CN107706128B - 一种基板冷却装置及冷却方法 - Google Patents
一种基板冷却装置及冷却方法 Download PDFInfo
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- CN107706128B CN107706128B CN201710661990.7A CN201710661990A CN107706128B CN 107706128 B CN107706128 B CN 107706128B CN 201710661990 A CN201710661990 A CN 201710661990A CN 107706128 B CN107706128 B CN 107706128B
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- cooling
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- 239000000758 substrate Substances 0.000 title claims abstract description 81
- 238000001816 cooling Methods 0.000 title claims abstract description 66
- 239000000498 cooling water Substances 0.000 claims abstract description 92
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 68
- 238000009826 distribution Methods 0.000 claims abstract description 38
- 230000000875 corresponding Effects 0.000 claims abstract description 9
- 239000011521 glass Substances 0.000 abstract description 23
- 230000001788 irregular Effects 0.000 abstract description 7
- WYTGDNHDOZPMIW-UHOFOFEASA-O Serpentine Natural products data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300.0' height='300.0' x='0.0' y='0.0'> </rect>
<path class='bond-0 atom-0 atom-1' d='M 51.5,93.1 L 58.7,100.3' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-0 atom-1' d='M 58.7,100.3 L 65.9,107.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-0 atom-1' d='M 56.4,88.3 L 63.5,95.4' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-0 atom-1' d='M 63.5,95.4 L 70.7,102.6' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1 atom-1 atom-2' d='M 68.3,105.0 L 79.0,102.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1 atom-1 atom-2' d='M 79.0,102.1 L 89.7,99.3' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3 atom-1 atom-4' d='M 68.3,105.0 L 59.5,137.9' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2 atom-2 atom-3' d='M 104.3,84.7 L 107.2,74.0' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2 atom-2 atom-3' d='M 107.2,74.0 L 110.0,63.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-4 atom-4 atom-5' d='M 59.5,137.9 L 83.6,162.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-25 atom-4 atom-10' d='M 59.5,137.9 L 26.5,146.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-25 atom-4 atom-10' d='M 56.3,145.9 L 33.3,152.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-5 atom-5 atom-6' d='M 83.6,162.1 L 74.8,195.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-27 atom-25 atom-5' d='M 116.5,153.2 L 83.6,162.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-30 atom-5 atom-26' d='M 86.4,156.1 L 84.2,155.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-30 atom-5 atom-26' d='M 89.1,150.2 L 84.7,149.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-30 atom-5 atom-26' d='M 91.9,144.3 L 85.3,142.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-6 atom-6 atom-7' d='M 74.8,195.0 L 41.8,203.