JP2016537478A - ハードマスクおよび充填材料として安定な金属化合物、その組成物、およびその使用方法 - Google Patents
ハードマスクおよび充填材料として安定な金属化合物、その組成物、およびその使用方法 Download PDFInfo
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- JP2016537478A JP2016537478A JP2016537231A JP2016537231A JP2016537478A JP 2016537478 A JP2016537478 A JP 2016537478A JP 2016537231 A JP2016537231 A JP 2016537231A JP 2016537231 A JP2016537231 A JP 2016537231A JP 2016537478 A JP2016537478 A JP 2016537478A
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- 239000000203 mixture Substances 0.000 title claims abstract description 81
- 238000000034 method Methods 0.000 title claims abstract description 24
- 150000002736 metal compounds Chemical class 0.000 title claims description 29
- 238000011049 filling Methods 0.000 title description 17
- 239000000463 material Substances 0.000 title description 15
- 229910052751 metal Inorganic materials 0.000 claims abstract description 40
- 239000002184 metal Substances 0.000 claims abstract description 40
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 37
- 239000002904 solvent Substances 0.000 claims abstract description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000010703 silicon Substances 0.000 claims abstract description 36
- -1 metal oxide compounds Chemical class 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 150000001875 compounds Chemical class 0.000 claims abstract description 22
- 229920002120 photoresistant polymer Polymers 0.000 claims description 67
- 125000002947 alkylene group Chemical group 0.000 claims description 22
- 239000010936 titanium Substances 0.000 claims description 22
- 125000000217 alkyl group Chemical group 0.000 claims description 18
- 125000003118 aryl group Chemical group 0.000 claims description 13
- 239000002253 acid Substances 0.000 claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 239000004094 surface-active agent Substances 0.000 claims description 11
- 125000002993 cycloalkylene group Chemical group 0.000 claims description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical group [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 125000004209 (C1-C8) alkyl group Chemical group 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 239000000654 additive Substances 0.000 claims description 5
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
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- 238000004519 manufacturing process Methods 0.000 claims description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
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- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 claims description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
