JP2017057490A - Ｃｏ−Ｆｅ−Ｂ系合金ターゲット材 - Google Patents

Ｃｏ−Ｆｅ−Ｂ系合金ターゲット材 Download PDF

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Publication number
JP2017057490A
JP2017057490A JP2016010266A JP2016010266A JP2017057490A JP 2017057490 A JP2017057490 A JP 2017057490A JP 2016010266 A JP2016010266 A JP 2016010266A JP 2016010266 A JP2016010266 A JP 2016010266A JP 2017057490 A JP2017057490 A JP 2017057490A
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JP
Japan
Prior art keywords
less
powder
sputtering target
target material
particle size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2016010266A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017057490A5 (enExample
Inventor
長谷川　浩之
Hiroyuki Hasegawa
浩之 長谷川
慶明 松原
Yoshiaki Matsubara
慶明 松原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Special Steel Co Ltd
Original Assignee
Sanyo Special Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Special Steel Co Ltd filed Critical Sanyo Special Steel Co Ltd
Priority to EP16846625.8A priority Critical patent/EP3351655A4/en
Priority to SG10201913475PA priority patent/SG10201913475PA/en
Priority to US15/760,404 priority patent/US20180265963A1/en
Priority to SG11201802203UA priority patent/SG11201802203UA/en
Priority to PCT/JP2016/077459 priority patent/WO2017047754A1/ja
Priority to KR1020187006795A priority patent/KR102635337B1/ko
Priority to TW105130206A priority patent/TWI712698B/zh
Publication of JP2017057490A publication Critical patent/JP2017057490A/ja
Publication of JP2017057490A5 publication Critical patent/JP2017057490A5/ja
Priority to US16/986,331 priority patent/US11377726B2/en
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05—Metallic powder characterised by the size or surface area of the particles
    • B22F1/052—Metallic powder characterised by the size or surface area of the particles characterised by a mixture of particles of different sizes or by the particle size distribution
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/07—Alloys based on nickel or cobalt based on cobalt
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C30/00—Alloys containing less than 50% by weight of each constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C33/00—Making ferrous alloys
    • C22C33/02—Making ferrous alloys by powder metallurgy
    • C22C33/0257—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C33/00—Making ferrous alloys
    • C22C33/02—Making ferrous alloys by powder metallurgy
    • C22C33/0257—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements
    • C22C33/0278—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements with at least one alloying element having a minimum content above 5%
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C33/00—Making ferrous alloys
    • C22C33/02—Making ferrous alloys by powder metallurgy
    • C22C33/0257—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements
    • C22C33/0278—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements with at least one alloying element having a minimum content above 5%
    • C22C33/0285—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements with at least one alloying element having a minimum content above 5% with Cr, Co, or Ni having a minimum content higher than 5%
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/002—Ferrous alloys, e.g. steel alloys containing In, Mg, or other elements not provided for in one single group C22C38/001 - C22C38/60
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/08—Ferrous alloys, e.g. steel alloys containing nickel
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/10—Ferrous alloys, e.g. steel alloys containing cobalt
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/12—Ferrous alloys, e.g. steel alloys containing tungsten, tantalum, molybdenum, vanadium, or niobium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/14—Ferrous alloys, e.g. steel alloys containing titanium or zirconium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/16—Ferrous alloys, e.g. steel alloys containing copper
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H01F41/183—Sputtering targets therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
JP2016010266A 2015-09-18 2016-01-22 Ｃｏ−Ｆｅ−Ｂ系合金ターゲット材 Withdrawn JP2017057490A (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
EP16846625.8A EP3351655A4 (en) 2015-09-18 2016-09-16 sputter target
SG10201913475PA SG10201913475PA (en) 2015-09-18 2016-09-16 Sputtering target material
US15/760,404 US20180265963A1 (en) 2015-09-18 2016-09-16 Sputtering Target Material
SG11201802203UA SG11201802203UA (en) 2015-09-18 2016-09-16 Sputtering target material
PCT/JP2016/077459 WO2017047754A1 (ja) 2015-09-18 2016-09-16 スパッタリングターゲット材
KR1020187006795A KR102635337B1 (ko) 2015-09-18 2016-09-16 스퍼터링 타겟재
TW105130206A TWI712698B (zh) 2015-09-18 2016-09-19 濺鍍靶材
US16/986,331 US11377726B2 (en) 2015-09-18 2020-08-06 Sputtering target material

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015184846 2015-09-18
JP2015184846 2015-09-18

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020074715A Division JP7084958B2 (ja) 2015-09-18 2020-04-20 Ｃｏ－Ｆｅ－Ｂ系合金ターゲット材

Publications (2)

Publication Number Publication Date
JP2017057490A true JP2017057490A (ja) 2017-03-23
JP2017057490A5 JP2017057490A5 (enExample) 2019-12-05

Family

ID=58391141

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016010266A Withdrawn JP2017057490A (ja) 2015-09-18 2016-01-22 Ｃｏ−Ｆｅ−Ｂ系合金ターゲット材
JP2020074715A Active JP7084958B2 (ja) 2015-09-18 2020-04-20 Ｃｏ－Ｆｅ－Ｂ系合金ターゲット材

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2020074715A Active JP7084958B2 (ja) 2015-09-18 2020-04-20 Ｃｏ－Ｆｅ－Ｂ系合金ターゲット材

Country Status (6)

Country Link
US (2) US20180265963A1 (enExample)
EP (1) EP3351655A4 (enExample)
JP (2) JP2017057490A (enExample)
KR (1) KR102635337B1 (enExample)
SG (2) SG10201913475PA (enExample)
TW (1) TWI712698B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020132995A (ja) * 2019-02-26 2020-08-31 山陽特殊製鋼株式会社 スパッタリングターゲット材に適した合金
WO2021141043A1 (ja) * 2020-01-06 2021-07-15 山陽特殊製鋼株式会社 スパッタリングターゲット材
WO2021141042A1 (ja) * 2020-01-06 2021-07-15 山陽特殊製鋼株式会社 スパッタリングターゲット材の製造方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3391982B1 (en) * 2017-04-21 2023-08-16 Raytheon Technologies Corporation Systems, devices and methods for spark plasma sintering
TWI642800B (zh) * 2017-10-03 2018-12-01 光洋應用材料科技股份有限公司 鈷鉑錸基濺鍍靶材、其製法及磁記錄層
TWI658150B (zh) * 2018-02-05 2019-05-01 光洋應用材料科技股份有限公司 含鈷鉻鉑硼錸濺鍍靶材、含鈷鉻鉑硼錸層及其製法
CN112371987A (zh) * 2020-11-13 2021-02-19 河南东微电子材料有限公司 一种铁钴硼铬铝合金粉末的制备方法
JP7205999B1 (ja) * 2021-09-09 2023-01-17 山陽特殊製鋼株式会社 スパッタリングターゲット材

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JP2003226963A (ja) * 2002-02-04 2003-08-15 Toshiba Corp スパッタリングターゲット
JP2012207274A (ja) * 2011-03-30 2012-10-25 Hitachi Metals Ltd 永久磁石薄膜用スパッタリングターゲット及びその製造方法
WO2014148588A1 (ja) * 2013-03-22 2014-09-25 Jx日鉱日石金属株式会社 タングステン焼結体スパッタリングターゲット及びその製造方法
WO2015019513A1 (ja) * 2013-08-09 2015-02-12 Jx日鉱日石金属株式会社 ネオジム、鉄、ボロンを主成分とする希土類粉末又はスパッタリングターゲットの製造方法、同希土類元素からなる粉末又はスパッタリングターゲット及びネオジム、鉄、ボロンを主成分とする希土類磁石用薄膜又はその製造方法
WO2015080009A1 (ja) * 2013-11-28 2015-06-04 Jx日鉱日石金属株式会社 磁性材スパッタリングターゲット及びその製造方法
WO2016140113A1 (ja) * 2015-03-04 2016-09-09 Ｊｘ金属株式会社 磁性材スパッタリングターゲット及びその製造方法

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JP4016399B2 (ja) 2003-04-30 2007-12-05 日立金属株式会社 Ｆｅ−Ｃｏ−Ｂ合金ターゲット材の製造方法
US7141208B2 (en) 2003-04-30 2006-11-28 Hitachi Metals, Ltd. Fe-Co-B alloy target and its production method, and soft magnetic film produced by using such target, and magnetic recording medium and TMR device
JP2005320627A (ja) 2004-04-07 2005-11-17 Hitachi Metals Ltd Ｃｏ合金ターゲット材の製造方法、Ｃｏ合金ターゲット材および垂直磁気記録用軟磁性膜ならびに垂直磁気記録媒体
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JP4331182B2 (ja) * 2006-04-14 2009-09-16 山陽特殊製鋼株式会社 軟磁性ターゲット材
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JP5631659B2 (ja) 2010-08-24 2014-11-26 山陽特殊製鋼株式会社 垂直磁気記録媒体用軟磁性合金およびスパッタリングターゲット材並びに磁気記録媒体
JP6405261B2 (ja) 2014-05-01 2018-10-17 山陽特殊製鋼株式会社 磁気記録用軟磁性合金及びスパッタリングターゲット材並びに磁気記録媒体

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JP2003226963A (ja) * 2002-02-04 2003-08-15 Toshiba Corp スパッタリングターゲット
JP2012207274A (ja) * 2011-03-30 2012-10-25 Hitachi Metals Ltd 永久磁石薄膜用スパッタリングターゲット及びその製造方法
WO2014148588A1 (ja) * 2013-03-22 2014-09-25 Jx日鉱日石金属株式会社 タングステン焼結体スパッタリングターゲット及びその製造方法
WO2015019513A1 (ja) * 2013-08-09 2015-02-12 Jx日鉱日石金属株式会社 ネオジム、鉄、ボロンを主成分とする希土類粉末又はスパッタリングターゲットの製造方法、同希土類元素からなる粉末又はスパッタリングターゲット及びネオジム、鉄、ボロンを主成分とする希土類磁石用薄膜又はその製造方法
WO2015080009A1 (ja) * 2013-11-28 2015-06-04 Jx日鉱日石金属株式会社 磁性材スパッタリングターゲット及びその製造方法
WO2016140113A1 (ja) * 2015-03-04 2016-09-09 Ｊｘ金属株式会社 磁性材スパッタリングターゲット及びその製造方法

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI834821B (zh) * 2019-02-26 2024-03-11 日商山陽特殊製鋼股份有限公司 適用於濺鍍靶材之合金
WO2020175424A1 (ja) * 2019-02-26 2020-09-03 山陽特殊製鋼株式会社 スパッタリングターゲット材に適した合金
CN113453823A (zh) * 2019-02-26 2021-09-28 山阳特殊制钢株式会社 适合于溅射靶材的合金
JP7382142B2 (ja) 2019-02-26 2023-11-16 山陽特殊製鋼株式会社 スパッタリングターゲット材に適した合金
JP2020132995A (ja) * 2019-02-26 2020-08-31 山陽特殊製鋼株式会社 スパッタリングターゲット材に適した合金
WO2021141043A1 (ja) * 2020-01-06 2021-07-15 山陽特殊製鋼株式会社 スパッタリングターゲット材
WO2021141042A1 (ja) * 2020-01-06 2021-07-15 山陽特殊製鋼株式会社 スパッタリングターゲット材の製造方法
JP2021109979A (ja) * 2020-01-06 2021-08-02 山陽特殊製鋼株式会社 スパッタリングターゲット材
JP2021109980A (ja) * 2020-01-06 2021-08-02 山陽特殊製鋼株式会社 スパッタリングターゲット材の製造方法
KR20220124147A (ko) * 2020-01-06 2022-09-13 산요오도꾸슈세이꼬 가부시키가이샤 스퍼터링 타겟재의 제조 방법
JP7492831B2 (ja) 2020-01-06 2024-05-30 山陽特殊製鋼株式会社 スパッタリングターゲット材
JP7506477B2 (ja) 2020-01-06 2024-06-26 山陽特殊製鋼株式会社 スパッタリングターゲット材の製造方法
KR102883192B1 (ko) 2020-01-06 2025-11-06 산요오도꾸슈세이꼬 가부시키가이샤 스퍼터링 타겟재의 제조 방법

Also Published As

Publication number Publication date
SG10201913475PA (en) 2020-03-30
TW201726954A (zh) 2017-08-01
JP2020143372A (ja) 2020-09-10
SG11201802203UA (en) 2018-04-27
US20180265963A1 (en) 2018-09-20
US20200362451A1 (en) 2020-11-19
TWI712698B (zh) 2020-12-11
JP7084958B2 (ja) 2022-06-15
KR20180054595A (ko) 2018-05-24
KR102635337B1 (ko) 2024-02-07
EP3351655A4 (en) 2019-04-17
US11377726B2 (en) 2022-07-05
EP3351655A1 (en) 2018-07-25

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