JP7382142B2 - スパッタリングターゲット材に適した合金 - Google Patents
スパッタリングターゲット材に適した合金 Download PDFInfo
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- JP7382142B2 JP7382142B2 JP2019032915A JP2019032915A JP7382142B2 JP 7382142 B2 JP7382142 B2 JP 7382142B2 JP 2019032915 A JP2019032915 A JP 2019032915A JP 2019032915 A JP2019032915 A JP 2019032915A JP 7382142 B2 JP7382142 B2 JP 7382142B2
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- 229910045601 alloy Inorganic materials 0.000 title claims description 67
- 239000000956 alloy Substances 0.000 title claims description 67
- 239000013077 target material Substances 0.000 title claims description 47
- 238000005477 sputtering target Methods 0.000 title claims description 37
- 239000000843 powder Substances 0.000 claims description 44
- 229910052751 metal Inorganic materials 0.000 claims description 36
- 239000002184 metal Substances 0.000 claims description 27
- 229910052742 iron Inorganic materials 0.000 claims description 24
- 239000000203 mixture Substances 0.000 claims description 17
- 239000012535 impurity Substances 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 229910052748 manganese Inorganic materials 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052707 ruthenium Inorganic materials 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- 229910052741 iridium Inorganic materials 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052702 rhenium Inorganic materials 0.000 claims description 4
- 229910052703 rhodium Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 229910052727 yttrium Inorganic materials 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 28
- 229910052799 carbon Inorganic materials 0.000 description 25
- 238000000889 atomisation Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 17
- 239000010409 thin film Substances 0.000 description 14
- 239000002994 raw material Substances 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 229910000521 B alloy Inorganic materials 0.000 description 6
- 238000009689 gas atomisation Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000010334 sieve classification Methods 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001192 hot extrusion Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009688 liquid atomisation Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009849 vacuum degassing Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/10—Ferrous alloys, e.g. steel alloys containing cobalt
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C19/00—Alloys based on nickel or cobalt
- C22C19/07—Alloys based on nickel or cobalt based on cobalt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0433—Nickel- or cobalt-based alloys
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
- C22C30/02—Alloys containing less than 50% by weight of each constituent containing copper
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C33/00—Making ferrous alloys
- C22C33/02—Making ferrous alloys by powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C33/00—Making ferrous alloys
- C22C33/02—Making ferrous alloys by powder metallurgy
- C22C33/0257—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements
- C22C33/0278—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements with at least one alloying element having a minimum content above 5%