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- 230000000996 additive effect Effects 0.000 claims description 2
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- 229910052793 cadmium Inorganic materials 0.000 claims description 2
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- 125000002843 carboxylic acid group Chemical group 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
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- 229910052733 gallium Inorganic materials 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
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- 239000011777 magnesium Substances 0.000 claims description 2
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- 239000011733 molybdenum Substances 0.000 claims description 2
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- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- 239000011135 tin Substances 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 claims description 2
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- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 10
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Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D185/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon; Coating compositions based on derivatives of such polymers
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/48—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
- C08G77/58—Metal-containing linkages
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
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- G—PHYSICS
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G03F7/0752—Silicon-containing compounds in non photosensitive layers or as additives, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/094—Multilayer resist systems, e.g. planarising layers
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- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0332—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their composition, e.g. multilayer masks, materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0338—Process specially adapted to improve the resolution of the mask
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Abstract
Description
40gのチタン(IV)ブトキシドポリマー(Ti(IV)BTPポリマー)(Sigma−Aldrich Corporation, St Louis Missouri)を52gの70/30PGMEA/PGME溶媒に溶解し、そしてN2下の反応容器に注入した。トリメチルシラノール12gをN2下滴下しつつこの溶液を攪拌し、温度を50℃に上げた。この反応混合物を60℃で2時間保持し、その後、20gの1,2−シクロヘキサンジカルボン酸無水物および20gの70/30PGMEA/PGMEを上記反応混合物に混合し、反応を60℃で約1時間継続した。一晩で室温まで冷却し、生成物を褐色ボトルに入れ、注意深くシールした。生成物溶液のFT−IRスペクトルをシクロヘキサン中で測定した。970cm−1の共鳴はTi−O−Siを示した。150℃、60秒でベーク処理された後の、測定された総金属酸化物含量は28質量%であった。