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-10 atom-6 atom-11' d='M 74.8,195.0 L 98.9,219.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-31 atom-6 atom-27' d='M 74.8,195.0 L 65.7,215.5 L 72.3,217.3 Z' style='fill:#3B4143;fill-rule:evenodd;fill-opacity:1;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path class='bond-7 atom-7 atom-8' d='M 41.8,203.8 L 29.7,235.9 L 36.3,237.6 Z' style='fill:#3B4143;fill-rule:evenodd;fill-opacity:1;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path class='bond-8 atom-7 atom-9' d='M 41.8,203.8 L 34.7,196.6' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-8 atom-7 atom-9' d='M 34.7,196.6 L 27.5,189.5' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9 atom-9 atom-10' d='M 20.8,168.2 L 23.7,157.5' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9 atom-9 atom-10' d='M 23.7,157.5 L 26.5,146.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11 atom-11 atom-12' d='M 98.9,219.1 L 109.6,216.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11 atom-11 atom-12' d='M 109.6,216.2 L 120.3,213.3' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-12 atom-12 atom-13' d='M 134.9,198.7 L 137.8,188.0' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-12 atom-12 atom-13' d='M 137.8,188.0 L 140.6,177.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-12 atom-12 atom-13' d='M 142.3,197.3 L 144.3,189.8' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-12 atom-12 atom-13' d='M 144.3,189.8 L 146.4,182.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-26 atom-20 atom-12' d='M 155.9,234.4 L 148.7,227.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-26 atom-20 atom-12' d='M 148.7,227.2 L 141.6,220.0' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-13 atom-13 atom-14' d='M 140.6,177.3 L 173.6,168.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-24 atom-13 atom-25' d='M 140.6,177.3 L 116.5,153.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-14 atom-14 atom-15' d='M 173.6,168.5 L 177.8,160.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-14 atom-14 atom-15' d='M 177.8,160.2 L 182.0,151.9' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-28 atom-18 atom-14' d='M 197.7,192.6 L 173.6,168.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-28 atom-18 atom-14' d='M 198.9,184.2 L 182.0,167.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-15 atom-15 atom-16' d='M 200.7,140.0 L 211.7,141.7' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-15 atom-15 atom-16' d='M 211.7,141.7 L 222.7,143.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-16 atom-16 atom-17' d='M 222.7,143.4 L 228.0,177.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-16 atom-16 atom-17' d='M 216.8,149.6 L 220.5,173.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-29 atom-24 atom-16' d='M 249.2,122.0 L 222.7,143.