JP2016528667A - プラズマチャンバ内での高速で再現性のあるプラズマの点火及び同調のための方法 - Google Patents
プラズマチャンバ内での高速で再現性のあるプラズマの点火及び同調のための方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 51
- 230000007704 transition Effects 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 15
- 230000008859 change Effects 0.000 claims description 10
- 230000000977 initiatory effect Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 description 21
- 239000003990 capacitor Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000003121 nonmonotonic effect Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32155—Frequency modulation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32155—Frequency modulation
- H01J37/32165—Plural frequencies
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- Analytical Chemistry (AREA)
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- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (15)
- 処理チャンバ内でプラズマ処理するための装置であって、
周波数同調を有する第1RF電源と、
第1RF電源に結合された第1整合ネットワークと、
第1RF電源及び第1整合ネットワークを制御するためのコントローラを含み、コントローラは、
処理チャンバにRF電力を供給するようにRF電源に指示すること、処理チャンバに送出されるRF電力のレベルを変更するようにRF電源に指示すること、又は処理チャンバ内の圧力を変化させることのうちの少なくとも1つによってプラズマの遷移を開始し、RF電源は、第1周波数で動作し、整合ネットワークは、ホールドモードにあり、
プラズマを点火するために第1期間の間に第1周波数を第2周波数に調整するようにRF電源に指示し、
プラズマを維持しながら、第2期間の間に第2周波数を既知の第3周波数に調整するためにRF電源に指示し、
RF電源によって供給されるRF電力の反射電力を低減するために、整合ネットワークの動作モードを自動同調モードに変更するように構成された装置。 - 第1整合ネットワークは、第1RF電源内に組み込まれており、コントローラは、第1RF電源の出力で測定されるように共通センサによって提供される共通の反射電力の測定値に基づいて、RFサイクルによって第1整合ネットワークの同調並びに周波数の両方を制御する、請求項1記載の装置。
- 反射電力は、RF電源によって供給される順方向電力の約0%〜20%の間に低減される、請求項1記載の装置。
- プラズマが、第1期間の間、RF電源からの反射電力を低減するために点火された後に、第1周波数が第2周波数に調整される、請求項1記載の装置。
- 反射電力の大きさは、到達時に第1期間の終了を意味する所定の閾値である、請求項4記載の装置。
- 第1期間は、既知の所定値である、請求項1〜5のいずれか1項記載の装置。
- 処理チャンバ内でプラズマ処理するためのシステムであって、
アンテナアセンブリ及び基板支持台を有する処理チャンバと、
アンテナアセンブリに結合された第1整合ネットワークと、
第1整合ネットワークに結合された第1RF電源と、
整合ネットワークと、
基板支持台に結合された第2整合ネットワークと、
第2整合ネットワークに結合された第2RF電源と、
第1RF電源、第1整合ネットワーク、第2RF電源、及び第2整合ネットワークを制御するためのコントローラとを含み、コントローラは、
処理チャンバにRF電力を供給するように第1RF電源に指示し、第1電源は、第1周波数で動作し、第1整合ネットワークは、ホールドモードにあり、
プラズマを点火するために第1期間の間に第1周波数を第2周波数に調整するように第1RF電源に指示し、
プラズマを維持しながら、第2期間の間に第2周波数を既知の第3周波数に調整するように第1RF電源に指示し、
第1RF電源によって供給されるRF電力の反射電力を低減するために、第1整合ネットワークの動作モードを自動同調モードに変更するように構成されたシステム。 - 整合ネットワークを介して処理チャンバに結合されたRF電源を用いて、処理チャンバ内でプラズマ処理するための方法であって、
処理チャンバにRF電力を供給すること、処理チャンバに送出されるRF電力のレベルを変更すること、又は処理チャンバ内の圧力を変更することのうちの少なくとも1つによって、プラズマ遷移を開始する工程であって、RF電源は、第1周波数で動作し、整合ネットワークは、ホールドモードにある工程と、
プラズマを点火するために、第1期間の間、RF電源を用いて第1周波数を第2周波数に調整する工程と、
プラズマを維持しながら、第2期間の間、RF電源を用いて第2周波数を既知の第3周波数に調整する工程と、
RF電源によって供給されるRF電力の反射電力を低減させるために、整合ネットワークの動作モードを自動同調モードに変更する工程とを含む方法。 - 整合ネットワークは、第1期間の間、ホールドモードに維持される、請求項8記載の方法。
- 整合ネットワークの動作モードは、反射電力を低減するために、自動同調モードに変更され、一方、第2周波数は、第2期間の間に既知の第3周波数に調整される、請求項8記載の方法。
- 整合ネットワークの動作モードは、第1期間の間に自動同調モードに変更される、請求項8記載の方法。
- 第1期間の間にRF電源からの反射電力を低減するためにプラズマが点火された後に、第1周波数が第2周波数に調整される、請求項8記載の方法。
- 反射電力の大きさは、到達時に第1期間の終了を意味する所定の閾値である、請求項12記載の方法。
- 反射電力は、RF電源によって供給される順方向電力の約0%〜20%の間に低減される、請求項8〜13のいずれか1項記載の方法。
- 第1期間は、既知の所定値である、請求項8〜13のいずれか1項記載の方法。
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US201361835847P | 2013-06-17 | 2013-06-17 | |
US61/835,847 | 2013-06-17 | ||
US14/287,480 US20140367043A1 (en) | 2013-06-17 | 2014-05-27 | Method for fast and repeatable plasma ignition and tuning in plasma chambers |
US14/287,480 | 2014-05-27 | ||
PCT/US2014/039965 WO2014204627A1 (en) | 2013-06-17 | 2014-05-29 | Method for fast and repeatable plasma ignition and tuning in plasma chambers |
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JP2016528667A true JP2016528667A (ja) | 2016-09-15 |
JP2016528667A5 JP2016528667A5 (ja) | 2018-06-28 |
JP6449260B2 JP6449260B2 (ja) | 2019-01-09 |
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JP2021523544A (ja) * | 2018-05-17 | 2021-09-02 | ベイジン・ナウラ・マイクロエレクトロニクス・イクイップメント・カンパニー・リミテッドBeijing NAURA Microelectronics Equipment Co.,LTD | 無線周波数電源のパルス変調のためのシステムおよび方法ならびにその反応室 |
JP7489894B2 (ja) | 2020-10-20 | 2024-05-24 | 東京エレクトロン株式会社 | プラズマ生成装置、プラズマ処理装置及びプラズマ処理方法 |
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CN105247967A (zh) | 2016-01-13 |
CN105247967B (zh) | 2019-10-08 |
US20140367043A1 (en) | 2014-12-18 |
TWI645441B (zh) | 2018-12-21 |
WO2014204627A1 (en) | 2014-12-24 |
TW201505067A (zh) | 2015-02-01 |
JP6449260B2 (ja) | 2019-01-09 |
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