JP2016521667A - 単結晶ガリウム含有窒化物の製法及びその方法によって得られる単結晶ガリウム含有窒化物 - Google Patents
単結晶ガリウム含有窒化物の製法及びその方法によって得られる単結晶ガリウム含有窒化物 Download PDFInfo
- Publication number
- JP2016521667A JP2016521667A JP2016515680A JP2016515680A JP2016521667A JP 2016521667 A JP2016521667 A JP 2016521667A JP 2016515680 A JP2016515680 A JP 2016515680A JP 2016515680 A JP2016515680 A JP 2016515680A JP 2016521667 A JP2016521667 A JP 2016521667A
- Authority
- JP
- Japan
- Prior art keywords
- nitride
- concentration
- gallium
- ammonia
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B7/00—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions
- C30B7/10—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions by application of pressure, e.g. hydrothermal processes
- C30B7/105—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions by application of pressure, e.g. hydrothermal processes using ammonia as solvent, i.e. ammonothermal processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL404149A PL229568B1 (pl) | 2013-05-30 | 2013-05-30 | Sposób wytwarzania monokrystalicznego azotku zawierającego gal i monokrystaliczny azotek zawierający gal, wytworzony tym sposobem |
| PLP.404149 | 2013-05-30 | ||
| PCT/EP2014/055876 WO2014191126A1 (en) | 2013-05-30 | 2014-03-24 | Method for obtaining monocrystalline gallium-containing nitride and monocrystalline gallium-containing nitride obtained by this method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016521667A true JP2016521667A (ja) | 2016-07-25 |
| JP2016521667A5 JP2016521667A5 (enExample) | 2019-02-14 |
Family
ID=50543016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016515680A Ceased JP2016521667A (ja) | 2013-05-30 | 2014-03-24 | 単結晶ガリウム含有窒化物の製法及びその方法によって得られる単結晶ガリウム含有窒化物 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US20160108547A1 (enExample) |
| EP (1) | EP3063315A1 (enExample) |
| JP (1) | JP2016521667A (enExample) |
| KR (1) | KR20160036013A (enExample) |
| CN (1) | CN105556006A (enExample) |
| CA (1) | CA2913720A1 (enExample) |
| HK (1) | HK1224343A1 (enExample) |
| PL (1) | PL229568B1 (enExample) |
| RU (1) | RU2015152554A (enExample) |
| WO (1) | WO2014191126A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| PL231548B1 (pl) | 2014-09-11 | 2019-03-29 | Ammono Spolka Akcyjna | Sposób wytwarzania monokrystalicznego azotku zawierającego gal |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011016714A (ja) * | 2009-06-25 | 2011-01-27 | Ammono Sp Zo O | バルク単結晶ガリウム含有窒化物の製造方法及びそれにより得られるバルク単結晶ガリウム含有窒化物基板並びにその基板上に製造されるデバイス. |
| JP2011230998A (ja) * | 2010-03-11 | 2011-11-17 | Soraa Inc | 半絶縁性のiii族メタルナイトライドおよびその製造方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| PL219109B1 (pl) | 2001-06-06 | 2015-03-31 | Ammono Spółka Z Ograniczoną Odpowiedzialnością | Sposób otrzymywania objętościowego monokrystalicznego azotku zawierającego gal oraz urządzenie do otrzymywania objętościowego monokrystalicznego azotku zawierającego gal |
| PL219601B1 (pl) | 2002-12-11 | 2015-06-30 | Ammono Spółka Z Ograniczoną Odpowiedzialnością | Sposób otrzymywania objętościowego monokrystalicznego azotku zawierającego gal |
| PL221055B1 (pl) | 2002-12-11 | 2016-02-29 | Ammono Spółka Z Ograniczoną Odpowiedzialnością | Sposób wytwarzania objętościowego monokrystalicznego azotku zawierającego gal |