40gのTi(IV)BTPポリマーを58gの70/30PGMEA/PGME溶媒に溶解し、そしてN2下の反応容器に注入した。トリメチルシラノール18gをN2下で滴下しつつこの溶液を攪拌し、温度を50℃に上げた。この反応混合物を60℃で2時間保持した。その後、20gの1,2−シクロヘキサンジカルボン酸無水物および20gの70/30PGMEA/PGME溶媒を前記反応混合物に混合し、反応を60℃で約1時間継続した。一晩で室温まで冷却し、生成物を褐色ボトルに入れ、注意深くシールした。150℃、60秒でベーク処理された後の、測定された総金属酸化物含量は32質量%であった。
20gのTi(IV)BTPポリマーを25gの70/30PGMEA/PGME溶媒に溶解し、そしてN2下の反応容器に注入した。tert−ブチルジメチルシラノール4.5gをN2下で滴下しつつこの溶液を攪拌し、温度を50℃に上げた。この反応混合物を60℃で2時間保持した。その後、5gの1,2−シクロヘキサンジカルボン酸無水物および5gの70/30PGMEA/PGME溶媒を前記反応混合物に混合し、反応を60℃で約1時間継続した。一晩で室温まで冷却し、生成物を褐色ボトルに入れ、注意深くシールした。
40gのTi(IV)BTPポリマーを52gの70/30PGMEA/PGME溶媒に溶解し、そしてN2下の反応容器に注入した。トリメチルシラノール12gを上記TiBTP溶液にN2下で滴下しつつこの溶液を攪拌しつつ温度を50℃に上げた。この反応混合物を60℃で2時間保持した。その後、15.2gのグルタル酸無水物および15.2gのArFシンナー溶媒を前記反応混合物に混合し、反応を60℃で約1時間継続した。一晩で室温まで冷却し、生成物を褐色ボトルに入れ、注意深くシールした。
40gのTi(IV)BTPポリマーを44gの70/30PGMEA/PGME溶媒に溶解し、そしてN2下の反応容器に注入した。4gのポリジメチルシロキサン(水素末端)をN2下で滴下しつつこの溶液を攪拌し、温度を50℃に上げた。この反応混合物を60℃で2時間保持した。その後、20gの1,2−シクロヘキサンジカルボン酸無水物および20gのArFシンナー溶媒を前記反応混合物に混合し、反応を60℃で約1時間継続した。一晩で室温まで冷却し、生成物を褐色ボトルに入れ、注意深くシールした。
40gのTi(IV)BTPポリマーを58gのArFシンナー溶媒に溶解し、そしてN2下の反応容器に注入した。トリメチルシラノール18gを上記TiBTP溶液にN2下で滴下しつつこの溶液を攪拌しつつ温度を50℃に上げた。この反応混合物を60℃で2時間保持した。その後、30gの1,2−シクロヘキサンジカルボン酸無水物および30gのArFシンナー溶媒を前記反応混合物に混合し、反応を60℃で約1時間継続した。一晩で室温まで冷却し、生成物を褐色ボトルに入れ、注意深くシールした。150℃/60秒でベーク処理された後の、測定された総金属酸化物含量は25質量%であった。
40gのTi(IV)BTPポリマーを61gのArFシンナー溶媒に溶解し、そしてN2下の反応容器に注入した。トリメチルシラノール21gを上記TiBTP溶液にN2下で滴下しつつこの溶液を攪拌しつつ温度を50℃に上げた。この反応混合物を60℃で2時間保持し、その後、35gの1,2−シクロヘキサンジカルボン酸無水物および35gのArFシンナー溶媒を前記反応混合物に混合し、反応を60℃で約1時間継続した。一晩で室温まで冷却し、生成物を褐色ボトルに入れ、注意深くシールした。150℃/60秒でベーク処理された後の、測定された総金属酸化物含量は23質量%であった。
40gのTi(IV)BTPポリマー、30gのシトラコン酸無水物および70gのPGMEA/PGME70:30を攪拌することで混合し、窒素下でフラスコ中で加熱した。反応を50℃で4時間保持した。一晩で室温まで冷却し、固体含量50%の生成物を褐色ボトルに入れた。150℃/60秒でベーク処理された後の、測定された総金属酸化物含量は28質量%であった。
合成例1からの金属ポリマーの10質量%溶液をPGMEA/PGME 70:30溶媒中に作成した。十分に混合した後に、シリコンウエハ上に溶液をスピンコートし、150℃、60秒でベーク処理した。反射防止膜の屈折率(n)および吸収値(k)を測定したところJ.A.Woollam VASE32エリプソメータにおいてn=1.67およびk=0.19であった。
合成例2からの金属ポリマーの10質量%溶液をPGMEA/PGME70:30溶媒中に作成した。十分に混合した後に、シリコンウエハ上に溶液をスピンコートし、150℃、60秒でベーク処理した。反射防止膜の屈折率(n)および吸収値(k)を測定したところJ.A.Woollam VASE32エリプソメータにおいてn=1.67およびk=0.18であった。
合成例6からの金属ポリマーの10質量%溶液をPGMEA/PGME70:30溶媒中に作成した。総組成物中0.2質量%のFC4430の界面活性剤を溶液に添加した。十分に混合した後に、シリコンウエハ上に溶液をスピンコートし、150℃、60秒でベーク処理した。反射防止膜の屈折率(n)および吸収値(k)を測定したところJ.A.Woollam VASE32エリプソメータにおいてn=1.66およびk=0.13であった。
合成例7からの金属ポリマーの10質量%溶液をPGMEA/PGME70:30溶媒中に作成した。総組成物中0.2質量%のFC4430の界面活性剤を溶液に添加した。十分に混合した後に、シリコンウエハ上に溶液をスピンコートし、150℃、60秒でベーク処理した。反射防止膜の屈折率(n)および吸収値(k)を測定したところJ.A.Woollam VASE32エリプソメータにおいてn=1.68およびk=0.14であった。
比較合成例1からの金属ポリマーの10質量%溶液をPGMEA/PGME 70:30溶媒中に作成した。十分に混合した後に、シリコンウエハ上に溶液をスピンコートし、150℃、60秒でベーク処理した。反射防止膜の屈折率(n)および吸収値(k)を測定したところJ.A.Woollam VASE32エリプソメータにおいてn=1.59およびk=0.48であった。
金属性下層フィルムのTi質量%を元素分析およびTGA質量欠損測定(熱質量分析)によって測定した。2つの方法からの結果は、矛盾がなかった。2つの方法の結果は整合した。製剤中の組成により、測定された総酸化物顔料は、150℃/60秒または160℃/60秒でベークされたフィルムにおいて、約20〜約40質量%の範囲である。元素分析において、フィルムは少量のケイ素含量とともに主にチタン化合物から成る。
