JP6901266B2 - 付加製造されたガス分配マニホールド - Google Patents
付加製造されたガス分配マニホールド Download PDFInfo
- Publication number
- JP6901266B2 JP6901266B2 JP2017003746A JP2017003746A JP6901266B2 JP 6901266 B2 JP6901266 B2 JP 6901266B2 JP 2017003746 A JP2017003746 A JP 2017003746A JP 2017003746 A JP2017003746 A JP 2017003746A JP 6901266 B2 JP6901266 B2 JP 6901266B2
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- Prior art keywords
- tubular passage
- heating element
- fluid flow
- resistance heating
- path
- Prior art date
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- 239000012530 fluid Substances 0.000 claims description 435
- 238000010438 heat treatment Methods 0.000 claims description 226
- 238000004519 manufacturing process Methods 0.000 claims description 90
- 238000000034 method Methods 0.000 claims description 73
- 239000000654 additive Substances 0.000 claims description 37
- 230000000996 additive effect Effects 0.000 claims description 37
- 238000002156 mixing Methods 0.000 claims description 27
- 238000007650 screen-printing Methods 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 15
- 238000012545 processing Methods 0.000 claims description 14
- 239000010410 layer Substances 0.000 description 184
- 239000007789 gas Substances 0.000 description 88
- 239000000463 material Substances 0.000 description 28
- 238000000151 deposition Methods 0.000 description 25
- 230000008021 deposition Effects 0.000 description 24
- 239000000758 substrate Substances 0.000 description 20
- 230000008569 process Effects 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 238000010926 purge Methods 0.000 description 12
- 230000002411 adverse Effects 0.000 description 11
- 238000005452 bending Methods 0.000 description 11
- 239000000919 ceramic Substances 0.000 description 10
- 238000013461 design Methods 0.000 description 9
- 238000005266 casting Methods 0.000 description 8
- 230000007246 mechanism Effects 0.000 description 8
- 238000005553 drilling Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000005482 strain hardening Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000009849 deactivation Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000010146 3D printing Methods 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000007605 air drying Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 239000000109 continuous material Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052602 gypsum Inorganic materials 0.000 description 1