- C22C33/0285—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements with at least one alloying element having a minimum content above 5% with Cr, Co, or Ni having a minimum content higher than 5%
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/007—Ferrous alloys, e.g. steel alloys containing silver
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/04—Ferrous alloys, e.g. steel alloys containing manganese
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/10—Ferrous alloys, e.g. steel alloys containing cobalt
- C22C38/105—Ferrous alloys, e.g. steel alloys containing cobalt containing Co and Ni
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/12—Ferrous alloys, e.g. steel alloys containing tungsten, tantalum, molybdenum, vanadium, or niobium
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/14—Ferrous alloys, e.g. steel alloys containing titanium or zirconium
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/16—Ferrous alloys, e.g. steel alloys containing copper
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
- C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
- C22C38/58—Ferrous alloys, e.g. steel alloys containing chromium with nickel with more than 1.5% by weight of manganese
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
- B22F2009/0824—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid with a specific atomising fluid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
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- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
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- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Powder Metallurgy (AREA)
Description
表1-4に示される組成となるように、各原料を秤量して、耐火物からなる坩堝に投入して、減圧下、Arガス雰囲気で、誘導加熱により溶解した。その後、溶解した溶湯を、坩堝下部に設けられた小孔(直径8mm)から流出させ、高圧のArガスを用いてガスアトマイズすることにより、実施例の合金粉末(No.1-44)及び比較例の合金粉末(No.45-48)を得た。各合金粉末の炭素濃度は、原料中に含まれる炭素及びカーボン粉末の添加により調整し、非分散型赤外線吸収法によって測定した。なお、表1-4において、Feの組成100-Xの記載は省略されている。
実施例(No.1-44)及び比較例(No.45-48)の各組成について、それぞれ5回ずつ、同条件でガスアトマイズをおこない、坩堝の小孔の閉塞状態を観察した。アトマイズ中に小孔が閉塞することなく合金粉末が得られた回数が、成功回数として、表1-4に記載されている。この成功回数を、以下の基準により評価した結果が、A又はBとして、表1-4に記載されている。
A(易アトマイズ性):成功回数3回以上
B(難アトマイズ性):成功回数2回以下
実施例の合金粉末(No.1-44)を用いて、以下の手順により、それぞれ、スパッタリングターゲット材を作製した。
温度:1100℃
圧力:200MPa
保持時間:3時間
実施例(No.1-44)の粉末を用いて製造した各スパッタリングターゲット材を用いて、スパッタリングをおこない、スパッタリング後のターゲット材の割れを、目視で確認した。いずれのターゲット材においても、ターゲット材の割れは観察されず、基板上に略均一な厚みの薄膜が形成された。この評価結果から、炭素濃度50ppm以上950ppm以下のターゲット材によっても、良好なスパッタリングが可能であることがわかる。
Claims (3)
- その材質が、Co及びFeから選択される少なくとも1種と、Bと、Cとを含んでおり、その残部が不可避的不純物からなる合金であり、この合金全体におけるCの濃度が210質量ppm以上450質量ppm以下であり、この合金中の、Cと不可避的不純物とを除く、Co、Fe及びBの組成が、一般式(CoX-Fe100-X)100-Y-BYで示され、この式中、Xが0以上100以下であり、Yが10以上65以下であるスパッタリングターゲット材の製造に用いる合金粉末。
- 上記合金が、他の金属元素をさらに含んでおり、この金属元素をMとするとき、この合金中の、Cと不可避的不純物とを除く、Co、Fe、B及びMの組成が、一般式(CoX-Fe100-X)100-Y-Z-BY-MZで示され、この式中、Xが0以上100以下であり、Yが10以上65以下であり、Zが0.5以上30以下であり、
上記金属元素Mが、Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Mn、Re、Ru、Rh、Ir、Ni、Pd、Pt及びAgからなる群から選択される1種または2種以上である請求項1に記載の合金粉末。 - 請求項1又は2に記載の合金粉末を用いて得られるスパッタリングターゲット材。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019032915A JP7382142B2 (ja) | 2019-02-26 | 2019-02-26 | スパッタリングターゲット材に適した合金 |
PCT/JP2020/007306 WO2020175424A1 (ja) | 2019-02-26 | 2020-02-25 | スパッタリングターゲット材に適した合金 |
KR1020217024217A KR20210129641A (ko) | 2019-02-26 | 2020-02-25 | 스퍼터링 타겟재에 적합한 합금 |
