold for integrated gas system gas panels
|
|
FR2919510B1
(fr)
|
2007-08-03 |
2010-10-22 |
Daher Aerospace |
Melangeur de fluide gazeux
|
|
US8322380B2
(en)
|
2007-10-12 |
2012-12-04 |
Lam Research Corporation |
Universal fluid flow adaptor
|
|
US20090120364A1
(en)
|
2007-11-09 |
2009-05-14 |
Applied Materials, Inc. |
Gas mixing swirl insert assembly
|
|
JP5377513B2
(ja)
|
2007-12-27 |
2013-12-25 |
ラム リサーチ コーポレーション |
ショートエッチングレシピのためのガス輸送遅延の解消のための装置、方法、及びプログラム格納デバイス
|
|
DE102008022355A1
(de)
|
2008-05-06 |
2009-11-19 |
Axel Wittek |
Rotor-Stator-System zum Herstellen von Dispersionen
|
|
KR101012421B1
(ko)
|
2008-06-02 |
2011-02-08 |
성균관대학교산학협력단 |
에어로졸 분사장치 및 그것을 이용한 필름형성방법
|
|
US9656223B2
(en)
|
2008-06-16 |
2017-05-23 |
Isel Co., Ltd. |
Mixing unit and device, fluid mixing method and fluid
|
|
US7699935B2
(en)
|
2008-06-19 |
2010-04-20 |
Applied Materials, Inc. |
Method and system for supplying a cleaning gas into a process chamber
|
|
US8340827B2
(en)
|
2008-06-20 |
2012-12-25 |
Lam Research Corporation |
Methods for controlling time scale of gas delivery into a processing chamber
|
|
US8397752B2
(en)
*
|
2008-10-22 |
2013-03-19 |
Globe Union Industrial Corp. |
Process for fabricating integral plastic faucet member and finished product thereof
|
|
US20140020779A1
(en)
|
2009-06-10 |
2014-01-23 |
Vistadeltek, Llc |
Extreme flow rate and/or high temperature fluid delivery substrates
|
|
WO2011101934A1
(ja)
|
2010-02-22 |
2011-08-25 |
株式会社フジキン |
混合ガス供給装置
|
|
US8845178B2
(en)
|
2010-02-23 |
2014-09-30 |
Asahi Organic Chemicals Industry Co., Ltd. |
In-line-type fluid mixer
|
|
US8852685B2
(en)
|
2010-04-23 |
2014-10-07 |
Lam Research Corporation |
Coating method for gas delivery system
|
|
JP5848344B2
(ja)
|
2010-06-24 |
2016-01-27 |
グラコ ミネソタ インコーポレーテッド |
流体混合装置用流体調整バルブ装置
|
|
US10350556B2
(en)
|
2011-01-07 |
2019-07-16 |
Microfluidics International Corporation |
Low holdup volume mixing chamber
|
|
US9129778B2
(en)
|
2011-03-18 |
2015-09-08 |
Lam Research Corporation |
Fluid distribution members and/or assemblies
|
|
US9079140B2
(en)
|
2011-04-13 |
2015-07-14 |
Microfluidics International Corporation |
Compact interaction chamber with multiple cross micro impinging jets
|
|
US8746284B2
(en)
|
2011-05-11 |
2014-06-10 |
Intermolecular, Inc. |
Apparatus and method for multiple symmetrical divisional gas distribution
|
|
JP5739261B2
(ja)
*
|
2011-07-28 |
2015-06-24 |
株式会社堀場エステック |
ガス供給システム
|
|
EP2820915B1
(en)
*
|
2012-02-27 |
2017-01-04 |
Watlow Electric Manufacturing Company |
Temperature detection and control system for layered heaters
|
|
US9091397B2
(en)
*
|
2012-03-27 |
2015-07-28 |
Lam Research Corporation |
Shared gas panels in plasma processing chambers employing multi-zone gas feeds
|
|
US10002747B2
(en)
|
2012-03-27 |
2018-06-19 |
Lam Research Corporation |
Methods and apparatus for supplying process gas in a plasma processing system
|
|
US8851113B2
(en)
|
2012-03-27 |
2014-10-07 |
Lam Research Coporation |
Shared gas panels in plasma processing systems
|
|
US8985152B2
(en)
*
|
2012-06-15 |
2015-03-24 |
Novellus Systems, Inc. |
Point of use valve manifold for semiconductor fabrication equipment
|
|
JP6123208B2
(ja)
|
2012-09-28 |
2017-05-10 |
東京エレクトロン株式会社 |
成膜装置
|
|
US20140137961A1
(en)
|
2012-11-19 |
2014-05-22 |
Applied Materials, Inc. |
Modular chemical delivery system
|
|
US9090972B2
(en)
|
2012-12-31 |
2015-07-28 |
Lam Research Corporation |
Gas supply systems for substrate processing chambers and methods therefor
|
|
US20140202577A1
(en)
*
|
2013-01-21 |
2014-07-24 |
William Gardiner WEBSTER, III |
Duct fitting apparatus with reduced flow pressure loss and method of formation thereof
|
|
GB201310452D0
(en)
|
2013-06-12 |
2013-07-24 |
Blagdon Actuation Res Ltd |
Fluid Manifolds
|
|
US9335768B2
(en)
*
|
2013-09-12 |
2016-05-10 |
Lam Research Corporation |
Cluster mass flow devices and multi-line mass flow devices incorporating the same
|
|
US10683571B2
(en)
*
|
2014-02-25 |
2020-06-16 |
Asm Ip Holding B.V. |
Gas supply manifold and method of supplying gases to chamber using same
|
|
TWI693638B
(zh)
|
2014-04-07 |
2020-05-11 |
美商蘭姆研究公司 |
獨立於配置的氣體輸送系統
|
|
WO2015191960A1
(en)
|
2014-06-13 |
2015-12-17 |
Vistadeltek, Llc |
High conductance valve for fluids and vapors
|
|
EP4194177A1
(en)
*
|
2014-07-13 |
2023-06-14 |
Stratasys Ltd. |
Method and system for rotational 3d printing
|
|
US20160111257A1
(en)
|
2014-10-17 |
2016-04-21 |
Lam Research Corporation |
Substrate for mounting gas supply components and methods thereof
|
|
US10557197B2
(en)
|
2014-10-17 |
2020-02-11 |
Lam Research Corporation |
Monolithic gas distribution manifold and various construction techniques and use cases therefor
|
|
MX369370B
(es)
*
|
2015-04-08 |
2019-11-06 |
Decatur Diamond Llc |
Fresa con conductos lubricacion.
|
|
US10022689B2
(en)
|
2015-07-24 |
2018-07-17 |
Lam Research Corporation |
Fluid mixing hub for semiconductor processing tool
|
|
US10118263B2
(en)
|
2015-09-02 |
2018-11-06 |
Lam Researech Corporation |
Monolithic manifold mask and substrate concepts
|
|
US9879795B2
(en)
|
2016-01-15 |
2018-01-30 |
Lam Research Corporation |
Additively manufactured gas distribution manifold
|
|
US10215317B2
(en)
|
2016-01-15 |
2019-02-26 |
Lam Research Corporation |
Additively manufactured gas distribution manifold
|