JP2017092031A - 透明電極およびこれを含む素子 - Google Patents
透明電極およびこれを含む素子 Download PDFInfo
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- JP2017092031A JP2017092031A JP2016216621A JP2016216621A JP2017092031A JP 2017092031 A JP2017092031 A JP 2017092031A JP 2016216621 A JP2016216621 A JP 2016216621A JP 2016216621 A JP2016216621 A JP 2016216621A JP 2017092031 A JP2017092031 A JP 2017092031A
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- 229910021389 graphene Inorganic materials 0.000 claims abstract description 128
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 126
- 239000000758 substrate Substances 0.000 claims abstract description 62
- 239000002070 nanowire Substances 0.000 claims abstract description 57
- 239000002019 doping agent Substances 0.000 claims description 26
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 18
- 238000002834 transmittance Methods 0.000 claims description 17
- 229910001507 metal halide Inorganic materials 0.000 claims description 10
- 150000005309 metal halides Chemical class 0.000 claims description 10
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 9
- 229910003771 Gold(I) chloride Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 claims description 8
- 239000010931 gold Substances 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
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- 101710134784 Agnoprotein Proteins 0.000 claims description 3
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- WCZAXBXVDLKQGV-UHFFFAOYSA-N n,n-dimethyl-2-(7-oxobenzo[c]fluoren-5-yl)oxyethanamine oxide Chemical compound C12=CC=CC=C2C(OCC[N+](C)([O-])C)=CC2=C1C1=CC=CC=C1C2=O WCZAXBXVDLKQGV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- BMNDJWSIKZECMH-UHFFFAOYSA-N nitrosyl bromide Chemical compound BrN=O BMNDJWSIKZECMH-UHFFFAOYSA-N 0.000 claims description 3
- 235000019392 nitrosyl chloride Nutrition 0.000 claims description 3
- VPCDQGACGWYTMC-UHFFFAOYSA-N nitrosyl chloride Chemical compound ClN=O VPCDQGACGWYTMC-UHFFFAOYSA-N 0.000 claims description 3
- ZEIYBPGWHWECHV-UHFFFAOYSA-N nitrosyl fluoride Chemical compound FN=O ZEIYBPGWHWECHV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 2
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- 230000005540 biological transmission Effects 0.000 abstract description 5
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- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 6
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- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 2
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
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- LNAZSHAWQACDHT-XIYTZBAFSA-N (2r,3r,4s,5r,6s)-4,5-dimethoxy-2-(methoxymethyl)-3-[(2s,3r,4s,5r,6r)-3,4,5-trimethoxy-6-(methoxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6r)-4,5,6-trimethoxy-2-(methoxymethyl)oxan-3-yl]oxyoxane Chemical compound CO[C@@H]1[C@@H](OC)[C@H](OC)[C@@H](COC)O[C@H]1O[C@H]1[C@H](OC)[C@@H](OC)[C@H](O[C@H]2[C@@H]([C@@H](OC)[C@H](OC)O[C@@H]2COC)OC)O[C@@H]1COC LNAZSHAWQACDHT-XIYTZBAFSA-N 0.000 description 1
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- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
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- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
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- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
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- 239000011889 copper foil Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 description 1
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- 229920001249 ethyl cellulose Polymers 0.000 description 1
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- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
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- 229910010272 inorganic material Inorganic materials 0.000 description 1
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- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- LYGJENNIWJXYER-UHFFFAOYSA-N nitromethane Chemical compound C[N+]([O-])=O LYGJENNIWJXYER-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