製剤例1の溶液を、110nmの最終フィルム厚を目的とし調製された固体含量で、1500rpmのスピン速度で溝サイズ70nm(深さ)×30nm(幅)およびライン/スペース(L/S)1:1でパターン化されたウエハ上に、スピンコートした。次に被膜されたウエハを150℃/60秒でベーク処理した。断面走査型電子顕微鏡(XSEM)データは、良好なフィルムコーティングおよび良好な充填特性を示した。溝領域の底からの最終フィルム厚さは115nmであった。
製剤例7の溶液を、250nmの最終フィルム厚を目的とし調製された固体含量で、1500rpmのスピン速度で、深ビアホール基板上にスピンコートした。使用したビアホールウエハは、〜90nmのビアホールサイズで650nmの深さのビアホールを有した。次に被膜されたウエハを150℃/60秒でベーク処理した。XSEMデータは、両方の独立し密集した領域において良好なフィルムコーティングおよび良好な充填特性を示した。
比較製剤例1の溶液を、110nmの最終フィルム厚を目的とし調製された固体含量で、1500rpmのスピン速度で溝サイズ70nm(深さ)×30nm(幅)およびライン/スペース(L/S)1:1でパターン化されたウエハ上に、スピンコートした。次に被膜されたウエハを150℃/60秒でベーク処理した。XSEMデータは、充填特性について欠損していることを示した。
CF4およびO2エッチングガスにおけるコーティング例1および2
エッチング速度試験のために、コーティング例1のための20質量%製剤溶液、およびコーティング例2のための20質量%製剤溶液を製造した。その後、被膜されたウエハをホットプレート上で150℃で1分間加熱した。AZ(登録商標)2110Pフォトレジスト (AZ Electronic Materials USA Corp., Somerville, NJの製品)を100℃で1分ベーク処理し、対照として使用した。全ての実験はNE−5000N(ULVAC)装置を使用しパターン化されたフォトレジストなしで実施された。当該条件で測定された各材料のエッチング速度は表1に纏められている。
Claims (15)
- 構造(I)の可溶性マルチ−リガンド−置換された金属化合物であり:
- ケイ素含有部分が、基R1、R2、R3およびR4の合計の30モル%〜60モル%の範囲で少なくとも2つの炭素を含む有機部分i)、および基R1、R2、R3およびR4の合計の30モル%〜60モル%の範囲で有機部分ii)を含む、請求項1に記載の化合物。
- 構造(I)において、R1、R2、R3およびR4の少なくとも一つが、基R1、R2、R3およびR4の合計の50モル%までの、好ましくは35モル%までの範囲でC1−C8アルキル部分をさらに含む、請求項1または2に記載の化合物。
- 前記金属が、チタン、ジルコニウム、タンタル、鉛、アンチモン、タリウム、インジウム、イッテルビウム、ガリウム、ハフニウム、アルミニウム、マグネシウム、モリブデン、ゲルマニウム、スズ、鉄、コバルト、ニッケル、銅、亜鉛、金、銀、カドミウム、タングステンおよび白金からなる群から選択され、かつ/または、nが2〜20であるとき、金属は一つより多い金属であり、請求項1〜3のいずれか一つに記載の化合物。
- 少なくとも2つの炭素を含むケイ素含有有機部分i)が、三置換シリル部分(IV)またはシロキサン部分(V)である、請求項1〜5のいずれか一つに記載の化合物。
- a.以下の構造(I)の可溶性マルチ−リガンド−置換された金属化合物:
並びに
(b)溶媒、
を含む組成物。 - 界面活性剤をさらに含む、請求項8に記載の組成物。
- 熱酸発生剤、熱塩基発生剤、および熱活性化過酸化物から成る群から選択される少なくとも一つをさらに含む、請求項8または9に記載の組成物。
- nが2〜20、好ましくはnが1である、請求項8〜10のいずれか一つに記載の組成物。
- 架橋添加剤をさらに含む、請求項8〜11のいずれか一つに記載の組成物。
- a.請求項8〜12のいずれか一つに記載の組成物を基板上に適用し;
そして、
b.フィルムをベーク処理する
ことを含む電子素子を製造するための方法。 - 基板が、ビアホール、溝、穴、または他の窪み局所形状を含むパターン化されたフォトレジストであり、
ここで、フィルムをベーク処理した後に、当該方法がさらに以下の工程を含む、請求項13に記載の方法:
c.パターン化されたフォトレジストの頂部を覆う当該組成物を除去し;そして、
d.酸素プラズマでレジストを除去し、それにより元のパターン化されたレジストのネガ型画像を形成させる。 - 剥離組成物により残留組成物を除去することをさらに含む、請求項13または14に記載の方法。
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KR102132509B1 (ko) | 2020-07-10 |
KR20160048796A (ko) | 2016-05-04 |
CN105492972A (zh) | 2016-04-13 |
JP7050137B2 (ja) | 2022-04-07 |
JP6786391B2 (ja) | 2020-11-18 |
IL243884A0 (en) | 2016-04-21 |
TW201527359A (zh) | 2015-07-16 |
CN105492972B (zh) | 2019-09-06 |
US9296922B2 (en) | 2016-03-29 |
SG11201600372VA (en) | 2016-02-26 |
TWI642698B (zh) | 2018-12-01 |
EP3039484A1 (en) | 2016-07-06 |
WO2015028371A1 (en) | 2015-03-05 |
JP2021038394A (ja) | 2021-03-11 |
EP3039484B1 (en) | 2018-07-18 |
US20150064904A1 (en) | 2015-03-05 |
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