EP20762821.5A EP3932592A4 (en) | 2019-02-26 | 2020-02-25 | ALLOY FOR SPUTTER TARGET MATERIAL |
CN202080015189.5A CN113453823A (zh) | 2019-02-26 | 2020-02-25 | 适合于溅射靶材的合金 |
US17/433,652 US20220145433A1 (en) | 2019-02-26 | 2020-02-25 | Alloy Suitable for Sputtering Target Material |
TW109105962A TWI834821B (zh) | 2019-02-26 | 2020-02-25 | 適用於濺鍍靶材之合金 |
SG11202109115PA SG11202109115PA (en) | 2019-02-26 | 2020-02-25 | Alloy suitable for sputtering target material |
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JP2019032915A JP7382142B2 (ja) | 2019-02-26 | 2019-02-26 | スパッタリングターゲット材に適した合金 |
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JP7382142B2 true JP7382142B2 (ja) | 2023-11-16 |
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US (1) | US20220145433A1 (ja) |
EP (1) | EP3932592A4 (ja) |
JP (1) | JP7382142B2 (ja) |
KR (1) | KR20210129641A (ja) |
CN (1) | CN113453823A (ja) |
SG (1) | SG11202109115PA (ja) |
TW (1) | TWI834821B (ja) |
WO (1) | WO2020175424A1 (ja) |
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JP7506477B2 (ja) * | 2020-01-06 | 2024-06-26 | 山陽特殊製鋼株式会社 | スパッタリングターゲット材の製造方法 |
JP7205999B1 (ja) * | 2021-09-09 | 2023-01-17 | 山陽特殊製鋼株式会社 | スパッタリングターゲット材 |
CN115747730A (zh) * | 2022-11-21 | 2023-03-07 | 先导薄膜材料(广东)有限公司 | 一种CoFeB合金靶材及其制备方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002161302A (ja) | 2000-09-18 | 2002-06-04 | Sumitomo Special Metals Co Ltd | 永久磁石用磁性合金粉末およびその製造方法 |
JP2008214729A (ja) | 2007-03-07 | 2008-09-18 | Hitachi Metals Ltd | Fe基軟磁性粉末 |
WO2011070860A1 (ja) | 2009-12-11 | 2011-06-16 | Jx日鉱日石金属株式会社 | 磁性材スパッタリングターゲット |
JP2011230279A (ja) | 2010-04-09 | 2011-11-17 | Sanyo Special Steel Co Ltd | ショットピーニング用高硬度投射材 |
JP2016500551A (ja) | 2012-09-21 | 2016-01-14 | ホガナス アクチボラグ (パブル) | 新規粉末、粉末組成物、それらの使用方法及並びにその粉末及び粉末組成物の使用 |
JP2017057490A (ja) | 2015-09-18 | 2017-03-23 | 山陽特殊製鋼株式会社 | Co−Fe−B系合金ターゲット材 |
JP2018123362A (ja) | 2017-01-30 | 2018-08-09 | Tdk株式会社 | 軟磁性合金および磁性部品 |
JP2018141195A (ja) | 2017-02-27 | 2018-09-13 | Tdk株式会社 | 積層膜の製造装置と製造方法、および薄膜インダクタの製造方法 |
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US6818041B2 (en) * | 2000-09-18 | 2004-11-16 | Neomax Co., Ltd | Magnetic alloy powder for permanent magnet and method for producing the same |
JP4331182B2 (ja) * | 2006-04-14 | 2009-09-16 | 山陽特殊製鋼株式会社 | 軟磁性ターゲット材 |
US20150034483A1 (en) * | 2012-06-06 | 2015-02-05 | Hitachi Metals, Ltd. | Fe-Co-BASED ALLOY SPUTTERING TARGET MATERIAL, AND METHOD OF PRODUCING SAME |
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KR20180088491A (ko) * | 2013-11-28 | 2018-08-03 | 제이엑스금속주식회사 | 자성재 스퍼터링 타깃 및 그 제조 방법 |
CN106011757B (zh) * | 2016-07-07 | 2019-02-22 | 燕山大学 | 一种防止用作溅射靶材的脆性合金开裂的铸造方法 |
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JP2017057490A (ja) | 2015-09-18 | 2017-03-23 | 山陽特殊製鋼株式会社 | Co−Fe−B系合金ターゲット材 |
JP2018123362A (ja) | 2017-01-30 | 2018-08-09 | Tdk株式会社 | 軟磁性合金および磁性部品 |
JP2018141195A (ja) | 2017-02-27 | 2018-09-13 | Tdk株式会社 | 積層膜の製造装置と製造方法、および薄膜インダクタの製造方法 |
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JP2020132995A (ja) | 2020-08-31 |
US20220145433A1 (en) | 2022-05-12 |
TWI834821B (zh) | 2024-03-11 |
EP3932592A4 (en) | 2022-09-07 |
CN113453823A (zh) | 2021-09-28 |
KR20210129641A (ko) | 2021-10-28 |
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