JP2015530961A5 - - Google Patents
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- JP2015530961A5 JP2015530961A5 JP2015521774A JP2015521774A JP2015530961A5 JP 2015530961 A5 JP2015530961 A5 JP 2015530961A5 JP 2015521774 A JP2015521774 A JP 2015521774A JP 2015521774 A JP2015521774 A JP 2015521774A JP 2015530961 A5 JP2015530961 A5 JP 2015530961A5
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- Prior art keywords
- layer
- array
- substrate
- metal
- catalyst
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010410 layer Substances 0.000 claims description 63
- 239000000758 substrate Substances 0.000 claims description 52
- 239000003054 catalyst Substances 0.000 claims description 37
- 239000012790 adhesive layer Substances 0.000 claims description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 25
- 239000002041 carbon nanotube Substances 0.000 claims description 24
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 21
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 239000002105 nanoparticle Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 229910052742 iron Inorganic materials 0.000 claims description 10
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- 239000002071 nanotube Substances 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 9
- 229910044991 metal oxide Inorganic materials 0.000 claims description 8
- 150000004706 metal oxides Chemical class 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910000640 Fe alloy Inorganic materials 0.000 claims description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 238000000137 annealing Methods 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052723 transition metal Inorganic materials 0.000 claims description 4
- 150000003624 transition metals Chemical class 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 claims description 2
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 2
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052790 beryllium Inorganic materials 0.000 claims description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 2
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- YCKOAAUKSGOOJH-UHFFFAOYSA-N copper silver Chemical compound [Cu].[Ag].[Ag] YCKOAAUKSGOOJH-UHFFFAOYSA-N 0.000 claims description 2
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000009969 flowable effect Effects 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 2
- 239000011133 lead Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 239000002082 metal nanoparticle Substances 0.000 claims description 2
- 229910052762 osmium Inorganic materials 0.000 claims description 2
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 239000012782 phase change material Substances 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 229910052703 rhodium Inorganic materials 0.000 claims description 2
- 239000010948 rhodium Substances 0.000 claims description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 238000000527 sonication Methods 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- 239000011135 tin Substances 0.000 claims description 2
- 239000004408 titanium dioxide Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000005012 migration Effects 0.000 claims 1
- 238000013508 migration Methods 0.000 claims 1
- 238000003786 synthesis reaction Methods 0.000 claims 1
- 238000003491 array Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/546,827 US9656246B2 (en) | 2012-07-11 | 2012-07-11 | Vertically aligned arrays of carbon nanotubes formed on multilayer substrates |
| US13/546,827 | 2012-07-11 | ||
| PCT/US2013/049900 WO2014011755A1 (en) | 2012-07-11 | 2013-07-10 | Vertically aligned arrays of carbon nanotubes formed on multilayer substrates |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015530961A JP2015530961A (ja) | 2015-10-29 |
| JP2015530961A5 true JP2015530961A5 (https=) | 2016-09-01 |
| JP6254158B2 JP6254158B2 (ja) | 2017-12-27 |
Family
ID=48914416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015521774A Active JP6254158B2 (ja) | 2012-07-11 | 2013-07-10 | 多層基板に形成されたカーボンナノチューブの垂直配向アレイ |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US9656246B2 (https=) |
| EP (1) | EP2872442B1 (https=) |
| JP (1) | JP6254158B2 (https=) |
| KR (1) | KR102163272B1 (https=) |
| CN (1) | CN104520232B (https=) |
| CA (1) | CA2878600C (https=) |
| ES (1) | ES2632778T3 (https=) |
| WO (1) | WO2014011755A1 (https=) |
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| CN104787748B (zh) * | 2015-04-28 | 2016-11-02 | 南京工业大学 | 一种垂直生长的开口碳纳米管薄膜的制备方法 |
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| US20090246507A1 (en) | 2008-01-15 | 2009-10-01 | Georgia Tech Research Corporation | Systems and methods for fabrication and transfer of carbon nanotubes |
| MX2010009801A (es) | 2008-03-06 | 2010-09-28 | Teijin Aramid Bv | Articulos resistentes a las balas que comprenden cuerpos alargados. |
| JP5176925B2 (ja) * | 2008-12-11 | 2013-04-03 | 株式会社デンソー | Ｃｎｔ合成用基板、その製造方法、及びｃｎｔの製造方法 |
| KR101603774B1 (ko) * | 2009-05-14 | 2016-03-15 | 삼성전자주식회사 | 탄소나노튜브 소자 어레이의 제조방법 |
| TW201122564A (en) * | 2009-06-25 | 2011-07-01 | Nikon Corp | Optical element, illumination apparatus, exposure apparatus, and method for manufacturing device |
| JP5574257B2 (ja) * | 2009-09-24 | 2014-08-20 | 日本ゼオン株式会社 | カーボンナノチューブ生成用再利用基材及びカーボンナノチューブ生成用基材並びにその製造方法 |
| US8409768B2 (en) * | 2009-10-12 | 2013-04-02 | Board Of Regents, The University Of Texas Systems | Tuning of Fe catalysts for growth of spin-capable carbon nanotubes |
| JP5858266B2 (ja) * | 2010-03-26 | 2016-02-10 | アイシン精機株式会社 | カーボンナノチューブ複合体の製造方法 |
| DE102011051705A1 (de) * | 2011-07-08 | 2013-01-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Schichtsystem mit einer Schicht aus parallel zueinander angeordneten Kohlenstoffröhren und einer elektrisch leitenden Deckschicht, Verfahren zur Herstellung des Schichtsystems und dessen Verwendung in der Mikrosystemtechnik |
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2012
- 2012-07-11 US US13/546,827 patent/US9656246B2/en active Active
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2013
- 2013-07-10 ES ES13744869.2T patent/ES2632778T3/es active Active
- 2013-07-10 KR KR1020157003673A patent/KR102163272B1/ko active Active
- 2013-07-10 US US14/414,227 patent/US9833772B2/en active Active
- 2013-07-10 EP EP13744869.2A patent/EP2872442B1/en active Active
- 2013-07-10 CN CN201380036483.4A patent/CN104520232B/zh active Active
- 2013-07-10 WO PCT/US2013/049900 patent/WO2014011755A1/en not_active Ceased
- 2013-07-10 JP JP2015521774A patent/JP6254158B2/ja active Active
- 2013-07-10 CA CA2878600A patent/CA2878600C/en active Active
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