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- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1606—Graphene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/04—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of carbon-silicon compounds, carbon or silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table further characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/413—Nanosized electrodes, e.g. nanowire electrodes comprising one or a plurality of nanowires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/42—Transparent materials
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- General Physics & Mathematics (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
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- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Electromagnetism (AREA)
- Crystallography & Structural Chemistry (AREA)
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- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Laminated Bodies (AREA)
- Led Devices (AREA)
- Conductive Materials (AREA)
Abstract
Description
前記電子素子は、平板ディスプレイ、曲面ディスプレイ、タッチスクリーンパネル、太陽電池、e−ウィンドウ、エレクトロクロミックミラー(electrochromic mirror)、ヒートミラー(heat mirror)、透明トランジスタ、フレキシブルディスプレイのうちのいずれか一つであり得る。
実施例1の透明電極は、以下のような方法によって作製した。
銀ナノワイヤー水溶液(濃度:0.5質量%、銀ナノワイヤーの平均直径20nm)4.8g
溶媒:水8.24gおよびエタノール4.73g
バインダー:ヒドロキシプロピルメチルセルロース水溶液(濃度:10質量%)0.96g
前記銀ナノワイヤー含有組成物を前記第1層上にワイヤーバー(wired bar)を用いてコーティングし、大気中で90℃の温度で1分間乾燥して第2導電層である第2層を形成した。
グラフェンメッシュ構造体を含む第1導電層である第1層を基板に形成した後、ドーパントとして3mgのAuCl3を使用し、溶媒として1mLのニトロメタン(nitromethane)を使用して互いに混合し、混合物をグラフェンメッシュ構造体上に塗布してドーピングしたことを除いては、前述の実施例1と同様な方法で透明電極を製造した。ドーピングされたAuCl3は第1層の総質量を基準として10質量%の含量を有する。
グラフェンメッシュ構造体を含む第1導電層である第1層を基板に形成した後、ドーパントとして揮発性HNO3を大気雰囲気下に常温で10分間グラフェンメッシュ構造体に吸着させてドーピングすることを除いては、前述の実施例1と同様な方式で透明電極を製造する。ドーピングされたHNO3は第1層の総質量を基準に0.01質量%の含量を有する。
フォトレジスト層を用いた複数のホールおよびパターンを形成せずグラフェン単層である第1層上に直ちに第2層を形成したことを除いては、前述の実施例1と同様な方法で基板、グラフェン単層からなる第1層、導電性ナノワイヤーを含む第2層およびオーバーコート層が順次に積層された透明電極を得た。
[1]下記の成分を有する銀ナノワイヤー含有組成物を得た:
銀ナノワイヤー水溶液(濃度:0.5質量%、銀ナノワイヤーの平均直径20nm)4.8g
溶媒:水8.24gおよびエタノール4.734g
バインダー:ヒドロキシプロピルメチルセルロース水溶液(濃度:10質量%)0.96g
前記銀ナノワイヤー含有組成物をPET基板上にワイヤーバーを用いてコーティングし、大気中で90℃の温度で1分間乾燥して銀ナノワイヤー導電層を形成した。
[1]信頼性評価は8585テストを通じて確認することができる。8585テストとは、85℃温度および85%の相対湿度条件下での物性変化率をチェックすることであって、本実施例では時間の流れによって面抵抗が変化する程度を測定することにより、透明電極の安定性を評価することができる。
[1]曲げ性評価(bending test)は、作製された透明電極を曲率半径1mmで20万回曲げた後、面抵抗変化率を測定することによって、反復された曲げまたは機械的衝撃など、物理的外力による透明電極の機械的柔軟性を評価することができる。
100 基板
110、110’ 第1層(グラフェンメッシュ構造体)
111、111’ ホール
112 ドーパント
120 第2層
121 導電性ナノワイヤー
130 オーバーコート層
Claims (16)
- 基板と、
前記基板上に形成され、グラフェンまたはその誘導体からなるグラフェンメッシュ構造体を含む第1層と、
前記第1層上に形成される第2層と、
を含み、
前記グラフェンメッシュ構造体が複数のホールを含み、
前記第2層が複数の導電性ナノワイヤーを含むことを特徴とする透明電極。 - 前記複数のホールが、前記グラフェンメッシュ構造体上で反復的な配列を成す、請求項1に記載の透明電極。
- 前記第1層が、前記グラフェンメッシュ構造体にドーピングされるドーパントを含む、請求項1または2に記載の透明電極。
- 前記ドーパントが、金属ハライド、窒酸化物、硫酸化物、金属過酸化物、またはこれらの組み合わせを含む、請求項3に記載の透明電極。
- 前記金属ハライドが、AuCl3、FeCl3、MoCl5、WCl5、SnCl4、MoF5、RuF5、TaBr5、SnI4、HAuCl4のうちの一つ以上を含む、請求項4に記載の透明電極。
- 前記窒酸化物が、HNO3、AgNO3、NO2F、NO2Cl、N2O5、NO2BF4、CH3NO2、C6H5NO2、CH3ONO、NO(SbCl6)、NOBF4、NOClO4、NOSO4H、C6H5NO、NOCl、NOF、NOBrのうちの一つ以上を含む、請求項4に記載の透明電極。
- 前記第1層の面抵抗が1000Ω/sq以下である、請求項3〜6のいずれか1項に記載の透明電極。
- 前記第1層の光透過度が98%以上である、請求項1〜7のいずれか1項に記載の透明電極。
- 前記第1層の上部から見る時、
前記複数のホールが円形の形状を有し、
前記複数のホールが四角形配列または六角形配列を成す、請求項1〜8のいずれか1項に記載の透明電極。 - 前記第1層の上部から見る時、
前記複数のホールが多角形の形状を有し、
前記複数のホールが四角形配列または六角形配列を成す、請求項1〜8のいずれか1項に記載の透明電極。 - 前記第2層が、前記導電性ナノワイヤーが互いに絡まって形成されたナノワイヤーメッシュ構造体を含む、請求項1〜10のいずれか1項に記載の透明電極。
- 少なくとも前記第2層の上部面を覆うように形成されるオーバーコート層をさらに含む、請求項11に記載の透明電極。
- 前記オーバーコート層が、前記第2層および前記第1層を通過して前記基板と連結される、請求項12に記載の透明電極。
- 前記導電性ナノワイヤーが、銀(Ag)、銅(Cu)、金(Au)、アルミニウム(Al)、ニッケル(Ni)、コバルト(Co)、パラジウム(Pd)、またはこれらの組み合わせを含む、請求項1〜13のいずれか1項に記載の透明電極。
- 請求項1〜14のいずれか1項に記載の透明電極を含む電子素子。
- 平板ディスプレイ、曲面ディスプレイ、タッチスクリーンパネル、太陽電池、e−ウィンドウ、エレクトロクロミックミラー、ヒートミラー、透明トランジスタ、フレキシブルディスプレイのうちのいずれか一つであることを特徴とする請求項15に記載の電子素子。
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JP6870959B2 (ja) | 2021-05-12 |
EP3168883A1 (en) | 2017-05-17 |
US10002927B2 (en) | 2018-06-19 |
EP3168883B1 (en) | 2018-11-28 |
CN107025953B (zh) | 2020-01-17 |
US20170133469A1 (en) | 2017-05-11 |
KR20170055361A (ko) | 2017-05-19 |
KR102437578B1 (ko) | 2022-08-26 |
CN107025953A (zh) | 2017-08-08 |
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