- 239000010440 gypsum Substances 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000010114 lost-foam casting Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000009972 noncorrosive effect Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000012255 powdered metal Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910000601 superalloy Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/30—Auxiliary operations or equipment
- B29C64/386—Data acquisition or data processing for additive manufacturing
- B29C64/393—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
- B01F35/833—Flow control by valves, e.g. opening intermittently
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/88—Forming a predetermined ratio of the substances to be mixed by feeding the materials batchwise
- B01F35/883—Forming a predetermined ratio of the substances to be mixed by feeding the materials batchwise using flow rate controls for feeding the substances
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
- B22F12/70—Gas flow means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
- B22F7/02—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers
- B22F7/04—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers with one or more layers not made from powder, e.g. made from solid metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K19/00—Arrangements of valves and flow lines specially adapted for mixing fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L13/00—Non-disconnectible pipe-joints, e.g. soldered, adhesive or caulked joints
- F16L13/002—Non-disconnectible pipe-joints, e.g. soldered, adhesive or caulked joints for pipes having a rectangular cross-section
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/12—Flanged joints specially adapted for particular pipes
- F16L23/14—Flanged joints specially adapted for particular pipes for rectangular pipes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L25/00—Constructive types of pipe joints not provided for in groups F16L13/00 - F16L23/00 ; Details of pipe joints not otherwise provided for, e.g. electrically conducting or insulating means
- F16L25/0009—Joints for pipes with a square or rectangular cross-section
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L3/00—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets
- F16L3/006—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets for pipes with a rectangular cross-section
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L41/00—Branching pipes; Joining pipes to walls
- F16L41/02—Branch units, e.g. made in one piece, welded, riveted
- F16L41/025—Branch units, e.g. made in one piece, welded, riveted with rectangular cross-section
