JP2017092363A - ウエーハの分割方法 - Google Patents
ウエーハの分割方法 Download PDFInfo
- Publication number
- JP2017092363A JP2017092363A JP2015223723A JP2015223723A JP2017092363A JP 2017092363 A JP2017092363 A JP 2017092363A JP 2015223723 A JP2015223723 A JP 2015223723A JP 2015223723 A JP2015223723 A JP 2015223723A JP 2017092363 A JP2017092363 A JP 2017092363A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing groove
- wiring layer
- cutting
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 37
- 238000005520 cutting process Methods 0.000 claims abstract description 69
- 238000001312 dry etching Methods 0.000 claims abstract description 29
- 230000001678 irradiating effect Effects 0.000 claims abstract description 13
- 230000001681 protective effect Effects 0.000 claims description 32
- 239000007789 gas Substances 0.000 description 52
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 26
- 229910052710 silicon Inorganic materials 0.000 description 26
- 239000010703 silicon Substances 0.000 description 26
- 239000000758 substrate Substances 0.000 description 26
- 238000005530 etching Methods 0.000 description 17
- 238000003754 machining Methods 0.000 description 11
- 239000002390 adhesive tape Substances 0.000 description 8
- 238000003384 imaging method Methods 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- -1 Ar and He Chemical class 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
- B05D1/005—Spin coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D19/00—Shearing machines or shearing devices cutting by rotary discs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K10/00—Welding or cutting by means of a plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
Abstract
【解決手段】表面W2aにCuを含む配線層W2を備え分割予定ラインSで区画された領域にデバイスDが形成されたウエーハWを分割する方法であって、ウエーハに対して吸収性を有する波長のレーザー光線を配線層側から照射して分割予定ラインSに沿って配線層を除去し加工溝Mを形成するレーザー加工溝形成工程と、レーザー加工溝形成工程の実施後、加工溝に沿って加工溝の最外幅Mwよりも幅が狭い切削ブレードをウエーハに切り込ませウエーハを完全切断する切削工程と、レーザー加工溝形成工程の実施後において、少なくとも加工溝をドライエッチングするドライエッチング工程と、からなる。
【選択図】図10
Description
本発明に係るウエーハの分割方法においては、まず、デバイスDの上面(ウエーハWの表面W2a)を保護する保護膜W3(図4において図示)を形成する保護膜形成工程を実施する。
保護膜形成工程を実施した後、例えば、ウエーハWに対して吸収性を有する波長のレーザー光線を配線層W2側から照射して分割予定ラインSに沿って配線層W2を除去し加工溝M(図8において図示)を形成するレーザー加工溝形成工程を行う。
レーザー加工溝形成工程の実施後において、例えば、図8に示す加工溝Mをドライエッチングするドライエッチング工程を行う。本工程においては、加工溝Mにおける露出しているシリコン基板W1部分をエッチングしていくが、特に、加工溝Mにおいてシリコン基板W1で形成された側壁部分に対するエッチングが重要となる。
(条件A)
エッチングガス: SF6ガス
プラズマ支援ガス: Arガス
エッチングガス供給量:1500cc/分
プラズマ支援ガス供給量:1000cc/分
高周波電力の出力: 3kW
本実施形態においては、ドライエッチング工程を実施後、加工溝Mに沿って加工溝Mの最外幅Mwよりも幅が狭い図11に示す切削ブレード60をウエーハWに切り込ませウエーハWを完全切断する切削工程を実施する。水溶性樹脂を用いて保護膜W3を形成しているので、保護膜W3は切削工程において切削水により溶解しウエーハWから除去される。
W:ウエーハ W1:シリコン基板 W2:Cuを含む配線層 W3:保護膜
S:分割予定ライン D:デバイス T:粘着テープ F:リングフレーム
1:レーザー加工装置
11:チャックテーブル 110:吸着部 110a:保持面 111:枠体
112:回転手段
12:レーザー加工手段 120:ハウジング 120a:レーザー発振器
121:集光器 121a:ミラー 121b:集光レンズ
13:アライメント手段 130:撮像手段 M:加工溝 G:Cuを含むデブリ
9:プラズマエッチング装置
90:静電チャック(ESC) 900:保持テーブル 901:電極
91:ガス噴出ヘッド 910:ガス拡散空間 911:ガス導入口
912:ガス吐出口 913:ガス配管
92:チャンバ 920:搬入出口 921:ゲートバルブ
93:ガス供給部 94,94a:整合器 95,95a:高周波電源