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-17 atom-17 atom-18' d='M 228.0,177.1 L 197.7,192.6' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-20 atom-17 atom-21' d='M 228.0,177.1 L 259.9,189.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-18 atom-18 atom-19' d='M 197.7,192.6 L 188.8,225.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-19 atom-19 atom-20' d='M 188.8,225.5 L 155.9,234.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-19 atom-19 atom-20' d='M 182.1,220.3 L 159.1,226.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 259.9,189.3 L 286.4,167.9' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 259.6,180.8 L 278.1,165.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-22 atom-22 atom-23' d='M 286.4,167.9 L 281.0,134.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-23 atom-23 atom-24' d='M 281.0,134.2 L 249.2,122.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-23 atom-23 atom-24' d='M 273.8,138.7 L 251.5,130.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<text x='40.1' y='87.7' class='atom-0' style='font-size:13px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='97.1' y='103.0' class='atom-2' style='font-size:13px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='13.6' y='186.5' class='atom-9' style='font-size:13px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='127.7' y='217.1' class='atom-12' style='font-size:13px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='137.1' y='211.6' class='atom-12' style='font-size:9px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >+</text>
<text x='175.5' y='144.9' class='atom-15' style='font-size:13px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >H</text>
<text x='184.9' y='144.9' class='atom-15' style='font-size:13px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='88.3' y='135.9' class='atom-26' style='font-size:13px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >H</text>
<text x='61.9' y='234.7' class='atom-27' style='font-size:13px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >H</text>
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85.0' height='85.0' x='0.0' y='0.0'> </rect>
<path class='bond-0 atom-0 atom-1' d='M 13.8,25.1 L 16.2,27.5' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-0 atom-1' d='M 16.2,27.5 L 18.6,29.9' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-0 atom-1' d='M 15.2,23.8 L 17.5,26.2' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-0 atom-1' d='M 17.5,26.2 L 19.9,28.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1 atom-1 atom-2' d='M 19.2,29.2 L 22.9,28.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-1 atom-1 atom-2' d='M 22.9,28.2 L 26.5,27.3' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-3 atom-1 atom-4' d='M 19.2,29.2 L 16.8,38.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2 atom-2 atom-3' d='M 29.1,24.7 L 30.0,21.1' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-2 atom-2 atom-3' d='M 30.0,21.1 L 31.0,17.