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L43/00—Bends; Siphons
- F16L43/001—Bends; Siphons made of metal
- F16L43/003—Bends; Siphons made of metal having a rectangular cross-section
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L47/00—Connecting arrangements or other fittings specially adapted to be made of plastics or to be used with pipes made of plastics
- F16L47/14—Flanged joints
- F16L47/145—Flanged joints for rectangular pipes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L51/00—Expansion-compensation arrangements for pipe-lines
- F16L51/02—Expansion-compensation arrangements for pipe-lines making use of bellows or an expansible folded or corrugated tube
- F16L51/021—Expansion-compensation arrangements for pipe-lines making use of bellows or an expansible folded or corrugated tube having a rectangular cross-section
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L9/00—Rigid pipes
- F16L9/003—Rigid pipes with a rectangular cross-section
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/10—Formation of a green body
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/20—Direct sintering or melting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/60—Treatment of workpieces or articles after build-up
- B22F10/66—Treatment of workpieces or articles after build-up by mechanical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
- B22F12/50—Means for feeding of material, e.g. heads
- B22F12/53—Nozzles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
- B22F12/90—Means for process control, e.g. cameras or sensors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
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- B29K2995/0006—Dielectric
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
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Description
本発明は、たとえば、以下のような態様で実現することもできる。
(1)適用例1
装置であって、
付加製造によって構築され、複数の管状通路を含むマニホールドであって、
少なくとも1本の管状通路が、1つの道筋をたどり、第1の走路を含む外表面を有し、
前記第1の走路は、前記道筋に沿って形成された第1の断面形状によって画定される表面を含み、
前記第1の断面形状は、前記道筋に対して直角な面内にあり、
前記第1の断面形状は、実質的に直線的である、
マニホールドを備える装置。
(2)適用例2
適用例1の装置であって、
前記道筋は、三次元の経路である、装置。
(3)適用例3
適用例1の装置であって、
前記第1の断面形状は、前記第1の走路を凹状にできるように、僅かに湾曲される、装置。
(4)適用例4
適用例1の装置であって、
前記第1の断面形状は、相対する側壁を前記走路の長さに沿って画定して谷間を形成する特徴を含む、装置。
(5)適用例5
適用例1ないし4のいずれか一項の装置であって、
前記少なくとも1本の管状通路の前記外表面は、第2の走路を含み、
前記第2の走路は、前記道筋に沿って形成された第2の断面形状によって画定される表面を含み、
前記第2の断面形状は、前記道筋に対して直角な面内にあり、
前記第2の断面形状は、実質的に直線的である、装置。
(6)適用例6
適用例5の装置であって、
前記第2の断面形状は、前記道筋に対して直角な前記面に垂直に見たときに、前記第1の断面形状に対して射角である、装置。
(7)適用例7
適用例5の装置であって、
前記第2の断面形状は、前記道筋に対して直角な前記面に垂直に見たときに、前記第1の断面形状に対して実質的に平行である、装置。
(8)適用例8
適用例5の装置であって、