96:排気管 97:排気装置 98:制御部
2:切削装置
30:チャックテーブル 30a:保持面 30b:回転手段
6:切削手段 60:切削ブレード 61:アライメント手段 610:撮像手段
62:スピンドルハウジング 63:スピンドル
Claims (2)
- 上面にCuを含む配線層を備え分割予定ラインで区画された領域にデバイスが形成されたウエーハを分割するウエーハの分割方法であって、
ウエーハに対して吸収性を有する波長のレーザー光線を該配線層側から照射して分割予定ラインに沿って該配線層を除去し加工溝を形成するレーザー加工溝形成工程と、
該レーザー加工溝形成工程の実施後、該加工溝に沿って該加工溝の最外幅よりも幅が狭い切削ブレードをウエーハに切り込ませウエーハを完全切断する切削工程と、
該レーザー加工溝形成工程の実施後において、少なくとも該加工溝をドライエッチングするドライエッチング工程と、
からなるウエーハの分割方法。 - 前記ドライエッチング工程の実施前までに前記デバイスの上面を保護する保護膜を形成する保護膜形成工程を行う請求項1記載のウエーハの分割方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015223723A JP6587911B2 (ja) | 2015-11-16 | 2015-11-16 | ウエーハの分割方法 |
TW105132905A TWI732790B (zh) | 2015-11-16 | 2016-10-12 | 晶圓的分割方法 |
KR1020160149040A KR102493116B1 (ko) | 2015-11-16 | 2016-11-09 | 웨이퍼의 분할 방법 |
US15/348,071 US10354919B2 (en) | 2015-11-16 | 2016-11-10 | Wafer dividing method |
CN201610997489.3A CN106847747B (zh) | 2015-11-16 | 2016-11-11 | 晶片的分割方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015223723A JP6587911B2 (ja) | 2015-11-16 | 2015-11-16 | ウエーハの分割方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017092363A true JP2017092363A (ja) | 2017-05-25 |
JP6587911B2 JP6587911B2 (ja) | 2019-10-09 |
Family
ID=58690792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015223723A Active JP6587911B2 (ja) | 2015-11-16 | 2015-11-16 | ウエーハの分割方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10354919B2 (ja) |
JP (1) | JP6587911B2 (ja) |
KR (1) | KR102493116B1 (ja) |
CN (1) | CN106847747B (ja) |
TW (1) | TWI732790B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020009957A (ja) * | 2018-07-10 | 2020-01-16 | 株式会社ディスコ | 半導体ウェーハの加工方法 |
JP2020021786A (ja) * | 2018-07-31 | 2020-02-06 | 株式会社ディスコ | チップ製造方法 |
JP2020109815A (ja) * | 2019-01-07 | 2020-07-16 | 株式会社ディスコ | ウェーハの加工方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017213628A (ja) * | 2016-05-31 | 2017-12-07 | 株式会社ディスコ | 切削装置 |
JP2018125479A (ja) * | 2017-02-03 | 2018-08-09 | 株式会社ディスコ | ウェーハの加工方法 |
CN107414309B (zh) * | 2017-07-14 | 2019-12-17 | 北京中科镭特电子有限公司 | 一种激光加工晶圆的方法及装置 |
KR102492733B1 (ko) | 2017-09-29 | 2023-01-27 | 삼성디스플레이 주식회사 | 구리 플라즈마 식각 방법 및 디스플레이 패널 제조 방법 |
JP7142236B2 (ja) * | 2018-03-28 | 2022-09-27 | パナソニックIpマネジメント株式会社 | 素子チップの製造方法 |
JP7068028B2 (ja) * | 2018-05-09 | 2022-05-16 | 株式会社ディスコ | ウェーハの分割方法 |
US10622272B1 (en) | 2018-10-24 | 2020-04-14 | Advanced Semiconductor Engineering, Inc. | Semiconductor chip structure and semiconductor package |
JP7325897B2 (ja) * | 2019-04-18 | 2023-08-15 | 株式会社ディスコ | 加工装置及び被加工物の加工方法 |
US11854888B2 (en) * | 2020-06-22 | 2023-12-26 | Applied Materials, Inc. | Laser scribing trench opening control in wafer dicing using hybrid laser scribing and plasma etch approach |
KR102529664B1 (ko) | 2021-02-01 | 2023-05-04 | 동의대학교 산학협력단 | 식용 가능한 생분해성 숟가락 및 이의 제조방법 |
CN113644035A (zh) * | 2021-08-06 | 2021-11-12 | 广东工业大学 | 一种半导体晶圆及其激光加工方法、系统 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012023085A (ja) * | 2010-07-12 | 2012-02-02 | Disco Abrasive Syst Ltd | 光デバイスウエーハの加工方法 |