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-4 atom-4 atom-5' d='M 16.8,38.5 L 23.5,45.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-25 atom-4 atom-10' d='M 16.8,38.5 L 7.5,41.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-25 atom-4 atom-10' d='M 15.9,40.7 L 9.4,42.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-5 atom-5 atom-6' d='M 23.5,45.3 L 21.1,54.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-27 atom-25 atom-5' d='M 32.8,42.8 L 23.5,45.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-30 atom-5 atom-26' d='M 24.4,43.3 L 23.8,43.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-30 atom-5 atom-26' d='M 25.2,41.4 L 24.0,41.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-30 atom-5 atom-26' d='M 26.1,39.5 L 24.2,39.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-6 atom-6 atom-7' d='M 21.1,54.5 L 11.8,57.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-10 atom-6 atom-11' d='M 21.1,54.5 L 27.8,61.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-31 atom-6 atom-27' d='M 21.1,54.5 L 18.2,61.5 L 20.1,62.0 Z' style='fill:#3B4143;fill-rule:evenodd;fill-opacity:1;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path class='bond-7 atom-7 atom-8' d='M 11.8,57.0 L 8.4,66.1 L 10.2,66.6 Z' style='fill:#3B4143;fill-rule:evenodd;fill-opacity:1;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path class='bond-8 atom-7 atom-9' d='M 11.8,57.0 L 9.4,54.7' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-8 atom-7 atom-9' d='M 9.4,54.7 L 7.0,52.3' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9 atom-9 atom-10' d='M 5.5,48.2 L 6.5,44.6' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-9 atom-9 atom-10' d='M 6.5,44.6 L 7.5,41.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11 atom-11 atom-12' d='M 27.8,61.3 L 31.5,60.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-11 atom-11 atom-12' d='M 31.5,60.4 L 35.1,59.4' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-12 atom-12 atom-13' d='M 37.7,56.8 L 38.6,53.2' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-12 atom-12 atom-13' d='M 38.6,53.2 L 39.6,49.6' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-12 atom-12 atom-13' d='M 39.8,56.2 L 40.5,53.7' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-12 atom-12 atom-13' d='M 40.5,53.7 L 41.2,51.2' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-26 atom-20 atom-12' d='M 43.9,65.6 L 41.5,63.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-26 atom-20 atom-12' d='M 41.5,63.3 L 39.2,60.9' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-13 atom-13 atom-14' d='M 39.6,49.6 L 48.9,47.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-24 atom-13 atom-25' d='M 39.6,49.6 L 32.8,42.8' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-14 atom-14 atom-15' d='M 48.9,47.1 L 50.2,44.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-14 atom-14 atom-15' d='M 50.2,44.4 L 51.6,41.8' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-28 atom-18 atom-14' d='M 55.7,53.9 L 48.9,47.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-28 atom-18 atom-14' d='M 56.0,51.5 L 51.3,46.7' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-15 atom-15 atom-16' d='M 55.3,38.9 L 59.0,39.4' style='fill:none;fill-rule:evenodd;stroke:#4284F4;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-15 atom-15 atom-16' d='M 59.0,39.4 L 62.7,40.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-16 atom-16 atom-17' d='M 62.7,40.0 L 64.2,49.5' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-16 atom-16 atom-17' d='M 61.0,41.8 L 62.1,48.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-29 atom-24 atom-16' d='M 70.2,34.0 L 62.7,40.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-17 atom-17 atom-18' d='M 64.2,49.5 L 55.7,53.9' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-20 atom-17 atom-21' d='M 64.2,49.5 L 73.2,53.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-18 atom-18 atom-19' d='M 55.7,53.9 L 53.2,63.1' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-19 atom-19 atom-20' d='M 53.2,63.1 L 43.9,65.6' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-19 atom-19 atom-20' d='M 51.3,61.7 L 44.8,63.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 73.2,53.0 L 80.6,46.9' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-21 atom-21 atom-22' d='M 73.1,50.6 L 78.3,46.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-22 atom-22 atom-23' d='M 80.6,46.9 L 79.1,37.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-23 atom-23 atom-24' d='M 79.1,37.4 L 70.2,34.0' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-23 atom-23 atom-24' d='M 77.1,38.7 L 70.8,36.3' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<text x='10.6' y='25.4' class='atom-0' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='26.7' y='29.7' class='atom-2' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='3.2' y='53.2' class='atom-9' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<text x='35.3' y='61.8' class='atom-12' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='39.5' y='59.4' class='atom-12' style='font-size:3px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >+</text>
<text x='47.3' y='41.5' class='atom-15' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >H</text>
<text x='51.4' y='41.5' class='atom-15' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#4284F4' >N</text>
<text x='24.2' y='39.0' class='atom-26' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >H</text>
<text x='16.8' y='66.8' class='atom-27' style='font-size:6px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >H</text>
</svg>
 O=C(OC)C=1[C@@H]2[C@@H]([C@@H](C)OC=1)C[n+]1c(c3[nH]c4c(c3cc1)cccc4)C2 WYTGDNHDOZPMIW-UHOFOFEASA-O 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000007493 shaping process Methods 0.000 description 4
- 238000005304 joining Methods 0.000 description 3
- 240000004282 Grewia occidentalis Species 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004301 light adaptation Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Abstract
本发明公开了一种基板冷却装置,包括冷却水供应装置、连接冷却水供应装置的冷却水管和分别连接冷却水管的多个进水口和多个出水口;冷却水管呈矩形分布,且冷却水管的矩形分布区域被划分为多个子区域,每个子区域的冷却水管两端均只连接有一个进水口和一个出水口;进水口设于矩形分布区域的中部,出水口设于矩形分布区域的角部,且每个子区域的冷却水管首先自相应的进水口延伸至靠近矩形分布区域的中心后,呈蛇形迂回地引出至角部的出水口。本发明还公开了一种基板冷却方法。通过对冷却水管的进水口、出水口以及走线进行设计,保证玻璃基板的所有区域的冷却速度一致,避免玻璃基板各区域收缩量不一致引起的不规则变形。
Description
技术领域
本发明涉及基板制作技术领域,尤其涉及一种基板冷却装置及冷却方法。
背景技术
由于TFT(Thin Film Transistor,即薄膜晶体管)制程过程中会反复地对玻璃基板产品进行-加热-冷却-加热-冷却……的循环反应,使得玻璃不断进行膨涨-收缩-膨涨-收缩……的循环变化,造成玻璃呈不规则变形,尤其是基板面积越大,玻璃基板四周的收缩量大于玻璃基板四角的情况也越来越明显。
而目前的降温设备中,为了保证玻璃基板各个部位的冷却速度一致,通常采用整面的降温板对其上方的玻璃基板进行降温,然而,由于玻璃基板各个角暴露在空气中的面积较多,其降温速率本身就大于其四个边的降温速率,现有的此种设备仍然无法改善玻璃基板的收缩量不均的现象。
发明内容
鉴于现有技术存在的不足,本发明提供了一种基板冷却装置及冷却方法,可以很好地改善玻璃基板的收缩量不均的现象,避免玻璃基板各区域收缩量不一致引起的不规则变形。
为了实现上述的目的,本发明采用了如下的技术方案:
一种基板冷却装置,包括冷却水供应装置、连接所述冷却水供应装置且用于对上方的基板进行冷却的冷却水管和分别连接所述冷却水管的多个进水口和多个出水口,所述进水口连接所述冷却水供应装置;所述冷却水管呈矩形分布,且所述冷却水管的矩形分布区域被划分为多个子区域,每个所述子区域的所述冷却水管两端均只连接有一个所述进水口和一个所述出水口;所述进水口设于所述矩形分布区域的中部,所述出水口设于所述矩形分布区域的角部,且每个所述子区域的所述冷却水管首先自相应的所述进水口延伸至靠近所述矩形分布区域的中心后,呈蛇形迂回地引出至角部的所述出水口。
作为其中一种实施方式,所述矩形分布区域被划分为关于其对称轴对称设置的多个所述子区域。
作为其中一种实施方式,每个所述子区域的面积相同。
作为其中一种实施方式,所述子区域为4个,分别呈矩形布置。
作为其中一种实施方式,所述子区域的所述冷却水管包括多段与其所属的所述子区域的对角线平行的第一段。
作为其中一种实施方式,所述子区域的所述冷却水管还包括多段与其所属的所述子区域的边界平行的第二段,所述第一段与所述第二段相邻且依次连接。
或者,所述子区域为8个,分别呈三角形布置。
作为其中一种实施方式,所述的基板冷却装置还包括定型块,所述定型块覆盖并接触所述冷却水管的上表面。
作为其中一种实施方式,所述的基板冷却装置还包括设于所述定型块下方的多组吸附通道,位于所述矩形分布区域的角部的第一吸附通道共用第一真空吸附装置,位于矩形分布区域的其他区域的第二吸附通道各自连通一个第二真空吸附装置。
本发明的另一目的在于提供一种基板冷却方法,使用一种所述的基板冷却装置,包括:分别同时朝不同的所述子区域的所述进水口注入冷却水,使冷却水依次自所述矩形分布区域的中心呈蛇形迂回地流向角部的所述出水口。
本发明通过对冷却水管的进水口、出水口以及走线进行设计,使得基板冷却装置可以克服玻璃基板的各个角处降温速率大于其四个边的降温速率的现象,保证玻璃基板的所有区域的冷却速度一致,避免玻璃基板各区域收缩量不一致引起的不规则变形。
附图说明
图1为本发明实施例1的基板冷却装置的结构示意图;
图2为本发明实施例1的基板冷却装置的冷却水管的布线方式示意图;
图3为本发明实施例1的基板冷却装置的冷却水管的吸附通道的布置方式示意图;
图4为本发明实施例1的基板冷却方法示意图;
图5为本发明实施例2的基板冷却装置的冷却水管的布线方式示意图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。
本发明的基板冷却装置包括用于供给冷却水的冷却水供应装置、连接冷却水供应装置的冷却水管和分别连接冷却水管的多个进水口和多个出水口,每个进水口均连接冷却水供应装置与冷却水管,自冷却水供应装置通入的低温冷却水进入到冷却水管后,对放置在其上方的基板进行冷却。为保证基板的各个部位均匀降温,本发明的冷却水管的布置区域与基板的形状一致,呈矩形分布,并且,冷却水管的矩形分布区域被划分为多个子区域进行冷却。在每个子区域的冷却水管两端均只连接有一个进水口和一个出水口,所有的进水口设于矩形分布区域的中部,所有的出水口设于矩形分布区域的角部,每个子区域的进水口和出水口互不影响。
每个子区域的冷却水管首先自相应的进水口延伸至靠近矩形分布区域的中心后,呈蛇形迂回地引出至角部的出水口。由于低温的冷却水首先对基板的中部进行冷却,中部区域具有相对较好的降温效果,随着冷却水的迂回行进,基板被自中心朝角部进行冷却,最终经过角部的冷却水温度相对于其经过基板的中部时的温度略有升高,然而,由于基板各个角暴露在空气中的面积较多,其降温速率本身就大于其四个边的降温速率,使得基板的四个角的降温速率与其四个边的降温速率大致相同,保证了基板各区域收缩量一致,不会出现不规则的变形。下面结合具体的实施方式对本发明的构思进行进一步描述。
实施例1
参阅图1,本实施例的基板冷却装置主要包括冷却水供应装置(图未示)、冷却水管10和分别连接冷却水管10的多个进水口21和多个出水口22,进水口21连接在冷却水供应装置的出水端。冷却水管10、进水口21和出水口22可以集成在一个盒体上,使进水口21和出水口22位于盒体的四周,冷却水管10位于盒体围成的空间内。
如图2所示,冷却水管10呈矩形分布,与矩形的基板P的形状匹配,其中,冷却水管10的矩形分布区域被划分为多个子区域100,每个子区域100的冷却水管10两端均只对应地连接有一个进水口21和一个出水口22。并且,进水口21设于矩形分布区域的中部,出水口22设于矩形分布区域的角部,且每个子区域100的冷却水管10首先自相应的进水口21延伸至靠近矩形分布区域的中心后,呈蛇形迂回地引出至角部的出水口22。
