JP2015038469A5 - - Google Patents
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- Publication number
- JP2015038469A5 JP2015038469A5 JP2014122959A JP2014122959A JP2015038469A5 JP 2015038469 A5 JP2015038469 A5 JP 2015038469A5 JP 2014122959 A JP2014122959 A JP 2014122959A JP 2014122959 A JP2014122959 A JP 2014122959A JP 2015038469 A5 JP2015038469 A5 JP 2015038469A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- workpiece
- ion beam
- probe
- flake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/930,911 US9040908B2 (en) | 2013-06-28 | 2013-06-28 | Plan view sample preparation |
| US13/930,911 | 2013-06-28 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015038469A JP2015038469A (ja) | 2015-02-26 |
| JP2015038469A5 true JP2015038469A5 (enExample) | 2017-07-13 |
| JP6359351B2 JP6359351B2 (ja) | 2018-07-18 |
Family
ID=50979660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014122959A Active JP6359351B2 (ja) | 2013-06-28 | 2014-06-16 | 平面視試料の調製 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US9040908B2 (enExample) |
| EP (1) | EP2818844A1 (enExample) |
| JP (1) | JP6359351B2 (enExample) |
| CN (1) | CN104251795B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9040908B2 (en) | 2013-06-28 | 2015-05-26 | Fei Company | Plan view sample preparation |
| CN105158516B (zh) * | 2015-08-20 | 2018-10-16 | 上海华力微电子有限公司 | 一种集成电路分析中透射电镜平面样品的制备方法 |
| US10546719B2 (en) * | 2017-06-02 | 2020-01-28 | Fei Company | Face-on, gas-assisted etching for plan-view lamellae preparation |
| US10801926B2 (en) * | 2017-07-17 | 2020-10-13 | Expresslo Llc | Probe with solid beveled tip and method for using same for specimen extraction |
| DE102018108974B3 (de) | 2018-04-16 | 2019-05-09 | Carl Zeiss Microscopy Gmbh | Verfahren zum Herstellen einer TEM-Probe |
| CN109374663B (zh) * | 2018-12-29 | 2021-05-04 | 中国工程物理研究院材料研究所 | 一种柔性高原子序数材料透射电镜样品的制备方法 |
| WO2021220508A1 (ja) * | 2020-05-01 | 2021-11-04 | 株式会社日立ハイテク | ピンセット、搬送装置および試料片の搬送方法 |
| CN115148568A (zh) * | 2021-03-30 | 2022-10-04 | 台湾积体电路制造股份有限公司 | 样品载台及修饰样品的系统及方法 |
| CZ2024342A3 (cs) | 2024-09-02 | 2026-03-11 | Tescan Group, A.S. | Způsob nalezení pozice špičky manipulátoru |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5435755Y2 (enExample) * | 1975-11-29 | 1979-10-30 | ||
| US5435850A (en) | 1993-09-17 | 1995-07-25 | Fei Company | Gas injection system |
| US5851413A (en) | 1996-06-19 | 1998-12-22 | Micrion Corporation | Gas delivery systems for particle beam processing |
| WO1999005506A1 (fr) * | 1997-07-22 | 1999-02-04 | Hitachi, Ltd. | Procede et dispositif de preparation d'echantillons |
| NL1022426C2 (nl) | 2003-01-17 | 2004-07-26 | Fei Co | Werkwijze voor het vervaardigen en transmissief bestralen van een preparaat alsmede deeltjes optisch systeem. |
| US20060085978A1 (en) | 2004-10-21 | 2006-04-27 | Milidantri Thomas H Jr | Turbine component fixture for manufacture or repair |
| EP1979927A4 (en) | 2006-01-19 | 2012-11-14 | Fibics Inc | REDEPOSITION TECHNIQUE FOR MEMBRANE FIXATION |
| US7423263B2 (en) | 2006-06-23 | 2008-09-09 | Fei Company | Planar view sample preparation |
| CN101105430B (zh) | 2006-07-10 | 2011-11-16 | Fei公司 | 用于从工件上分离微型样品的方法 |
| US8357913B2 (en) * | 2006-10-20 | 2013-01-22 | Fei Company | Method and apparatus for sample extraction and handling |
| JP5270558B2 (ja) * | 2006-10-20 | 2013-08-21 | エフ・イ−・アイ・カンパニー | Ｓ／ｔｅｍのサンプルを作成する方法およびサンプル構造 |
| JP2009216534A (ja) * | 2008-03-11 | 2009-09-24 | Jeol Ltd | 薄膜試料作製方法 |
| US9040908B2 (en) | 2013-06-28 | 2015-05-26 | Fei Company | Plan view sample preparation |
-
2013
- 2013-06-28 US US13/930,911 patent/US9040908B2/en active Active
-
2014
- 2014-06-16 JP JP2014122959A patent/JP6359351B2/ja active Active
- 2014-06-24 EP EP14173606.6A patent/EP2818844A1/en not_active Withdrawn
- 2014-06-27 CN CN201410302659.2A patent/CN104251795B/zh active Active
-
2015
- 2015-04-21 US US14/692,509 patent/US9368325B2/en active Active
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