JP2014520407A (ja) * | 2011-06-24 | 2014-08-21 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | ダイアタッチフィルム(daf)又は他の材料層をダイシングする前におけるレーザカットされた半導体のエッチング |
JP2015079790A (ja) * | 2013-10-15 | 2015-04-23 | 株式会社ディスコ | ウエーハの加工方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1027971A (ja) * | 1996-07-10 | 1998-01-27 | Nec Corp | 有機薄膜多層配線基板の切断方法 |
US6420245B1 (en) * | 1999-06-08 | 2002-07-16 | Kulicke & Soffa Investments, Inc. | Method for singulating semiconductor wafers |
US6527968B1 (en) * | 2000-03-27 | 2003-03-04 | Applied Materials Inc. | Two-stage self-cleaning silicon etch process |
US6596562B1 (en) * | 2002-01-03 | 2003-07-22 | Intel Corporation | Semiconductor wafer singulation method |
JP4422463B2 (ja) * | 2003-11-07 | 2010-02-24 | 株式会社ディスコ | 半導体ウエーハの分割方法 |
US6974726B2 (en) * | 2003-12-30 | 2005-12-13 | Intel Corporation | Silicon wafer with soluble protective coating |
GB2420443B (en) * | 2004-11-01 | 2009-09-16 | Xsil Technology Ltd | Increasing die strength by etching during or after dicing |
JP4571850B2 (ja) * | 2004-11-12 | 2010-10-27 | 東京応化工業株式会社 | レーザーダイシング用保護膜剤及び該保護膜剤を用いたウエーハの加工方法 |
JP4694845B2 (ja) * | 2005-01-05 | 2011-06-08 | 株式会社ディスコ | ウエーハの分割方法 |
US7265034B2 (en) * | 2005-02-18 | 2007-09-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of cutting integrated circuit chips from wafer by ablating with laser and cutting with saw blade |
JP2009503271A (ja) * | 2005-08-02 | 2009-01-29 | マサチューセッツ インスティテュート オブ テクノロジー | Cvd/pecvd−プラズマチャンバーの内部から表面沈着物を除去するためのフッ化硫黄を使用する遠隔チャンバー方法 |
JP4993886B2 (ja) | 2005-09-07 | 2012-08-08 | 株式会社ディスコ | レーザー加工装置 |
JP2009021476A (ja) * | 2007-07-13 | 2009-01-29 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
US8598016B2 (en) * | 2011-06-15 | 2013-12-03 | Applied Materials, Inc. | In-situ deposited mask layer for device singulation by laser scribing and plasma etch |
US8993414B2 (en) * | 2012-07-13 | 2015-03-31 | Applied Materials, Inc. | Laser scribing and plasma etch for high die break strength and clean sidewall |
US9040389B2 (en) * | 2012-10-09 | 2015-05-26 | Infineon Technologies Ag | Singulation processes |
JP6113019B2 (ja) * | 2013-08-07 | 2017-04-12 | 株式会社ディスコ | ウエーハの分割方法 |
JP6302644B2 (ja) * | 2013-11-11 | 2018-03-28 | 株式会社ディスコ | ウェーハの加工方法 |
JP6223801B2 (ja) * | 2013-12-05 | 2017-11-01 | 株式会社ディスコ | 光デバイスウェーハの加工方法 |
US9299611B2 (en) * | 2014-01-29 | 2016-03-29 | Applied Materials, Inc. | Method of wafer dicing using hybrid laser scribing and plasma etch approach with mask plasma treatment for improved mask etch resistance |
US9355907B1 (en) * | 2015-01-05 | 2016-05-31 | Applied Materials, Inc. | Hybrid wafer dicing approach using a line shaped laser beam profile laser scribing process and plasma etch process |
-
2015
- 2015-11-16 JP JP2015223723A patent/JP6587911B2/ja active Active
-
2016
- 2016-10-12 TW TW105132905A patent/TWI732790B/zh active
- 2016-11-09 KR KR1020160149040A patent/KR102493116B1/ko active IP Right Grant
- 2016-11-10 US US15/348,071 patent/US10354919B2/en active Active