前記第2の断面形状は、前記道筋に対して直角な前記面に垂直に見たときに、前記第1の断面形状に対して直角である、装置。
(9)適用例9
適用例1ないし4のいずれか一項の装置であって、
前記少なくとも1本の管状通路は、さらに、前記第1の走路に隣接し前記第1の走路に沿って前記第1の走路の実質的に全長にわたって伸びる第1の誘電体層を含む、装置。
(10)適用例10
適用例9の装置であって、
前記少なくとも1本の管状通路は、さらに、前記第1の誘電体層に隣接し前記第1の誘電体層に沿って前記第1の誘電体層の実質的に全長にわたって伸びる抵抗加熱素子層を含む、装置。
(11)適用例11
適用例10の装置であって、
前記少なくとも1本の管状通路は、さらに、前記抵抗加熱素子層に隣接し前記第1の走路に沿って前記第1の走路の実質的に全長にわたって伸びる第2の誘電体層を含み、
前記抵抗加熱素子層は、前記第1の誘電体層と前記第2の誘電体層との間に配置される、装置。
(12)適用例12
適用例10の装置であって、
前記抵抗加熱素子層は、前記管状通路を第1の温度に加熱するように構成された第1の加熱ゾーンを含み、
前記抵抗加熱素子層は、前記管状通路を前記第1の温度とは異なる第2の温度に加熱するように構成された第2の加熱ゾーンを含む、装置。
(13)適用例13
付加製造を使用して管状通路上に加熱器を形成するための方法であって、
前記管状通路を提供することと、
コンピュータ制御される第1のノズルを使用して、前記管状通路上に第1の流動性誘電体を堆積させることと、
前記第1の流動性誘電体を硬化させることと、
コンピュータ制御される第2のノズルを使用して、前記硬化された第1の流動性誘電体上に抵抗加熱素子を堆積させることと、
前記抵抗加熱素子を硬化させることと、
コンピュータ制御される第3のノズルを使用して、前記抵抗加熱配線上に第2の流動性誘電体を堆積させることであって、前記抵抗加熱素子は、前記硬化された第1の流動性誘電体と、前記第2の流動性誘電体との間に配置される、第2の流動性誘電体の堆積と、
前記第2の流動性誘電体を硬化させることと、
を備える方法。
(14)適用例14
適用例13の方法であって、
前記管状通路は、三次元の道筋をたどる、方法。
(15)適用例15
適用例13の方法であって、
前記管状通路を提供することは、前記管状通路を付加製造することを含む、方法。
(16)適用例16
適用例15の方法であって、
前記管状通路は、1つの道筋をたどり、走路を含む外表面を有し、
前記走路は、前記道筋に沿って形成された第1の断面形状によって画定される表面を含み、
前記第1の断面形状は、前記道筋に対して直角な面内にあり、
前記第1の断面形状は、実質的に直線的であり、
前記第1の流動性誘電体は、前記走路上に堆積される、方法。
(17)適用例17
適用例13ないし16のいずれか一項の方法であって、
前記管状通路を提供することは、複数の管状通路を含むマニホールドを提供することを含む、方法。
(18)適用例18
適用例13ないし15のいずれか一項の方法であって、
前記管状通路を提供することは、複数の管状通路を含むマニホールドを付加製造することを含む、方法。
(19)適用例19
適用例18の方法であって、
少なくとも1本の管状通路が、1つの道筋をたどり、走路を含む外表面を有し、
前記走路は、前記道筋に沿って形成された第1の断面形状によって画定される表面を含み、
前記第1の断面形状は、前記道筋に対して直角な面内にあり、
前記第1の断面形状は、実質的に直線的であり、
前記第1の流動性誘電体は、前記走路上に堆積される、方法。
(20)適用例20
スクリーン印刷を使用して管状通路上に加熱器を形成するための方法であって、
付加製造された管状通路を提供することであって、
前記管状通路は、二次元の道筋をたどり、走路を含む外表面を有し、
前記走路は、前記道筋に沿って形成された第1の断面形状によって画定される表面を含み、
前記第1の断面形状は、前記道筋に対して直角な面内にあり、
前記第1の断面形状は、実質的に直線的である、管状通路の提供と、
前記走路上に第1の誘電体層をスクリーン印刷することと、
前記第1の誘電体層を硬化させることと、
前記第1の誘電体層上に抵抗加熱素子をスクリーン印刷することと、
前記抵抗加熱配線を硬化させることと、
前記抵抗熱素子上に第2の誘電体層をスクリーン印刷することであって、前記抵抗加熱素子は、前記第1の誘電体層と前記第2の誘電体層との間に配置される、第2の誘電体層のスクリーン印刷と、
前記第2の誘電体層を硬化させることと、
を備える方法。
Claims (35)
- 半導体処理チャンバにおいて用いられる装置であって、
付加製造によって構築されるマニホールドであって、
混合チャンバと、
複数の流路の部分であって、各流路は、
第1の流体フローコンポーネント・インターフェイス入口および第1の流体フローコンポーネント・インターフェイス出口を含む第1の流体フローコンポーネント・インターフェイスと、
その流路の前記第1の流体フローコンポーネント・インターフェイス出口に前記混合チャンバを流体的に接続する第1の管状通路と、
その流路の前記第1の流体フローコンポーネント・インターフェイス入口に流体的に接続された第2の管状通路と、を含む複数の流路の部分と、を備え、
前記第1の管状通路および前記第2の管状通路の1本以上は、上記流路の少なくとも1本について、1つのそれぞれの道筋をたどり、第1の走路を含む外表面を有し、
それぞれの第1の走路は、前記それぞれの道筋に沿って形成されたそれぞれの第1の断面形状によって画定される表面を含み、
それぞれの第1の走路について、
前記それぞれの第1の断面形状は、前記それぞれの道筋に対して直角な面内にあり、
前記それぞれの第1の断面形状は、実質的に直線的である、
マニホールドを備える装置。 - 請求項1に記載の装置であって、
前記道筋は、三次元の経路である、装置。 - 請求項1に記載の装置であって、
前記第1の断面形状は、前記第1の走路を凹状にできるように、湾曲される、装置。 - 半導体処理チャンバにおいて用いられる装置であって、