| TWI334890B (en) | 2002-12-11 | 2010-12-21 | Ammono Sp Zoo | Process for obtaining bulk mono-crystalline gallium-containing nitride, eliminating impurities from the obtained crystal and manufacturing substrates made of bulk mono-crystalline gallium-containing nitride |
| AU2003299899A1 (en) * | 2002-12-27 | 2004-07-29 | General Electric Company | Gallium nitride crystal, homoepitaxial gallium-nitride-based devices and method for producing same |
| EP1759408A1 (en) | 2004-06-11 | 2007-03-07 | AMMONO Sp.z o.o. | High electron mobility transistor (hemt) made of layers of group xiii element nitrides and manufacturing method thereof. |
| US20060247623A1 (en) * | 2005-04-29 | 2006-11-02 | Sdgi Holdings, Inc. | Local delivery of an active agent from an orthopedic implant |
| PL394857A1 (pl) * | 2008-08-07 | 2011-09-26 | Sorra, Inc. | Sposób amonotermalnego wytwarzania kryształów ciągnionych azotku galu na dużą skalę |
| JP5291648B2 (ja) * | 2010-03-17 | 2013-09-18 | 日本碍子株式会社 | 窒化物結晶の製造装置及び製造方法 |
| EP2772570A4 (en) * | 2011-10-28 | 2015-03-04 | Mitsubishi Chem Corp | METHOD FOR PRODUCING A NITRIDE CRYSTAL AND NITRIDE CRYSTAL |
| WO2014129544A1 (ja) * | 2013-02-22 | 2014-08-28 | 三菱化学株式会社 | 周期表第13族金属窒化物結晶およびその製造方法 |
-
2013
- 2013-05-30 PL PL404149A patent/PL229568B1/pl unknown
-
2014
- 2014-03-24 CN CN201480031120.6A patent/CN105556006A/zh active Pending
- 2014-03-24 RU RU2015152554A patent/RU2015152554A/ru not_active Application Discontinuation
- 2014-03-24 CA CA2913720A patent/CA2913720A1/en not_active Abandoned
- 2014-03-24 EP EP14718522.7A patent/EP3063315A1/en not_active Withdrawn
- 2014-03-24 HK HK16112554.5A patent/HK1224343A1/zh unknown
- 2014-03-24 KR KR1020157036340A patent/KR20160036013A/ko not_active Withdrawn
- 2014-03-24 WO PCT/EP2014/055876 patent/WO2014191126A1/en not_active Ceased
- 2014-03-24 JP JP2016515680A patent/JP2016521667A/ja not_active Ceased
- 2014-03-24 US US14/894,337 patent/US20160108547A1/en not_active Abandoned
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011016714A (ja) * | 2009-06-25 | 2011-01-27 | Ammono Sp Zo O | バルク単結晶ガリウム含有窒化物の製造方法及びそれにより得られるバルク単結晶ガリウム含有窒化物基板並びにその基板上に製造されるデバイス. |
| JP2011230998A (ja) * | 2010-03-11 | 2011-11-17 | Soraa Inc | 半絶縁性のiii族メタルナイトライドおよびその製造方法 |
Non-Patent Citations (2)
| Title |
|---|
| TUOMISTO F. ET AL.: "Vacancy defects in bulk ammonothermal GaN crystals", JOURNAL OF CRYSTAL GROWTH, vol. 312, JPN6018008048, 2010, pages 2620 - 2623, ISSN: 0004039978 * |
| WANG, BUGUO ET AL.: "Structural and optical properties of GaN crystals grown by the ammonothermal technique", PHYSICA STATUS SOLIDI C., vol. 8, JPN6018008047, 2011, pages 2127 - 2129, ISSN: 0004039977 * |
Also Published As
| Publication number | Publication date |
|---|---|
| PL404149A1 (pl) | 2014-12-08 |
| EP3063315A1 (en) | 2016-09-07 |
| PL229568B1 (pl) | 2018-07-31 |
| CN105556006A (zh) | 2016-05-04 |
| US20160108547A1 (en) | 2016-04-21 |
| HK1224343A1 (zh) | 2017-08-18 |
| CA2913720A1 (en) | 2014-12-04 |
| RU2015152554A (ru) | 2017-07-05 |
| WO2014191126A1 (en) | 2014-12-04 |
| KR20160036013A (ko) | 2016-04-01 |
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