冷却水管10布置形成的矩形分布区域被划分为关于其对称轴对称设置的多个子区域100,每个子区域100的面积相同。本实施例以8个子区域为例进行说明。如图2所示,8个三角形布置的子区域100关于矩形分布区域的横、纵对称轴对称布置,每个角部的两个子区域100拼接形成矩形区域。每个三角形布置的子区域100的冷却水管10自进水口21引入后,笔直延伸直至接近矩形区域的中心,然后自中心区域朝矩形区域的角部呈蛇形来回弯折,冷却水管10包括平行于自进水口21引入段的较长的第一方向延伸的段100L,以及连接相邻两条第一方向延伸的段的衔接段100S,衔接段100S的长度短于第一方向延伸的段100L,保证冷却水在相邻的两条第一方向延伸的段100L之间的流动切换速度极短,衔接段100S的延伸方向可以平行于与其临近的三角形边界线。在其他实施方式中,每个子区域100内的冷却水管10呈连续的弧形。
进一步优选地,每个子区域100内的冷却水管10之间的间距不完全相同,冷却水管10之间的间距自矩形分布区域的中部至角部越来越稀疏,可以使得冷却水对角部的冷却效果得到削弱。
另外,基板冷却装置还具有定型块30,定型块30为块状的导热板,用于覆盖并接触冷却水管10的上表面,可以实现局部的均匀导热。结合图3所示,本实施例的定型块30的下方还设置有多组吸附通道40,包括位于矩形分布区域的角部的4个第一吸附通道41和位于矩形分布区域的其他区域的4个第二吸附通道42,4个第一吸附通道41形成一组,共用第一真空吸附装置,4个第二吸附通道42各自成一组,分别连通一个第二真空吸附装置,各组吸附通道40的吸附力可分别调整,在实际的基板冷却过程中,可通过实施监测基板各边的收缩量来适当调整相应的吸附通道40的真空吸力值,改变定型块30与其上方的基板P的接触紧密度,使使各边收缩量不均的状况得到改善,减少基板的形变状况。其中,位于各个角部的第一吸附通道41具体呈L形槽,且L形槽的拐角更靠近矩形分布区域的中部,可以增强对靠近内侧的基板区域的吸附;而每个第二吸附通道42可以包括多条槽,以吸附相应面积的基板区域。
如图4所示,本实施例还提供了一种基板冷却方法,其要点在于:S1、分别同时朝不同的子区域100的进水口21注入冷却水,S2、使冷却水依次自矩形分布区域的中心呈蛇形迂回地流向角部的出水口22。由于每个子区域的冷却水管首先自相应的进水口延伸至靠近矩形分布区域的中心后,呈蛇形迂回地引出至角部的出水口。与角部相比,中部区域具有相对较好的降温效果,可以平衡由于基板各个角暴露在空气中的面积较多,其降温速率本身就大于其四个边的降温速率的情形,使得基板的四个角的降温速率与其四个边的降温速率大致相同,保证了基板各区域收缩量一致,不会出现不规则的变形。
实施例2
如图5所示,与实施例1不同的是,本实施例的冷却水管10分布区域被划分4个矩形的子区域,其仅具有4个进水口21和4个出水口22。每个子区域100的冷却水管10包括多段与其所属的子区域100的对角线平行的第一段101以及多段与其所属的子区域100的边界平行的第二段102,第一段101与第二段102相邻且依次连接。该第一段101与第二段102也可以为平滑的曲线,也可以起到与实施例1类似的冷却效果。
本发明通过对冷却水管的进水口、出水口以及走线进行设计,使得基板冷却装置可以克服玻璃基板的各个角处降温速率大于其四个边的降温速率的现象,保证玻璃基板的所有区域的冷却速度一致,避免玻璃基板各区域收缩量不一致引起的不规则变形。每个子区域的冷却水管首先自相应的进水口延伸至靠近矩形分布区域的中心后,呈蛇形迂回地引出至角部的出水口。由于低温的冷却水首先对基板的中部进行冷却,中部区域具有相对较好的降温效果,随着冷却水的迂回行进,基板被自中心朝角部进行冷却,最终经过角部的冷却水温度相对于其经过基板的中部时的温度略有升高,然而,由于基板各个角暴露在空气中的面积较多,其降温速率本身就大于其四个边的降温速率,使得基板的四个角的降温速率与其四个边的降温速率大致相同,保证了基板各区域收缩量一致,不会出现不规则的变形。
以上所述仅是本申请的具体实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本申请的保护范围。
Claims (10)
1.一种基板冷却装置,其特征在于,包括冷却水供应装置、连接所述冷却水供应装置且用于对上方的基板(P)进行冷却的冷却水管(10)和分别连接所述冷却水管(10)的多个进水口(21)和多个出水口(22),所述进水口(21)连接所述冷却水供应装置;所述冷却水管(10)呈矩形分布,且所述冷却水管(10)的矩形分布区域被划分为多个子区域(100),每个所述子区域(100)的所述冷却水管(10)两端均只连接有一个所述进水口(21)和一个所述出水口(22);所述进水口(21)设于所述矩形分布区域的边缘的中部,所述出水口(22)设于所述矩形分布区域的角部,且每个所述子区域(100)的所述冷却水管(10)首先自相应的所述进水口(21)延伸至靠近所述矩形分布区域的中心后,呈蛇形迂回地引出至角部的所述出水口(22)。
2.根据权利要求1所述的基板冷却装置,其特征在于,所述矩形分布区域被划分为关于其对称轴对称设置的多个所述子区域(100)。
3.根据权利要求2所述的基板冷却装置,其特征在于,每个所述子区域(100)的面积相同。
4.根据权利要求2所述的基板冷却装置,其特征在于,所述子区域(100)为4个,分别呈矩形布置。
5.根据权利要求4所述的基板冷却装置,其特征在于,所述子区域(100)的所述冷却水管(10)包括多段与其所属的所述子区域(100)的对角线平行的第一段(101)。
6.根据权利要求5所述的基板冷却装置,其特征在于,所述子区域(100)的所述冷却水管(10)还包括多段与其所属的所述子区域(100)的边界平行的第二段(102),所述第一段(101)与所述第二段(102)相邻且依次连接。
7.根据权利要求2所述的基板冷却装置,其特征在于,所述子区域(100)为8个,分别呈三角形布置。
8.根据权利要求1-7任一所述的基板冷却装置,其特征在于,还包括定型块(30),所述定型块(30)覆盖并接触所述冷却水管(10)的上表面。
9.根据权利要求8所述的基板冷却装置,其特征在于,还包括设于所述定型块(30)下方的多组吸附通道(40),位于所述矩形分布区域的角部的第一吸附通道(41)共用第一真空吸附装置,位于矩形分布区域的其他区域的第二吸附通道(42)各自连通一个第二真空吸附装置。
10.一种基板冷却方法,其特征在于,使用权利要求1-9任一所述的基板冷却装置,包括:分别同时朝不同的所述子区域(100)的所述进水口(21)注入冷却水,使冷却水依次自相应的所述进水口(21)、所述矩形分布区域的中心呈蛇形迂回地流向角部的所述出水口(22)。
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