付加製造によって構築され、複数の管状通路を含むマニホールドであって、
少なくとも1本の管状通路が、1つのそれぞれの道筋をたどり、第1の走路を含む外表面を有し、
前記第1の走路は、前記それぞれの道筋に沿って形成された第1の断面形状によって画定される表面を含み、
前記第1の断面形状は、前記それぞれの道筋に対して直角な面内にあり、
前記第1の断面形状は、実質的に直線的であり、
前記第1の断面形状は、相対する側壁を前記第1の走路の長さに沿って画定して谷間を形成する特徴を含む、装置。 - 請求項1ないし3のいずれか一項に記載の装置であって、
前記少なくとも1本の管状通路の前記外表面は、第2の走路を含み、
前記第2の走路は、前記道筋に沿って形成された第2の断面形状によって画定される表面を含み、
前記第2の断面形状は、前記道筋に対して直角な面内にあり、
前記第2の断面形状は、実質的に直線的である、装置。 - 請求項5に記載の装置であって、
前記第2の断面形状は、前記道筋に対して直角な前記面に垂直に見たときに、前記第1の断面形状に対して斜角である、装置。 - 請求項5に記載の装置であって、
前記第2の断面形状は、前記道筋に対して直角な前記面に垂直に見たときに、前記第1の断面形状に対して実質的に平行である、装置。 - 請求項5に記載の装置であって、
前記第2の断面形状は、前記道筋に対して直角な前記面に垂直に見たときに、前記第1の断面形状に対して直角である、装置。 - 請求項1ないし3のいずれか一項に記載の装置であって、
前記少なくとも1本の管状通路は、さらに、前記第1の走路に隣接し前記第1の走路に沿って前記第1の走路の実質的に全長にわたって伸びる第1の誘電体層を含む、装置。 - 請求項9に記載の装置であって、
前記少なくとも1本の管状通路は、さらに、前記第1の誘電体層に隣接し前記第1の誘電体層に沿って前記第1の誘電体層の実質的に全長にわたって伸びる抵抗加熱素子層を含む、装置。 - 請求項10に記載の装置であって、
前記少なくとも1本の管状通路は、さらに、前記抵抗加熱素子層に隣接し前記第1の走路に沿って前記第1の走路の実質的に全長にわたって伸びる第2の誘電体層を含み、
前記抵抗加熱素子層は、前記第1の誘電体層と前記第2の誘電体層との間に配置される、装置。 - 請求項10に記載の装置であって、
前記抵抗加熱素子層は、前記管状通路を第1の温度に加熱するように構成された第1の加熱ゾーンを含み、
前記抵抗加熱素子層は、前記管状通路を前記第1の温度とは異なる第2の温度に加熱するように構成された第2の加熱ゾーンを含む、装置。 - 請求項1に記載の装置であって、
前記少なくとも1本の流路は、さらに、加熱素子を含み、
前記加熱素子は、前記第1の管状通路および前記第2の管状通路のうちの1本以上の前記第1の走路上に配置され、
前記加熱素子は、前記第1の管状通路および前記第2の管状通路のうちの1本以上の前記それぞれの道筋に沿って伸びる、装置。 - 請求項13に記載の装置であって、
前記加熱素子は、前記第1の管状通路および前記第2の管状通路の両方の前記第1の走路上に配置され、
前記加熱素子は、前記第1の管状通路および前記第2の管状通路の両方の前記それぞれの道筋に沿って伸びる、装置。 - 請求項13に記載の装置であって、
前記複数の流路の各流路は、それぞれの道筋をたどり、第1の走路を含む外表面を有し、
前記複数の流路の各流路は、加熱素子を含み、
各流路について、前記加熱素子は、その流路の前記第1の管状通路および前記第2の管状通路のうちの1本以上の前記第1の走路上に配置され、
各流路について、前記加熱素子は、その流路の前記第1の管状通路および前記第2の管状通路のうちの1本以上の前記それぞれの道筋に沿って伸びる、装置。 - 請求項15に記載の装置であって、
各流路について、前記加熱素子は、その流路の前記第1の管状通路および前記第2の管状通路の両方の前記第1の走路上に配置され、
各流路について、前記加熱素子は、その流路の前記第1の管状通路および前記第2の管状通路の両方の前記それぞれの道筋に沿って伸びる、装置。 - 請求項1に記載の装置であって、
各流路の前記第1の流体フローコンポーネント・インターフェイス、前記第1の管状通路、および前記第2の管状通路は、一体化している、装置。 - 半導体処理チャンバにおいて用いられる装置であって、
付加製造によって構築されたマニホールドであって、
混合チャンバと、
抵抗加熱素子と、
複数の流路の部分であって、各流路は、
第1の流体フローコンポーネント・インターフェイス入口および第1の流体フローコンポーネント・インターフェイス出口を含む第1の流体フローコンポーネント・インターフェイスと、
その流路の前記第1の流体フローコンポーネント・インターフェイス出口に前記混合チャンバを流体的に接続する第1の管状通路と、
その流路の前記第1の流体フローコンポーネント・インターフェイス入口に流体的に接続された第2の管状通路と、を含む複数の流路の部分と、を備えるマニホールドと、を備え、
上記流路の少なくとも1本について、前記第1の管状通路および前記第2の管状通路のうちの1本以上は、それぞれの道筋をたどり、
それぞれの道筋をたどる前記少なくとも1本の流路について、前記抵抗加熱素子は、前記第1の管状通路および前記第2の管状通路のうちの1本以上の上に配置され、前記第1の管状通路および前記第2の管状通路のうちの1本以上の前記それぞれの道筋に沿って伸びる、装置。 - 請求項18に記載の装置であって、
各流路の前記第1の流体フローコンポーネント・インターフェイス、前記第1の管状通路、および前記第2の管状通路は、一体化している、装置。 - 請求項18に記載の装置であって、
前記それぞれの道筋をたどる前記少なくとも1本の流路について、
前記抵抗加熱素子が配置される前記第1の管状通路および前記第2の管状通路のうちの前記1本以上は、さらに、第1の誘電体層を含み、
前記第1の誘電体層は、前記抵抗加熱素子が配置される前記第1の管状通路および前記第2の管状通路のうちの前記1本以上の上に配置され、前記1本以上に沿って伸び、
前記第1の誘電体層は、前記抵抗加熱素子と、前記抵抗加熱素子が配置される前記第1の管状通路および前記第2の管状通路のうちの前記1本以上と、の間に配置される、装置。 - 請求項20に記載の装置であって、
前記それぞれの道筋をたどる前記少なくとも1本の流路について、
前記抵抗加熱素子が配置される前記第1の管状通路および前記第2の管状通路のうちの前記1本以上は、さらに、第2の誘電体層を含み、
前記第2の誘電体層は、前記抵抗加熱素子に隣接し、前記抵抗加熱素子が配置される前記第1の管状通路および前記第2の管状通路のうちの前記1本以上に沿って伸び、
前記抵抗加熱素子は、前記第1の誘電体層と前記第2の誘電体層との間に配置される、装置。 - 請求項18に記載の装置であって、さらに、
前記第1の管状通路と前記第2の管状通路との少なくとも一方の上に配置される抵抗加熱素子層をさらに備え、
前記抵抗加熱素子層は、前記抵抗加熱素子層が配置される前記第1の管状通路または前記第2の管状通路を第1の温度に加熱するように構成された第1の加熱ゾーンを含み、
前記抵抗加熱素子層は、前記抵抗加熱素子層が配置される前記第1の管状通路または前記第2の管状通路を前記第1の温度とは異なる第2の温度に加熱するように構成された第2の加熱ゾーンを含む、装置。 - 請求項18に記載の装置であって、さらに、
複数の抵抗加熱素子層を含み、
前記複数の流路の各流路は、それぞれの道筋をたどり、
前記複数の流路の各流路は、抵抗加熱素子層を含み、
各流路について、前記抵抗加熱素子層は、その流路の前記第1の管状通路および前記第2の管状通路のうちの1本以上の上に配置され、
各流路について、前記抵抗加熱素子層は、その流路の前記第1の管状通路および前記第2の管状通路のうちの前記1本以上に沿って伸びる、装置。 - 請求項18に記載の装置であって、
抵抗加熱素子は、前記抵抗加熱素子が配置される前記第1の管状通路および前記第2の管状通路のうちの前記1本以上の断面の周囲の少なくとも一部に沿って配置される、装置。 - 請求項24に記載の装置であって、
前記抵抗加熱素子は、前記抵抗加熱素子が配置される前記第1の管状通路および前記第2の管状通路のうちの前記1本以上の前記断面の全周囲に沿って配置される、装置。 - 請求項18に記載の装置であって、
抵抗加熱素子層は、1つ以上の抵抗加熱素子を含む、装置。 - 請求項26に記載の装置であって、
少なくとも1つの抵抗加熱素子は、らせん状パターン、蛇行状パターン、ならびに直線状および湾曲した部分を有するパターンのうちの1つをたどる、装置。 - 付加製造を使用して管状通路上に加熱器を形成するための方法であって、
前記管状通路を提供することと、
コンピュータ制御される第1のノズルを使用して、前記管状通路上に第1の流動性誘電体を堆積させることと、
前記第1の流動性誘電体を硬化させることと、
コンピュータ制御される第2のノズルを使用して、前記硬化された第1の流動性誘電体上に抵抗加熱素子を堆積させることと、
前記抵抗加熱素子を硬化させることと、
コンピュータ制御される第3のノズルを使用して、前記抵抗加熱素子上に第2の流動性誘電体を堆積させることであって、前記抵抗加熱素子は、前記硬化された第1の流動性誘電体と、前記第2の流動性誘電体との間に配置される、第2の流動性誘電体の堆積と、
前記第2の流動性誘電体を硬化させることと、
を備える方法。 - 請求項28に記載の方法であって、
前記管状通路は、三次元の道筋をたどる、方法。 - 請求項28に記載の方法であって、
前記管状通路を提供することは、前記管状通路を付加製造することを含む、方法。 - 請求項30に記載の方法であって、
前記管状通路は、1つの道筋をたどり、走路を含む外表面を有し、
前記走路は、前記道筋に沿って形成された第1の断面形状によって画定される表面を含み、
前記第1の断面形状は、前記道筋に対して直角な面内にあり、
前記第1の断面形状は、実質的に直線的であり、
前記第1の流動性誘電体は、前記走路上に堆積される、方法。 - 請求項28ないし31のいずれか一項に記載の方法であって、
前記管状通路を提供することは、複数の管状通路を含むマニホールドを提供することを含む、方法。 - 請求項28ないし30のいずれか一項に記載の方法であって、
前記管状通路を提供することは、複数の管状通路を含むマニホールドを付加製造することを含む、方法。 - 請求項33に記載の方法であって、
少なくとも1本の管状通路が、1つの道筋をたどり、走路を含む外表面を有し、
前記走路は、前記道筋に沿って形成された第1の断面形状によって画定される表面を含み、
前記第1の断面形状は、前記道筋に対して直角な面内にあり、
前記第1の断面形状は、実質的に直線的であり、
前記第1の流動性誘電体は、前記走路上に堆積される、方法。 - スクリーン印刷を使用して管状通路上に加熱器を形成するための方法であって、
付加製造された管状通路を提供することであって、
前記管状通路は、二次元の道筋をたどり、走路を含む外表面を有し、
前記走路は、前記道筋に沿って形成された第1の断面形状によって画定される表面を含み、
前記第1の断面形状は、前記道筋に対して直角な面内にあり、
前記第1の断面形状は、実質的に直線的である、管状通路の提供と、
前記走路上に第1の誘電体層をスクリーン印刷することと、
前記第1の誘電体層を硬化させることと、
前記第1の誘電体層上に抵抗加熱素子をスクリーン印刷することと、
前記抵抗加熱素子を硬化させることと、
前記抵抗加熱素子上に第2の誘電体層をスクリーン印刷することであって、前記抵抗加熱素子は、前記第1の誘電体層と前記第2の誘電体層との間に配置される、第2の誘電体層のスクリーン印刷と、
前記第2の誘電体層を硬化させることと、
を備える方法。
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