- 2016-11-11 CN CN201610997489.3A patent/CN106847747B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012023085A (ja) * | 2010-07-12 | 2012-02-02 | Disco Abrasive Syst Ltd | 光デバイスウエーハの加工方法 |
JP2014520407A (ja) * | 2011-06-24 | 2014-08-21 | エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド | ダイアタッチフィルム(daf)又は他の材料層をダイシングする前におけるレーザカットされた半導体のエッチング |
JP2015079790A (ja) * | 2013-10-15 | 2015-04-23 | 株式会社ディスコ | ウエーハの加工方法 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020009957A (ja) * | 2018-07-10 | 2020-01-16 | 株式会社ディスコ | 半導体ウェーハの加工方法 |
JP7109862B2 (ja) | 2018-07-10 | 2022-08-01 | 株式会社ディスコ | 半導体ウェーハの加工方法 |
JP2020021786A (ja) * | 2018-07-31 | 2020-02-06 | 株式会社ディスコ | チップ製造方法 |
KR20200014195A (ko) | 2018-07-31 | 2020-02-10 | 가부시기가이샤 디스코 | 칩 제조 방법 |
JP7072993B2 (ja) | 2018-07-31 | 2022-05-23 | 株式会社ディスコ | チップ製造方法 |
TWI800668B (zh) * | 2018-07-31 | 2023-05-01 | 日商迪思科股份有限公司 | 晶片製造方法 |
JP2020109815A (ja) * | 2019-01-07 | 2020-07-16 | 株式会社ディスコ | ウェーハの加工方法 |
JP7193350B2 (ja) | 2019-01-07 | 2022-12-20 | 株式会社ディスコ | ウェーハの加工方法 |
TWI820282B (zh) * | 2019-01-07 | 2023-11-01 | 日商迪思科股份有限公司 | 晶圓的加工方法 |
Also Published As
Publication number | Publication date |
---|---|
KR102493116B1 (ko) | 2023-01-27 |
US20170140989A1 (en) | 2017-05-18 |
CN106847747A (zh) | 2017-06-13 |
KR20170057139A (ko) | 2017-05-24 |
CN106847747B (zh) | 2021-12-28 |
US10354919B2 (en) | 2019-07-16 |
TWI732790B (zh) | 2021-07-11 |
JP6587911B2 (ja) | 2019-10-09 |
TW201719746A (zh) | 2017-06-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6587911B2 (ja) | ウエーハの分割方法 | |
KR102044042B1 (ko) | 웨이퍼의 가공 방법 | |
US11450578B2 (en) | Substrate processing system and substrate processing method | |
CN108231676B (zh) | 晶片的加工方法 | |
KR102336955B1 (ko) | 웨이퍼의 가공 방법 | |
JPWO2019176589A1 (ja) | 基板処理システム、基板処理方法及びコンピュータ記憶媒体 | |
JP2012023085A (ja) | 光デバイスウエーハの加工方法 | |
US20080064187A1 (en) | Production Method for Stacked Device | |
JP2008130818A (ja) | レーザー加工装置 | |
KR20150043975A (ko) | 웨이퍼의 가공 방법 | |
JP2016157892A (ja) | ウエーハの加工方法 | |
TW202008452A (zh) | 晶片製造方法 | |
JP2017162901A (ja) | ウエーハの分割方法 | |
JP6137798B2 (ja) | レーザー加工装置及び保護膜被覆方法 | |
JP2013149900A (ja) | 被加工物の分割方法 | |
JP4666583B2 (ja) | 保護被膜の被覆方法 | |
JP5619382B2 (ja) | ウエーハの加工方法 | |
JP2011176035A (ja) | ウエーハの洗浄方法 | |
JP6438304B2 (ja) | ウエーハの加工方法 | |
JP2018207010A (ja) | デバイスチップの製造方法 | |
JP2018190857A (ja) | ウェーハの加工方法 | |
JP2016162769A (ja) | ウエーハの加工方法 | |
JP2019096812A (ja) | 被加工物の加工方法 | |
JP5288785B2 (ja) | ウェーハ加工装置 | |
JP2022054537A (ja) | ウエーハの加工方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180928 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190530 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190530 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190725 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190815 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190911 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6587911 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |