JP2016025085A5 - - Google Patents

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Publication number
JP2016025085A5
JP2016025085A5 JP2015142246A JP2015142246A JP2016025085A5 JP 2016025085 A5 JP2016025085 A5 JP 2016025085A5 JP 2015142246 A JP2015142246 A JP 2015142246A JP 2015142246 A JP2015142246 A JP 2015142246A JP 2016025085 A5 JP2016025085 A5 JP 2016025085A5
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JP
Japan
Prior art keywords
sample
rotating
needle
sample holder
charged particle
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Application number
JP2015142246A
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English (en)
Japanese (ja)
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JP6385899B2 (ja
JP2016025085A (ja
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Publication of JP2016025085A publication Critical patent/JP2016025085A/ja
Publication of JP2016025085A5 publication Critical patent/JP2016025085A5/ja
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Publication of JP6385899B2 publication Critical patent/JP6385899B2/ja
Expired - Fee Related legal-status Critical Current
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JP2015142246A 2014-07-21 2015-07-16 Ｔｅｍ試料取付け構造 Expired - Fee Related JP6385899B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462027035P 2014-07-21 2014-07-21
US62/027,035 2014-07-21

Publications (3)

Publication Number Publication Date
JP2016025085A JP2016025085A (ja) 2016-02-08
JP2016025085A5 true JP2016025085A5 (enExample) 2017-11-24
JP6385899B2 JP6385899B2 (ja) 2018-09-05

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JP2015142246A Expired - Fee Related JP6385899B2 (ja) 2014-07-21 2015-07-16 Ｔｅｍ試料取付け構造

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US (1) US9514913B2 (enExample)
JP (1) JP6385899B2 (enExample)
CN (1) CN105277576B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015215323A1 (de) * 2015-08-11 2017-02-16 Georg-August-Universität Göttingen Stiftung Öffentlichen Rechts Technik zur tomografischen Bilderfassung
CN110118791B (zh) * 2019-05-21 2020-03-03 山东省分析测试中心 用于获取裂纹/晶界三维信息的ebsd设备样品台及方法
CN110672881A (zh) * 2019-09-30 2020-01-10 上海华力集成电路制造有限公司 金属栅结构及其制造方法
CN111208155B (zh) * 2020-03-13 2024-12-27 康湃医疗科技(苏州)有限公司 一种多角度摆放样品的x射线样品托架
CN113063967B (zh) * 2021-02-18 2023-02-10 上海大学 可实现三维原子探针微尖阵列样品转动的旋转样品台装置
US11476079B1 (en) * 2021-03-31 2022-10-18 Fei Company Method and system for imaging a multi-pillar sample
CN115047016A (zh) * 2022-08-16 2022-09-13 合肥晶合集成电路股份有限公司 立体tem样品结构及其制备方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62281349A (ja) 1986-05-29 1987-12-07 Seiko Instr & Electronics Ltd 金属パタ−ン膜の形成方法及びその装置
US5104684A (en) 1990-05-25 1992-04-14 Massachusetts Institute Of Technology Ion beam induced deposition of metals
BE1007675A3 (nl) 1993-10-28 1995-09-12 Philips Electronics Nv Werkwijze voor het vervaardigen van preparaten voor een elektronenmicroscoop.
JPH08304243A (ja) * 1995-05-11 1996-11-22 Nippon Steel Corp 断面薄膜試料及びその作製方法及び断面薄膜試料用ホルダ
US8723144B2 (en) 2004-07-14 2014-05-13 Applied Materials Israel, Ltd. Apparatus for sample formation and microanalysis in a vacuum chamber
US7442924B2 (en) 2005-02-23 2008-10-28 Fei, Company Repetitive circumferential milling for sample preparation
JP4851804B2 (ja) 2006-02-13 2012-01-11 株式会社日立ハイテクノロジーズ 集束イオンビーム加工観察装置、集束イオンビーム加工観察システム及び加工観察方法
JP4923716B2 (ja) * 2006-05-11 2012-04-25 株式会社日立製作所 試料分析装置および試料分析方法
EP1890136A1 (en) 2006-08-16 2008-02-20 FEI Company Method for obtaining images from slices of a specimen
CN200982932Y (zh) * 2006-11-03 2007-11-28 中国科学院金属研究所 一种用离子束加工样品界面实现背散射表征的装置
US7884326B2 (en) 2007-01-22 2011-02-08 Fei Company Manipulator for rotating and translating a sample holder
EP2051280A1 (en) 2007-10-18 2009-04-22 The Regents of the University of California Motorized manipulator for positioning a TEM specimen
JP5268324B2 (ja) * 2007-10-29 2013-08-21 株式会社日立ハイテクノロジーズ 荷電粒子線顕微装置及び顕微方法
JP2009192341A (ja) 2008-02-14 2009-08-27 Sumitomo Metal Mining Co Ltd 透過電子顕微鏡用薄片試料の作製方法、及びそれに用いる試料台
TWI372859B (en) 2008-10-03 2012-09-21 Inotera Memories Inc Method for manufacturing an electron tomography specimen with fiducial markers and method for constructing 3d image
JP5883658B2 (ja) * 2012-01-20 2016-03-15 株式会社日立ハイテクノロジーズ 荷電粒子線顕微鏡、荷電粒子線顕微鏡用試料ホルダ及び荷電粒子線顕微方法
US8502172B1 (en) 2012-06-26 2013-08-06 Fei Company Three dimensional fiducial
WO2014195998A1 (ja) * 2013-06-03 2014-12-11 株式会社日立製作所 荷電粒子線顕微鏡、荷電粒子線顕微鏡用試料ホルダ及び荷電粒子線顕微方法

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